CN213210440U - Small current measurement calibration framework for automatic integrated circuit tester - Google Patents
Small current measurement calibration framework for automatic integrated circuit tester Download PDFInfo
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- CN213210440U CN213210440U CN202021470834.6U CN202021470834U CN213210440U CN 213210440 U CN213210440 U CN 213210440U CN 202021470834 U CN202021470834 U CN 202021470834U CN 213210440 U CN213210440 U CN 213210440U
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Abstract
The utility model discloses a small current measurement calibration framework for an automatic integrated circuit tester, which comprises a direct current correction plate, a voltmeter and an external control system; the direct current correction plate is connected with the automatic integrated circuit tester to form a passage, and a reference resistor is connected in series on the passage; the voltmeter is connected with the reference resistor in parallel and used for measuring the voltage at two ends of the reference resistor; the external control system is respectively connected with the digital multimeter and the automatic integrated circuit tester through electric signals and is used for generating test signals to the automatic integrated circuit tester to enable the automatic integrated circuit tester to be in a test state, acquiring and processing signals sent by the voltmeter to obtain a current measured value, and compensating the current measured value to obtain a current output value. The utility model overcomes the defect of numerical value distortion caused by magnetic field interference in the prior art, and realizes accurate measurement of small current of the automatic integrated circuit tester by introducing reference resistance and measuring voltage; simple structure, low cost and good application prospect.
Description
Technical Field
The utility model belongs to the technical field of integrated circuit automatic test machine undercurrent measurement, a undercurrent measurement calibration framework for integrated circuit automatic test machine is related to.
Background
An Automatic Test machine (Automatic Test Equipment) for Integrated Circuits (ICs) in the semiconductor industry is used to detect the functional integrity of the ICs and is the final process of the IC production to ensure the quality of the IC production.
In the verification process of an automatic testing machine for integrated circuits, the measurement of small current is an important task, at present, the test current is specifically shown in fig. 1, which is directly tested by using a digital multimeter, and the test method is suitable for measuring large current, because relative to the large current, such interference energy as electric field interference is small, and the measurement of the large current is difficult to be influenced, but for small currents in the uA and nA levels, the influence of the interference energy is large, and the noise bottom may submerge the small current which is weak, and when the energy of the interference is superposed into the circuit, the distortion of the measured data is easily caused.
Therefore, it is very important to develop a device capable of accurately measuring the small current of the automatic tester of the integrated circuit.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to overcome the defect that prior art is difficult to guarantee measured data's authenticity, provide a device that can the undercurrent of accurate measurement integrated circuit automatic test machine.
In order to achieve the above object, the utility model provides a following technical scheme:
a small current measurement calibration architecture for an automatic tester of an integrated circuit comprises a direct current correction board, a voltmeter and an external control system;
the direct current correction plate is connected with the automatic integrated circuit tester to form a passage, and a reference resistor is connected in series on the passage;
the voltmeter is connected with the reference resistor in parallel and used for measuring the voltage at two ends of the reference resistor;
the external control system is respectively connected with the digital multimeter and the automatic integrated circuit tester through electric signals and is used for generating test signals to the automatic integrated circuit tester to enable the automatic integrated circuit tester to be in a test state, acquiring and processing signals sent by the voltmeter to obtain a current measured value, and compensating the current measured value to obtain a current output value. The compensation of the measured current value by the external control system is realized by comparing the difference between the measured value and the standard value, which is the same as the compensation technique of the prior art.
The prior art structure is shown in fig. 1, when a small current is measured, a current meter needs to be connected to a circuit by using a measuring wire, when a current passes through the measuring wire, a large amount of magnetic fields are generated around the measuring wire, and the energy of the interference is superimposed on the circuit, which results in a distorted value.
The utility model discloses a little electric current measurement calibration framework for integrated circuit automatic test machine takes the mode of curve test, introduces reference resistance and measures the little electric current, through the voltage at reference resistance both ends, convert into the electric current, the distortion problem in the little electric current test process has been solved on the one hand, ensure measuring accuracy, reduce test environment's requirement, on the other hand, can be through chooseing for use the great reference resistance of resistance, carry out similar enlarged processing to it, increase the SNR, reinforcing interference killing feature. The utility model discloses, realized the accurate measurement of integrated circuit automatic test machine's undercurrent, its simple structure simultaneously, low cost has application prospect.
As a preferred technical scheme:
the calibration architecture for measuring small current of the automatic tester of the integrated circuit is characterized in that the reference resistor is positioned on the direct current calibration board. The protection scope of the present invention is not limited thereto, and only a feasible technical solution is provided here, and meanwhile, the dc correction board is provided with a dc correction circuit, wherein the dc correction circuit is the prior art.
The small current measurement calibration architecture for the automatic test machine of the integrated circuit is described above, and the external control system is an industrial computer (IPC).
The small current measurement calibration architecture for the automatic integrated circuit tester is characterized in that the voltmeter is a digital multimeter. The protection scope of the present invention is not limited thereto, and only one feasible technical solution is provided here, and other devices capable of measuring voltage are applicable to the present invention.
The calibration architecture for measuring small current of the automatic tester of integrated circuit as described above, the measured value of current IrealThe calculation formula of (a) is as follows:
Ireal＝Ureal/R；
Urealis the reading of the voltmeter in units of V; and R is the resistance value of the reference resistor and has the unit of omega.
The calibration architecture for measuring small current of automatic tester of integrated circuit as described above is characterized in that the reference resistance is measured by kelvin four-wire test method (also called four-wire circuit measurement method), which is a mature test method in the circuit detection field and has the key advantages of separate current and voltage electrodes and elimination of the impedance of wiring and contact resistance.
