CN213378296U

CN213378296U - Plasma cleaning machine

Info

Publication number: CN213378296U
Application number: CN202022194819.XU
Authority: CN
Inventors: 朱霆; 叶贤斌; 李文强; 杨建新; 张凯
Original assignee: Shenzhen Tete Semiconductor Equipment Co ltd
Current assignee: Shenzhen Tete Semiconductor Equipment Co ltd
Priority date: 2020-09-27
Filing date: 2020-09-27
Publication date: 2021-06-08
Anticipated expiration: 2030-09-27

Abstract

The utility model discloses a plasma cleaning machine, plasma cleaning machine include magazine installation mechanism and pushing equipment, magazine installation mechanism is used for installing the magazine, pushing equipment be used for with treat abluent material in the magazine and push out to and push back the material that washs the completion the magazine. The pushing mechanism comprises a pushing module, an adjusting module and a pushing piece. The material pushing module comprises a material pushing guide rail and a material pushing driving piece, the adjusting module comprises an adjusting guide rail and an adjusting driving piece, the adjusting guide rail is slidably mounted on the material pushing guide rail and is in crossed arrangement with the material pushing guide rail, and the adjusting guide rail can be driven by the material pushing driving piece to slide. The material pushing part is slidably mounted on the adjusting guide rail and can be driven by the adjusting driving part to slide. The utility model discloses card material phenomenon when the reducible pushing equipment of plasma cleaning machine pushes away the material improves the cleaning efficiency of cleaning machine.

Description

Plasma cleaning machine

Technical Field

The utility model relates to a plasma cleaning machine technical field, in particular to plasma cleaning machine.

Background

In the IC industry, contaminants such as glue overflow and oxides are usually left on the substrate and the lead frame during production, which affects the effect of the bonding wire.

When some existing plasma cleaning machines are cleaned, a substrate or a lead frame in a material box is pushed onto a material supporting jig through a material pushing mechanism, and then a material loading process is completed; or the cleaned substrate or the lead frame on the material supporting jig is pushed back into the material box through the material pushing mechanism, so that the blanking process is completed.

However, when pushing materials, the pushing mechanisms of some plasma cleaning machines are prone to push the materials askew to cause material jamming, and further affect the cleaning efficiency of the cleaning machines.

The above is only for the purpose of assisting understanding of the technical solution of the present invention, and does not represent an admission that the above is the prior art.

SUMMERY OF THE UTILITY MODEL

The utility model aims at providing a plasma cleaning machine, aim at some plasma cleaning machine's that current pushing equipment when pushing away the material, appear pushing away the askew and cause the condition of card material of material easily, and then influence the cleaning efficiency's of cleaning machine technical problem.

In order to achieve the above object, the utility model provides a plasma cleaning machine includes magazine installation mechanism and pushing equipment, magazine installation mechanism is used for installing the magazine, pushing equipment is used for with treat abluent material in the magazine and push out to and push back the material that washs the completion the magazine. The pushing mechanism comprises a pushing module, an adjusting module and a pushing piece.

The material pushing module comprises a material pushing guide rail and a material pushing driving piece, the adjusting module comprises an adjusting guide rail and an adjusting driving piece, the adjusting guide rail is slidably mounted on the material pushing guide rail and is in crossed arrangement with the material pushing guide rail, and the adjusting guide rail can be driven by the material pushing driving piece to slide. The material pushing part is slidably mounted on the adjusting guide rail and can be driven by the adjusting driving part to slide.

In an embodiment, the pushing mechanism further comprises a first mounting piece and a second mounting piece, the first mounting piece is slidably mounted on the adjusting guide rail, the second mounting piece is mounted on the first mounting piece and can slide relative to the first mounting piece along the extending direction of the pushing guide rail, and the pushing piece is mounted on the second mounting piece; still be connected with first elastic component between first installed part and the second installed part, first elastic component is followed push away the extending direction of material guide rail and extend.

In an embodiment, the pushing mechanism further includes a first sensor and a first alarm, and the first sensor is configured to sense the first elastic member and is electrically connected to the alarm.

In one embodiment, the first mounting part and the second mounting part are connected through a cross roller guide rail, and the cross roller guide rail extends along the extension direction of the material pushing guide rail.

