CN213302710U - Coplanar waveguide line electrode structure and modulator - Google Patents
Coplanar waveguide line electrode structure and modulator Download PDFInfo
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- CN213302710U CN213302710U CN202020803683.5U CN202020803683U CN213302710U CN 213302710 U CN213302710 U CN 213302710U CN 202020803683 U CN202020803683 U CN 202020803683U CN 213302710 U CN213302710 U CN 213302710U
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Abstract
The application discloses coplane waveguide line electrode structure and modulator, including metal electrode and optical waveguide, metal electrode includes ground electrode and signal electrode, signal electrode's both sides are equipped with the linking arm, the inboard of ground electrode is equipped with the linking arm, signal electrode's linking arm end is equipped with the signal line and extends the electrode, ground electrode's linking arm end is equipped with the earth connection and extends the electrode, the signal line extend the electrode with it is equipped with interval D to extend between the electrode to the earth connection1Said optical waveguide passing through said spacing D1. By mixing metalsThe electrodes are extended, so that the distance between the electrodes is actually shortened, the electrode interval is reduced under the condition of less influence on the characteristic impedance, and the electric field intensity between the electrodes is increased. The design can greatly enhance the electro-optic conversion efficiency and reduce the driving voltage of the modulator.
Description
Technical Field
The present disclosure relates to electronic communications, and more particularly, to a coplanar waveguide line electrode structure and a modulator.
Background
In recent years, the rapid development of emerging network application services such as internet of things, unmanned driving, telemedicine, remote education and the like puts higher demands on high-speed and high-capacity communication technology. The optical communication has been developed rapidly in the direction of high-speed and high-capacity communication because of the characteristics of large bandwidth, high reliability, low cost, strong anti-interference capability and the like. How to load high-speed electrical signals onto an optical carrier is a core research content. An electro-optical modulator is one of core devices in an optical interconnection, optical computing, and optical communication system, and as a device for converting an electrical signal into an optical signal, the performance of the electro-optical modulator plays an important role in the transmission distance and the transmission speed of the optical signal. With the increasing urgent need of high-speed and large-capacity communication technology, higher requirements are also put on the modulation rate of the electro-optical modulator.
The electro-optic modulator uses certain electro-optic crystals, such as lithium niobate crystal (Li NbO)3) Gallium arsenide (GaAs) and lithium tantalate (Li TaO) crystals3) The electro-optic effect of (2). The electro-optic effect, i.e., when a voltage is applied to the electro-optic crystal, the refractive index of the electro-optic crystal changes, resulting in a change in the characteristics of the light wave passing through the crystal, which effects modulation of the phase, amplitude, intensity, and polarization state of the optical signal.
An input light wave of the MZ interferometer modulator is divided into two equal beams at a light splitting element after passing through a section of light path, and the two equal beams are respectively transmitted through two optical waveguides, wherein the optical waveguides are made of electro-optic materials, the refractive index of the optical waveguides changes along with the magnitude of an external voltage, and therefore two optical signals reach the light combining element to generate phase difference. If the optical path difference of the two beams is integral multiple of the wavelength, the two beams are enhanced in coherence; if the optical path difference between the two beams is 1/2, the two beams will cancel out coherently, and the output of the modulator is small, so the optical signal can be modulated by controlling the voltage.
However, when designing a coplanar waveguide line electrode structure of a high-speed electro-optical modulator, in order to prevent microwave reflection of an electrical signal, it is necessary to keep the impedance of an electrode material consistent with the impedance of an input end, and at the same time, it is necessary to ensure that the transmission speed of the electrical signal is the same as or close to the group speed of the optical signal transmitted in the waveguide, and it is also necessary to reduce the transmission loss of the electrical signal as much as possible, which puts high demands on the electrode design.
SUMMERY OF THE UTILITY MODEL
The present application provides a coplanar waveguide line electrode structure and a modulator, which can reduce the transmission loss of an electrical signal as much as possible while ensuring that the transmission speed of the electrical signal is the same as or close to the group speed of an optical signal transmitted through a waveguide.
