CN213240273U - Electric probe seat for testing - Google Patents
Electric probe seat for testing Download PDFInfo
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- CN213240273U CN213240273U CN202021839100.0U CN202021839100U CN213240273U CN 213240273 U CN213240273 U CN 213240273U CN 202021839100 U CN202021839100 U CN 202021839100U CN 213240273 U CN213240273 U CN 213240273U
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- belt wheel
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- 239000000523 sample Substances 0.000 title claims abstract description 85
- 238000012360 testing method Methods 0.000 title claims abstract description 27
- 230000005540 biological transmission Effects 0.000 claims abstract description 15
- 230000033001 locomotion Effects 0.000 claims description 22
- 238000009434 installation Methods 0.000 abstract description 4
- 230000007547 defect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000015556 catabolic process Effects 0.000 description 1
- 239000013256 coordination polymer Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
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Abstract
The utility model discloses an electric probe seat for testing, which comprises a driving motor, an adjustable connecting plate, a belt wheel, a transmission belt, a driving micrometer, a manual knob, a bearing seat, a ball screw, a driven end belt wheel, a screw nut, a probe fixing plate, a linear guide rail, a probe connecting plate and a probe; the utility model reduces the manual labor force and improves the operation testing efficiency; the production and purchase cost is greatly reduced; the whole design scheme takes the installation convenience and the use reliability into consideration; the function of the original manual probe seat is maintained while high-speed high-precision electric operation is realized.
Description
Technical Field
The utility model relates to a device of semiconductor wafer test, concretely relates to test is with electronic probe seat.
Background
The middle Test (CP Test) is the first station of the semiconductor subsequent packaging Test, and the existing Test needle base can find that the existing Test needle base is mostly a manual needle base with a laminated driving structure which is driven by a micrometer and supported and guided by a crossed roller guide rail, and the existing Test needle base individually has the defects of large guide rail gap, snaking and incapability of quickly and accurately positioning due to the fact that the existing Test needle base is driven by a common screw, and a dovetail guide positioner structure has the defects of large guide rail gap, snaking and incapability of quickly and accurately positioning. The precision of the probe seat is mainly guaranteed by the precision of the micrometer, and in the using process, the position of the probe seat needs to be adjusted by manually rotating the micrometer every time when the probe seat is tested, wherein the Z axis needs to be adjusted every time.
In all the existing devices, the precision and the speed are always mutually restricted, and a high-precision micrometer is very expensive in price, so that the purpose can be achieved by rotating the micrometer for many turns when the micrometer needs to be moved slightly. In order to solve the problem of the defects of the conventional structure, the scheme provides the electric probe seat for the test.
Disclosure of Invention
In view of the above-mentioned deficiencies and inadequacies of the prior art, it would be desirable to provide a motorized probe mount for testing.
According to the technical scheme provided by the embodiment of the utility model, an electric probe seat for testing comprises a driving motor, an adjustable connecting plate, a belt wheel, a transmission belt, a driving micrometer, a manual knob, a bearing seat, a ball screw, a driven end belt wheel, a screw nut, a probe fixing plate, a linear guide rail, a probe connecting plate and a probe; the driving motor is vertically arranged on the base, and the adjustable connecting plate is arranged between the driving motor and the base; the central hole of the belt wheel is arranged on the rotating shaft of the driving motor; the right end of the transmission belt is sleeved outside the belt wheel, and the left end of the transmission belt is sleeved outside the driven end belt wheel; the driving micrometer is arranged outside the driving motor and the box body below the base; the ball screw is arranged on the left side of the driving motor and vertically penetrates through a left side base plate of the base, a bearing seat is fixed on the upper surface of the left side base plate and above the ball screw, a central hole of the bearing seat is sleeved outside a shaft body of the ball screw, and the manual knob is arranged above the bearing seat and at the upper end of the ball screw; the central hole of the driven end belt wheel is sleeved on the shaft body of the ball screw, and the driven end belt wheel is positioned between the left side base plate and the screw nut of the base; the probe fixing plate is sleeved and mounted outside the screw nut, the linear guide rail is fixedly mounted on the outer wall of the left side surface of the lower shell of the driving motor, and the right side surface of the probe fixing plate is fixedly connected with the linear guide rail; the probe fixing plate is characterized in that the middle of the left side face of the probe fixing plate is fixedly provided with the probe connecting plate, and the middle of the lower end of the probe connecting plate is provided with the probe which faces away from the driving motor.
