CN111239444A - Positioning detection device based on leaf spring fine adjustment - Google Patents

Abstract

The invention is a positioning detection device based on the fine adjustment of the leaf spring, which comprises a base, a mounting frame is arranged on the base, a Y-axis sliding table that can move left and right is connected to the mounting frame, and a Z-axis sliding table that can move up and down is connected to the Y-axis sliding table. Axis sliding table, Z-axis sliding table is connected with a combined probe adjustment mechanism through the Z-axis connection block. In the combined probe adjustment mechanism, the bending state of the leaf spring is adjusted by the differential head to drive the sliding axis to slide slightly left and right; the sliding axis passes through the sliding axis. The connecting block is connected with a probe spacing adjustment mechanism. In the probe spacing adjustment mechanism, the threaded sleeve 1 and the threaded sleeve 2 in opposite directions are driven to move toward or away from each other by rotating the connecting rod, thereby driving the probe to adjust the spacing. Position indicators positioned coaxially on the connecting rods accurately display the probe spacing. The device can adapt to the testing of different types of chips or PCB boards by adjusting the position of the combined probes and the spacing of the probes quickly and accurately, and is convenient to use and suitable for promotion.

Description

A positioning detection device based on leaf spring fine-tuning

(1) Technical field

The invention relates to the technical field of semiconductor detection equipment, in particular to a positioning detection device based on fine adjustment of a leaf spring.

(2) Background technology

In the testing of semiconductor industry, optoelectronic industry, integrated circuit and packaging, in order to ensure the quality and reliability, and reduce the research and development time and the cost of the device manufacturing process, the participation of high-precision positioning detection equipment is required. Most of the positioning detection devices in the prior art are combined with probes and the positions between the probes are relatively fixed, and can only test the continuity of a certain size or type of chip or PCB board. For different types of chips, corresponding preparations are required. The special positioning detection device has large limitations in use, high test cost, and brings inconvenience to the detection; at present, some detection devices can achieve a certain position adjustment between the probes, but the adjustment accuracy is low, the adjustment operation process is troublesome, and the efficiency lower.

(3) Contents of the invention

In order to overcome the above-mentioned problems in the prior art, the present invention provides a positioning detection device based on the fine-tuning of the leaf spring, which can adapt to different types of chips or PCB boards by adjusting the combined probe position and the probe spacing quickly and accurately. The test of the present invention is realized by the following technical solutions:

A positioning detection device based on fine adjustment of leaf springs, comprising a base, a mounting frame is arranged on the base, a Z-axis sliding table is connected to the mounting frame, and the Z-axis sliding table is connected with a combined probe through a Z-axis connecting block. Needle adjustment mechanism; the combined probe adjustment mechanism includes a support plate horizontally connected to the Z-axis connecting block, and the left and right sides of the top surface of the support plate are respectively provided with symmetrical left support seats and right support seats, A sliding shaft that can slide left and right runs through the left support base and the right support base. The connecting block is connected with a probe spacing adjustment mechanism; the probe spacing adjustment mechanism includes a spacing adjustment base plate connected to the sliding shaft connecting block, the left and right sides of the spacing adjustment base plate are provided with connecting seats, and the left and right sides of the spacing adjustment base plate are provided with connecting seats. A connecting rod is connected between the connecting seats on the right, and a threaded sleeve 1 and a threaded sleeve 2 are connected to the connecting rod. The threaded sleeve 1 and the threaded sleeve 2 can move left and right on the connecting rod. The lower ends of the first threaded sleeve and the second threaded sleeve are connected with a threaded sleeve connecting plate, and the threaded sleeve connecting plate is connected with a probe bracket for fixing the probe.

Preferably, each of the left support base and the right support base includes a left side plate, a right side plate and a top plate connected above the left side plate and the right side plate, and the sliding shaft is slidably connected to the right side plate and the right side plate of the left support base. The left side plate of the right bearing seat; the left side plate of the left bearing seat and the left end of the sliding shaft and the right side plate of the right bearing seat and the right end of the sliding shaft are connected by a leaf spring; the top plate of the left bearing seat is provided with There is a differential head, the differential head is located just above the leaf spring, and the differential head can move up and down to press or loosen the leaf spring.

