CN213222075U - Centralized source supply device - Google Patents
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- CN213222075U CN213222075U CN202020824099.8U CN202020824099U CN213222075U CN 213222075 U CN213222075 U CN 213222075U CN 202020824099 U CN202020824099 U CN 202020824099U CN 213222075 U CN213222075 U CN 213222075U
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Abstract
The utility model discloses a centralized source supply device, which comprises a source bottle, a source barrel for providing source liquid for the source bottle and a temperature control cavity for preserving heat of the source bottle, wherein the source barrel is provided with a pressure control device, an acid inlet pipeline for supplementing the source liquid and a liquid supplementing piece for delivering the source liquid for the source bottle, the source bottle is provided with an air inlet pipe for inputting carrier gas and a pipeline delivery mechanism, the pipeline delivery mechanism comprises a gas delivery mechanism for outputting gas and a pressure relief pipeline mechanism, the utility model adopts a centralized source supply mode to supply liquid for a plurality of source bottles, the centralized source supply is supplemented once, the service time is long, the source changing bottles are not required to be disassembled and transported, only the acid inlet is butted, acid is fed outside, the risk is reduced, the fluctuation of the liquid amount in the source bottles is reduced simultaneously, the source amount carried by gas is consistent, the liquid pressure in the source bottles is consistent, the influence of the gas on the temperature of the source liquid is reduced simultaneously, the source liquid of the utility model is continuously used, the use is free from waste, and the utilization rate of the source liquid is improved.
Description
Technical Field
The utility model belongs to semiconductor manufacturing and solar photovoltaic cell make the field especially relate to the supply device in semiconductor manufacturing and photovoltaic cell manufacture equipment.
Background
At present, liquid boron sources and liquid phosphorus sources are mostly used in boron diffusion processes and phosphorus diffusion processes, and carrier gas is used for carrying the boron sources and the phosphorus sources into a reaction cavity.
At present, the mode that a single source bottle of a single thermostatic bath corresponds to a single furnace tube is mainly adopted, or the mode that a plurality of source bottles are arranged in a thermostatic cabinet for controlling the temperature is adopted. The two differences are that the source bottles are controlled separately and the source bottles are controlled centrally. In fact, the source liquid is still used in the same mode, and when the old source bottle is used for the rest two to three centimeters, the source bottle needs to be replaced and the process needs to be carried out.
The prior art has a plurality of problems:
1. the source bottle needs to be replaced frequently, and the source bottle needs to be replaced once about 15 days conventionally.
2. In the use process of the existing equipment, the source quantity carried by gas state can be changed along with the reduction of the source quantity, the process can generate influence, and the flow of process gas needs to be changed.
3. With the reduction of the source quantity, the larger the temperature fluctuation brought by the carrier gas entering the source liquid, the process stability is influenced.
4. The source liquid in the source bottle with the height of several centimeters can not be used. Low utilization rate, waste and unsafe treatment and recovery.
The scheme is a mode of supplying liquid to the source bottles by using one large-capacity source barrel, the liquid amount in each source bottle in a plurality of devices does not need to be concerned, and only after the liquid level in the source barrel is alarmed, the alarm is cleared and the liquid supplement is prepared.
Disclosure of Invention
The utility model discloses an overcome prior art not enough, provide a concentrate source device.
In order to achieve the above purpose, the utility model adopts the following technical scheme: a centralized source supply device, comprising: the source bottle is provided with an air inlet pipe for inputting carrier gas and a pipeline conveying mechanism, and the pipeline conveying mechanism comprises a gas conveying mechanism for outputting gas and a pressure relief pipeline mechanism.
Further, the method comprises the following steps of; the lower end of the liquid supplementing piece extends into the source barrel, liquid supplementing pipelines are communicated with the upper end of the liquid supplementing piece and are arranged into a plurality of groups, a liquid supplementing pump is fixedly arranged on each liquid supplementing pipeline, and the other end of each liquid supplementing pipeline is fixedly arranged on the source bottle.
Further, the method comprises the following steps of; the source barrel is also provided with an acid discharge device which comprises an acid discharge pipeline, the acid discharge pipeline is fixedly arranged on the source barrel, the lower side of the acid discharge pipeline extends into the source barrel, the lower end surface of the acid discharge pipeline is close to the bottom of the source barrel, an acid discharge pump is communicated with the acid discharge pipeline, the acid discharge pump drives an acid discharge pipeline to discharge the source liquid in the source barrel, the acid discharge device also comprises an air inlet mechanism, the air inlet mechanism comprises an air inlet pipeline fixedly arranged on the source barrel, the lower side of the air inlet pipeline extends into the source barrel, the air inlet pipeline is fixedly provided with a one-way power valve, the air flow direction of the one-way power valve is set to be an external inflow source barrel, the air inlet pipeline is provided with a pneumatic valve, the gas inlet mechanism is used for controlling the circulation of gas, and the gas inlet mechanism maintains the source liquid in the source barrel to be emptied and the pressure in the source barrel when the source barrel supplies the source liquid to the source bottle.