In one embodiment, the pushing member is arranged in a long shape and extends along the extending direction of the pushing guide rail, and both ends of the pushing member are free ends capable of pushing materials.

In an embodiment, the pushing mechanism further comprises a third mounting piece and a fourth mounting piece, the third mounting piece is slidably mounted on the adjusting guide rail, the fourth mounting piece is mounted on the third mounting piece and can slide relative to the third mounting piece along the extending direction of the pushing guide rail, and the pushing piece is mounted on the fourth mounting piece; and in the extending direction of the pushing guide rail, second elastic pieces are arranged on two sides of the fourth mounting piece, the second elastic pieces extend along the extending direction of the pushing guide rail, one end of each second elastic piece is connected with the third mounting piece, and the other end of each second elastic piece is connected with the fourth mounting piece.

In an embodiment, the plurality of pushing members are provided, the fourth mounting member is in a long strip structure, and the plurality of pushing members are arranged on the fourth mounting member at intervals along the extending direction of the adjusting guide rail.

In an embodiment, the pushing mechanism further includes a fifth mounting member and a lifting device, the fifth mounting member is slidably mounted on the adjustment guide rail and is further provided with a vertically extending lifting guide rail, and the third mounting member is slidably mounted on the lifting guide rail and can be driven by the lifting device to slide.

In one embodiment, a first inclined plane and a second inclined plane are arranged at the end part of the pushing piece, and the first inclined plane and the second inclined plane jointly form a pushing groove for pushing materials.

In one embodiment, the plasma cleaning machine further comprises a code scanning device, and the code scanning device is slidably mounted on the adjusting guide rail.

The utility model discloses plasma cleaning machine includes magazine installation mechanism and pushing equipment, and magazine installation mechanism is used for installing the magazine, and the magazine is used for placing the material, and pushing equipment then is used for treating abluent material to push out in the magazine to and will wash the material of accomplishing and push back the magazine.

Wherein, this pushing equipment pushes away the material module including pushing away material module, adjustment module and material pushing piece, pushes away the material module including pushing away the material guide rail and pushing away the material piece, and the adjustment module includes adjustment guide rail and adjustment driving piece, and adjustment guide rail slidable mounting on pushing away the material guide rail and be the cross setting with pushing away the material guide rail, the adjustment guide rail can by push away the material driving piece drive and slide. The pushing piece is slidably mounted on the adjusting guide rail and can be driven by the adjusting driving piece to slide.

The utility model discloses plasma cleaning machine when specifically using, pushes away the material guide rail and can follow and push away the material direction and extend, and then the accessible pushes away the material driving piece drive adjustment guide rail and slides for the adjustment guide rail can drive and push away the material spare and slide and push away the material along pushing away the material guide rail. In addition, the pushing piece can be driven to slide on the adjusting guide rail by adjusting the driving piece, so that the pushing position of the pushing piece on the material is adjusted, the pushing position is centered, the smooth pushing is ensured, and the phenomena of askew pushing, oblique pushing and material blocking are reduced.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the structures shown in the drawings without creative efforts.

FIG. 1 is a schematic structural diagram of an embodiment of a plasma cleaning machine according to the present invention;

FIG. 2 is a schematic structural diagram of an embodiment of the pushing mechanism shown in FIG. 1;

FIG. 3 is a schematic structural diagram of the adjusting module shown in FIG. 2;

FIG. 4 is a schematic structural view of another embodiment of the pusher mechanism of FIG. 1;

FIG. 5 is a schematic view of a portion of the adjusting module shown in FIG. 4;

fig. 6 is a schematic structural diagram of an embodiment of a pushing member of the plasma cleaning machine of the present invention.

The reference numbers illustrate:

the objects, features and advantages of the present invention will be further described with reference to the accompanying drawings.

Detailed Description

It should be noted that, if directional indications (such as upper, lower, left, right, front and rear … …) are involved in the embodiment of the present invention, the directional indications are only used to explain the relative position relationship between the components, the motion situation, etc. in a specific posture (as shown in the drawings), and if the specific posture is changed, the directional indications are changed accordingly.