In order to realize the above object, on the one hand, the present application provides a coplanar waveguide line electrode structure, including metal electrode and optical waveguide, the metal electrode includes ground electrode and signal electrode, the both sides of signal electrode are equipped with the linking arm, the inboard of ground electrode is equipped with the linking arm, the linking arm end of signal electrode is equipped with signal line extension electrode, the linking arm end of ground electrode is equipped with the earth connection and extends the electrode, signal line extension electrode with it extends to be equipped with interval D between the electrode to be equipped with the earth connection1Said optical waveguide passing through said spacing D1。
Preferably, the optical waveguide device comprises a metal electrode and an optical waveguide, wherein the metal electrode comprises a ground electrode and a signal electrode, a plurality of connecting arms are arranged on two sides of the signal electrode, a signal line extension electrode is arranged at the tail end of each connecting arm, and a distance D is arranged between the signal line extension electrode and the ground electrode2Said optical waveguide passing through said spacing D2。
Preferably, a metal electrode and an optical waveguide are included, the metal electrode includes a ground electrode and a signal electrode,the inner side of the ground electrode is provided with a plurality of connecting arms, the tail ends of the connecting arms are provided with ground wire extension electrodes, and a distance D is arranged between each ground wire extension electrode and the signal electrode3Said optical waveguide passing through said spacing D3。
Preferably, the connecting arm is vertically spaced from the left edge of the signal line extension electrode or the ground line extension electrode by a distance t1The vertical distance between the connecting arm and the right edge of the signal wire extension electrode or the ground wire extension electrode is t2The vertical distance between two adjacent connecting arms is T, and the following conditions are met: t is t1≥0，t2≥0，T＞0，0＜t1+t2T is less than or equal to T, T1、t2The numerical range of (A) is 1 to 100. mu.m.
Preferably, the connecting arm has a width δ1The width of the extension electrode is delta2The following conditions are satisfied: delta1＜t1+t2，0＜δ1＜30μm，0＜δ2＜30μm。
Preferably, the distance between the ground electrode and the signal electrode is D, and the range of D is: d is more than or equal to 3 mu m and less than or equal to 200 mu m, the width of the ground electrode is 5-2000 mu m, and the width of the signal electrode is 5-1000 mu m.
Preferably, said distance D 11 μm < D1< D, spacing D 21 μm < D2< D, the spacing D3 is 1 μm < D3＜D。
Preferably, the optical waveguide is composed of an input waveguide, a waveguide splitting element, a double-arm waveguide, a waveguide light combining element and an output waveguide, and the metal electrode is composed of a signal electrode and two ground electrodes and is arranged on the left side, the middle and the right side of the double-arm waveguide.
On the other hand, the application provides a modulator of a coplanar waveguide line electrode structure, which comprises a substrate and a lithium niobate layer formed on the surface of the substrate, wherein the coplanar waveguide line electrode structure is arranged on the lithium niobate layer.
Preferably, the lithium niobate layer is a thin-film lithium niobate layer subjected to etching processing and subjected to X-cutting, Y-cutting or Z-cutting, and the substrate below the lithium niobate layer is made of silicon or silicon dioxide or a multilayer material of silicon and silicon dioxide or a multilayer material of silicon dioxide, metal and silicon.
The beneficial effect of this application is: by adopting the coplanar waveguide line electrode structure, the transmission loss of the electric signals is reduced as much as possible under the conditions of ensuring that the impedance of the electrode material is consistent with that of the input end and ensuring that the transmission speed of the electric signals is the same as or close to the group speed of the optical signals transmitted in the waveguide. On the basis of the original MZ interferometer modulator, the metal electrodes are extended, and the distance between the electrodes is actually shortened, so that the electrode spacing is reduced and the electric field intensity between the electrodes is increased under the condition of less influence on characteristic impedance.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this application, serve to provide a further understanding of the application and to enable other features, objects, and advantages of the application to be more apparent. The drawings and their description illustrate the embodiments of the invention and do not limit it. In the drawings:
fig. 1 is a schematic diagram of a coplanar waveguide line electrode structure.
Fig. 2 is a cut-away perspective view of an MZ electro-optic modulator provided in an embodiment of the present application.
Fig. 3 is a schematic diagram of a coplanar waveguide line electrode structure.
Fig. 4 is a schematic diagram of a coplanar waveguide line electrode structure.
Fig. 5 is a schematic diagram of a coplanar waveguide line electrode structure.
Fig. 6 is a schematic diagram of a coplanar waveguide line electrode structure.
The device comprises a 1-ground electrode, a 2-signal electrode, a 3-optical waveguide, a 4-lithium niobate layer, a 5-substrate, a 6-grounding wire extension electrode, a 7-connecting arm and an 8-signal wire extension electrode.
Detailed Description
In order to make the technical solutions better understood by those skilled in the art, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only partial embodiments of the present application, but not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
It should be noted that the terms "first," "second," and the like in the description and claims of this application and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It should be understood that the data so used may be interchanged under appropriate circumstances such that embodiments of the application described herein may be used. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
In this application, the terms "upper", "lower", "left", "right", "front", "rear", "top", "bottom", "inner", "outer", "middle", "vertical", "horizontal", "lateral", "longitudinal", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings. These terms are used primarily to better describe the present application and its embodiments, and are not used to limit the indicated devices, elements or components to a particular orientation or to be constructed and operated in a particular orientation.