Further, the method comprises the following steps of; the pressure control device comprises an air outlet pipeline communicated with the air inlet pipeline, an air outlet one-way valve is fixedly arranged on the air outlet pipeline, the air flow direction of the air outlet one-way valve is set from the source barrel to the air outlet pipeline, and the air outlet pipeline is connected with the acid gas discharge processing pipeline. The air inlet pipeline is provided with a pressure gauge, the air outlet pipeline adjusts the pressure in the source barrel, and the pressure gauge gives an alarm for the abnormality of the pressure in the source barrel.
Further, the method comprises the following steps of; the source barrel is also provided with a liquid level warning mechanism, the liquid level warning mechanism comprises a low liquid level warning point, a high liquid level warning point and a standby liquid level warning point, the liquid level in the source barrel is lower than the low liquid level warning point, and the low liquid level warning point gives an alarm to prompt the supplement of source liquid; the source barrel replenishes source liquid to enable the liquid level to reach the position of a high liquid level warning point and enter a standby state; the standby liquid level warning point is located on the upper side of the high liquid level warning point, the high liquid level warning point has a problem, the supplement source liquid level reaches the standby liquid level warning point, and the standby liquid level warning point gives an alarm.
Further, the method comprises the following steps of; an air inlet pipe is fixedly arranged on the source bottle, extends into the source bottle, and is externally connected with process carrier gas on equipment; and a thermocouple is arranged in the source bottle and used for adjusting the heating power of the temperature control cavity.
Further, the method comprises the following steps of; the pipeline conveying mechanism also comprises an air-through piece fixedly arranged on the source bottle, the air-through piece is communicated with the pressure relief pipeline mechanism and the gas conveying mechanism, the pressure relief pipeline mechanism comprises a pressure relief pipeline communicated with the ventilating piece, a pressure relief pneumatic valve, a pressure relief one-way valve and a pressure relief outlet are fixedly arranged on the pressure relief pipeline, the pressure relief outlet is externally connected with an acid gas discharge processing pipeline, the air flow direction of the pressure relief one-way valve is arranged from the source bottle to the acid discharge pipeline, the pressure relief pipeline mechanism keeps the air pressure in the source bottle within a certain range through pressure relief, the air conveying mechanism comprises an air vent pipeline communicated with the air vent piece, the air pipe is fixedly provided with a conveying pneumatic valve, an air outlet and an air one-way valve, the air outlet is externally connected with a reaction cavity, the gas flow direction of the ventilation one-way valve is set from the source bottle to the reaction cavity, and the gas conveying mechanism introduces gas into the reaction cavity for reaction.
Further, the method comprises the following steps of; the source bottle is further provided with a detection mechanism, the detection mechanism comprises a low liquid level detection point, a high liquid level detection point and a standby liquid level detection point, the standby liquid level detection point is located on the upper side of the high liquid level detection point, the low liquid level detection point is located on the lower side of the high liquid level detection point, and source liquid supplement in the source bottle (126) is controlled by detecting liquid level signals through the low liquid level detection point (115), the high liquid level detection point (114) and the standby liquid level detection point (113).
Further, the method comprises the following steps of; a group of source bottles or a plurality of groups of source bottles are arranged in the temperature control cavity; the source barrel and the source bottle are arranged in a temperature control cavity, or are independently arranged in the temperature control cavity, or are not provided with the temperature control cavity.
Further, the method comprises the following steps of; the liquid supplementing piece (127) supplements source liquid for the source bottle (126) through a set single liquid supplementing amount, the set single liquid supplementing amount is set as a fixed liquid supplementing amount or a fixed opening time length of the liquid supplementing pump (107), and the set single liquid supplementing amount is larger than the using source amount of a single process; or the liquid is replenished through signal control.
To sum up, the utility model discloses a mode of concentrating the supply supplies liquid to a plurality of source bottles, concentrates the supply and once mends liquid, and live time is permanent, need not to dismantle the transport and trades the source bottle, only docks into sour mouthful, and the outside is advanced sour, reduces the risk, reduces the fluctuation of liquid volume in the source bottle simultaneously, makes the source volume that gas carried unanimously, and liquid pressure is unanimous in the source bottle, has reduced the influence of gas to source liquid temperature simultaneously, the utility model discloses a source liquid continuous use uses extravagantly, has improved the utilization ratio of source liquid.
Drawings
Fig. 1 is a schematic view of the device of the present invention.
Fig. 2 is a schematic diagram of a second embodiment of the present invention.
Fig. 3 is a third schematic view of the embodiment of the present invention.
Fig. 4 is a fourth schematic diagram of the embodiment of the present invention.
Fig. 5 is a schematic diagram of an embodiment of the present invention.
The labels in the figure are: the device comprises an air inlet pipeline 100, an air-operated valve 101, a pressure gauge 102, a one-way power valve 103, an acid discharge pipeline 104, an acid discharge pump 105, an acid inlet pipeline 106, a liquid supplementing pump 107, a liquid supplementing pipeline 108, an air inlet pipe 109, a pressure relief one-way valve 110, a pressure relief outlet 111, a vent outlet 112, a standby liquid level detection point 113, a high liquid level detection point 114, a low liquid level detection point 115, a thermocouple 116, a delivery pneumatic valve 117, a pressure relief pneumatic valve 118, a low liquid level warning point 119, a high liquid level warning point 120, a standby liquid level warning point 121, a temperature control cavity 123, a vent one-way valve 124, a vent pipeline 125, a source bottle 126, a liquid supplementing piece 127, a pressure relief pipeline 130, a vent pipeline 131, a vent piece 132, a vent one-way valve 133, a barrel body 200, a barrel bottom 201, a barrel cover 202, a source barrel cavity 203, a bottle.