In addition, if there is a description relating to "first", "second", etc. in the embodiments of the present invention, the description of "first", "second", etc. is for descriptive purposes only and is not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In addition, the meaning of "and/or" appearing throughout is to include three juxtapositions, exemplified by "A and/or B" including either scheme A, or scheme B, or a scheme in which both A and B are satisfied. In addition, the technical solutions in the embodiments may be combined with each other, but it must be based on the realization of those skilled in the art, and when the technical solutions are contradictory or cannot be realized, the combination of the technical solutions should not be considered to exist, and is not within the protection scope of the present invention.

The utility model provides a plasma cleaning machine.

In the embodiment of the present invention, as shown in fig. 1, the plasma cleaning machine includes a magazine mounting mechanism 40, a material pushing mechanism 30, a material guiding mechanism 50, a material supporting jig circulating mechanism 20, and a cavity module 60. Before the plasma cleaning machine 10 cleans materials such as a substrate and a lead frame, a plurality of materials are stored through the material box 70, the material box 70 is of a box-shaped structure and is provided with a front opening and a rear opening, a plurality of material storage layers are arranged in the material box 70 from top to bottom, and each material storage layer can be used for storing a piece of material to be cleaned or cleaned. The front and rear through openings of the material box 70 enable the material to be pushed out or pushed back, and then the material loading and unloading in the material box 70 are realized.

The cartridge mounting mechanism 40 is used for mounting and positioning the cartridge 70, and can drive the cartridge 70 to move up and down, so that the material in each material layer can be pushed out or pushed back.

The pushing mechanism 30 is mainly used for pushing the substrate or the lead frame in the material box 70 onto the material supporting jig circulating mechanism 20, so as to complete the feeding process. And the pushing mechanism 30 is further configured to push the cleaned substrate or lead frame on the material supporting jig 21 back into the material box 70, thereby completing the blanking process. Of course, there may be a plurality of pushing mechanisms 30, for example, two pushing mechanisms 30 are provided, one of which is disposed behind the cartridge mounting mechanism 40 and is responsible for pushing out the material in the cartridge 70, and the other of which is disposed in front of the cartridge mounting mechanism 40 and is responsible for pushing the material cleaned on the material supporting jig 21 back into the cartridge 70.

The material guiding mechanism 50 is arranged between the material box mounting mechanism 40 and the material supporting jig circulating mechanism 20, and is mainly used for conveying materials between the material box 70 and the material supporting jig circulating mechanism 20, so that the situation that the material pushing mechanism 30 cannot completely push materials to influence feeding and discharging can be avoided, and the generation of dust pollution can be reduced. Specifically, after the material pushing mechanism 30 pushes out the material in the material box 70, the material guiding mechanism 50 conveys the material to the material supporting jig circulating mechanism 20; after the material pushing mechanism 30 pushes out the material on the material supporting jig circulating mechanism 20, the material guiding mechanism 50 reversely conveys the material back into the material box 70, so as to ensure smooth feeding and discharging.

The material supporting jig circulating mechanism 20 is mainly used for conveying the material at the position of the material box mounting mechanism 40 to the position of the cavity module 60 for cleaning, and conveying the material cleaned at the position of the cavity module 60 back to the position of the material box mounting mechanism 40 for storage. When the material supporting jig circulating mechanism 20 transports the material, the material can be placed and positioned by the material supporting jig 21, and then the material supporting jig 21 is transported to the cavity module 60 or the magazine mounting mechanism 40 by the driving member, the transporting rail and the like.

The cavity module 60 comprises a reaction cavity for cleaning materials, the materials can be placed into the reaction cavity after being conveyed to the cavity module 60, an electric field in the reaction cavity can generate plasma through ionized gas (such as argon), and then the materials are cleaned by means of the performance that the plasma has active components.

In this embodiment, for the pushing equipment who solves some current plasma cleaning machines when pushing away the material, the easy condition that pushes away the material askew and cause the card material that appears, and then influences the cleaning efficiency's of cleaning machine technical problem, pushing equipment 30 is including pushing away material module 31, adjustment module 32 and pushing away material piece 33.

