CN213336614U - Intelligent vacuum pressure sensing device - Google Patents
Intelligent vacuum pressure sensing device Download PDFInfo
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- CN213336614U CN213336614U CN202022679790.4U CN202022679790U CN213336614U CN 213336614 U CN213336614 U CN 213336614U CN 202022679790 U CN202022679790 U CN 202022679790U CN 213336614 U CN213336614 U CN 213336614U
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Abstract
The utility model provides an intelligent vacuum pressure sensing device, which comprises a coupled integrated measuring module and a real-time measurement and control module, wherein the input end of the integrated measuring module is used for acquiring the pressure and the temperature of a vacuum system, respectively converting the pressure and the temperature into electric signals and outputting the electric signals to the real-time measurement and control module according to the grading amplification; the real-time measurement and control module carries out the AD conversion to the signal of telecommunication of input, and based on the temperature of input, carries out temperature compensation to pressure, and is used for the outside demonstration with the pressure output after the compensation, and is used for controlling external switch's switching signal and the communication signal that is used for external communication based on the pressure value output, the utility model discloses an intelligence vacuum pressure sensing device can realize the small-signal amplification plastic output with the pressure of gathering and temperature, has realized covering the pressure measurement requirement of full range with a sensor, and carries out temperature and drift real-time compensation to pressure based on the temperature of gathering, has guaranteed real-time pressure measurement's accuracy and accuracy.
Description
Technical Field
The utility model relates to a vacuum pressure sensor field, concretely relates to intelligence vacuum pressure sensing device.
Background
The vacuum system is a necessary process for manufacturing basic materials and high-end industries, and the process application of the negative pressure characteristic of the vacuum system is different according to the type and the control point of the vacuum degree of the vacuum pump, such as vacuum adsorption, vacuum conveying, vacuum smelting, vacuum drying, vacuum distillation, vacuum degassing, cooling, fresh keeping, cleaning, sterilization, leakage detection, high-speed wind tunnel technology, vacuum heat insulation and insulation, rarefied gas discharge, cosmic vacuum effect and the like.
The accurate real-time measurement and control of the vacuum degree is the key of a vacuum system, and the measurement range span is large, the environmental influence is large, and the use point position is dense, which is always a system difficulty. In the existing vacuum measurement and control mode, a mechanical surface contact for low vacuum, a crystal sensor for medium vacuum and a gauge for high vacuum are commonly used. The mechanical meter is low in precision, the range of an unprocessed crystal sensor is narrow, the crystal sensor can normally work only over 2kpa under temperature drift and zero drift, and the gauge has the defects of slow response time, easiness in sudden damage and the like due to the special structural principle. The problem that the process cannot continuously work when the device is mounted cannot meet the requirements when the device is not mounted is always troubled for industrial application, and a good solution is not provided so far. If a foreign high-precision sensor is introduced, the price is dozens of times of the existing price, and the use condition is harsh and cannot be popularized.
SUMMERY OF THE UTILITY MODEL
The utility model provides an intelligence vacuum pressure sensing device gathers vacuum system's pressure and temperature in unison to can realize the small-signal amplification plastic output of gathering high vacuum, realized covering the pressure measurement requirement of full range with a sensor, whole vacuum system's measurement and control problem is solved to the mode with the low cost, and carry out temperature and drift real-time compensation to pressure based on the temperature of gathering, guaranteed real-time pressure measurement's accuracy and accuracy.
In order to solve the technical problem, the utility model provides a technical scheme as follows: an intelligent vacuum pressure sensing device at least comprises an integrated measuring module and a real-time measuring and controlling module which are coupled; the input end of the integrated measurement module is used for collecting the pressure and the temperature of the vacuum system, respectively converting the pressure and the temperature into electric signals, shaping, amplifying and outputting the electric signals to the real-time measurement and control module; the real-time measurement and control module carries out A/D conversion to the signal of telecommunication of input to based on the temperature of input, carry out temperature compensation to pressure, and show the pressure value after the compensation, and, based on pressure value output control signal and the communication signal that is used for external communication.
