CN213240367U - Single-layer capacitance testing equipment - Google Patents

Single-layer capacitance testing equipment Download PDF

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Publication number
CN213240367U
CN213240367U CN202021954984.4U CN202021954984U CN213240367U CN 213240367 U CN213240367 U CN 213240367U CN 202021954984 U CN202021954984 U CN 202021954984U CN 213240367 U CN213240367 U CN 213240367U
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Prior art keywords
testing
layer capacitor
limiting part
test apparatus
layer capacitance
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CN202021954984.4U
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Chinese (zh)
Inventor
杨应俊
韦日文
刘振辉
周业强
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Silicon Electric Semiconductor Equipment Shenzhen Co ltd
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Silicon Electric Semiconductor Equipment Shenzhen Co ltd
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Abstract

The utility model discloses a single-layer capacitance test equipment. The single-layer capacitance testing equipment comprises a feeding part, a testing part and a discharging part which are sequentially arranged along the horizontal direction; the feeding part comprises a feeding mechanical arm used for transporting the single-layer capacitor to the testing part; the blanking part comprises a blanking mechanical arm used for transporting and keeping away the single-layer capacitor from the testing part; the test section includes: the space motion mechanism is connected with the carrying piece part which is provided with an adsorption hole which is vertically upward; and the adsorption hole communicated with the vacuum is used for positioning the single-layer capacitor. Automatic feeding, testing and discharging of the single-layer capacitor testing are achieved, and therefore testing efficiency of the single-layer capacitor is improved and yield is improved compared with manual testing.