Specifically, the material pushing module 31 includes a material pushing guide rail 311 and a material pushing driving member 312, the material pushing guide rail 311 extends along a material pushing direction preset by the plasma cleaning machine 10, and the specific length and the specific form can be set by itself according to actual needs. The material push actuator 312 may be a motor, cylinder, or the like. The adjusting module 32 includes an adjusting guide rail 321 and an adjusting driving member 322, the adjusting guide rail 321 is slidably mounted on the pushing guide rail 311 and is disposed in a cross manner with the pushing guide rail 311, that is, the extending direction of the adjusting guide rail 321 and the extending direction of the pushing guide rail 311 are disposed in a cross manner, and can be perpendicular to each other and also can be other cross angles, and the adjusting module can be specifically set according to actual needs. The adjustment rail 321 may be directly slidably mounted on the pushing rail 311, or may be indirectly slidably mounted on the pushing rail 311 through an intermediate connector or a slider. Meanwhile, the adjustment guide rail 321 can be driven by the pushing material driving element 312 to slide.

In addition, the pushing member 33 is mainly used for abutting against and pushing the material in the material box 70, and the specific shape, size and structure of the pushing member 33 are not specifically limited, and only the material needs to be pushed. In this embodiment, the pushing member 33 is slidably mounted on the adjusting guide rail 321, and can be driven by the adjusting driving member 322 to slide, specifically, driven by the adjusting driving member 322 to slide along the adjusting guide rail 321.

It can be understood that the utility model discloses plasma cleaning machine 10 when specifically using, pushes away material guide rail 311 and extends along the predetermined material direction that pushes away, and then the accessible pushes away material driving piece 312 drive adjustment guide rail 321 and slides for adjustment guide rail 321 can drive material pushing part 33 and slide and push away the material along pushing away material guide rail 311 and push away the material. In addition, the pushing member 33 can be driven to slide on the adjusting guide rail 321 by adjusting the driving member 322, so that the pushing position of the pushing member 33 on the material is adjusted, the pushing position is centered, smooth pushing is ensured, and the phenomena of askew pushing, oblique pushing and material jamming are reduced.

In an embodiment, as shown in fig. 2 and 3, the pushing mechanism 30 further includes a first mounting member 34 and a second mounting member 35, the first mounting member 34 is slidably mounted on the adjustment rail 321, the second mounting member 35 is mounted on the first mounting member 34 and is slidable relative to the first mounting member 34 along the extending direction of the pushing rail 311, and the pushing member 33 is mounted on the second mounting member 35; a first elastic member 36 is further connected between the first mounting member 34 and the second mounting member 35, and the first elastic member 36 extends along the extending direction of the pushing rail 311.

The specific structure of the first mounting part 34 and the second mounting part 35 can be set as required, and in the present embodiment, the first mounting part 34 and the second mounting part 35 are both plate-shaped structures for convenience of manufacture and assembly. The first mounting member 34 may be provided with a sliding structure matching with the adjustment guide rail 321, or may be slidably mounted on the adjustment guide rail 321 through an external connecting member or a sliding member. Similarly, the second mounting member 35 and the first mounting member 34 may be slidably coupled by a mating sliding structure, or intermediate member. For example, in other embodiments, the first mounting member 34 and the second mounting member 35 are connected by a cross roller rail extending along the extension direction of the pusher rail 311. This enables the second mounting member 35 to slide along the adjustment rail 321 together with the first mounting member 34, and also slide relative to the first mounting member 34 along the extending direction of the pushing rail 311.

It is understood that the pushing member 33 is mounted on the second mounting member 35, and a first elastic member 36 is further connected between the second mounting member 35 and the first mounting member 34, and the first elastic member 36 extends along the extending direction of the pushing rail 311. So can make material pushing member 33 can the elasticity promote the material to if when the in-process that promotes appears the card material phenomenon, first elastic component 36 makes and pushes away and can have certain buffering between material pushing member 33 and the material, avoids the condition that material pushing member 33 continues to promote and damage the material when the card material appears.

In addition, the pushing member 33 is slidably mounted on the adjusting guide rail 321 through the first mounting member 34 and the second mounting member 35, so that the assembling and replacing of the pushing member 33 are facilitated, and the stable sliding and pushing of the pushing member 33 are controlled.

Of course, the material pushing mechanism 30 may also have an accident of material jamming during the material pushing process, and therefore, in order to enable the material jamming accident to be handled in time, in an embodiment, the material pushing mechanism 30 further includes a first sensor and a first alarm, and the first sensor is configured to sense the first elastic element 36 and is electrically connected to the alarm. Specifically, first inductor can respond to the pressure size of first elastic component 36, also can respond to the flexible variable quantity of first elastic component 36 to will transmit information directly or transmit for first siren after handling when sensing card material information, first alarm is through mode suggestion staff such as sound, bright light, and then in time handle card material problem.