Preferably, the lower end of the differential head is threadedly connected to the top plate of the left support seat, and a scale layer in the vertical direction is provided on the upper circumferential surface of the threaded portion of the lower end of the differential head.

Preferably, lower limit rods are provided below the leaf springs of the left and right support bases, and the lower limit rods are connected to the support plate; and an upper limit rod is also provided above the leaf spring of the right support base.

Preferably, the anti-rotation limiting device includes a guide shaft and a guide shaft seat slidably connected to both ends of the guide shaft, and the lower end of the guide shaft seat is fixed on the support plate; the guide shaft and the sliding shaft are fixed by fixing clip connection.

Preferably, the connecting seat is a rolling bearing seat, the connecting rod is a threaded rod, the threaded sleeve 1 and the threaded sleeve 2 are threadedly connected to the connecting rod and have opposite directions of rotation; the right end of the connecting rod is provided with an adjustment knob; the threaded sleeve The inner side of the connecting plate is connected with a threaded sleeve sliding block, the spacing adjustment base plate is connected with a threaded sleeve guide rail in the left and right directions, and the threaded sleeve sliding block and the threaded sleeve guide rail are matched and connected; the connection seat is also connected with a fixing knob, The fixing knob is threadedly connected with the connecting seat, and the connecting rod is pressed or released by rotating the fixing knob.

Preferably, a position indicator is provided between the connection base and the adjustment knob.

Preferably, a centering spring is connected between the first threaded sleeve and the second threaded sleeve.

Preferably, a horizontal scale is provided at the lower end of the front side surface of the spacing adjustment base plate, and a spacing pointer is connected to the lower end of the threaded sleeve connecting plate.

Preferably, a Y-axis sliding table is further provided between the mounting frame and the Z-axis sliding table, a left feeding table and a right feeding table are provided on the base, and the positions of the left feeding table and the right feeding table are respectively the same as the Y-axis sliding table. The left and right dead center positions of the Y-axis slider on the axis slide table correspond.

The beneficial effects of the present invention are:

1. By adjusting the combined probe adjustment mechanism and the probe spacing adjustment mechanism, it can adapt to the testing of various types of chips or PCB boards.

2. In the combined probe adjustment mechanism, the bending state of the leaf spring is adjusted by rotating the differential head, and then the elastic force of the leaf spring pushes the sliding shaft to move left and right to adjust the left and right positions of the probe spacing adjustment mechanism, which can realize the combined probe at a lower cost. high-precision adjustment.

3. There is a scale layer in the upper and lower directions on the circumference of the differential head. The scale value is calculated according to the relationship between the extension or retraction of the differential head and the shape transformation of the leaf spring. The adjustment of the combined probe position is more accurate.

4. There are limit rods above and below the leaf spring, so that the leaf spring can be deformed within a certain range, so as to avoid excessive deformation from damaging the leaf spring or affecting the accuracy of adjustment when it exceeds the deformation position.

5. In the probe spacing adjustment mechanism, the threaded sleeve 1 and the threaded sleeve 2 are threadedly connected to the connecting rod and have opposite directions of rotation. The probe spacing can be easily adjusted by rotating the adjustment knob.

6. There is a position indicator between the connection seat and the adjustment knob, which can precisely control the distance between the probes.

7. A centering spring is connected between the threaded sleeve 1 and the threaded sleeve 2. When the adjustment knob is fine-tuned left and right, a back force can be applied to eliminate the reverse adjustment gap and further improve the adjustment accuracy of the probe spacing.

8. Spacing adjustment The lower end of the substrate is provided with a horizontal scale, which can read the probe spacing intuitively.

9. There is also a Y-axis sliding table between the mounting frame and the Z-axis sliding table. The base is provided with a left feeding table and a right feeding table. The left feeding table and the right feeding table are alternately detected and loaded, and the work efficiency is higher.