Moreover, some of the above terms may be used to indicate other meanings besides the orientation or positional relationship, for example, the term "on" may also be used to indicate some kind of attachment or connection relationship in some cases. The specific meaning of these terms in this application will be understood by those of ordinary skill in the art as appropriate.
In addition, the term "plurality" shall mean two as well as more than two.
It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict. The present application will be described in detail below with reference to the embodiments with reference to the attached drawings.
Example 1:
as shown in fig. 1, the utility model provides a coplanar waveguide line electrode structure, including metal electrode and optical waveguide 3, metal electrode includes ground electrode 1 and signal electrode 2, the both sides of signal electrode 2 are equipped with several linking arm 7, the end of linking arm 7 is equipped with signal line extension electrode 8, the position that one side that ground electrode is close to signal electrode 2 corresponds also is equipped with the linking arm, the end of linking arm 7 is equipped with earth connection extension electrode 6, signal line extension electrode 8 with be equipped with interval D between earth connection extension electrode 61Said optical waveguide passing through said spacing D1。
In this embodiment, the connecting arm 7 is vertically spaced from the left edge of the signal line extension electrode 8 or the ground line extension electrode 6 by a distance t1The vertical distance between the connecting arm 7 and the edge of the right side 6 of the signal wire extension electrode 8 or the grounding wire extension electrode is t2The vertical distance between two adjacent connecting arms 7 is T, and the following conditions are met: t is t1≥0，t2≥0，T＞0，0＜t1+t2≤T。
In the present embodiment, t is1、t2The numerical range of (A) is 1 to 100. mu.m.
In the present embodiment, the connecting arm 7 has a width δ1The width of the right side 6 of the signal line extension electrode 8 or the grounding line extension electrode is delta2The following conditions are satisfied: delta1＜t1+t2，0＜δ1＜10μm，0＜δ2＜10μm。
In this embodiment, the distance between the ground electrode 1 and the signal electrode 2 is D, and the range of D is: d is more than or equal to 3 mu m and less than or equal to 200 mu m.
In this embodiment, the distance D 11 μm < D1< D, spacing D 21 μm < D2< D, spacing D 31 μm < D3＜D
In this embodiment, the width of the ground electrode 1 is 5-2000 μm, and the width W of the signal electrode 2 is 5-1000 μm.
In the present embodiment, the connecting arm 7 and the right side 6 of the signal line extension electrode 8 or the ground line extension electrode form a T shape or an L shape.
In this embodiment, the optical waveguide 3 is composed of an input waveguide, a waveguide splitting element, a dual-arm waveguide, a waveguide combining element and an output waveguide, and the metal electrode is composed of a signal electrode and two ground electrodes and is disposed on the left side, the middle and the right side of the dual-arm waveguide.
As shown in fig. 2, the present application provides a modulator with a coplanar waveguide line electrode structure, which includes a substrate 5 and a lithium niobate layer 4 formed on the surface of the substrate, wherein the coplanar waveguide line electrode structure is disposed on the lithium niobate layer 4.
In this embodiment, the lithium niobate layer 4 is a thin film lithium niobate that is X-cut, Y-cut, or Z-cut by etching. The substrate below the lithium niobate layer is made of silicon or silicon dioxide or a multilayer material of silicon and silicon dioxide or a multilayer material of silicon dioxide, metal and silicon.
Example 2:
as shown in fig. 5, the difference from embodiment 1 is that the optical waveguide 3 includes a metal electrode including a ground electrode 1 and a signal electrode 2, a plurality of connecting arms 7 are provided on both sides of the signal electrode 2, the connecting arms 7 are not provided on both sides of the ground electrode 1, a signal line extension electrode 8 is provided at an end of each connecting arm 7, and the optical waveguide passes through a distance D between the ground electrode 1 and the signal line extension electrode 82。
Example 3:
as shown in fig. 6, the difference from embodiment 1 is that the metal electrode includes a ground electrode 1 and a signal electrode 2, a connecting arm 7 is provided on the inner side of the ground electrode 1, a ground line extension electrode 6 is provided at the end of the connecting arm 7, the connecting arm 7 is not provided on both sides of the signal electrode 2, the optical waveguide passes through the ground electrode 1 and the ground line extension electrode 6, and the optical waveguide passes through a distance D between the ground electrode 1 and the signal line extension electrode 83。
The coplanar waveguide line electrode structure ensures that the impedance of an electrode material is consistent with that of an input end, and the transmission loss of an electric signal is reduced as much as possible under the condition that the transmission speed of the electric signal is the same as or close to the group speed of an optical signal transmitted in a waveguide.
