CN213327817U - Rotary sample table for magnetron sputtering equipment - Google Patents

Abstract

The utility model discloses a rotatory sample platform for magnetron sputtering equipment, including the cabinet body and show wheel, the mounting groove has all been seted up to the both sides of cabinet body upper surface, the inside rotation of mounting groove is connected with the show wheel, the central fixedly connected with pivot of department of show wheel, the drive belt has been cup jointed at the middle part of pivot, drive motor has been cup jointed to the bottom of drive belt, the both ends of the cabinet body all are provided with slide bar and damping rod, the one end sliding connection that the cabinet body was kept away from to the slide bar has positioning bolt, positioning bolt's surperficial threaded connection has the display screen body, the equal fixedly connected with connecting block of lower extreme. The utility model discloses a setting of driving motor, drive belt, pivot and show wheel is accomplished to the goods preparation after, and the personnel can all put the finished product that covers on different products on the show wheel, at the in-process of show, it is rotatory to drive belt, pivot and show wheel through driving motor, can effectually show multiple sample when rotatory and come out the confession personnel and watch.

Description

Rotary sample table for magnetron sputtering equipment

Technical Field

The utility model relates to a sample show stand technical field specifically is a rotatory sample platform for magnetron sputtering equipment.

Background

In the process of preparing a thin film by Physical Vapor Deposition (PVD), a sputtering method is one of the main methods for preparing the thin film, wherein the magnetron sputtering technology is increasingly emphasized in recent years and becomes an important method for depositing various functional compound thin films, and the main advantages of preparing the thin film by the magnetron sputtering method are as follows: the deposition rate is high; the energy of deposited atoms is high, and the structure of the film is compact and the adhesive force is strong; when the alloy film is prepared, the controllability of the components is good; as the application of the magnetron sputtering technology is more and more extensive, the magnetron sputtering technology becomes one of the very important technologies no matter in laboratories or in the field of industrial production, especially in the field of electronic products, and home and abroad equipment manufacturers pay more and more attention to the research and development of the magnetron sputtering equipment; a series of magnetron sputtering devices suitable for laboratory scientific research and industrial production are developed in advanced and developed countries such as Germany, America, Japan and the like; in China, Shenyang scientific instrument and equipment limited company, Chinese science instruments, Nanguang introduced by China and other companies of Chinese academy of sciences also develop and produce a series of magnetron sputtering equipment in succession, and the requirements of domestic scientific research and production are met.

After the finished product is manufactured, a sample needs to be placed on a display table for displaying, however, the existing sample table has single display effect and single display sample, and therefore, a rotary sample table for magnetron sputtering equipment is provided.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a rotatory sample platform for magnetron sputtering equipment in order to solve the problem that proposes among the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a rotatory sample platform for magnetron sputtering equipment, includes the cabinet body and show wheel, the mounting groove has all been seted up to the both sides of cabinet body upper surface, the inside of mounting groove is rotated and is connected with the show wheel, the fixedly connected with pivot of center department of show wheel, the drive belt has been cup jointed at the middle part of pivot, drive motor has been cup jointed to the bottom of drive belt, the both ends of the cabinet body all are provided with slide bar and damping lever, the one end sliding connection that the cabinet body was kept away from to the slide bar has positioning bolt, positioning bolt's surperficial threaded connection has the display screen body, the equal fixedly connected with connecting block of lower extreme of display screen body both sides, connecting block and damping lever swing joint, the upper portion fixed mounting of cabinet body one side has control button, be electric.

Preferably, four corners of the bottom of the cabinet body are fixedly provided with trundles, and the surfaces of the trundles are provided with rubber layers.

Preferably, one side of the top end of the cabinet body is provided with a hinge, and the cabinet body is movably connected with a cabinet cover through the hinge.

Preferably, the both sides of roof are fixed mounting has the illumination lamp plate in the cabinet lid.

Preferably, the surface of the display wheel is provided with a rotating rod, and the display wheel is connected with an object placing bracket through the rotating rod in a rotating way.