(4) Description of drawings

The present invention will be further described below in conjunction with the accompanying drawings.

FIG. 1 is a schematic diagram of the three-dimensional structure of the present invention.

FIG. 2 is a schematic side view of the structure of the present invention.

FIG. 3 is a schematic diagram of the installation structure of the Y-axis sliding table and the Z-axis sliding table in the present invention.

FIG. 4 is a structural diagram of the feeding table in the present invention.

5 is a front view of the connection structure of the combined probe adjustment mechanism and the probe spacing adjustment mechanism in the present invention.

6 is a perspective view of the connection structure of the combined probe adjustment mechanism and the probe spacing adjustment mechanism in the present invention.

FIG. 7 is a schematic front view of the structure of the combined probe adjustment mechanism in the present invention.

FIG. 8 is a schematic top view of the structure of the combined probe adjustment mechanism in the present invention.

FIG. 9 is a left-view structural schematic diagram of the combined probe adjustment mechanism in the present invention.

FIG. 10 is a schematic three-dimensional structure diagram of the combined probe adjustment mechanism in the present invention.

FIG. 11 is a schematic front view of the structure of the probe pitch adjustment mechanism in the present invention.

FIG. 12 is a schematic view of the structure of the probe distance adjustment mechanism in the right side view of the present invention.

FIG. 13 is a schematic three-dimensional structure diagram of the probe spacing adjustment mechanism in the present invention.

In the figure, 1-base, 2-mounting frame, 3-Y-axis sliding table, 31-Y-axis sliding block, 32-Y-axis connecting block, 4-Z-axis sliding table, 41-Z-axis sliding block, 42-Z-axis Connection block, 5-combination probe adjustment mechanism, 51-support plate, 52-left support base, 521-plate spring fixing table 1, 53-right support base, 54-sliding shaft, 541-leaf spring fixing table 2, 55 -leaf spring, 56-lower limit rod, 561-upper limit rod, 57-differential head, 58-slide shaft connecting block, 59-fixing clip, 50-guide shaft, 501-guide shaft seat, 6-probe spacing adjustment Mechanism, 61-spacing adjustment base plate, 62-connecting rod, 63-threaded sleeve one, 631-threaded sleeve connecting plate, 632-probe bracket, 633-threaded sleeve slider, 634-threaded sleeve guide rail, 635-probe, 64-threaded sleeve II, 65-position indicator, 66-adjustment knob, 67-fixed knob, 68-scale, 681-spacing pointer, 69-centering spring, 60-connecting seat, 7-feeding table 1, 71- Loading table slider, 72- Chip positioning tool, 73- Loading table mounting hole, 8- Loading table two, 9- Chip.

(5) Specific implementation methods

In order to enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be further described below with reference to the accompanying drawings.

The present invention is a positioning detection device based on the fine adjustment of the leaf spring. As shown in Figures 1-2, it includes a base 1, and the base 1 is provided with a mounting frame 2, and the mounting frame 2 is connected with a Y-axis sliding table in the left and right directions. 3. The Y-axis sliding table 3 adopts a pneumatic sliding table, and the Y-axis sliding block 31 on the Y-axis sliding table 3 can be extended or retracted in the left and right directions under the pneumatic, driving the probe to detect the feeding table 1 7 and the feeding table 2 8 chips on two stations to improve work efficiency.

The Y-axis sliding block 31 is screwed with a Y-axis connecting block 32, the Y-axis connecting block 32 is fixedly mounted with a Z-axis sliding table 4, the Z-axis sliding table 4 also adopts a pneumatic sliding table, and the Z-axis sliding table on the Z-axis sliding table 4 The block 41 can move up and down under pneumatic conditions. The function of the Z-axis sliding table 4 is to drive the probe at the lower end to move up and down, and conduct a continuity test on the chip or the PCB board.