Detailed Description
The following description of the embodiments of the present invention is provided for illustrative purposes, and other advantages and effects of the present invention will be readily apparent to those skilled in the art from the disclosure herein. The present invention can also be implemented or applied through other different specific embodiments, and various details in the present specification can be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention. It is to be noted that the features in the following embodiments and examples may be combined with each other without conflict.
It should be noted that the drawings provided in the following embodiments are only for illustrating the basic concept of the present invention, and the components related to the present invention are only shown in the drawings rather than drawn according to the number, shape and size of the components in actual implementation, and the form, amount and ratio of the components in actual implementation may be changed at will, and the layout of the components may be more complicated.
All directional indicators (such as upper, lower, left, right, front, rear, horizontal, vertical … …) in the embodiments of the present invention are only used to explain the relative position relationship between the components, the motion situation, etc. in a specific posture, if the specific posture changes, the directional indicator changes accordingly.
The first embodiment is as follows:
as shown in fig. 1, a centralized source supply device includes a source bottle 126, a source barrel 122 for providing source liquid for the source bottle 126, and a temperature control cavity 123 for preserving heat of the source bottle 126, the source barrel 122 is provided with a pressure control device, an acid inlet pipe 106 for replenishing source liquid, and a liquid replenishing piece 127 for delivering source liquid to the source bottle 126, the source bottle 126 is provided with an air inlet pipe 109 for inputting carrier gas and a pipeline delivery mechanism, and the pipeline delivery mechanism includes a gas delivery mechanism for outputting gas and a pressure relief pipe mechanism.
The source barrel 122 comprises a barrel bottom 201, a barrel body 200 and a barrel cover 202, the barrel cover 202 is horizontally parallel to the barrel bottom 201, the barrel cover 202 is located on the upper side of the barrel bottom 201, the barrel bottom 201 is in contact with a placing surface, the barrel body 200 is connected with the barrel cover 202 and the barrel bottom 201, the barrel body 200 and the barrel cover 202 form a cavity of a source barrel cavity 203, the acid inlet pipeline 106 is arranged on the barrel cover 202 and is communicated with the source barrel cavity 203, the acid inlet pipeline 106 is used for liquid supplement of the source barrel 122, the acid inlet pipeline 106 is sealed and closed in normal process engineering, and when the source barrel 122 needs liquid supplement, the acid inlet pipeline 106 is connected with an external liquid supplement pipeline for liquid supplement.
The liquid supplementing piece 127 is fixedly connected with the barrel cover 202, the lower end of the liquid supplementing piece 127 penetrates through the barrel cover 202 and extends into the source barrel cavity 203, the upper end of the liquid supplementing piece 127 is communicated with liquid supplementing pipelines 108, the liquid supplementing pipelines 108 can be arranged in multiple groups, and in this embodiment, the liquid supplementing pipelines 108 are arranged in two groups; in the implementation process of this embodiment, when the source liquid in the source bottle 126 is sufficient, the fluid infusion pump 107 is turned off, when the source bottle 126 needs fluid infusion, the fluid infusion pump 107 is turned on, and the source barrel 122 supplements the source liquid to the source bottle 126.
Still be provided with the acid discharge device on the source bucket 122, the acid discharge device is including acid discharge pipeline 104, acid discharge pipeline 104 sets firmly in bung 202, acid discharge pipeline 104 downside runs through bung 202 and extends to in the source bucket chamber 203, just the terminal surface is close to barrel head 201 under acid discharge pipeline 104, the intercommunication is provided with acid discharge pump 105 on the acid discharge pipeline 104, acid discharge pump 105 starts the back, and the drive acid discharge pipeline 104 will the source liquid evacuation in the source bucket 122 avoids the source liquid extravagant and provides convenience for follow-up operation.
The acid discharge device further comprises an air inlet mechanism, the air inlet mechanism comprises an air inlet pipeline 100 fixedly arranged on a barrel cover 202, the lower side of the air inlet pipeline 100 extends into a source barrel cavity 203, the lower end face of the air inlet pipeline 100 is close to the barrel cover 202, so that the source barrel cavity 203 is filled with air input by the air inlet pipeline 100, a one-way power valve 103 is fixedly arranged on the air inlet pipeline 100, the airflow direction of the one-way power valve 103 is set to be that the air flows into the source barrel 122 from the outside, and the air flow in the source barrel 122 is prevented from returning to an air inlet control end from the air inlet pipeline 100 to influence. The gas inlet pipeline 100 is provided with a pneumatic valve 101 for controlling the circulation of gas, in normal process engineering, the acid discharge pump 105 is closed, the acid discharge pipeline 104 is in a closed state, when an emergency or a source barrel 122 needs to be maintained, the upper side of the acid discharge pipeline 104 is connected with an external source liquid receiving device, the acid discharge pump 105 and the pneumatic valve 101 are opened, the gas inlet pipeline 100 conveys gas to the source barrel cavity 203, so that the source barrel 122 is provided with two groups of channels communicated with the outside, the source liquid in the source barrel 122 can be discharged out of the source barrel at the moment, the acid discharge channel 104 discharges acid outwards, and the channel of the gas inlet pipeline 100 introduces nitrogen into the source barrel to maintain the pressure in the source barrel. When the source bottle 126 needs to be replenished, the air intake mechanism is simultaneously activated to maintain the pressure in the source tank when the source tank 122 supplies the source bottle 126 with the source liquid.