The utility model discloses in, linear guide's guide rail direction of motion with screw nut is in the last direction of motion of ball is unanimous.
The utility model discloses in, band pulley and driven end band pulley basis supporting setting is done to driving belt's drive ratio demand.
The utility model discloses in, band pulley and driven end band pulley are located same horizontal plane.
The utility model discloses in, screw nut and ball basis ball's helical pitch and required the movement distance of probe is exactly ball's length sets up in a complete set.
The utility model discloses in, the probe be horizontal form set up and with be perpendicular form between the probe connecting plate.
To sum up, the utility model has the advantages that:
1. the manual labor force is reduced, and the operation testing efficiency is improved.
2. Compared with other electric needle bases, the production and purchase cost is greatly reduced.
3. In the installation and use processes, the overall design scheme takes the installation convenience and the use reliability into consideration, for example, an adjustable connecting plate is used for ensuring that the installation tightness is adjustable, and a linear guide rail is used for ensuring the operation stability; the service life of the ball screw and the ball screw nut is prolonged.
4. The function of the original manual probe seat is kept while high-speed and high-precision electric operation is realized, and a user can switch the use mode to be manual or electric operation according to the actual conditions of the user.
Drawings
Other features, objects and advantages of the invention will become more apparent upon reading of the detailed description of non-limiting embodiments made with reference to the following drawings:
fig. 1 is a schematic structural view of the present invention;
fig. 2 is a schematic top view of the present invention;
fig. 3 is a front view of the base of the present invention.
Reference numbers in the figures: 1. the device comprises a driving motor, 2 an adjustable connecting plate, 3 a belt wheel, 4 a transmission belt, 5 a driving micrometer, 6 a manual knob, 7 a bearing seat, 8 a ball screw, 9 a driven end belt wheel, 10 a screw nut, 11 a probe fixing plate, 12 a linear guide rail, 13 a probe connecting plate and 14 a probe.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the relevant invention and not restrictive of the invention. It should be noted that, for convenience of description, only the portions related to the present invention are shown in the drawings.
It should be noted that, in the present invention, the embodiments and features of the embodiments may be combined with each other without conflict. The present invention will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.
As shown in fig. 1 and 2, an electric probe base for testing comprises a driving motor 1, an adjustable connecting plate 2, a belt pulley 3, a transmission belt 4, a driving micrometer 5, a manual knob 6, a bearing seat 7, a ball screw 8, a driven end belt pulley 9, a screw nut 10, a probe fixing plate 11, a linear guide rail 12, a probe connecting plate 13 and a probe 14; as shown in fig. 3, which is a schematic front view structure diagram of the base, the driving motor 1 is vertically installed at the right side of the base, and the adjustable connecting plate 2 is installed between the driving motor 1 and the base; the central hole of the belt wheel 3 is arranged on the rotating shaft of the driving motor 1; the right end of the transmission belt 4 is sleeved outside the belt wheel 3, and the left end of the transmission belt 4 is sleeved outside the driven end belt wheel 9; the driving micrometer 5 is arranged outside the box body below the driving motor 1 and the base; the ball screw 8 is arranged on the left side of the driving motor 1, the ball screw 8 vertically penetrates through a left side base plate of the base, a bearing seat 7 is fixed on the upper surface of the left side base plate and above the ball screw 8, a central hole of the bearing seat 7 is sleeved and installed outside a shaft body of the ball screw 8, and the manual knob 6 is installed above the bearing seat 7 and at the upper end of the ball screw 8; the central hole of the driven end belt wheel 9 is sleeved on the shaft body of the ball screw 8, and the driven end belt wheel 9 is positioned between the left side base plate of the base and the screw nut 10; the probe fixing plate 11 is sleeved outside the screw nut 10, the linear guide rail 12 is fixed on the outer wall of the left side surface of the lower shell of the driving motor 1, and the right side surface of the probe fixing plate 11 is fixedly connected with the linear guide rail 12; the probe connecting plate 13 is fixedly installed in the middle of the left side surface of the probe fixing plate 11, and the probe 14 facing away from the driving motor 1 is installed in the middle of the lower end of the probe connecting plate 13.