The Z-axis sliding table 4 is connected with the combined probe adjustment mechanism 5 through the Z-axis connection block 4 , and the combined probe adjustment mechanism 5 includes a support plate 51 horizontally connected to the Z-axis connection block 42 . The right two sides are respectively provided with symmetrical left support bases 52 and right support bases 53 . Both the left support base 52 and the right support base 53 include a left side plate, a right side plate and a top plate connected above the left side plate and the right side plate, and the right side plate of the left support base 52 and the left side plate of the right support base 53 A sliding shaft 54 is slidably connected between them. In order to reduce sliding resistance, sliding bearings are installed on the right side plate of the left support base 52 and the left side plate of the right support base 53, and the sliding shaft 54 slides between the two sliding bearings.

The left side plate of the left support seat 52 and the inner side of the right side plate of the right support seat 53 are provided with a plate spring fixing table 1 521 , the left and right ends of the sliding shaft 54 are provided with a plate spring fixing table 2 541 , and the left support seat 52 The plate spring 55 is connected between the plate spring fixing table 1 521 and the plate spring fixing table 2 541 at the left end of the sliding shaft 54. Similarly, the plate spring fixing table 1 521 of the right support base 53 and the plate spring fixing table 2 on the right end of the sliding shaft 54 The connection between 541 is also connected with a leaf spring 55, and the connection method is screw fastening connection.

The top plate of the left support base 52 is provided with a differential head 57, the differential head 57 is located just above the leaf spring 55, the lower end of the differential head 57 is threadedly connected with the top plate of the left support base 52, and the upper circumferential surface of the threaded portion of the lower end of the differential head 57 is provided. There is a scale layer, and the scale layer is provided with scale values in the up and down direction. The scale value is obtained according to the conversion relationship between the up and down displacement of the differential head extending or retracting and the deformation value in the left and right directions of the leaf spring. In this way, by rotating the differential head 57 downward, The bottom of the differential head 57 presses down the curved shape of the leaf spring 55. After the leaf spring 55 is pressed, the lateral displacement will occur, thereby pushing the sliding shaft 54 to slide axially to the right, thereby driving the probe spacing adjustment mechanism 6 as a whole to the axial rightward. When the differential head 57 is rotated in the reverse direction, the bottom of the differential head 57 is separated from the leaf spring 55 on the left side, and the leaf spring 55 bends upward under the elastic force, thereby pulling the sliding shaft 54 to slide axially to the left, thereby driving the probe distance adjustment The mechanism 6 moves axially to the left as a whole.

A lower limit rod 56 is provided below the leaf spring 55, and the lower limit rod 56 is fixedly connected to the support plate 51; an upper limit rod 561 is also provided above the leaf spring 55 connected to the right support base 53, and the upper limit rod 561 and The lower limit rod 56 can make the leaf spring 55 deform within a certain range, so as to avoid excessive deformation and damage to the leaf spring 55 or affect the adjustment accuracy when the deformation position is exceeded. For example, in FIG. 57 If the deformation of the downward pressing leaf spring 55 is excessive and becomes concave, it will no longer conform to the conversion relationship of the deformation value based on it, resulting in inaccurate adjustment.

The sliding shaft 54 is also connected with a rotation-stopping device, which can prevent the probe spacing adjustment mechanism 6 from driving the sliding shaft 54 to rotate, and also prevent the rotational force from exerting a torsion force on the leaf spring 55 and affecting the life of the leaf spring 55 . The anti-rotation limiting device includes a guide shaft 50 and a guide shaft seat 501 slidably connected to both ends of the guide shaft 50. The lower end of the guide shaft seat 501 is fixed on the support plate (51), and the guide shaft seat 501 is also provided with sliding Bearings, so that the guide shaft 50 can slide left and right more smoothly. The guide shaft 50 and the sliding shaft 54 are fixed together by the fixing clip 59. When the sliding shaft 54 is forced to slide left and right, the guide shaft 50 plays a role of sliding and guiding.