Description

Single-layer capacitance testing equipment
Technical Field
The utility model relates to a single-layer capacitance test equipment.
Background
The current single-layer capacitor adopts manual testing, so that the yield is low, and a larger market gap is caused; therefore, it is necessary to develop a device for improving the capacity of the single-layer capacitor instead of manual testing.
SUMMERY OF THE UTILITY MODEL
The single-layer capacitor capacity is improved to a certain extent by at least replacing manual testing with mechanization; the utility model provides a single-deck electric capacity test equipment.
The technical scheme of the utility model is that: a single-layer capacitance test apparatus is provided,
the device is characterized in that a feeding part, a testing part and a discharging part are sequentially arranged along the horizontal direction;
the feeding part comprises a feeding mechanical arm used for transporting the single-layer capacitor to the testing part;
the blanking part comprises a blanking mechanical arm used for transporting and keeping away the single-layer capacitor from the testing part;
the test section includes: the space motion mechanism is connected with the carrying piece part which is provided with an adsorption hole which is vertically upward; and the adsorption hole communicated with the vacuum is used for positioning the single-layer capacitor.
Further, the upper side of the carrying sheet part is provided with a carrying sheet plane, and the adsorption holes are located on the carrying sheet plane and vertically upwards open.
Further, the test section includes the vertical counterpoint camera that sets up downwards, the space motion includes horizontal plane motion, horizontal plane motion can make the individual layer electric capacity on the carrier strip portion just correspond to the counterpoint camera along vertical ascending direction.
Furthermore, the horizontal plane motion mechanism is two linear guide rails which are arranged along the horizontal plane in a crossed manner.
Further, the space motion mechanism is provided with a rotating mechanism, and the rotating mechanism enables the carrying piece part to rotate along the axis in the vertical direction.
Further, the single-layer capacitor testing equipment further comprises an air-extracting and filtering device communicated with the waste collecting port, and the single-layer capacitor which is unqualified in testing passes through the waste collecting port and enters the air-extracting and filtering device.
Furthermore, the feeding mechanical arm comprises a carrying suction nozzle, a transfer arm and an installation body;
the conveying suction nozzle is arranged on the transfer arm;
the transfer arm is connected to the mounting body through the flexible elastic sheet, and the transfer arm can rotate relative to the mounting body along the bending direction of the flexible elastic sheet, so that the carrying suction nozzle can rotate relative to the mounting body.
Furthermore, the switching arm is provided with a first limiting part extending along one end far away from the carrying suction nozzle, and the mounting body is provided with a second limiting part; the first limiting part can move along the rotation direction of the transfer arm and is stopped against the second limiting part.
Furthermore, the installation body is further provided with a third limiting part, and the first limiting part can rotate between the positions limited by the second limiting part and the third limiting part.
Furthermore, the position limited by the third limiting part is used for sucking the single-layer capacitor along the vertical direction by the carrying suction nozzle, and the first limiting part is stopped against the third limiting part under the natural state of the flexible elastic sheet.
The beneficial effects of the utility model reside in that: automatic feeding, testing and discharging of the single-layer capacitor testing are achieved, and therefore testing efficiency of the single-layer capacitor is improved and yield is improved compared with manual testing.
Drawings
FIG. 1 is a schematic view of the single-layer capacitance testing apparatus of the present invention;
FIG. 2 is a schematic view of the structure of the testing part of the present invention;
FIG. 3 is a schematic view of the structure of the carrier plate of the present invention;
FIG. 4 is an enlarged view of a portion of FIG. 3;
FIG. 5 is a schematic view of the adsorption holes of the present invention disposed on the slide glass;
FIG. 6 is a schematic structural view of a loading robot arm;
FIG. 7 is a schematic sectional view taken along line A-A in FIG. 6;
FIG. 8 is a schematic view of the first position-limiting portion abutting against the second position-limiting portion;
fig. 9 is a schematic view of the first position-limiting portion abutting against the third position-limiting portion.
Detailed Description
In order to facilitate the understanding of the technical solutions of the present invention for those skilled in the art, the technical solutions of the present invention will be described in further detail with reference to specific embodiments.
As shown in fig. 1, 2, 3, 4 and 5, a single-layer capacitor testing apparatus 100 is used for electrical testing of a single-layer capacitor; of course, the technical solution disclosed in the present invention is not limited to testing single-layer capacitors, and it should also belong to the protection scope of the present invention for applying the technical solution of the present invention to testing other components;
the feeding part 20, the testing part 30 and the discharging part 40 are sequentially arranged along the horizontal direction; the testing part 30 is used for electrically testing the single-layer capacitor, the loading part 20 is used for loading the testing part 30, the unloading part 40 is used for unloading the testing part 30, and the loading part 20 and the unloading part 40 work in a coordinated manner, so that the working efficiency of the testing part 30 is improved;
the loading part 20 comprises a loading mechanical arm 21 for transporting the single-layer capacitor to the testing part 30; preparing a single-layer capacitor before testing;
the blanking part 40 includes a blanking robot arm for carrying and moving the single-layer capacitor away from the test part 30; moving away the tested single-layer capacitor to prepare for the subsequent single-layer capacitor test;
the test section 30 includes: a space movement mechanism 31 and a carrier piece part 32 connected with the space movement mechanism and provided with an adsorption hole 321 which is vertically upward; the space motion mechanism 31 is a mechanism combination which can comprise a linear motion mechanism and/or a rotary motion mechanism and/or a planar motion mechanism and/or a three-dimensional space motion mechanism which can enable a single-layer capacitor to meet the test alignment requirement, and can realize a motion function; the adsorption hole 321 communicated with the vacuum is used for positioning the single-layer capacitor; the position is stable and reliable when the single-layer capacitor is tested; because the single-layer capacitor belongs to a thin structure, namely, the single-layer capacitor is not easy to turn or displace when being subjected to point contact test on one side of the single-layer capacitor, the positioning requirement of the test can be met by vacuum adsorption fixation.
