CN209338643U - Physical vapour deposition (PVD) PVD equipment - Google Patents
Physical vapour deposition (PVD) PVD equipment Download PDFInfo
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- CN209338643U CN209338643U CN201821730530.1U CN201821730530U CN209338643U CN 209338643 U CN209338643 U CN 209338643U CN 201821730530 U CN201821730530 U CN 201821730530U CN 209338643 U CN209338643 U CN 209338643U
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- pvd
- container
- door body
- vapour deposition
- physical vapour
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- 238000005240 physical vapour deposition Methods 0.000 title claims abstract description 129
- 239000000463 material Substances 0.000 claims abstract description 23
- 238000000429 assembly Methods 0.000 claims abstract description 8
- 230000000712 assembly Effects 0.000 claims abstract description 8
- 239000000758 substrate Substances 0.000 claims description 35
- 230000007246 mechanism Effects 0.000 claims description 7
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 7
- 238000010586 diagram Methods 0.000 description 8
- 239000013077 target material Substances 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
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- Physical Vapour Deposition (AREA)
Abstract
The utility model relates to photovoltaic apparatus fields, disclose a kind of physical vapour deposition (PVD) PVD equipment.In the utility model, physical vapour deposition (PVD) PVD equipment, comprising: for accommodating the container of coiled material and target, the first opening for target disengaging container is opened up on container；First door body, is detachably connected with container, closes or open the first opening；Several mounting assemblies are located on first side that is open of first door body towards container, for installing target；Wherein, the target in each mounting assembly is mounted on for into container, and being surrounded on coiled material after the first opening of the first door body closing.Compared with prior art, so that target can be replaced in device external, target replacement is more convenient, increase in equipment can operating space, it is easy to operate when spare part inside more exchange device.
Description
Technical field
The utility model relates to photovoltaic apparatus fields, in particular to physical vapour deposition (PVD) PVD equipment.
Background technique
Present physical vapour deposition (PVD) PVD equipment is for the equipment to coated film on solar base plate, in existing equipment
In, equipment single side is begun to speak, and solar base plate, that is, coiled material is arranged on door, and film, that is, target setting in the cavity, passes through door sealing
Cavity, then vacuumize, it allows in the film splash to coiled material of target, realizes the plated film of solar base plate.But in existing equipment, target
Film on material is finished, and when needing replacing target, operator needs to enter replacement in cavity, since space is limited in cavity,
Operator, which enters cavity and carries more exchange device, enters cavity, is more troublesome, the operable limited space of operator, operates
It is inconvenient.And in order to allow target be fixed to cavity in, need that various mechanisms are installed in the cavity, leading to inside cavity, structure is complicated,
Internal spare part is replaced later, and same operating space is smaller, operating difficulties.
Utility model content
The purpose of this utility model is to provide a kind of physical vapour deposition (PVD) PVD equipments, so that can replace in device external
Target, target replacement is more convenient, increase in equipment can operating space, it is easy to operate when spare part inside more exchange device.
In order to solve the above technical problems, the embodiments of the present invention provides a kind of physical vapour deposition (PVD) PVD equipment,
Include: the container for accommodating coiled material and target, is opened up on the container and pass in and out the first of the container for the target and open
Mouthful；
First door body is detachably connected with the container, closes or open first opening；
Several mounting assemblies are located on described first side that is open of first door body towards the container, use
In installation target；
Wherein, the target being mounted in each mounting assembly is used to open in first door body closing described first
After mouthful, into the container, and it is surrounded on the coiled material.
The utility model embodiment in terms of existing technologies, due to container be equipped with first opening, the first door body
With several mounting assemblies, target is installed on the first door by several mounting assemblies, to open the in the first door body
When one opening, target by first can be open out with the first door body and remove container, and then need replacing target and can directly hold
Replacement, enters in container without operator's Portable device outside device, and in outside, replacement target has operator enough
Work piece operations are operated, and spare part needed for each operation is also placed in outside, and operator is facilitated to replace target.Meanwhile being used for target
One end be arranged in mounting assembly, mounting assembly and target can all follow the first noumenon to leave container, so that inside container
It is clear that the structure can be simplified, to, by mounting assembly and target far from container, hold when needing to replace container inside other component
Inside device can operating space will will increase, other internal spare parts also become apparent.At this point, to other parts replacements in container
When, even if operator enters inside container, operator can operating space also will increase so that operator operation more
It is convenient simple.
In addition, each mounting assembly includes:
Pedestal is arranged in first door body, for installing the target；
Driving device is arranged in first door body and is detachably connected with the target, the target is driven to carry out
Rotation.So that target realizes rotation, meet process requirements.