The sliding shaft 54 is fixedly connected with a sliding shaft connecting block 58 , and the sliding shaft connecting block 58 is screwed and connected with a probe spacing adjustment mechanism 6 , and the probe spacing adjustment mechanism 6 includes a spacing adjustment substrate connected to the sliding shaft connecting block 58 . 61. The left and right sides of the spacing adjustment base plate 61 are provided with connecting seats 60, and connecting rods 62 are connected between the left and right connecting seats 60, and the connecting rods 62 are matched with a threaded sleeve 63 and a threaded sleeve. Two 64, the threaded sleeve 1 63 and the threaded sleeve 2 64 can move left and right on the connecting rod 62, wherein the connecting seat 60 is a rolling bearing seat, the connecting seat 60 is equipped with a rolling bearing, the connecting rod 62 is a threaded rod, and the connecting rod 62 Both ends are fixed in the inner ring of the rolling bearing in the connecting seat 60 on both sides, the threaded sleeve 1 63 and the threaded sleeve 2 64 are threadedly connected with the connecting rod 62, and the threaded sleeve 1 63 and the threaded sleeve 2 64 have opposite directions of rotation. In the example, the first threaded sleeve 63 is provided with a left-handed thread, and the second threaded sleeve 64 is provided with a right-handed thread, so that when the connecting rod 62 is rotated, the first threaded sleeve 63 and the second threaded sleeve 64 move toward or away from each other at the same time.

The lower ends of the first threaded sleeve 63 and the second threaded sleeve 64 are connected with a threaded sleeve connecting plate 631, the inner side of the threaded sleeve connecting plate 631 is connected with a threaded sleeve sliding block 633, and the spacing adjustment base plate 61 is connected with left and right threaded sleeve guide rails 634, The threaded sleeve slider 633 is connected with the threaded sleeve guide rail 634, so that when the distance between the threaded sleeve 1 63 and the threaded sleeve 2 64 is adjusted by rotating the connecting rod 62, the threaded sleeve 1 63 and the threaded sleeve 2 64 will not follow. It will move left and right along the direction of the threaded sleeve guide rail 634 . A probe bracket 632 for fixing the probes 635 is connected to the threaded sleeve connecting plate 631 , and the distance between the probes 635 can be adjusted by rotating the connecting rod 62 .

The connecting base 60 is also connected with a fixing knob 67. In this embodiment, the fixing knob 67 is located on the right connecting base 60, the fixing knob 67 is threadedly connected with the connecting base 60, and the rod end of the fixing knob 67 passes through the connecting base 60. , the connecting rod 62 can be resisted or loosened by rotating the fixed knob 67. When the distance between the probes 635 is adjusted, the connecting rod 62 can be fixed by rotating the fixed knob 67 to prevent the probe 635 from passively moving left and right during operation. , the spacing changes, and the measurement results are inaccurate.

The right end of the connecting rod 62 is provided with an adjustment knob 66, which is convenient for the operator to grasp and adjust the distance between the probes 635; a position indicator 65 is arranged between the connection base 60 and the adjustment knob 66, and the position indicator can monitor the number of rotations, and through the Entering parameters such as pitch, diameter of connecting rod 62, etc., can directly display the distance between probes 635 with high precision.

A centering spring 69 is connected between the threaded sleeve 1 63 and the threaded sleeve 2 64. When the adjustment knob is finely adjusted left and right, the centering spring 69 will exert a back force to eliminate the reverse adjustment gap and further improve the adjustment accuracy of the probe spacing. .

The lower end of the front side of the spacing adjustment base plate 61 is provided with a horizontal scale 68, and the lower end of the threaded sleeve connecting plate 631 is connected with a spacing pointer 681, which can intuitively read the probe spacing, which is more convenient.