On the probe base, the guide rail motion direction of the linear guide rail 12 is consistent with the motion direction of the screw nut 10 on the ball screw 8.
On the probe seat, the belt wheel 3 and the driven end belt wheel 9 are arranged in a matched manner according to the transmission ratio requirement of the transmission belt 4.
On the probe seat, the belt wheel 3 and the driven end belt wheel 9 are positioned on the same horizontal plane.
On the probe seat, the lead screw nut 10 and the ball screw 8 are arranged in a matching manner according to the lead of the ball screw 8 and the required movement distance of the probe 14, namely the length of the ball screw 8.
On the probe seat, the probes 14 are arranged transversely and are vertical to the probe connecting plate 13.
Example (b): belt pulley 3 couples and fixes on driving motor 1 with driving motor 1's pivot, driving motor 1 drives driving belt 4 through belt pulley 3 with rotary motion as the power supply, driving belt 4 drives driven end band pulley rotation 9, driven end band pulley 9 links as an organic whole with ball 8, so transmit the motion for ball 8, ball 8 keeps single fixed rotary motion because under the support of bearing frame 7, ball nut 10 uses with ball 8 is supporting, its effect is the up-and-down reciprocating motion who converts ball 8's rotary motion into ball nut 10. The ball screw nut 10 and the probe fixing plate 11 are fixed together, and the probe connecting plate 13 and the probe fixing plate 11 are fixed together, so that finally the up-and-down reciprocating motion of the ball screw nut 10 is transmitted to the probe connecting plate 13 to enable the probe connecting plate 13 to carry out synchronous up-and-down reciprocating motion, the probe 14 and the probe connecting plate 13 are fixed together, finally the rotary motion of the driving motor 1 is formed and converted into the up-and-down reciprocating motion of the probe 14, and the design of the Z-direction electric needle seat is realized.
On this probe seat, linear guide 12 is in the same place with probe fixed plate 11 fixed connection, has realized the support and the guide effect to motion, has realized sharing ball 8 and ball nut 10's effort, has guaranteed the reliable and stable of whole mechanism.
On this probe seat, adjustable connecting plate 2 is arranged in the assembling process and is designed for drive belt 4's adjustment tight degree that rises, has compensatied the problem that drive belt 4 relaxes and leads to the performance degradation under daily big work load intensity, and is light adjustable, has guaranteed the economic nature of structure.
On the probe holder, the driving micrometer 5 is a manual micrometer, and a micrometer in the other direction is used for driving in the XY direction. Because the adjusting frequency of the probe seat in the XY direction is very low in the semiconductor test, the position can be adjusted only when the probe seat is placed, and ten thousand times of test actions on one wafer all depend on the movement in the Z direction after the test is started.
On this probe seat, manual knob 6's effect is when guaranteeing that driving motor 1 is breaking the enable state, and the accessible is rotatory manual knob 6 and come manual control to realize the up-and-down motion of probe 14, has realized promptly that the position under driving motor 1 enables the state confirms, has realized again that the manual operation under driving motor 1 breaks the enable state has compromise the function of manual probe seat.
On this probe seat, driving motor 1 can be according to the in-service use demand, the size of required power, and motion and positioning accuracy carry out comparatively easily, random selection replacement.
The foregoing description is only exemplary of the preferred embodiments of the invention and is provided for the purpose of illustrating the general principles of the invention. Meanwhile, the scope of the present invention is not limited to the specific combinations of the above-described technical features, and other technical features or equivalent features may be combined arbitrarily without departing from the scope of the present invention. For example, the above features and (but not limited to) technical features having similar functions disclosed in the present invention are mutually replaced to form the technical solution.