In addition, the pedestal includes:
First substrate is installed in first door body；
The second substrate is oppositely arranged with the first substrate；
Bottom plate connects the first substrate and the second substrate；
Protruding shaft is rotatably arranged in the second substrate towards the side of the first substrate；
The driving device includes:
Shaft is rotatably arranged on the first substrate；
Motor, setting on the first substrate, and are fixedly connected with the shaft, and the shaft is driven to be rotated；
Wherein, the protruding shaft and shaft coaxial arrangement, and the fixed both ends for supporting the target respectively.
In addition, the physical vapour deposition (PVD) PVD equipment further include:
First vehicle is fixedly connected with first door body, drives first door body relative to described in the container
First opening moves along a straight line.So as to drive first opening linear motion of first door body relative to container.
In addition, the physical vapour deposition (PVD) PVD equipment further include:
First track, first opening relative to the container are configured, and first vehicle is slideably set
It sets on first track.It is slided convenient for first vehicle.
In addition, the physical vapour deposition (PVD) PVD equipment further include:
Driving mechanism is fixedly connected with first vehicle, and first vehicle is driven to be slided along first track
It is dynamic.First vehicle sliding is driven by driving mechanism, is more saved artificial.
In addition, the physical vapour deposition (PVD) PVD equipment further include:
Weight vehicle is fixedly connected with first door body, is slidably disposed on first track, is matched for placing
Heavy mail.So that side of first door body towards the first opening and the side uniform force away from the first opening, prevent first
Door body is toppled over, skew.
In addition, the second opening that the container is passed in and out for the coiled material is offered on the container, second opening
It is oppositely arranged with first opening；
The physical vapour deposition (PVD) PVD equipment further include:
Second door body is detachably connected with the container, closes or open second opening；
Mounting rack is set to described second side that is open of second door body towards the container, for installing
State coiled material.
In addition, the physical vapour deposition (PVD) PVD equipment further include:
Second vehicle is fixedly connected with second door body, drives second door body relative to described in the container
Second opening moves along a straight line.To which coiled material can also be replaced in external container, replace more convenient.
In addition, the physical vapour deposition (PVD) PVD equipment further include:
Second track, second opening relative to the container are configured, and second vehicle is slideably set
It sets on second track.Convenient for the second door body relative to the second harness motion, manpower is saved.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of physical vapour deposition (PVD) PVD equipment in the utility model first embodiment；
Fig. 2 is the structural schematic diagram of the first opening of the first door body direction side in the utility model first embodiment；
Fig. 3 is the structural schematic diagram of the second opening of the second door body direction side in the utility model first embodiment；
Fig. 4 is that target is mounted on the structural schematic diagram in mounting assembly in the utility model first embodiment；
Fig. 5 is that coiled material is mounted on the structural schematic diagram in the second door body in the utility model first embodiment；
Fig. 6 is the structural schematic diagram of first vehicle in the utility model first embodiment；
Fig. 7 is the structural schematic diagram of second vehicle in the utility model first embodiment；
Fig. 8 is the structural schematic diagram of physical vapour deposition (PVD) PVD equipment in the utility model second embodiment.
Specific embodiment
It is practical new to this below in conjunction with attached drawing to keep the purpose of this utility model, technical solution and advantage clearer
Each embodiment of type is explained in detail.However, it will be understood by those skilled in the art that each in the utility model
In embodiment, in order to make the reader understand this application better, many technical details are proposed.But even if without these skills
The required guarantor of each claim of the application also may be implemented in art details and various changes and modifications based on the following respective embodiments
The technical solution of shield.
The first embodiment of the utility model is related to a kind of physical vapour deposition (PVD) PVD equipment, as depicted in figs. 1 and 2, packet
Container 3, the first door body 4 and several mounting assemblies 5 for accommodating coiled material 1 and target 2 are included, are opened up on container 3 for target 2
Pass in and out the first opening 6 of container 3.First door body 4 is detachably connected with container 3, closes or open the first opening 6.Several peaces
Arrangement 5, be located on the first door body 4 towards container 3 first opening 6 side, for installing target 2.It is mounted on each installation
Target 2 on component 5 is used for after the first opening 6 of the first door body 4 closing, into container 3, and is surrounded on coiled material 1.In this reality
It applies in mode, mounting assembly 5 is equipped with eight, and target 2 also has eight, installs a target 2 in each mounting assembly 5, needs more
When changing target 2, the first door body 4 is pulled, allows the first noumenon far from the first opening 6, so that target 2 and mounting assembly 5 are together with the
One door body 4 leaves container 3.