The base 1 is provided with a left feeding table 7 and a right feeding table 8. The left feeding table 7 and the right feeding table 8 have the same structure and are both pneumatic sliding tables, which are fixed on the base 1 through the feeding table mounting holes 73 on the base 1. left and right. Since the feeding table slider 71 on the pneumatic sliding table can only slide from one end to the other end, and cannot be started or stopped at any point in the middle, the installation positions of the left feeding table 7 and the right feeding table 8 are respectively the same as those on the Y-axis sliding table 3 The left and right dead center positions of the Y-axis slider 31 correspond to each other. The slider 71 of the feeding table is provided with a chip fixing tool 72 , and the chip 9 is fixed in the chip fixing tool 72 .

Working process: Before the probe station starts to work, adjust the position of the probe precisely to adapt to different sizes of chips or PCBs. First, use the differential head 57 in the combined probe adjustment mechanism 5 to fine-tune the position of the probe in the left and right directions, and then adjust the distance between the left and right probes through the adjustment knob 66 in the probe spacing adjustment mechanism 6. After adjustment, tighten the fixed knob; The left feeding table 7 and the right feeding table 8 are alternately put into the chip 9 or the PCB detection part, the left feeding table 7 pushes the chip 9 to the left detection position, the Y-axis sliding table 3 moves to the left position, and the Z-axis sliding table 4 moves to the left position. Move down to start the inspection. After the inspection is completed, the Z-axis sliding table 4 retreats upward, the left upper material table 7 retreats, takes down the chip 9 that has been inspected, and installs the chip 9 to be inspected; while the left upper material table 7 is retracted, the upper right The material table 8 pushes the chip 9 to the right detection position, the Y-direction pneumatic sliding table moves to the right position, and the Z-direction pneumatic sliding table moves down to start the detection. After the detection is completed, the Z-axis sliding table 4 retreats upward, and the right feeding The table 8 is retracted, the right upper material table 8 is unloaded and then new material is loaded, and the left upper material table 7 after the loading and feeding is completed pushes the chip 9 to the left detection position, and starts a new round of detection cycle.

In the description of the present invention, the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "vertical", "horizontal", etc. The orientation or positional relationship is based on the orientation or positional relationship shown in the drawings, and is only for describing the present invention rather than requiring the present invention to be constructed or operated in a specific orientation, and therefore should not be construed as a limitation of the present invention. In the present invention, "connected" and "connected" should be understood in a broad sense, for example, it may be a connection or a detachable connection; it may be a direct connection or an indirect connection through an intermediate component. In other words, the specific meanings of the above terms can be understood in specific situations.

The above descriptions are the preferred embodiments of the present invention, and the description of the specific embodiments is only used to better understand the idea of the present invention. For those skilled in the art, several improvements or equivalent replacements can also be made according to the principles of the present invention, and these improvements or equivalent replacements are also considered to fall within the protection scope of the present invention.

Claims (10)

1. The utility model provides a location detection device based on leaf spring fine setting, includes base (1), be equipped with mounting bracket (2) on base (1), its characterized in that: the mounting rack (2) is connected with a Z-axis sliding table (4), and the Z-axis sliding table (4) is connected with a combined probe adjusting mechanism (5) through a Z-axis connecting block (42); the combined probe adjusting mechanism (5) comprises a supporting plate (51) horizontally connected to a Z-axis connecting block (42), the left side of the top surface of the supporting plate (51) is connected with a left supporting seat (52), the right side of the top surface of the supporting plate (51) is connected with a right supporting seat (53) symmetrical to the left supporting seat (52), a sliding shaft (54) capable of sliding left and right penetrates through the space between the left supporting seat (52) and the right supporting seat (53), the sliding shaft (54) is connected with a sliding shaft connecting block (58), the sliding shaft (54) is further connected with a rotation stopping limiting device, and the sliding shaft connecting block (58) is connected with a probe spacing adjusting mechanism (6); probe interval guiding mechanism (6) is including connecting interval adjustment base plate (61) on sliding shaft connecting block (58), the left and right both sides of interval adjustment base plate (61) all are equipped with connecting seat (60), left and right be connected with connecting rod (62) between connecting seat (60), the cooperation is connected with thread bush (63) and thread bush two (64) on connecting rod (62), left and right motion can be gone up in connecting rod (62) in thread bush (63) and thread bush two (64), the lower extreme of thread bush (63) and thread bush two (64) all is connected with thread bush connecting plate (631), be connected with probe support (632) that are used for fixed probe (635) on thread bush connecting plate (631).