Preferably, the upper part of the back of the cabinet body is movably connected with an access door, and the lower part of the access door is movably connected with a placing cabin door.

Compared with the prior art, the beneficial effects of the utility model are that:

1. the utility model discloses a setting of driving motor, drive belt, pivot and show wheel is accomplished to the goods preparation after, and the personnel can all put the finished product that covers on different products on the show wheel, at the in-process of show, it is rotatory to drive belt, pivot and show wheel through driving motor, can effectually show multiple sample when rotatory and come out the confession personnel and watch.

2. The utility model discloses a setting of slide bar, damping rod and display screen body, when the show sample, personnel can use the slide bar to rotate to the top of show wheel as the centre of a circle with the display screen body, and back fixed position bolt makes the height and the angle of positioning bolt and damping rod restriction display screen body to in the show, the product brief introduction etc. can be broadcast to the display screen body, thereby show sample and product that can pluralism.

Drawings

FIG. 1 is a schematic side view of the present invention;

FIG. 2 is a schematic structural view of the back of the present invention;

fig. 3 is a schematic front view of a cross-sectional structure of the present invention;

FIG. 4 is a schematic view of the storage rack of the present invention;

fig. 5 is a schematic structural diagram of a point a in fig. 1 according to the present invention.

In the figure: 1. a cabinet body; 2. a display wheel; 3. a rotating shaft; 4. a transmission belt; 5. a drive motor; 6. a slide bar; 7. a damping lever; 8. positioning the bolt; 9. a display screen body; 10. connecting blocks; 11. a control button; 12. a caster wheel; 13. a cabinet cover; 14. a lighting lamp panel; 15. a rotating rod; 16. a placement bracket; 17. an access door; 18. and placing the cabin door.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "front", "rear", "both ends", "one end", "the other end", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "disposed," "connected," and the like are to be construed broadly, and for example, "connected" may be either fixedly connected or detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

Referring to fig. 1-5, the present invention provides an embodiment: a rotary sample table for magnetron sputtering equipment comprises a cabinet body 1 and display wheels 2, wherein mounting grooves are formed in two sides of the upper surface of the cabinet body 1, the display wheels 2 are rotatably connected inside the mounting grooves, a rotating shaft 3 is fixedly connected to the center of each display wheel 2, a driving belt 4 is sleeved in the middle of each rotating shaft 3, and a driving motor 5 is sleeved at the bottom of each driving belt 4;

through the arrangement of the transmission motor 5, the transmission belt 4, the rotating shaft 3 and the display wheel 2, when the products are manufactured, the personnel can put the finished products covered on different products on the display wheel 2, and in the display process, the transmission motor 5 drives the transmission belt 4, the rotating shaft 3 and the display wheel 2 to rotate, so that various samples can be effectively displayed for the personnel to watch during rotation;

the two ends of the cabinet body 1 are respectively provided with a sliding rod 6 and a damping rod 7, the arrangement of the damping rods 7 can effectively assist in limiting the angle and the height of the display screen body 9, one end, far away from the cabinet body 1, of the sliding rod 6 is connected with a positioning bolt 8 in a sliding mode, and the surface of the positioning bolt 8 is connected with the display screen body 9 in a threaded mode;

through the arrangement of the sliding rod 6, the damping rod 7 and the display screen body 9, when a sample is displayed, a person can rotate the display screen body 9 to the position above the display wheel 2 by taking the sliding rod 6 as a circle center, and then fix the positioning bolt 8, so that the positioning bolt 8 and the damping rod 7 limit the height and the angle of the display screen body 9, and therefore the display screen body 9 can play brief introduction of products and the like during displaying, and the sample and the products can be displayed in a diversified manner;

the equal fixedly connected with connecting block 10 of lower extreme of 9 both sides of display screen body, connecting block 10 and 7 swing joint of damping lever, the upper portion fixed mounting of the cabinet body 1 one side has control button 11, be electric connection between control button 11 and the drive motor 5, setting through control button 11, when personnel need take out the sample and explain alone, can press control button 11 and make drive motor 5 bring to rest, when drive motor 5 bring to rest, show wheel 2 can stall, thereby personnel can open the cabinet lid 13 and take out the sample and explain.