Furthermore, the integrated measuring module comprises a measuring shell and a measuring circuit module arranged in the measuring shell, wherein the measuring circuit module comprises a pressure measuring unit, a temperature measuring unit and a signal shaping and amplifying unit respectively coupled with the pressure measuring unit and the temperature measuring unit; the pressure measuring unit inputs the pressure of the vacuum system, converts a measured pressure signal into a pressure electric signal and outputs the pressure electric signal to the signal shaping and amplifying unit; the temperature measuring unit inputs the temperature of the vacuum system, converts a measured temperature signal into a temperature electric signal and outputs the temperature electric signal to the signal shaping and amplifying unit; the signal shaping and amplifying unit is used for outputting the input pressure electric signal and the input temperature electric signal to the real-time measurement and control module after signal processing and amplification.
And the small signals collected by amplification and shaping are realized through the signal shaping and amplifying unit.
Furthermore, the real-time measurement and control module comprises a base and a real-time measurement and control circuit module arranged in the base, wherein the real-time measurement and control circuit module comprises an A/D conversion unit, a compensation unit and a display output unit which are sequentially coupled; the A/D conversion unit is used for converting the input pressure electric signal and the temperature electric signal into a pressure digital signal and a temperature digital signal and outputting the pressure digital signal and the temperature digital signal to the compensation unit; the compensation unit is used for carrying out temperature compensation on the input pressure digital signal based on the input temperature digital signal and outputting the compensated pressure signal to the display output unit; and the display output unit is used for outputting the compensated pressure for external display and outputting communication information and/or control signals.
The base protection sets up in its inside real-time measurement and control circuit module, and real-time measurement and control circuit module realizes the temperature compensation and the drift compensation of pressure, obtains accurate pressure measurement value.
Further, the pressure measuring unit at least comprises a pressure sensor, and the compensation unit at least comprises a controller for solidifying compensation parameters of the corresponding pressure sensor.
The temperature compensation and the drift compensation are calculated in the controller based on the compensation parameters.
Furthermore, the measuring shell comprises a measuring plug and a protective shell which are integrally connected, the measuring plug is used for being connected with a vacuum system, and the protective shell is used for protecting the internal measuring circuit module.
The measuring plug is connected with the vacuum system, so that the stability of parameter acquisition is ensured.
Furthermore, the measurement circuit module further comprises a protection unit, wherein the input of the protection unit is used for being coupled with an external power supply, and the output of the protection unit is coupled with the signal shaping and amplifying unit; the protection circuit module is used for protecting the measurement circuit module when the external power supply fails.
The protection unit is used for ensuring that other units of the measuring circuit module are not damaged under the conditions of overvoltage, short circuit and failure of an external power supply.
Furthermore, real-time observing and controlling circuit module still includes the setting unit, the setting unit inputs outside setting parameter to with outside setting parameter conversion digital signal output to the compensation unit, the compensation unit is based on the pressure signal after the compensation to and the setting parameter of input, output corresponding control signal is used for controlling external switch.
Furthermore, be equipped with the display screen on the base, the display screen is connected with the real-time measurement and control circuit module's in the base display output unit for show the pressure value.
Furthermore, at least 2 groups of indicator lamps are arranged on two sides of the display screen, wherein 1 group of indicator lamps is used for indicating the range of the current display pressure value, and the other group of indicator lamps is used for indicating the parameter range set by the setting unit.
Furthermore, a key connected with a setting unit of the real-time measurement and control circuit module in the base is arranged below the display screen and used for setting parameters and outputting the set parameters to the setting unit.
The method has the following technical advantages or beneficial effects:
1. the intelligent vacuum pressure sensing device adopts an integrated measuring module to realize the pressure and temperature acquisition of a vacuum system, realizes the amplification and shaping of acquired small signals inside the integrated measuring module, and realizes the continuous measurement of covering the full range of 1pa to 100kpa by using a single crystal sensor.
2. The protective casing of the measuring shell is anti-collision and acid and alkali resistant, protects the measuring circuit module inside the measuring shell, and can prevent the measuring circuit module from being interfered.
3. The real-time measurement and control module carries out real-time dynamic temperature compensation on the pressure based on the temperature, and accurate measurement on the pressure is realized.