The pressure control device comprises an air outlet pipeline 125 communicated with an air inlet pipeline 100, the air outlet pipeline 125 is connected with an acid gas discharge processing pipeline, an air outlet one-way valve 124 is fixedly arranged on the air outlet pipeline 125, the air flow direction of the air outlet one-way valve 124 is set from a source barrel 122 to the air outlet pipeline 125, the air inlet pipeline 100 is used for introducing air into the source barrel 122 when a source bottle 126 is replenished with liquid and an acid pump 105 is used for discharging acid, the overflowed air can be discharged from the one-way valve 124 to maintain the air pressure in the source barrel 122, a pressure gauge 102 is arranged on the air inlet pipeline 100, when the equipment normally works, the air outlet one-way valve 124 is in an open state, when the pressure in the source barrel 122 is too high, the pressure in the source barrel 122 is adjusted through the air outlet pipeline 125, so that the pressure in the source barrel 122 is kept in a certain range, if the air outlet one-way valve 124 or the air outlet pipeline 125 has, the pressure gauge 102 can detect that the pressure in the source barrel 122 exceeds a set value, the pressure gauge 102 gives an alarm, and meanwhile, in the process of supplementing the source liquid into the source barrel 122 or supplementing the source liquid into the source bottle 126, the pressure in the source barrel 122 can be reduced, the air pressure can be controlled within a certain range by opening the air inlet mechanism, if a problem occurs in one process, the pressure in the source barrel 122 can be changed or is higher or lower than the set pressure range, and at the moment, the pressure gauge 102 gives an alarm through the alarm, so that the safety and the reliability of the equipment are improved.
The source barrel 122 is further provided with a liquid level warning mechanism, the liquid level warning mechanism comprises a low liquid level warning point 119 fixedly arranged on the lower side of the barrel body 200, a high liquid level warning point 120 and a standby liquid level warning point 121 on the upper side of the barrel body 200, when the liquid level of the source barrel 122 is lower than the low liquid level warning point 119, the low liquid level warning point 119 gives an alarm to prompt the supplement of the source liquid, a certain height difference exists between the low liquid level warning point 119 and the barrel bottom 201, the lower end surface of the liquid supplement part 127 is positioned on the lower side of the low liquid level warning point 119, so that the utilization rate of the source bottle 126 to the source liquid in the source barrel 122 can be improved, meanwhile, the time for supplementing the source liquid to the source barrel 122 can be delayed, the flexible operation of an operator is facilitated, the phenomenon that the source barrel 122 stops when giving an alarm to affect the production efficiency is avoided, the high liquid level warning point 120 is positioned on the upper side of the barrel body 200, the source barrel 122 supplements the source liquid to enable the liquid level to reach the, stopping the acid inlet pipeline 106 from being supplemented, stopping equipment related to source liquid supplementation, and simultaneously enabling the equipment to enter a standby state, so that the source liquid supplementation amount in the source barrel 122 is controlled, and excessive supplementation is avoided; reserve liquid level warning point 121 is located high liquid level warning point 120 upside, reserve liquid level warning point 121 belongs to reserve alarm device, works as high liquid level warning point 120 goes wrong, during the replenishment volume of uncontrollable source liquid, source liquid level can be higher than high liquid level warning point 120 until reaching reserve liquid level warning point 121, and reserve liquid level warning point 121 reports to the police and warns this moment, avoids the excessive replenishment of source liquid, through the replenishment volume of dual control source liquid, has further improved the reliability of equipment.
The source bottle 126 comprises a bottle bottom 302, a bottle body 301 and a bottle cap 300, the bottle cap 300 is horizontally parallel to the bottle bottom 302, the bottle cap 300 is located on the upper side of the bottle bottom 302, the bottle bottom 302 is in contact with a placing surface, the bottle body 301 connects the bottle cap 300 with the bottle bottom 302, the bottle cap 300, the bottle body 301 and the bottle bottom 302 form a cavity of a source bottle cavity 303, the lower end face of a liquid supplementing pipeline 108 is arranged on the bottle cap 300 and is communicated with the source bottle cavity 303, the liquid supplementing pipeline 108 is used for supplementing liquid for the source bottle 126, in normal process engineering, the liquid supplementing pump 107 is sealed and closed, when the source bottle 126 needs to be supplemented with liquid, the liquid supplementing pump 107 is opened, and the source barrel 122 conveys the source liquid into the source bottle cavity 303 through the liquid supplementing piece 127 and the liquid supplementing pipeline 108.