The utility model embodiment in terms of existing technologies, is open 6, first since container 3 is equipped with first
Body 4 and several mounting assemblies 5, target 2 is mounted in the first door body 4 by several mounting assemblies 5, thus in the first door body
When 4 the first opening 6 of opening, target 2 can pass through the first opening 6 with the first door body 4 and go out removal container 3, and then need replacing target
Material 2 can be replaced directly outside container 3, enter in container 3 without operator's Portable device, and in outside, replacement target 2 makes
Operator has enough operation work piece operations, and spare part needed for each operation is also placed in outside, and operator is facilitated to replace target
Material 2.Meanwhile for the setting of one end of target 2 in mounting assembly 5, mounting assembly 5 and target 2 can all follow the first noumenon from
Container 3 is opened, so that the structure can be simplified inside container 3 is clear, thus when needing to replace 3 inside other component of container, it will
Mounting assembly 5 and target 2 far from container 3, inside container 3 can operating space will will increase, other internal spare parts are also more bright
It is aobvious.At this point, even if operator enters inside container 3, operator's operates when to other parts replacements in container 3
Space also will increase, so that operator's operation is more convenient simple.
Further, as shown in Figure 2 and Figure 4, each mounting assembly 5 includes pedestal and driving device, and pedestal is arranged first
In door body 4, target 2 is installed on the base.Driving device is arranged in the first door body 4 and is detachably connected with target 2, drives target
Material 2 is rotated.
Specifically, as shown in Figure 2 and Figure 4, pedestal includes first substrate 51, the second substrate 52, protruding shaft 53 and bottom plate 54,
First substrate 51 is installed in the first door body 4, and the second substrate 52 is oppositely arranged with first substrate 51, and bottom plate 54 connects first substrate
51 and the second substrate 52, protruding shaft 53 be rotatably arranged in the second substrate 52 towards the side of first substrate 51.Driving device packet
Shaft 55 and motor 56 are included, shaft 55 is rotatably arranged on first substrate 51, and motor 56 is arranged on first substrate 51, and
It is fixedly connected with shaft 55, drive shaft 55 is rotated, and protruding shaft 53 and shaft 55 are coaxially disposed, and fixed support target respectively
2 both ends.Target 2 is arranged between first substrate 51 and the second substrate 52, and one end of target 2 can pass through screw and 53 phase of protruding shaft
Fixed, the other end is fixed also by screw and 55 phase of shaft, and motor 56 drives shaft 55 to rotate, the drive target 2 of shaft 55 and convex
Axis 53 rotates, to realize that target 2 rotates between first substrate 51 and the second substrate 52, when needing to remove target 2, by screw
Unscrew, target 2 is taken out between first substrate 51 and the second substrate 52.
It will be further appreciated that as shown in figures 1 to 6, physical vapour deposition (PVD) PVD equipment further includes first vehicle 7, with
One door body 4 is fixedly connected, and the first door body 4 is driven to move along a straight line relative to the first opening 6 of container 3.First vehicle 7 include
First vehicle frame 71 and the first idler wheel 72, the first rack are fixed with 4 phase of the first door body, and the bottom end of the first rack is provided with multiple first
Idler wheel 72 pushes first vehicle 7, and the first idler wheel 72 rolls, so that the first door body 4 is easily towards or away from the side of the first opening 6
To movement, so that first opening 6 linear motion of first door body 4 relative to container 3 can be realized.
In addition, as shown in figures 1 to 6, physical vapour deposition (PVD) PVD equipment further includes the first track 8, relative to container 3
First opening 6 is configured, and first vehicle 7 is slidably disposed on the first track 8.In the present embodiment, at 3 bottom of container
Portion is equipped with bearing soleplate 9, and bearing soleplate 9 extends to the first 6 directions of opening, more than the position where the first opening 6, bearing soleplate
9 are equipped with the first track 8, and the length of the first track 8 is greater than the entire length of the first door body 4 and target 2, so that the first door body
It when 4 drive targets 2 all leave container 3, can be slided along the first track 8 always, until target 2 completely in the external world of container 3, makes
First vehicle 7 drive the movement of the first door body 4 more it is convenient just.
In addition, as shown in figures 1 to 6, physical vapour deposition (PVD) PVD equipment further includes driving mechanism, it is fixed with first vehicle 7
Connection, drives first vehicle 7 to be slided along the first track 8.In the present embodiment, driving mechanism is including being first motor 10
The first connecting shaft 11 being connected with first motor 10, the first connecting shaft 11 connect the first idler wheel 72, and the driving of first motor 10 first connects
Axis 11 rotates, and the first connecting shaft 11 drives the first idler wheel 72, so that the first idler wheel 72 rotates, along the first rail after the rotation of the first idler wheel 72
Road 8 rolls, and first vehicle 7 is driven to move together.It drives first vehicle 7 to slide by driving mechanism, more saves artificial.