Adopt above-mentioned technical scheme: automatic feeding, testing and discharging of the single-layer capacitor testing are achieved, and therefore testing efficiency of the single-layer capacitor is improved and yield is improved compared with manual testing.
As shown in fig. 2 and 5, a slide plane 322 is arranged on the upper side of the carrier part 32, and the suction hole 321 is located on the slide plane 322 and has an opening facing vertically upwards; that is, the single-layer capacitor adsorbed by the adsorption hole 321 is attached to the slide plane 322, so as to improve the stability of fixing the single-layer capacitor to the carrier plate part 32.
Adopt above-mentioned technical scheme: one side of the single-layer capacitor is adsorbed on the wafer carrying plane 322, so that the stability of the single-layer capacitor during testing is improved.
As shown in fig. 1, the testing part 30 includes an alignment camera 33 disposed vertically downward, and the spatial movement 31 includes a horizontal movement mechanism, which enables the single-layer capacitor on the carrying sheet part 32 to correspond to the alignment camera 33 along the vertical upward direction, so as to scan the position of the single-layer capacitor by the alignment camera 33, and improve the accuracy of the single-layer capacitor testing position. The horizontal plane movement mechanism is two linear guide rails which are arranged along the horizontal plane in a crossed manner, namely the position of the horizontal plane movement of the carrying piece part 32 is adjusted through the two linear guide rails which are arranged in a crossed manner, and the structure is simple.
Adopt above-mentioned technical scheme: the single-layer capacitor reaches a preset position, and therefore the accuracy and the stability of the single-layer capacitor test are improved.
As shown in fig. 1, the spatial movement mechanism 31 is provided with a rotation mechanism, which enables the carrier sheet part 32 to rotate along the axis in the vertical direction, so as to satisfy the test angle test of the single-layer capacitance.
Adopt above-mentioned technical scheme: and for single-layer capacitors or other components with test requirements, the angle debugging requirements for the test are realized through the rotating mechanism.
As shown in FIG. 1, the single-layer capacitance testing apparatus 100 further comprises a suction filter device 50 connected to the waste collection opening 51, and the single-layer capacitance which is not tested enters the suction filter device 50 through the waste collection opening 51.
Air exhaust filter device 50 is for filtering the air suction pipeline and be provided with the device of filtered air impurity, the utility model discloses collect single-deck electric capacity in air exhaust filter device 50 as the impurity of similar air to reach the purpose of collecting unqualified single-deck electric capacity.
Adopt above-mentioned technical scheme: the unqualified single-layer capacitor and air are sucked into the air-extracting and filtering device 50 from the waste collecting port 51, the single-layer capacitor is blocked and collected by the structure with the filtering function, the single-layer capacitor is collected, and the structure is simple and reliable.
As shown in fig. 1, 6, 7 and 8, the loading robot arm 21 includes a carrying suction nozzle 211, an adapter arm 212 and a mounting body 213;
the transfer suction nozzle 211 is mounted to the transfer arm 212; the carrying suction nozzle 211 is of a vacuum adsorption structure and is used for sucking a single-layer capacitor; the use requirements of the carrying suction nozzle 211 for absorbing single-layer capacitors at different positions are met through the transfer arm 212;
the transfer arm 212 is connected to the mounting body 213 through a flexible elastic sheet 214, and the transfer arm 212 can rotate relative to the mounting body 213 along the bending direction of the flexible elastic sheet 214, so that the transportation suction nozzle 211 can rotate relative to the mounting body 214; in order to prevent the single-layer capacitor from being damaged by being sucked by the carrying suction nozzle 211, a flexible contact mode between the carrying suction nozzle 211 and the single-layer capacitor is required; the flexible elastic sheet 214 provides a flexible displacement function for the carrying suction nozzle 211, so as to prevent the single-layer capacitor from being crushed due to the larger movement deviation of the carrying suction nozzle 211; of course, after understanding the above technical solution, a person skilled in the art can also adopt a linear elastic connection to connect the transfer arm 212 to the mounting body 213 in a linear sliding manner, so that when the carrying suction nozzle 211 is stopped against the single-layer capacitor, the linear sliding is realized, the flexible contact is realized, and the single-layer capacitor is prevented from being crushed.
As shown in fig. 1, 6, 7 and 8, the transfer arm 212 is provided with a first limiting portion 215 extending along one end away from the carrying suction nozzle 211, and the mounting body 213 is provided with a second limiting portion 216; the first position-limiting part 215 can move along the rotation direction of the adapting arm 212 and is stopped against the second position-limiting part 216, so that the adapting arm 212 is prevented from excessively swinging due to too large rotation angle of the adapting arm 212, and the testing accuracy is prevented from being influenced; the mounting body 213 is further provided with a third limiting part 217, the first limiting part 215 can rotate between positions limited by the second limiting part 216 and the third limiting part 217, and the second limiting part 216 and the third limiting part 217 jointly limit the rotating position of the transfer arm 212, so that the position of a single-layer capacitor sucked by the carrying suction nozzle 211 is limited, and the accuracy of the sucking and placing positions of the single-layer capacitor is improved; the position limited by the third limiting portion 217 is that the carrying suction nozzle 211 sucks the single-layer capacitor along the vertical direction, and the first limiting portion 215 stops against the third limiting portion 217 in the natural state of the flexible elastic sheet 214.
Adopt above-mentioned technical scheme: the motion of the transfer arm 212 is limited, so that the shaking caused by the overlarge rotation angle of the transfer arm 212 is prevented.
The above is the preferred embodiment of the present invention, and is not used to limit the protection scope of the present invention. It should be recognized that non-inventive variations and modifications to the disclosed embodiments, as understood by those skilled in the art, are intended to be included within the scope of the present invention as claimed and claimed.