An air inlet pipe 109 is fixedly arranged on the bottle cap 300, the air inlet pipe 109 penetrates through the bottle cap 300 and extends into the source bottle cavity 303, a process carrier gas on equipment is connected to the upper end face of the air inlet pipe 109, and the lower end face of the air inlet pipe 109 is close to the source bottle cavity 303, so that after the carrier gas is input into the source bottle cavity 303 through the air inlet pipe 109, the contact time and area of the carrier gas and a source liquid in the source bottle 126 are increased, and the efficiency is improved; the bottle cap 300 is fixedly provided with a thermocouple 116 located in the source bottle cavity 303, in this embodiment, the multiple groups of source bottles 126 are arranged in a temperature control cavity 123, the temperature control cavity 123 controls the temperature of the source bottles 126, the source liquid temperature inside the source bottles 126 is kept consistent under the condition of stable temperature, specifically, the temperature control cavity 123 controls the temperature of the source bottles 126, the temperature of the source bottles 126 affects the temperature of the source liquid, the carrier gas is conveyed to the source bottles 126 to be in contact with the source liquid, the carrier gas flows out to take away heat, so that the temperature of the source liquid is reduced, the source bottles 126 in contact with the carrier gas are affected, the temperature of the source bottles 126 is reduced, the thermocouple 116 detects the reduction of the temperature of the source liquid, and timely increases the heating power of the temperature control cavity 123, so that the temperature of the source liquid is timely adjusted, and the reliability of the device is further improved.
The pipeline conveying mechanism comprises an air vent 132, a pressure relief pipeline mechanism and an air conveying mechanism, the vent 132 is fixedly arranged on the bottle cap 300 and extends into the source bottle cavity 303, the pressure relief pipeline mechanism comprises a pressure relief pipeline 130 communicated with the vent 132, the pressure relief pipeline 130 is fixedly provided with a pressure relief pneumatic valve 118, a pressure relief check valve 110 and a pressure relief outlet 111, the pressure relief pneumatic valve 118 is a normally open pneumatic valve, namely, in the standby non-ventilation state, the pneumatic valve is in a conduction state, the pressure relief outlet 111 is externally connected with an acid exhaust pipeline, the pressure relief check valve 110 is oriented to flow from the source bottle 126 to the acid gas vent process line, during normal operation of the source bottle 126, the pressure relief pneumatic valve 118 is in a closed state, when the pressure of the source bottle 126 is too high, the pressure relief pneumatic valve 118 is opened, and the pressure is relieved to the acid discharge pipe through the pressure relief one-way valve 110, so that the air pressure in the source bottle 126 is kept within a certain range.
The gas conveying mechanism comprises a vent pipeline 131 communicated with the vent piece 132, a conveying pneumatic valve 117, a vent outlet 112 and a vent one-way valve 133 are fixedly arranged on the vent pipeline 131, the vent outlet 112 is externally connected with a reaction cavity, the airflow direction of the vent one-way valve 133 is set from the source bottle 126 to the reaction cavity, when the source bottle 126 works normally, the conveying pneumatic valve 117 is opened, carrier gas enters source liquid in the source bottle 126, and the bubbled carrier gas passes through the conveying pneumatic valve 117, the vent one-way valve 133 and the vent outlet 112 through the vent pipeline 131 and then is introduced into the reaction cavity for reaction.
In the implementation process, when the device is in a standby state, the infusion pump 107 is in a closed state, the conveying pneumatic valve 117 is in a closed state, the pressure relief pneumatic valve 118 is in an open state, the air pressure in the source bottle 126 is kept within a certain range, when the device works normally, the pressure relief pneumatic valve 118 is in a non-conducting state, the conveying pneumatic valve 117 is opened, carrier gas enters the source liquid in the source bottle 126 through the air inlet pipe 109, and after bubbling, the carrier gas passes through the conveying pneumatic valve 117, the ventilation one-way valve 133 and the ventilation outlet 112 through the ventilation pipeline 131 and then is introduced into the reaction cavity for reaction; when the air pressure in the source bottle 126 is too high, the pressure relief air-operated valve 118 is opened, and the pressure is relieved to the acid discharge pipe through the pressure relief one-way valve 110, so that the air pressure in the source bottle 126 is kept within a certain range.
The source bottle 126 is also provided with a detection mechanism, the detection mechanism comprises a low liquid level detection point 115, a high liquid level detection point 114 and a standby liquid level detection point 113 which are arranged on the bottle body 301, the low liquid level detection point 115 is positioned at the lower side of the high liquid level detection point 114, the standby liquid level detection point 113 is positioned at the upper side of the high liquid level detection point 114, the low liquid level detection point 115 is arranged in the middle area of the bottle body 301, the low liquid level detection point 115 and the high liquid level detection point 114 are used as key points of replenishing source liquid, that is, in normal operation, the source bottle 126 has a source liquid level between the low liquid level detection point 115 and the high liquid level detection point 114, and, in particular, the detection signal of the high liquid level detection point 114 shows that liquid exists or does not exist, the detection signal of the low liquid level detection point 115 shows that liquid exists, the detection signal of the standby liquid level detection point 113 shows that no liquid exists, and the standby state is normal; when the detection signal of the high liquid level detection point 114 shows no liquid, the detection signal of the low liquid level detection point 115 also shows no liquid, and the state is that the source bottle 126 needs to be supplemented with the source liquid, the device performs related liquid supplementing operation, and the certain height difference exists between the low liquid level detection point 115 and the bottle bottom 302, so that the time for supplementing the source liquid to the source bottle 126 can be delayed, the flexible operation of an operator is facilitated, and the phenomenon that the production efficiency is influenced because the source bottle 126 stops immediately when alarming occurs is avoided.