Generally, the impedance characteristic of the coplanar waveguide line is approximately proportional to the ratio of the spacing between the ground electrode and the signal electrode to the width of the signal electrode, while for the lithium niobate modulator, in order to ensure the maximization of the effective electric field without affecting the transmission of light, the spacing between the ground line and the signal line, i.e., for the effective electrode spacing of the optical waveguide, the spacing between the ground electrode and the signal electrode is usually only a few micrometers, and in order to satisfy the impedance characteristic, the width W of the signal electrode is usually only about ten micrometers. Meanwhile, the loss of the coplanar waveguide line is generally determined by the width W of the signal electrode, the thickness of the coplanar waveguide line, and the metal conductivity. While metal conductivity is certain for the same material, the width W of the signal electrode is also typically limited for lithium niobate modulators under conventional configurations, and very thick electrodes must typically be used in order to reduce electrical losses.
The application makes the signal electrode as wide as possible and simultaneously satisfies impedance matching, the GSG is a coplanar waveguide line (CPW or CPWG), the G is a ground electrode, and the S is a signal electrode. On one side of the ground electrode, the same extension metal electrode as the ground electrode is grown, and on both sides of the S signal electrode, the same extension electrode as the S ground line is grown. Wherein the distance D between the extending metal electrodes is smaller than the distance D between the electrodes.
The vertical distance between the connecting arm and the left edge of the extended electrode is t1The vertical distance between the connecting arm and the right edge of the extension electrode is t2The vertical distance between two adjacent connecting arms is T, and the following conditions are met: t is t1≥0，t2≥0，T＞0，0＜t1+t2≤T。
That is, when viewed from the figure, there may be only the left-side extended electrode or the right-side extended electrode connected to each extended electrode connecting arm, there may be no other-side extended electrode, and there may be no space between the extended electrodes connected to each extended metal electrode connecting arm, and these electrodes are connected to each other.
When t is1When the value is 0, the coplanar waveguide line electrode structure is formed as shown in fig. 3, when t is1+t2When T, the coplanar waveguide line electrode structure is formed as shown in fig. 4.
For this configuration, the electrode connection arm width δ is suitably extended1And an extended electrode width δ2In the case of (2), the electrode spacing and the spacing D between the ground line and the signal line are no longer the same for the optical waveguide. In this case, the interval between the ground line and the signal line and the width of the signal line can be changed without affecting the interval of the optical waveguide electrode, thereby reducing the loss of the transmission line. The coplanar waveguide line of the present application satisfies the impedance equal to or similar to the input impedance (typically 50 Ω), and the propagation speed of the electrical signal in the coplanar waveguide line is equal to or similar to the speed of light in the optical waveguide.
By adopting the modulator, the metal electrode is extended, and the distance between the electrode and the metal electrode is actually shortened, so that the resistance loss of the transmission of electrical signals in the coplanar waveguide line is reduced.
The above description is only a preferred embodiment of the present application and is not intended to limit the present application, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.
Claims (18)
1. The utility model provides a coplanar waveguide line electrode structure, its characterized in that, includes metal electrode and optical waveguide, metal electrode includes ground electrode and signal electrode, signal electrode's both sides are equipped with the linking arm, the inboard of ground electrode is equipped with the linking arm, signal electrode's linking arm end is equipped with signal line and extends the electrode, ground electrode's linking arm end is equipped with the earth connection and extends the electrode, signal line extend the electrode with it extends to be equipped with interval D between the electrode to earth connection1Said optical waveguide passing through said spacing D1。
2. The coplanar waveguide electrode structure as set forth in claim 1, wherein the connecting arm is spaced apart from the left edge of the signal-line extension electrode or the ground-line extension electrode by a vertical distance t1The vertical distance between the connecting arm and the right edge of the signal wire extension electrode or the ground wire extension electrode is t2The vertical distance between two adjacent connecting arms is T, and the following conditions are met: t is t1≥0，t2≥0，T＞0，0＜t1+t2T is less than or equal to T, T1、t2The numerical range of (A) is 1 to 100. mu.m.
3. The coplanar waveguide line electrode structure of claim 1 wherein the linking arm has a width δ1The width of the signal line extension electrode and the ground line extension electrode is delta2The following conditions are satisfied: delta1＜t1+t2，0＜δ1＜30μm，0＜δ2＜30μm。
4. A coplanar waveguide electrode structure as set forth in claim 1 wherein the spacing between the ground electrode and the signal electrode is D, the range of D being: d is more than or equal to 3 mu m and less than or equal to 200 mu m, the width of the ground electrode is 5-2000 mu m, and the width of the signal electrode is 5-1000 mu m.