In an embodiment, with reference to fig. 4 to 6, the pushing member 33 is disposed in a long shape and extends along the extending direction of the pushing guide rail 311, and both ends of the pushing member 33 are free ends capable of pushing material. Therefore, the pushing mechanism 30 can push the material from two different directions, that is, the material can be pushed toward the material box 70, and the material can be pushed away from the material box 70.

In this embodiment, a material guiding mechanism 50 is further installed between the mounting mechanism 40 of the material box 70 and the material supporting jig circulating mechanism 20, and after the material pushing mechanism 30 pushes the material out of the material box 70 for a certain length, the material guiding mechanism 50 can automatically guide the material onto the material supporting jig circulating mechanism 20. However, the material guiding mechanism 50 sometimes cannot guide the material completely, and thus the material conveying is affected. Therefore, in the present embodiment, two pushing mechanisms 30 are provided, one of which is provided behind the mounting mechanism 40 of the cartridge 70 and is responsible for pushing the material out of the cartridge 70. The pushing member 33 of the other pushing mechanism 30 has two free ends capable of pushing materials, and is used for pushing the cleaned material on the material supporting jig back to the material box 70 and assisting to push the material that cannot be completely guided out from the material guiding mechanism 50.

In order to enable the other pushing mechanism 30 to better cross over the material supporting jig circulating mechanism 20 to assist in pushing the material on the material guiding mechanism 50, in an embodiment, the pushing mechanism 30 further includes a fifth mounting member 310 and a lifting device 320, the fifth mounting member 310 is slidably mounted on the adjusting guide rail 321 and further provided with a vertically extending lifting guide rail 330, and the third mounting member 37 is slidably mounted on the lifting guide rail 330 and can be driven by the lifting device 320 to slide.

Specifically, when the pushing mechanism 30 needs to move the material guiding mechanism 50, the third mounting member 37 may be driven to ascend through the lifting device 320, and the third mounting member 37 simultaneously drives the material pushing member 33 to ascend until the material pushing member 33 generates a certain interval with other mechanism components on the plasma cleaning machine 10 in the height direction, so as to avoid collision between the pushing mechanism 30 and other mechanism components in the process of moving to the material guiding mechanism 50. The entire adjusting guide rail 321 can be driven by the pushing driving element 312 to move until the pushing element 33 moves above the material guiding mechanism 50. Finally, the pushing member 33 descends to push the material on the guiding mechanism 50.

When both ends of the pushing member 33 are free ends capable of pushing material, in order to enable the pushing member 33 to push material from any end, as shown in fig. 5, in an embodiment, the pushing mechanism 30 further includes a third mounting member 37 and a fourth mounting member 38, the third mounting member 37 is slidably mounted on the adjustment guide rail 321, the fourth mounting member 38 is mounted on the third mounting member 37 and can slide relative to the third mounting member 37 along the extending direction of the pushing guide rail 311, and the pushing member 33 is mounted on the fourth mounting member 38; in the extending direction of the material pushing guide rail 311, second elastic pieces 39 are arranged on two sides of the fourth mounting piece 38, the second elastic pieces 39 extend along the extending direction of the material pushing guide rail 311, one end of each second elastic piece 39 is connected with the third mounting piece 37, and the other end of each second elastic piece is connected with the fourth mounting piece 38.

In addition, the pushing mechanism 30 may further include a second sensor and a second alarm, the second sensor is used for sensing the pressure or the expansion amount of the second elastic member 39, and is electrically connected to the second alarm, so as to send a reminding signal through the second alarm when the material jamming condition is sensed.

In an embodiment, as shown in fig. 5, the plurality of pushing members 33 are provided, the fourth mounting member 38 is an elongated structure, and the plurality of pushing members 33 are arranged on the fourth mounting member 38 at intervals along the extending direction of the adjustment guide rail 321. And then a plurality of materials are pushed simultaneously, so that the cleaning efficiency of the plasma cleaning machine 10 is improved.