Further, the equal fixed mounting in four corners of cabinet body 1 bottom has truckle 12, and the surface of truckle 12 all is provided with the rubber layer, through the setting of truckle 12, can make things convenient for personnel to remove this sample platform more.

Further, one side on the cabinet body 1 top is provided with the hinge, and the cabinet body 1 has a cabinet lid 13 through hinge swing joint, through the setting of cabinet lid 13, can effectually play the guard action for show wheel 2 and sample, simultaneously, can play dirt-proof effect for show wheel 2 and sample.

Further, the equal fixed mounting in both sides of roof has illumination lamp plate 14 in the cabinet lid 13, through illumination lamp plate 14's setting, can effectually throw light on for the sample on the show wheel 2 and fill light, makes the sample that the observation that the personnel of visiting can be more clear show.

Further, the surface of show wheel 2 is provided with bull stick 15, and show wheel 2 rotates through bull stick 15 to be connected with puts thing bracket 16, has heard the setting of putting thing bracket 16, and the personnel can put into the product of difference and put into and show in putting thing bracket 16.

Further, the upper portion swing joint at the cabinet body 1 back has access door 17, and the below swing joint of access door 17 has placing hatch door 18, and through the setting of access door 17, the personnel of can being convenient for overhaul for the part in the mounting groove.

The working principle is as follows: when using, the personnel need place the sample of required show in proper order on two show wheels 2 earlier, then open driving motor 5 and close cabinet lid 13, pull up display screen body 9 to the top of cabinet lid 13 after closing, screw up positioning bolt 8 after angle and position have been adjusted and fix its position, just accomplish the adjustment and can begin to show.

It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Claims (6)

1. The utility model provides a rotatory sample platform for magnetron sputtering equipment, includes cabinet body (1) and show wheel (2), its characterized in that: the improved cabinet is characterized in that mounting grooves are formed in two sides of the upper surface of the cabinet body (1), a display wheel (2) is rotatably connected inside the mounting grooves, a rotating shaft (3) is fixedly connected to the center of the display wheel (2), a driving belt (4) is sleeved in the middle of the rotating shaft (3), a driving motor (5) is sleeved at the bottom of the driving belt (4), a sliding rod (6) and a damping rod (7) are arranged at two ends of the cabinet body (1), a positioning bolt (8) is slidably connected to one end, away from the cabinet body (1), of the sliding rod (6), a display screen body (9) is in threaded connection with the surface of the positioning bolt (8), connecting blocks (10) are fixedly connected to the lower ends of two sides of the display screen body (9), the connecting blocks (10) are movably connected with the damping rod (7), and a control button (11) is fixedly mounted, the control button (11) is electrically connected with the transmission motor (5).

2. The rotary sample stage for the magnetron sputtering apparatus according to claim 1, wherein: four corners of the bottom of the cabinet body (1) are fixedly provided with trundles (12), and the surfaces of the trundles (12) are provided with rubber layers.

3. The rotary sample stage for the magnetron sputtering apparatus according to claim 1, wherein: one side on the top end of the cabinet body (1) is provided with a hinge, and the cabinet body (1) is movably connected with a cabinet cover (13) through the hinge.

4. The rotary sample stage for a magnetron sputtering apparatus of claim 3, wherein: the both sides of roof are all fixed mounting have illumination lamp plate (14) in cabinet cover (13).

5. The rotary sample stage for the magnetron sputtering apparatus according to claim 1, wherein: the surface of the display wheel (2) is provided with a rotating rod (15), and the display wheel (2) is rotatably connected with an object placing bracket (16) through the rotating rod (15).

6. The rotary sample stage for the magnetron sputtering apparatus according to claim 1, wherein: the upper portion at the cabinet body (1) back swing joint has access door (17), the below swing joint of access door (17) has places hatch door (18).

Images