Claims (10)

1. A single layer capacitance test apparatus, characterized by:
the device is characterized in that a feeding part, a testing part and a discharging part are sequentially arranged along the horizontal direction;
the feeding part comprises a feeding mechanical arm used for transporting the single-layer capacitor to the testing part;
the blanking part comprises a blanking mechanical arm used for transporting and keeping away the single-layer capacitor from the testing part;
the test section includes: the space motion mechanism is connected with the carrying piece part which is provided with an adsorption hole which is vertically upward; and the adsorption hole communicated with the vacuum is used for positioning the single-layer capacitor.
2. The single layer capacitance test apparatus of claim 1, wherein:
the upper side of the carrying piece part is provided with a carrying piece plane, and the adsorption hole is located on the carrying piece plane and is vertically upward in opening.
3. The single layer capacitance test apparatus of claim 1, wherein:
the test section includes the vertical counterpoint camera that sets up downwards, spatial motion includes horizontal plane motion, horizontal plane motion can make the individual layer electric capacity on the carrier strip portion just correspond to the counterpoint camera along vertical ascending direction.
4. The single layer capacitance test apparatus of claim 3, wherein: the horizontal plane motion mechanism is two linear guide rails which are arranged along the horizontal plane in a crossed mode.
5. The single layer capacitance test apparatus of claim 1, wherein: the space motion mechanism is provided with a rotating mechanism which enables the carrying piece part to rotate along the axis of the vertical direction.
6. The single layer capacitance test apparatus of claim 1, wherein: the single-layer capacitor testing equipment further comprises an air-extracting and filtering device communicated with the waste collecting port, and the single-layer capacitor which is unqualified in testing passes through the waste collecting port and enters the air-extracting and filtering device.
7. The single layer capacitance test apparatus of claim 1, wherein: the feeding mechanical arm comprises a carrying suction nozzle, a transfer arm and an installation body;
the conveying suction nozzle is arranged on the transfer arm;
the transfer arm is connected to the mounting body through the flexible elastic sheet, and the transfer arm can rotate relative to the mounting body along the bending direction of the flexible elastic sheet, so that the carrying suction nozzle can rotate relative to the mounting body.
8. The single layer capacitance test apparatus of claim 7, wherein: the adapter arm is provided with a first limiting part extending along one end far away from the carrying suction nozzle, and the mounting body is provided with a second limiting part; the first limiting part can move along the rotation direction of the transfer arm and is stopped against the second limiting part.
9. The single layer capacitance test apparatus of claim 8, wherein: the mounting body is further provided with a third limiting part, and the first limiting part can rotate between positions limited by the second limiting part and the third limiting part.
10. The single layer capacitance test apparatus of claim 9, wherein: the position limited by the third limiting part is used for sucking the single-layer capacitor along the vertical direction by the carrying suction nozzle, and the first limiting part is stopped against the third limiting part in the natural state of the flexible elastic sheet.
CN202021954984.4U 2020-09-09 2020-09-09 Single-layer capacitance testing equipment Active CN213240367U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202021954984.4U CN213240367U (en) 2020-09-09 2020-09-09 Single-layer capacitance testing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202021954984.4U CN213240367U (en) 2020-09-09 2020-09-09 Single-layer capacitance testing equipment

Publications (1)

Publication Number Publication Date
CN213240367U true CN213240367U (en) 2021-05-18

Family

ID=75872008

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202021954984.4U Active CN213240367U (en) 2020-09-09 2020-09-09 Single-layer capacitance testing equipment

Country Status (1)

Country Link
CN (1) CN213240367U (en)

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