In an embodiment, as shown in fig. 6, the end of the pushing member 33 is provided with a first inclined surface 331 and a second inclined surface 332, and the first inclined surface 331 and the second inclined surface 332 together form a pushing groove 333 for pushing. Specifically, in this embodiment, the first inclined surface 331 is located above the second inclined surface 332, a horizontal plane where an intersection line between the first inclined surface 331 and the second inclined surface 332 is located is taken as a reference plane, and an inclination angle of the first inclined surface 331 is greater than an inclination angle of the second inclined surface 332. So can guarantee to push away material piece 33 and can promote thinner material, avoid pushing away the material that material piece 33 can not be fine or the unstable condition of promotion process.

In one embodiment, as shown in fig. 4, the plasma cleaning machine 10 further includes a code scanning device 340, wherein the code scanning device 340 is slidably mounted on the adjustment guide rail 321. It can be understood that the code scanning device 340 can slide along the extending direction of the pushing guide rail 311 along with the adjusting guide rail 321, and can also slide on the adjusting guide rail 321, so that the code scanning device 340 can scan any position on the material.

The above only is the preferred embodiment of the present invention, not limiting the scope of the present invention, all the equivalent structure changes made by the contents of the specification and the drawings under the inventive concept of the present invention, or the direct/indirect application in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A plasma cleaning machine, comprising:

the material box mounting mechanism is used for mounting a material box; and the number of the first and second groups,

pushing equipment, be used for with treat abluent material propulsion in the magazine to and push back the material that washs the completion the magazine, pushing equipment includes:

the material pushing module comprises a material pushing guide rail and a material pushing driving piece;

the adjusting module comprises an adjusting guide rail and an adjusting driving piece, the adjusting guide rail is slidably mounted on the pushing guide rail and is arranged in a cross manner with the pushing guide rail, and the adjusting guide rail can be driven by the pushing driving piece to slide; and the number of the first and second groups,

and the pushing piece is arranged on the adjusting guide rail in a sliding manner and can be driven by the adjusting driving piece to slide.

2. The plasma cleaning machine of claim 1, wherein the pushing mechanism further comprises a first mounting member slidably mounted on the adjustment rail and a second mounting member mounted on the first mounting member and slidable relative to the first mounting member in a direction in which the pushing rail extends, the pushing member being mounted on the second mounting member;

still be connected with first elastic component between first installed part and the second installed part, first elastic component is followed push away the extending direction of material guide rail and extend.

3. The plasma cleaning machine of claim 2, wherein the pushing mechanism further comprises a first sensor and a first alarm, the first sensor is used for sensing the first elastic member and is electrically connected with the alarm.

4. The plasma cleaning machine of claim 2 wherein said first mounting member and said second mounting member are connected by a cross roller guide extending in the direction of extension of said pusher guide.

5. The plasma cleaning machine as claimed in claim 1, wherein the pushing member is disposed in an elongated shape and extends along the extending direction of the pushing guide rail, and both ends of the pushing member are free ends capable of pushing material.

6. The plasma cleaning machine of claim 5, wherein the pushing mechanism further comprises a third mounting member slidably mounted on the adjustment rail and a fourth mounting member mounted on the third mounting member and slidable relative to the third mounting member along the extension direction of the pushing rail, the pushing member being mounted on the fourth mounting member;

and in the extending direction of the pushing guide rail, second elastic pieces are arranged on two sides of the fourth mounting piece, the second elastic pieces extend along the extending direction of the pushing guide rail, one end of each second elastic piece is connected with the third mounting piece, and the other end of each second elastic piece is connected with the fourth mounting piece.

7. The plasma cleaning machine as claimed in claim 6, wherein said pusher is provided in plural, and said fourth mounting member is in an elongated configuration, and said plurality of pusher are arranged at intervals on said fourth mounting member in an extending direction of said adjustment rail.

8. The plasma cleaning machine of claim 6 wherein the pushing mechanism further comprises a fifth mounting member slidably mounted on the adjustment rail and further comprising a vertically extending lifting rail, and a lifting device, the third mounting member being slidably mounted on the lifting rail and being driven by the lifting device to slide.

9. The plasma cleaning machine as claimed in any one of claims 1 to 8, wherein the end of the pushing member is provided with a first inclined surface and a second inclined surface, and the first inclined surface and the second inclined surface together form a pushing groove for pushing the material.

10. The plasma cleaning machine of any one of claims 1 to 8, further comprising a code scanning device slidably mounted on the adjustment guide rail.