Has the advantages that:
(1) the utility model discloses a small current measurement calibration framework for integrated circuit automatic testing machine, overcome the defect that the magnetic field interference of prior art leads to the distortion of numerical value, realize the accurate measurement of the small current of integrated circuit automatic testing machine;
(2) the utility model discloses a small current measurement calibration framework for integrated circuit automatic test machine introduces reference resistance and measures the small current, through the voltage at reference resistance both ends, converts into the electric current, has solved the distortion problem in the small current test process on the one hand, ensures the measuring accuracy, reduces test environment's requirement, on the other hand, can carry out similar enlarged processing to it through selecting for use the great reference resistance of resistance, increases the SNR, reinforcing interference killing feature;
(3) the utility model discloses a little electric current measurement calibration framework for integrated circuit automatic test machine, simple structure, low cost has application prospect.
Drawings
FIG. 1 is a diagram of a small current measurement calibration architecture of a prior art automatic tester for integrated circuits;
fig. 2 shows the small current measurement calibration architecture for the automatic integrated circuit tester of the present invention.
Detailed Description
The following describes the present invention with reference to the accompanying drawings.
Example 1
A small current measurement calibration architecture for an automatic tester of integrated circuits, as shown in FIG. 2, comprises a DC calibration board, a voltmeter (specifically a digital multimeter) and an external control system (specifically an industrial computer);
the direct current correction plate is connected with the automatic integrated circuit tester to form a passage, and a reference resistor (the reference resistor is positioned on the direct current correction plate) is connected in series on the passage;
the voltmeter is connected with the reference resistor in parallel and is used for measuring the voltages at two ends of the reference resistor, and particularly, the voltages at two ends of the reference resistor are measured by adopting a Kelvin four-wire detection method (also called a four-wire circuit measurement method);
the external control system is respectively connected with the digital multimeter and the automatic integrated circuit tester through electric signals and is used for generating test signals to the automatic integrated circuit tester to enable the automatic integrated circuit tester to carry out test state, and simultaneously acquiring and processing signals sent by the voltmeter to obtain a current measured value IrealAnd compensating the measured current value to obtain a current output value, wherein the measured current value IrealThe calculation formula of (a) is as follows:
Ireal＝Ureal/R；
Urealis the reading of the voltmeter in units of V; and R is the resistance value of the reference resistor and has the unit of omega.
Through verification, the small current measurement calibration framework for the automatic integrated circuit tester overcomes the defect of numerical value distortion caused by magnetic field interference in the prior art, and realizes accurate measurement of the small current of the automatic integrated circuit tester; the reference resistor is introduced to measure the small current, and the voltage at the two ends of the reference resistor is converted into the current, so that the problem of distortion in the small current testing process is solved, the measuring accuracy is ensured, and the requirement of a testing environment is reduced; simple structure, low cost and wide application prospect.
Although specific embodiments of the present invention have been described above, it will be appreciated by those skilled in the art that these embodiments are merely illustrative and various changes or modifications may be made without departing from the spirit and scope of the invention.
Claims (4)
1. A small current measurement calibration architecture for an automatic tester of an integrated circuit is characterized by comprising a direct current correction board, a voltmeter and an external control system;
the direct current correction plate is connected with the automatic integrated circuit tester to form a passage, and a reference resistor is connected in series on the passage;
the voltmeter is connected with the reference resistor in parallel and used for measuring the voltage at two ends of the reference resistor;
and the external control system is respectively connected with the voltmeter and the automatic test machine electrical signal of the integrated circuit.
2. The architecture of claim 1, wherein the reference resistor is located on a DC calibration board.
3. The architecture of claim 1, wherein the external control system is an industrial computer.
4. The architecture of claim 1, wherein the voltmeter is a digital multimeter.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021470834.6U CN213210440U (en) | 2020-07-23 | 2020-07-23 | Small current measurement calibration framework for automatic integrated circuit tester |
| TW110205389U TWM621317U (en) | 2020-07-23 | 2021-05-13 | Small current measuring alignment bracket mechanism for integrated circuit automatic test machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021470834.6U CN213210440U (en) | 2020-07-23 | 2020-07-23 | Small current measurement calibration framework for automatic integrated circuit tester |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN213210440U true CN213210440U (en) | 2021-05-14 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202021470834.6U Active CN213210440U (en) | 2020-07-23 | 2020-07-23 | Small current measurement calibration framework for automatic integrated circuit tester |
Country Status (2)
| Country | Link |
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| CN (1) | CN213210440U (en) |
| TW (1) | TWM621317U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113433501A (en) * | 2021-06-24 | 2021-09-24 | 紫光展讯通信(惠州)有限公司 | Current calibration method, system, medium and calibration board |
-
2020
- 2020-07-23 CN CN202021470834.6U patent/CN213210440U/en active Active
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2021
- 2021-05-13 TW TW110205389U patent/TWM621317U/en unknown
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113433501A (en) * | 2021-06-24 | 2021-09-24 | 紫光展讯通信(惠州)有限公司 | Current calibration method, system, medium and calibration board |
Also Published As
| Publication number | Publication date |
|---|---|
| TWM621317U (en) | 2021-12-21 |
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| CP01 | Change in the name or title of a patent holder |
Address after: 201799 1st floor, building 1, 1130 qinghewan Road, Qingpu District, Shanghai Patentee after: Sundak Semiconductor Technology (Shanghai) Co.,Ltd. Address before: 201799 1st floor, building 1, 1130 qinghewan Road, Qingpu District, Shanghai Patentee before: Sundec semiconductor technology (Shanghai) Co.,Ltd. |
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| CP01 | Change in the name or title of a patent holder |