4. And setting an upper limit pressure action value and a lower limit pressure action value according to requirements, and outputting a switch control signal to a control device at the rear end when a specific pressure value is reached.
5. The vacuum system can realize communication with various upper computer equipment in various communication modes, and realizes transmission of the pressure of the vacuum system and transmission of control signals based on the pressure of the vacuum system.
Drawings
Fig. 1 is a schematic diagram of an embodiment of an intelligent vacuum pressure sensor device according to the present invention;
fig. 2 is a schematic structural diagram of an integrated measurement module according to an embodiment of the intelligent vacuum pressure sensor of the present invention;
fig. 3 is a schematic block diagram of a measurement circuit module according to an embodiment of the present invention;
fig. 4 is a schematic structural diagram of a real-time measurement and control module according to an embodiment of the intelligent vacuum pressure sensing apparatus of the present invention;
FIG. 5 is a schematic block diagram of a real-time measurement and control circuit module according to an embodiment of the present invention;
description of reference numerals: 11-measuring plug, 12-protective shell, 21-base, 22-display screen, 23-range indicator lamp, 24-parameter indicator lamp and 25-key.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
The schematic diagram of the specific embodiment of the intelligent vacuum pressure sensing device provided by the utility model is shown in fig. 1, and comprises an integrated measuring module and a real-time measuring and controlling module which are coupled by a shielding cable; the input end of the integrated measuring module is connected with the vacuum system, the pressure and the temperature of the vacuum system are collected and are used for respectively converting the pressure and the temperature into electric signals, and the electric signals are amplified and output to the real-time measuring and controlling module in a grading manner; the real-time measurement and control module carries out A/D conversion on an input electric signal, carries out temperature compensation on pressure based on input temperature, outputs the compensated pressure for external display, and outputs a switch signal for controlling an external switch and a communication signal for external communication based on a pressure value.
Fig. 2 is a schematic structural diagram of an integrated measurement module of the intelligent vacuum pressure sensing apparatus according to an embodiment of the present invention. The measurement shell of the integrated measurement module comprises a measurement plug 11 and a protection shell 12 which are connected integrally, the measurement plug is directly installed with the vacuum system, and the stable connection of the integrated measurement module and the vacuum system is guaranteed, so that the pressure and the temperature of stable collection are realized. The protective shell is used for protecting the internal measuring circuit module. It should be noted that the specific structure of the measurement plug is correspondingly installed according to the vacuum system, for example, the measurement plug and the vacuum system are screwed together. The protective housing is used for protecting the internal measuring circuit module, and can prevent collision, resist interference and resist acid and alkali.
Fig. 3 shows a schematic block diagram of a measurement circuit module according to an embodiment of the present invention. The device comprises a pressure measuring unit, a temperature measuring unit and a signal shaping and amplifying unit which is respectively coupled with the pressure measuring unit and the temperature measuring unit. Pressure sensor among the pressure cell and the temperature sensor among the temperature measurement unit convert the pressure and the temperature of gathering into the signal of telecommunication respectively to signal plastic amplifier unit, and signal plastic amplifier unit is according to the signal of telecommunication of input, and the pressure and temperature are enlargied in grades, and output voltage and temperature signal are to real-time observing and controlling module, can realize long-range output to real-time observing and controlling module through the shielded cable.
Fig. 4 is a schematic block diagram of a real-time measurement and control circuit module. The real-time measurement and control circuit module comprises an A/D conversion unit, a compensation unit and a display output unit which are sequentially coupled. The A/D conversion unit is used for converting the input pressure electric signal and the temperature electric signal into a pressure digital signal and a temperature digital signal and outputting the pressure digital signal and the temperature digital signal to the compensation unit. The compensation unit performs temperature compensation on the input pressure digital signal based on the input temperature digital signal, and outputs the compensated pressure signal to the display output unit. The compensation unit at least comprises a controller, and the temperature compensation coefficient of the curing pressure sensor in the controller carries out real-time temperature compensation aiming at the pressure.