Meanwhile as shown in Fig. 1, Fig. 3 and Fig. 5, the second opening 12 that container 3 is passed in and out for coiled material 1 is offered on container 3,
Second opening 12 is oppositely arranged with the first opening 6.Physical vapour deposition (PVD) PVD equipment further includes the second door body 13 and mounting rack 14,
Second door body 13 is detachably connected with container 3, closes or open the second opening 12.Mounting rack 14 is set to 13 direction of the second door body
The side of second opening 12 of container 3, for installing coiled material 1.To which coiled material 1 can also be replaced outside container 3, replacement is more just
Benefit.
In addition, as shown in Figure 1 and Figure 7, physical vapour deposition (PVD) PVD equipment further includes second vehicle 15, with the second door body 13
It is fixedly connected, the second door body 13 is driven to move along a straight line relative to the second opening 12 of container 3.The structure of second vehicle 15 with
The structure of first vehicle 7 is identical, including the second vehicle frame 151 and the second idler wheel 152, and the second vehicle frame 151 is solid with 13 phase of the second door body
Fixed, the bottom end of the second vehicle frame 151 is provided with multiple second idler wheels 152, pushes first vehicle 7, and the second idler wheel 152 rolls, so that
Second door body 13 is easily moved towards or away from the direction of the second opening 12, so that the second door body 13 can be realized relative to container 3
Second opening 12 linear motion.
In addition, as shown in Figure 1 and Figure 7, physical vapour deposition (PVD) PVD equipment further includes the second track 16, relative to container 3
Second opening 12 is configured, and second vehicle 15 is slidably disposed on the second track 16.Convenient for the second door body 13 relative to
Second opening, 12 movement, saves manpower.Namely in the present embodiment, bearing soleplate 9 is partially toward 12 direction of the second opening
Extend, far from container 3, the second track 16 is arranged on bearing soleplate 9, prolongs from the second opening 12 to the direction far from container 3
It stretches, when the second door body 13 drives coiled material 1 to arrive 3 outside of container by the second opening 12, second vehicle 15 is slided along track always, directly
It is entirely located in outside container 3 to coiled material 1, the convenient replacement to coiled material 1, so that second vehicle 15 drives the movement of the first door body 4 more
For it is convenient just.In actual use, it is equipped with the second motor 17 and the second connecting shaft 18, the second connecting shaft 18 connects the second idler wheel 152, the
Two motors 17 connect the second connecting shaft 18, and driving the second connecting shaft 18 rotation, the second connecting shaft 18 drives the rotation of the second idler wheel 152, along the
The sliding of two tracks 16, drives the second door body 13 to move together, more saves artificial.
The second embodiment of the utility model is related to a kind of physical vapour deposition (PVD) PVD equipment.Second embodiment and the
One embodiment is roughly the same, is in place of the main distinction: in the first embodiment, no weight vehicle.And in the utility model
Second embodiment in, it is fixed with the first door body 4 as shown in figure 8, physical vapour deposition (PVD) PVD equipment further includes weight vehicle 19
Connection, is slidably disposed on the first track 8, for placing counterweight 20.So that the first door body 4 is open towards first
6 side and away from first opening 6 side uniform force, prevent the first door body 4 from toppling over, skew.Same second door body 13
Side away from the second opening 12 also is provided with weight vehicle 21, and weight vehicle slides along the second track 16, places and match on weight vehicle 21
Heavy mail 22, so that 13 two sides uniform force of the second door body, will not topple over skew.
It will be understood by those skilled in the art that the respective embodiments described above are to realize the specific implementation of the utility model
Example, and in practical applications, can to it, various changes can be made in the form and details, without departing from the spirit of the utility model
And range.
Claims (10)
1. a kind of physical vapour deposition (PVD) PVD equipment, comprising: for accommodating the container of coiled material and target, it is characterised in that: the appearance
The first opening that the container is passed in and out for the target is opened up on device；
First door body is detachably connected with the container, closes or open first opening；
Several mounting assemblies are located on described first side that is open of first door body towards the container, for pacifying
Fill target；
Wherein, the target being mounted in each mounting assembly is used in first door body closing, first opening
Afterwards, into the container, and it is surrounded on the coiled material.
2. physical vapour deposition (PVD) PVD equipment according to claim 1, which is characterized in that each mounting assembly includes:
Pedestal is arranged in first door body, for installing the target；
Driving device is arranged in first door body and is detachably connected with the target, the target is driven to be rotated.