The liquid supplementing operation mode of the equipment controls the source liquid supplementing amount through signals, specifically, the liquid supplementing pump 107 is turned on until the detection signal of the low liquid level detection point 115 shows that liquid exists, the liquid supplementing pump 107 is turned off after the detection signal of the high liquid level detection point 114 shows that liquid exists, corresponding valves are turned off, and the equipment enters a normal standby state.
In order to prevent the high liquid level detection point 114 from being in a problem, the standby liquid level detection point 113 is used as a standby early warning device, when the source bottle 126 is used for liquid supplement, if the high liquid level detection point 114 is in a problem, the supplemented source liquid level exceeds the high liquid level detection point 114 until the supplemented source liquid level reaches the standby liquid level detection point 113, the standby liquid level detection point 113 displays liquid in a signal mode, the state is an abnormal state, air inlet of the liquid supplement pump 107 and the air inlet pipe 109 and corresponding valves related to the process are closed, a normal standby state is achieved, and an alarm is given, specifically, the alarm of the abnormal state indicates that the liquid level detection point is in a fault, manual treatment is needed at the moment, and.
Example two:
as shown in fig. 2, the difference between this embodiment and the first embodiment is that in the first embodiment, the source barrel 122 is not disposed in the temperature-controlled cavity 123, and in this embodiment, the source barrel 122 and the source bottle 126 are disposed in one temperature-controlled cavity 123, so as to increase the range of temperature control of the source liquid and reduce energy consumption.
Example three:
as shown in fig. 3, the difference between the present embodiment and the first embodiment is that in the first embodiment, the multiple groups of source bottles 126 share one temperature-controlled cavity 123, and in the present embodiment, each group of source bottles 126 is disposed in one temperature-controlled cavity 123, so as to improve the accuracy of the temperature-controlled cavity 123 in controlling the temperature of the source bottles 126.
Example four:
as shown in fig. 4, the difference between the present embodiment and the fourth embodiment is that in the fourth embodiment, the source barrel 122 is not disposed in the temperature-controlled cavity 123, and in the present embodiment, the source barrel 122 is disposed in a separate temperature-controlled cavity 123, so as to increase the range of controlling the temperature of the source liquid.
Example five:
as shown in fig. 5, the present embodiment is different from the above embodiments in that in the above embodiments, the low liquid level detection point 115 and the high liquid level detection point 114 in the detection mechanism are key points of the replenishment source liquid; in this embodiment, the high level detection point 114 is used as a key point for replenishing the source liquid.
In this embodiment, the low liquid level detection point 115 of the detection mechanism is disposed at the lower side of the bottle body 301, and the high liquid level detection point 114 is used as a key point for supplementing the source liquid, that is, in normal operation, the liquid level of the source liquid in the source bottle 126 fluctuates up and down at the high liquid level detection point 114, specifically, in a normal state, the standby liquid level detection point 113 displays no liquid in signal, the low liquid level detection point 115 displays liquid in signal, and the high liquid level detection point 114 displays liquid in signal, and the standby state is normal; the standby liquid level detection point 113 signals that no liquid exists, the low liquid level detection point 115 signals that no liquid exists, and the high liquid level detection point 114 signals that no liquid exists, liquid supplement is needed in the state, and the device performs related liquid supplement operation; the standby liquid level detection point 113 is in an abnormal state, and an alarm is required to be sent and processed manually, wherein the standby liquid level detection point 113 is in a liquid state or the low liquid level detection point 115 is in a liquid-free state.
When the detection signal of the low liquid level detection point 115 shows that there is no liquid, the state is that the source bottle 126 is seriously lack of liquid, and is abnormal, generally, the state can be generated after the first use or maintenance, at this moment, manual or automatic liquid supplement is selected after manual inspection, and the mode can influence the source temperature.
When the standby liquid level detection point 113 indicates that liquid exists, the standby liquid level detection point is in an abnormal state, and the reason for causing the state is that when the source bottle 126 is used for liquid supplement, the liquid level of supplemented source liquid exceeds the high liquid level detection point 114 and reaches the standby liquid level detection point 113, in the state, the air inlet of the liquid supplement pump 107 and the air inlet pipe 109 and corresponding valves related to the process are closed, normal standby is carried out, and an alarm is given out.
In addition, in the above embodiment, the gas input by the intake pipe 100 may be set to be nitrogen; the carrier gas may also be provided as nitrogen.
In the above embodiment, the liquid level warning mechanism disposed on the source barrel (122) and the detection mechanism disposed on the source bottle (126) can detect the liquid level by ultrasonic detection or laser detection.