The display output unit receives the pressure signal compensated by the compensation unit, converts the pressure signal into a digital signal available for external display, and outputs communication information to perform information interaction with an upper computer, and the communication mode is not limited to 485/TCP/wireless communication modes. It is also possible to output a control signal based on the compensated pressure signal, for example to output a switching value for control of the back-end PLC.
The real-time measurement and control circuit module further comprises a setting unit, the setting unit converts externally set parameters and outputs the externally set parameters to the compensation unit, and the compensation unit outputs corresponding control signals for controlling an external switch based on the compensated pressure signals and the input setting parameters. For example, upper and lower limit values of the external control signal action are set.
Fig. 5 is a schematic structural diagram of the real-time measurement and control module, which includes a base and a real-time measurement and control circuit module disposed in the base. The base is provided with a display screen, the display screen is connected with a display output unit through a connector assembly and used for displaying pressure values, at least 2 groups of indicator lamps are arranged on two sides of the display screen, wherein one group on the right is used as a range indicator lamp and used for indicating the range of the currently displayed pressure values, and one group on the left is used as a parameter lamp and used for indicating the set parameter range. The display screen is provided with a key connected with a setting unit of the real-time measurement and control circuit module in the base below, and the key is used for setting parameters and outputting the set parameters to the setting unit.
The utility model discloses an in the embodiment, pressure measurement sensor and the temperature measurement sensor of integrative measurement module will detect pressure value and temperature value conversion and be the signal of telecommunication, and the output can transmit long distance voltage signal and get into real-time observing and controlling module after signal plastic amplification unit enlargies. In order to amplify and shape the small signal, the voltage of the integrated measurement module is automatically increased, and larger output is obtained. The real-time measurement and control module carries out intelligent digital compensation on the pressure according to the set drift value and the set temperature value, and then the pressure value and the temperature value acquired on site are calculated and displayed. If the detected temperature is 40 ℃, the pressure deviation is 60 Pa, and after the compensation operation is finished, standard signals of 4-20 ma or 0-10 v and the like are output. And outputting the pressure and temperature values to a display screen for display. If the output pressure unit is kpa, the upper indicator light of the corresponding right group of indicator lights is turned on for indicating the unit of the currently displayed pressure. The right set of indicator lights on the underside indicate pressure units pa. The output pressure value can be output to an upper computer in a 485 communication mode. The parameters are set according to actual needs through the following 4 function keys. 4 function buttons of accessible set up the upper and lower limit value to export the upper and lower limit value to setting up the unit the utility model discloses a when intelligence vacuum pressure sensing device detected vacuum pressure and reachs the upper limit value, output control signal to rear end control system to make all the other equipment of control system control start.
In summary, the above description is only a preferred embodiment of the present invention and should not be taken as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principles of the present invention should be included within the scope of the present invention.
Claims (10)
1. An intelligent vacuum pressure sensing device, characterized in that: the system at least comprises a coupled integrated measuring module and a real-time measuring and controlling module;
the input end of the integrated measurement module is used for collecting the pressure and the temperature of the vacuum system, respectively converting the pressure and the temperature into electric signals, shaping, amplifying and outputting the electric signals to the real-time measurement and control module;
the real-time measurement and control module carries out A/D conversion to the electrical signal of input to based on the temperature signal of input, carry out temperature compensation to pressure signal, and show the pressure value after the compensation, and, based on pressure value output control signal and the communication signal that is used for external communication.
2. The intelligent vacuum pressure sensing device of claim 1, wherein:
the integrated measuring module comprises a measuring shell and a measuring circuit module arranged in the measuring shell, wherein the measuring circuit module comprises a pressure measuring unit, a temperature measuring unit and a signal shaping and amplifying unit which is respectively coupled with the pressure measuring unit and the temperature measuring unit;
the pressure measuring unit is used for collecting the pressure of the vacuum system, converting the collected pressure signal into a pressure electric signal and outputting the pressure electric signal to the signal shaping and amplifying unit;
the temperature measuring unit is used for acquiring the temperature of the vacuum system, converting the acquired temperature signal into a temperature electric signal and outputting the temperature electric signal to the signal shaping and amplifying unit;
the signal shaping and amplifying unit shapes and amplifies the input pressure electric signal and the input temperature electric signal and outputs the signals to the real-time measurement and control module.