2. The positioning detection device based on leaf spring fine adjustment of claim 1, characterized in that: the left supporting seat (52) and the right supporting seat (53) respectively comprise a left side plate, a right side plate and a top plate connected above the left side plate and the right side plate, and the sliding shaft (54) is connected to the right side plate of the left supporting seat (52) and the left side plate of the right supporting seat (53) in a sliding manner; the left side plate of the left supporting seat (52) is connected with the left end of the sliding shaft (54), and the right side plate of the right supporting seat (53) is connected with the right end of the sliding shaft (54) through a plate spring (55); a top plate of the left supporting seat (52) is provided with a differential head (57), the differential head (57) is positioned right above the plate spring (55), and the differential head (57) can move up and down to press or loosen the plate spring (55).

3. The positioning detection device based on leaf spring fine adjustment of claim 2, characterized in that: the lower end of the differential head (57) is in threaded connection with a top plate of the left supporting seat (52), and a scale layer is arranged on the circumferential surface above the threaded part at the lower end of the differential head (57).

4. The positioning detection device based on leaf spring fine adjustment of claim 3, characterized in that: a lower limiting rod (56) is arranged below each plate spring (55), and the lower limiting rods (56) are connected to the supporting plate (51); an upper limit rod (561) is also arranged above the plate spring (55) connected with the right supporting seat (53).

5. The positioning detection device based on leaf spring fine adjustment of claim 4, characterized in that: the rotation stopping limiting device comprises a guide shaft (50) and guide shaft seats (501) which are connected to two ends of the guide shaft (50) in a sliding mode, and the lower ends of the guide shaft seats (501) are fixed on a supporting plate (51); the guide shaft (50) is connected with the sliding shaft (54) through a fixing clamp (59).

6. The positioning detection device based on leaf spring fine adjustment of claim 1, characterized in that: the connecting seat (60) on the probe spacing adjusting mechanism (6) is a rolling bearing seat, the connecting rod (62) is a threaded rod, and the first threaded sleeve (63) and the second threaded sleeve (64) are in threaded fit connection with the connecting rod (62) and have opposite rotation directions; the inner side of the threaded sleeve connecting plate (631) is connected with a threaded sleeve sliding block (633), the distance adjusting base plate (61) is connected with a threaded sleeve guide rail (634) in the left-right direction, and the threaded sleeve sliding block (633) is connected with the threaded sleeve guide rail (634) in a matched mode; still be connected with fixed knob (67) on connecting seat (60), fixed knob (67) and connecting seat (60) threaded connection, support or loosen through rotatory fixed knob (67) connecting rod (62).

7. The positioning detection device based on leaf spring fine adjustment of claim 6, characterized in that: an adjusting knob (66) is arranged at the right end of the connecting rod (62); a position indicator (65) is arranged between the connecting seat (60) and the adjusting knob (66).

8. The positioning detection device based on leaf spring fine adjustment of claim 7, characterized in that: and a centering spring (69) is connected between the first threaded sleeve (63) and the second threaded sleeve (64).

9. The positioning detection device based on leaf spring fine adjustment of claim 8, characterized in that: the lower end of the front side face of the distance adjusting base plate (61) is provided with a horizontal graduated scale (68), and the lower end of the thread sleeve connecting plate (631) is connected with a distance pointer (681).

10. The positioning detection device based on the fine tuning of the plate spring according to any one of claims 1 to 9, characterized in that: still be equipped with Y axle sliding table (3) between mounting bracket (2) and Z axle sliding table (4), be equipped with left material loading platform (7) and right material loading platform (8) on base (1), the position of left side material loading platform (7) and right material loading platform (8) is corresponding with the left and right dead point position of Y axle slider (31) on Y axle sliding table (3) respectively.

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