In the above embodiment, the fluid replacement operation of the source bottle 126 can be integrated in a suitable step during the operation of the equipment process without using the source fluid, i.e. some steps after the air inlet pipe 109 and the pneumatic valve 117 are closed are related to the fluid replacement operation based on the fluid level detection point.
In other embodiments, the acid inlet pipe 106 and the acid outlet pipe 104 may be directly and fixedly connected to an external liquid replenishing pipe and an external source liquid receiving device, wherein a switch pump is connected between the acid inlet pipe 106 and the external liquid replenishing pipe, the switch pump is normally in a closed state, when the source barrel 122 needs to replenish liquid, the switch pump is turned on, and the acid inlet pipe 106 is connected to the external liquid replenishing pipe to replenish liquid.
In other embodiments, the manner of the relevant fluid replacement operation of the apparatus may also control the source fluid replacement amount through a signal, specifically, the fluid replacement pump 107 is turned on until the high fluid level detection point 114 indicates that there is fluid, and then the fluid replacement pump 107 is turned off, the corresponding valve is turned off, and the normal standby state is entered.
In other embodiments, the fluid replacement operation of the apparatus can also be performed by replacing the source fluid with a single set amount of fluid replacement, which is performed in a manner of a small amount of fluid replacement without affecting the source temperature, specifically, a fixed amount of fluid replacement can be set or a fixed opening time of the fluid replacement pump 107 can be set, and the fixed amount of fluid replacement is larger than the amount of the source fluid used in the single process. When the high liquid level detection point 114 indicates no liquid, the liquid supplementing pipeline 108 delivers a fixed source liquid amount during automatic liquid supplementing, and after supplementing, when the high liquid level detection point 114 indicates that liquid exists, the normal state is switched, the corresponding valve is closed, and the standby state is entered.
In other embodiments, the source bottle 126 can be replenished during a process shutdown of the plant.
It is obvious that the described embodiments are only some of the embodiments of the present invention, and not all of them. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts shall belong to the protection scope of the present invention.
Claims (10)
1. A centralized source supply device, comprising: the source bottle heat-preservation device comprises a source bottle (126), a source barrel (122) for providing source liquid for the source bottle (126) and a temperature-control cavity (123) for preserving heat of the source bottle (126), wherein a pressure control device, an acid inlet pipeline (106) for supplementing the source liquid and a liquid supplementing piece (127) for delivering the source liquid for the source bottle (126) are arranged on the source barrel (122), an air inlet pipe (109) for inputting carrier gas and a pipeline delivery mechanism are arranged on the source bottle (126), and the pipeline delivery mechanism comprises a gas delivery mechanism for outputting gas and a pressure-release pipeline mechanism.
2. The centralized source of supply of claim 1, wherein: the lower end of the liquid supplementing piece (127) extends into the source barrel (122), liquid supplementing pipelines (108) are communicated with the upper end of the liquid supplementing piece (127), the liquid supplementing pipelines (108) are arranged into a plurality of groups, a liquid supplementing pump (107) is fixedly arranged on each liquid supplementing pipeline (108), and the other end of each liquid supplementing pipeline (108) is fixedly arranged on a source bottle (126).
3. The centralized source of supply of claim 1, wherein: the source barrel (122) is further provided with an acid discharging device, the acid discharging device comprises an acid discharging pipeline (104), the acid discharging pipeline (104) is fixedly arranged on the source barrel (122), the lower side of the acid discharging pipeline (104) extends into the source barrel (122), the lower end face of the acid discharging pipeline (104) is close to the bottom of the source barrel (122), an acid discharging pump (105) is communicated with the acid discharging pipeline (104), the acid discharging pump (105) drives the acid discharging pipeline (104) to discharge source liquid in the source barrel (122), the acid discharging device further comprises an air inlet mechanism, the air inlet mechanism comprises an air inlet pipeline (100) fixedly arranged on the source barrel (122), the lower side of the air inlet pipeline (100) extends into the source barrel (122), a one-way power valve (103) is fixedly arranged on the air inlet pipeline (100), and the airflow direction of the one-way power valve (103) is set to be external inflow source barrel (122), and the air inlet pipeline (100) is provided with a pneumatic valve (101) for controlling the circulation of air, and the air inlet mechanism maintains the source liquid in the source barrel (122) to be emptied and the source barrel pressure when the source barrel (122) supplies source liquid to the source bottle (126) for conveying.
4. A centralized source of supply arrangement as claimed in claim 3, wherein: the pressure control device comprises an air outlet pipeline (125) communicated with an air inlet pipeline (100), an air outlet one-way valve (124) is fixedly arranged on the air outlet pipeline (125), the air flow direction of the air outlet one-way valve (124) is set to be from a source barrel (122) to the air outlet pipeline (125), the air outlet pipeline (125) is connected with an acid gas discharge processing pipeline, a pressure gauge (102) is arranged on the air inlet pipeline (100), the air outlet pipeline (125) adjusts the pressure in the source barrel (122), and the pressure gauge (102) gives an alarm for the abnormity of the pressure in the source barrel (122).