3. The intelligent vacuum pressure sensing device of claim 2, wherein: the real-time measurement and control module comprises a base (21) and a real-time measurement and control circuit module arranged in the base (21),
the real-time measurement and control circuit module comprises an A/D conversion unit, a compensation unit and a display output unit which are sequentially coupled;
the A/D conversion unit is used for converting the input pressure electric signal and the temperature electric signal into a pressure digital signal and a temperature digital signal and outputting the pressure digital signal and the temperature digital signal to the compensation unit;
the compensation unit compensates the input pressure digital signal in real time based on the input temperature digital signal and outputs the compensated pressure signal to the display output unit;
and the display output unit is used for outputting the compensated pressure for external display and outputting communication information and/or control signals.
4. The intelligent vacuum pressure sensing device of claim 3, wherein: the pressure measuring unit at least comprises a pressure sensor, and the compensation unit at least comprises a controller used for solidifying compensation parameters of the corresponding pressure sensor.
5. The intelligent vacuum pressure sensing device according to claim 2, wherein the measurement housing comprises an integrally connected measurement plug (11) and a protective outer shell (12), the measurement plug (11) being adapted to be connected to a vacuum system, the protective outer shell (12) being adapted to protect the internal measurement circuit module.
6. The intelligent vacuum pressure sensing device according to claim 2, wherein the measurement circuit module further comprises a protection unit, an input of the protection unit is used for coupling with an external power supply, and an output of the protection unit is coupled with the signal shaping and amplifying unit; the protection circuit module is used for protecting the measurement circuit module when the external power supply fails.
7. The intelligent vacuum pressure sensing device according to claim 3, wherein the real-time measurement and control circuit module further comprises a setting unit, the setting unit inputs external setting parameters and converts the external setting parameters into digital signals to be output to the compensation unit, and the compensation unit outputs corresponding control signals for controlling the external switch based on the compensated pressure signals and the input setting parameters.
8. The intelligent vacuum pressure sensing device according to claim 3, wherein a display screen (22) is arranged on the base (21), and the display screen is connected with a display output unit of the real-time measurement and control circuit module in the base and used for displaying the pressure value.
9. The intelligent vacuum pressure sensing device according to claim 8, wherein at least 2 groups of indicator lights are provided on both sides of the display screen, wherein 1 group is used as a range indicator light (23) for indicating the range of the current display pressure value, and the other group is used as a parameter indicator light (24) for indicating the parameter range set by the setting unit.
10. The intelligent vacuum pressure sensing device of claim 8, wherein: and a key (25) connected with a setting unit of the real-time measurement and control circuit module in the base is arranged below the display screen and used for setting parameters and outputting the set parameters to the setting unit.
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| CN202022679790.4U CN213336614U (en) | 2020-11-18 | 2020-11-18 | Intelligent vacuum pressure sensing device |
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| CN202022679790.4U CN213336614U (en) | 2020-11-18 | 2020-11-18 | Intelligent vacuum pressure sensing device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113720524A (en) * | 2021-08-26 | 2021-11-30 | 北京七星华创流量计有限公司 | Pressure detection method and pressure detection system |
| CN114112183A (en) * | 2021-10-28 | 2022-03-01 | 凯晟动力技术（嘉兴）有限公司 | Vacuum degree pressure sensor for automobile brake power-assisted braking |
-
2020
- 2020-11-18 CN CN202022679790.4U patent/CN213336614U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113720524A (en) * | 2021-08-26 | 2021-11-30 | 北京七星华创流量计有限公司 | Pressure detection method and pressure detection system |
| CN114112183A (en) * | 2021-10-28 | 2022-03-01 | 凯晟动力技术（嘉兴）有限公司 | Vacuum degree pressure sensor for automobile brake power-assisted braking |
| CN114112183B (en) * | 2021-10-28 | 2024-08-02 | 凯晟动力技术（嘉兴）有限公司 | Automobile brake booster braking vacuum degree pressure sensor |
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