Claims (6)
1. An electric probe seat for testing is characterized in that: the device comprises a driving motor (1), an adjustable connecting plate (2), a belt wheel (3), a transmission belt (4), a driving micrometer (5), a manual knob (6), a bearing seat (7), a ball screw (8), a driven end belt wheel (9), a screw nut (10), a probe fixing plate (11), a linear guide rail (12), a probe connecting plate (13) and a probe (14); the driving motor (1) is vertically arranged on the base, and the adjustable connecting plate (2) is arranged between the driving motor (1) and the base; the central hole of the belt wheel (3) is arranged on the rotating shaft of the driving motor (1); the right end of the transmission belt (4) is sleeved outside the belt wheel (3), and the left end of the transmission belt (4) is sleeved outside the driven end belt wheel (9); the driving micrometer (5) is arranged outside the driving motor (1) and the box body below the base; the ball screw (8) is arranged on the left side of the driving motor (1), the ball screw (8) vertically penetrates through a left side base plate of the base, a bearing seat (7) is fixed on the upper surface of the left side base plate and above the ball screw (8), a center hole of the bearing seat (7) is sleeved and mounted outside a shaft body of the ball screw (8), and the manual knob (6) is mounted above the bearing seat (7) and at the upper end of the ball screw (8); the central hole of the driven end belt wheel (9) is sleeved on the shaft body of the ball screw (8), and the driven end belt wheel (9) is positioned between the left side base plate of the base and the screw nut (10); the probe fixing plate (11) is sleeved and mounted outside the screw nut (10), the linear guide rail (12) is mounted and fixed on the outer wall of the left side surface of the lower shell of the driving motor (1), and the right side surface of the probe fixing plate (11) is fixedly connected with the linear guide rail (12); the probe connecting plate (13) is fixedly arranged in the middle of the left side face of the probe fixing plate (11), and the probe (14) facing away from the driving motor (1) is arranged in the middle of the lower end of the probe connecting plate (13).
2. The motorized test probe mount of claim 1, wherein: the guide rail movement direction of the linear guide rail (12) is consistent with the movement direction of the screw nut (10) on the ball screw (8).
3. The motorized test probe mount of claim 1, wherein: the belt wheel (3) and the driven end belt wheel (9) are arranged in a matched mode according to the transmission ratio requirement of the transmission belt (4).
4. The motorized test probe mount of claim 1, wherein: the belt wheel (3) and the driven end belt wheel (9) are positioned on the same horizontal plane.
5. The motorized test probe mount of claim 1, wherein: the lead screw nut (10) and the ball screw (8) are matched according to the lead of the ball screw (8) and the required movement distance of the probe (14), namely the length of the ball screw (8).
6. The motorized test probe mount of claim 1, wherein: the probes (14) are arranged transversely and are vertical to the probe connecting plates (13).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021839100.0U CN213240273U (en) | 2020-08-28 | 2020-08-28 | Electric probe seat for testing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021839100.0U CN213240273U (en) | 2020-08-28 | 2020-08-28 | Electric probe seat for testing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN213240273U true CN213240273U (en) | 2021-05-18 |
Family
ID=75902887
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202021839100.0U Active CN213240273U (en) | 2020-08-28 | 2020-08-28 | Electric probe seat for testing |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN213240273U (en) |
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2020
- 2020-08-28 CN CN202021839100.0U patent/CN213240273U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20220915 Address after: 101300 0146, floor 3, building 1, yard 1, Shuangyu South Street, Shunyi District, Beijing Patentee after: Beijing Ketai optical core semiconductor equipment Technology Co.,Ltd. Address before: 101125 room 1700, 75 Xinhua North Street, Tongzhou District, Beijing Patentee before: BEIJING GUIKE INTELLIGENT TECHNOLOGY Co.,Ltd. |
|
| TR01 | Transfer of patent right | ||
| CP03 | Change of name, title or address |
Address after: 101399 North Wenhuaying Village, Shunyi District, Beijing (No. 1, Shunchuang 2nd Road) Patentee after: Beijing Ruihuayu Semiconductor Equipment Co.,Ltd. Country or region after: China Address before: 101300 0146, floor 3, building 1, yard 1, Shuangyu South Street, Shunyi District, Beijing Patentee before: Beijing Ketai optical core semiconductor equipment Technology Co.,Ltd. Country or region before: China |
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| CP03 | Change of name, title or address | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20240327 Address after: 528248, No. 16 Guangming Avenue, New Light Source Industrial Base, Shishan Town, Nanhai District, Foshan City, Guangdong Province (Residence application, multiple photos for one address) Patentee after: Foshan Xince Technology Co.,Ltd. Country or region after: China Address before: 101399 North Wenhuaying Village, Shunyi District, Beijing (No. 1, Shunchuang 2nd Road) Patentee before: Beijing Ruihuayu Semiconductor Equipment Co.,Ltd. Country or region before: China |
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| TR01 | Transfer of patent right |