5. A coplanar waveguide line electrode structure as set forth in claim 4 wherein said spacing D11 μm < D1< D, spacing D21 μm < D2< D, spacing D31 μm < D3＜D。
6. A coplanar waveguide line electrode structure as set forth in claim 1 wherein said optical waveguide is comprised of an input waveguide, a waveguide splitting element, a double arm waveguide, a waveguide combining element and an output waveguide, and said metal electrodes are comprised of a signal electrode and two ground electrodes disposed on the left, middle and right sides of the double arm waveguide.
7. The coplanar waveguide line electrode structure is characterized by comprising a metal electrode and an optical waveguide, wherein the metal electrode comprises a ground electrode and a signal electrode, a plurality of connecting arms are arranged on two sides of the signal electrode, a signal line extension electrode is arranged at the tail end of each connecting arm, and a distance D is arranged between the signal line extension electrode and the ground electrode2Said optical waveguide passing through said spacing D2。
8. The coplanar waveguide line electrode structure of claim 7 wherein the linking arm has a width δ1The width of the signal line extension electrode and the ground line extension electrode is delta2The following conditions are satisfied: delta1＜t1+t2，0＜δ1＜30μm，0＜δ2＜30μm。
9. A coplanar waveguide electrode structure as set forth in claim 7 wherein the spacing between the ground electrode and the signal electrode is D, the range of D being: d is more than or equal to 3 mu m and less than or equal to 200 mu m, the width of the ground electrode is 5-2000 mu m, and the width of the signal electrode is 5-1000 mu m.
10. A coplanar waveguide line electrode structure as in claim 7 wherein said spacing D is11 μm < D1< D, spacing D21 μm < D2< D, spacing D31 μm < D3＜D。
11. A coplanar waveguide electrode structure as set forth in claim 7 wherein said optical waveguide is comprised of an input waveguide, a waveguide splitting element, a double arm waveguide, a waveguide combining element and an output waveguide, and said metal electrodes are comprised of a signal electrode and two ground electrodes disposed on the left, middle and right sides of the double arm waveguide.
12. A coplanar waveguide line electrode structure is characterized by comprising metalThe metal electrode comprises a ground electrode and a signal electrode, a plurality of connecting arms are arranged on the inner side of the ground electrode, ground wire extension electrodes are arranged at the tail ends of the connecting arms, and a distance D is arranged between each two adjacent signal electrodes3Said optical waveguide passing through said spacing D3。
13. The coplanar waveguide electrode structure as set forth in claim 12, wherein the connecting arm is spaced apart from the left edge of the signal-line extension electrode or the ground-line extension electrode by a vertical distance t1The vertical distance between the connecting arm and the right edge of the signal wire extension electrode or the ground wire extension electrode is t2The vertical distance between two adjacent connecting arms is T, and the following conditions are met: t is t1≥0，t2≥0，T＞0，0＜t1+t2T is less than or equal to T, T1、t2The numerical range of (A) is 1 to 100. mu.m.
14. The coplanar waveguide line electrode structure of claim 12 wherein the linking arm has a width δ1The width of the signal line extension electrode and the ground line extension electrode is delta2The following conditions are satisfied: delta1＜t1+t2，0＜δ1＜30μm，0＜δ2＜30μm。
15. A coplanar waveguide electrode structure as set forth in claim 12 wherein the spacing between the ground electrode and the signal electrode is D, the range of D being: d is more than or equal to 3 mu m and less than or equal to 200 mu m, the width of the ground electrode is 5-2000 mu m, and the width of the signal electrode is 5-1000 mu m.
16. A coplanar waveguide line electrode structure as set forth in claim 12 wherein said spacing D is11 μm < D1< D, spacing D21 μm < D2< D, spacing D31 μm < D3＜D。
17. A coplanar waveguide electrode structure as set forth in claim 12 wherein said optical waveguide is comprised of an input waveguide, a waveguide splitting element, a double arm waveguide, a waveguide combining element and an output waveguide, and said metal electrodes are comprised of a signal electrode and two ground electrodes disposed on the left, middle and right sides of the double arm waveguide.
18. A coplanar waveguide line modulator comprising a substrate and a lithium niobate layer formed on a surface thereof, said lithium niobate layer having disposed thereon a coplanar waveguide line electrode structure as defined in any one of claims 1 to 17.
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