5. The centralized source of supply of claim 1, wherein: the source barrel (122) is also provided with a liquid level warning mechanism, the liquid level warning mechanism comprises a low liquid level warning point (119), a high liquid level warning point (120) and a standby liquid level warning point (121), the liquid level of the source barrel (122) is lower than that of the low liquid level warning point (119), and the low liquid level warning point (119) gives an alarm to prompt the supplement of the source liquid; the source barrel (122) is supplemented with source liquid to enable the liquid level to reach the position of a high liquid level warning point (120), and the liquid level enters a standby state; reserve liquid level warning point (121) are located high liquid level warning point (120) upside, high liquid level warning point (120) go wrong, and replenishment source liquid level reaches reserve liquid level warning point (121), reserve liquid level warning point (121) report to the police.
6. The centralized source of supply of claim 1, wherein: an air inlet pipe (109) is fixedly arranged on the source bottle (126), the air inlet pipe (109) extends into the source bottle (126), and the upper end face of the air inlet pipe (109) is externally connected with process carrier gas on equipment; a thermocouple (116) is arranged in the source bottle (126), and the thermocouple (116) adjusts the heating power of the temperature control cavity (123).
7. The centralized source of supply of claim 1, wherein: the pipeline conveying mechanism further comprises an air vent (132) fixedly arranged on the source bottle (126), the air vent (132) is communicated with the pressure relief pipeline mechanism and the gas conveying mechanism, the pressure relief pipeline mechanism comprises a pressure relief pipeline (130) communicated with the air vent (132), a pressure relief pneumatic valve (118), a pressure relief one-way valve (110) and a pressure relief outlet (111) are fixedly arranged on the pressure relief pipeline (130), the pressure relief outlet (111) is externally connected with an acid gas discharge processing pipeline, the air flow direction of the pressure relief one-way valve (110) is set from the source bottle (126) to an acid discharge pipeline, the pressure relief pipeline mechanism keeps the air pressure in the source bottle (126) within a certain range through pressure relief, the gas conveying mechanism comprises an air vent pipeline (131) communicated with the air vent (132), and a conveying pneumatic valve (117), an air vent (112) and an air vent one-way valve (133) are fixedly arranged on the air vent pipeline (131), the ventilation outlet (112) is externally connected with a reaction cavity, the airflow direction of the ventilation one-way valve (133) is set from the source bottle (126) to the reaction cavity, and the gas conveying mechanism introduces gas into the reaction cavity for reaction.
8. The centralized source of supply of claim 1, wherein: the source bottle (126) is further provided with a detection mechanism, the detection mechanism comprises a low liquid level detection point (115), a high liquid level detection point (114) and a standby liquid level detection point (113), the standby liquid level detection point (113) is located on the upper side of the high liquid level detection point (114), the low liquid level detection point (115) is located on the lower side of the high liquid level detection point (114), and source liquid supplement in the source bottle (126) is controlled by detecting liquid level signals through the low liquid level detection point (115), the high liquid level detection point (114) and the standby liquid level detection point (113).
9. The centralized source of supply of claim 1, wherein: a group of source bottles (126) or a plurality of groups of source bottles (126) are arranged in the temperature control cavity (123); the source barrel (122) and the source bottle (126) are arranged in a temperature control cavity (123), or are independently arranged in the temperature control cavity (123), or the temperature control cavity (123) is not arranged.
10. The centralized source of supply of claim 8, wherein: the liquid supplementing piece (127) supplements source liquid for the source bottle (126) through a set single liquid supplementing amount, the set single liquid supplementing amount is set as a fixed liquid supplementing amount or a fixed opening time length of the liquid supplementing pump (107), and the set single liquid supplementing amount is larger than the using source amount of a single process; or the liquid is replenished through signal control.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020824099.8U CN213222075U (en) | 2020-05-18 | 2020-05-18 | Centralized source supply device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020824099.8U CN213222075U (en) | 2020-05-18 | 2020-05-18 | Centralized source supply device |
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| CN213222075U true CN213222075U (en) | 2021-05-18 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113760020A (en) * | 2021-09-26 | 2021-12-07 | 北京北方华创微电子装备有限公司 | Pressure control device for semiconductor device and semiconductor device |
| CN114743900A (en) * | 2022-04-25 | 2022-07-12 | 北京北方华创微电子装备有限公司 | Vaporization system and semiconductor processing equipment |
-
2020
- 2020-05-18 CN CN202020824099.8U patent/CN213222075U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113760020A (en) * | 2021-09-26 | 2021-12-07 | 北京北方华创微电子装备有限公司 | Pressure control device for semiconductor device and semiconductor device |
| CN114743900A (en) * | 2022-04-25 | 2022-07-12 | 北京北方华创微电子装备有限公司 | Vaporization system and semiconductor processing equipment |
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Address after: No.1, Jikang Road, Kengzi street, Pingshan District, Shenzhen City, Guangdong Province Patentee after: Laplace New Energy Technology Co.,Ltd. Address before: No.1, Jikang Road, Kengzi street, Pingshan District, Shenzhen City, Guangdong Province Patentee before: SHENZHEN LAPLACE ENERGY TECHNOLOGY Co.,Ltd. |