3. physical vapour deposition (PVD) PVD equipment according to claim 2, which is characterized in that the pedestal includes:
First substrate is installed in first door body；
The second substrate is oppositely arranged with the first substrate；
Bottom plate connects the first substrate and the second substrate；
Protruding shaft is rotatably arranged in the second substrate towards the side of the first substrate；
The driving device includes:
Shaft is rotatably arranged on the first substrate；
Motor, setting on the first substrate, and are fixedly connected with the shaft, and the shaft is driven to be rotated；
Wherein, the protruding shaft and shaft coaxial arrangement, and the fixed both ends for supporting the target respectively.
4. physical vapour deposition (PVD) PVD equipment according to claim 3, which is characterized in that the physical vapour deposition (PVD) PVD is set
It is standby further include:
First vehicle is fixedly connected with first door body, drive first door body relative to the container described first
Opening moves along a straight line.
5. physical vapour deposition (PVD) PVD equipment according to claim 4, it is characterised in that: the physical vapour deposition (PVD) PVD is set
It is standby further include:
First track, first opening relative to the container are configured, and first vehicle is slidably disposed on
On first track.
6. physical vapour deposition (PVD) PVD equipment according to claim 5, it is characterised in that: the physical vapour deposition (PVD) PVD is set
It is standby further include:
Driving mechanism is fixedly connected with first vehicle, and first vehicle is driven to be slided along first track.
7. physical vapour deposition (PVD) PVD equipment according to claim 6, it is characterised in that: the physical vapour deposition (PVD) PVD is set
It is standby further include:
Weight vehicle is fixedly connected with first door body, is slidably disposed on first track, for placing counterweight
Part.
8. physical vapour deposition (PVD) PVD equipment according to claim 1, it is characterised in that: offer and be used on the container
The coiled material passes in and out the second opening of the container, and second opening is oppositely arranged with first opening；
The physical vapour deposition (PVD) PVD equipment further include:
Second door body is detachably connected with the container, closes or open second opening；
Mounting rack is set to described second side that is open of second door body towards the container, for installing the volume
Material.
9. physical vapour deposition (PVD) PVD equipment according to claim 8, which is characterized in that the physical vapour deposition (PVD) PVD is set
It is standby further include:
Second vehicle is fixedly connected with second door body, drive second door body relative to the container described second
Opening moves along a straight line.
10. physical vapour deposition (PVD) PVD equipment according to claim 9, it is characterised in that: the physical vapour deposition (PVD) PVD
Equipment further include:
Second track, second opening relative to the container are configured, and second vehicle is slidably disposed on
On second track.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821730530.1U CN209338643U (en) | 2018-10-24 | 2018-10-24 | Physical vapour deposition (PVD) PVD equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821730530.1U CN209338643U (en) | 2018-10-24 | 2018-10-24 | Physical vapour deposition (PVD) PVD equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209338643U true CN209338643U (en) | 2019-09-03 |
Family
ID=67746559
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821730530.1U Expired - Fee Related CN209338643U (en) | 2018-10-24 | 2018-10-24 | Physical vapour deposition (PVD) PVD equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209338643U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113846293A (en) * | 2021-09-15 | 2021-12-28 | 无锡尚积半导体科技有限公司 | Physical vapor deposition source moving device and physical vapor deposition device |
-
2018
- 2018-10-24 CN CN201821730530.1U patent/CN209338643U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113846293A (en) * | 2021-09-15 | 2021-12-28 | 无锡尚积半导体科技有限公司 | Physical vapor deposition source moving device and physical vapor deposition device |
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Legal Events
| Date | Code | Title | Description |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 100076 6015, 6th floor, building 8, 9 Yingshun Road, Yinghai Town, Daxing District, Beijing Patentee after: Beijing Dingrong Photovoltaic Technology Co.,Ltd. Address before: 100176 room 3001, 6 building, 7 East Street, Rongchang economic and Technological Development Zone, Beijing, Beijing Patentee before: BEIJING APOLLO DING RONG SOLAR TECHNOLOGY Co.,Ltd. |
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| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210513 Address after: 518002 Room 201, building a, No.1 Qianwan 1st Road, Qianhai Shenzhen Hong Kong cooperation zone, Shenzhen City, Guangdong Province Patentee after: Hongyi Technology Co.,Ltd. Address before: 100076 6015, 6th floor, building 8, 9 Yingshun Road, Yinghai Town, Daxing District, Beijing Patentee before: Beijing Dingrong Photovoltaic Technology Co.,Ltd. |
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| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190903 |