CN213207281U - Machine table gas replacement equipment - Google Patents
Machine table gas replacement equipment Download PDFInfo
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- CN213207281U CN213207281U CN202021728532.4U CN202021728532U CN213207281U CN 213207281 U CN213207281 U CN 213207281U CN 202021728532 U CN202021728532 U CN 202021728532U CN 213207281 U CN213207281 U CN 213207281U
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Abstract
The utility model provides a gaseous replacement equipment of board relates to the semiconductor device field, and this gaseous replacement equipment of board includes the board cavity, replaces pipeline, exhaust pipe and gas heating device, replace the pipeline with the board cavity is connected, be used for to protective gas lets in the board cavity, exhaust pipe with the board cavity is connected, is used for the extraction gas in the board cavity, gas heating device with replace the pipe connection, be used for right it heats to replace the pipeline. Compared with the prior art, the utility model provides a gaseous replacement equipment of board can replace the residual gas in the board cavity fast to it is residual to get rid of the steam in the board cavity fast, has reduced clean time, has improved clean efficiency.
Description
Technical Field
The utility model relates to a semiconductor equipment field particularly, relates to a gaseous replacement equipment of platform.
Background
In the field of semiconductor manufacturing, a machine usually has a machine cavity with various functions, such as a reaction gas delivery cavity or a reaction gas buffer cavity, and when the machine cavity is maintained, the inner wall of the machine cavity is usually wiped with absolute alcohol and ultrapure water to realize the functions of cleaning and maintenance. However, after the maintenance with the absolute alcohol and the ultra-pure water, residual gas or liquid, such as volatilized alcohol or water vapor, is usually present in the chamber of the machine, so that it is difficult to establish a vacuum environment in the chamber of the machine, and meanwhile, the normal use of the chamber of the machine is easily affected due to the contamination.
In the prior art, in order to solve the above problems, nitrogen is generally introduced into the machine cavity for replacement, and the nitrogen is mixed with residual gas or water vapor in the machine cavity and then discharged, so as to establish a clean space. However, since the gaseous impurities cannot be visually recognized, the gaseous impurities can only be actively removed after being replaced with nitrogen for a plurality of times and for a long time, and then whether the residual gas or liquid is completely discharged is determined by the vacuum state, which results in a long time spent on cleaning, and a waste of time.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a gaseous replacement equipment of board, it can improve gas mixing efficiency, and residual gas and vapor in the quick discharge board cavity reduce the clean time.
The embodiment of the utility model is realized like this:
in a first aspect, an embodiment of the present invention provides a machine gas replacement device, including machine cavity, replacement pipeline, exhaust pipe and gas heating device, the replacement pipeline with the machine cavity is connected, be used for to protective gas lets in the machine cavity, exhaust pipe with the machine cavity is connected, is used for the extraction gas in the machine cavity, gas heating device with the replacement pipeline is connected, be used for right the replacement pipeline heats.
In an optional embodiment, a first three-way valve and a second three-way valve are sequentially arranged on the replacement pipeline along the gas flowing direction, the first three-way valve is provided with a first inlet, a first outlet and a first reversing interface, the first inlet and the first outlet are connected with the replacement pipeline, the gas inlet end of the gas heating device is connected with the first reversing interface, the second three-way valve is provided with a second inlet, a second outlet and a second reversing interface, the second inlet and the second outlet are connected with the replacement pipeline, and the gas outlet end of the gas heating device is connected with the second reversing interface.
In an optional embodiment, the gas heating device comprises a heating body, an air inlet connecting pipe and an air outlet connecting pipe, the air inlet connecting pipe is arranged at an air inlet end of the heating body and detachably connected with the first reversing interface, and the air outlet connecting pipe is arranged at an air outlet end of the heating body and detachably connected with the second reversing interface.
In an alternative embodiment, the gas heating device further comprises a moving device platform freely movable with respect to the displacement conduit, the heating body being arranged on the moving device platform.
In an optional embodiment, the mobile device platform includes a bearing frame, a lifting driving member and a mobile chassis, the lifting driving member is disposed on the mobile chassis, a plurality of mobile wheels are disposed at the bottom of the mobile chassis, the bearing frame is disposed on the lifting driving member and is configured to move up and down relative to the mobile chassis under the driving of the lifting driving member, and the heating body is disposed on the bearing frame.
In an optional embodiment, a first plug-in connector is arranged on the first reversing interface, an air inlet connector is arranged at an air inlet end of the air inlet connecting pipe, and the first plug-in connector is used for being plugged into the air inlet connector; the second reversing connector is provided with a second plug-in connector, the air outlet end of the air outlet connecting pipe is provided with an air outlet connector, and the second plug-in connector is used for being connected to the air outlet connector in an inserting mode.
In an optional embodiment, the heating body comprises a cylinder body and heating wires arranged around the cylinder body in a surrounding manner, the cylinder body is provided with an air inlet hole and an air outlet hole, the air inlet connecting pipe is connected to the air inlet hole, and the air outlet connecting pipe is connected to the air outlet hole.
In an alternative embodiment, the air inlet connection pipe and the air outlet connection pipe are both flexible hoses.
In an optional embodiment, the equipment for machine gas replacement further includes a nitrogen source, and the nitrogen source is connected to the replacement pipe so as to introduce nitrogen into the machine cavity through the replacement pipe.
In an optional implementation manner, the machine gas replacement device further includes a negative pressure pump, and the negative pressure pump is connected to the pumping pipeline to pump out the gas in the machine cavity through the pumping pipeline.
The utility model discloses beneficial effect includes:
the utility model provides a gaseous replacement equipment of board, through setting up gaseous heating device, and with gaseous heating device and replacement pipe connection, thereby the protective gas in the heating replacement pipeline, make the protective gas temperature who gets into the board cavity rise, on the one hand, under the effect of gaseous heat molecule, the mixing efficiency of residual gas or steam in protective gas and the board cavity improves, make the protective gas accomplish the replacement rapidly, and promote the protective gas content in the board cavity rapidly, the mixed gas is discharged by exhaust duct. On the other hand, the temperature in the machine table cavity is raised by heating the protective gas, so that the process of gasifying water vapor and liquid is accelerated, the water vapor remaining in the machine table cavity can be further reduced, and the water vapor in the machine table cavity is removed. Compared with the prior art, the utility model provides a gaseous replacement equipment of board can replace the residual gas in the board cavity fast to it is residual to get rid of the steam in the board cavity fast, has reduced clean time, has improved clean efficiency.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention, and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
Fig. 1 is a schematic structural view of a machine gas replacement device provided in the utility model;
FIG. 2 is a schematic view showing a connection structure of the gas heating apparatus and the replacement piping in FIG. 1;
fig. 3 is a schematic view of a connection structure between the gas heating apparatus and the moving apparatus platform in fig. 1.
Icon: 100-machine gas replacement equipment; 110-a machine cavity; 130-displacement of the pipe; 131-a first three-way valve; 1311-a first inlet; 1313 — a first outlet; 1315-a first commutation interface; 1317 — a first plug connector; 133-a second three-way valve; 1331-a second inlet; 1333-a second outlet; 1335-a second commutation interface; 1337-a second plug connector; 150-an air extraction pipeline; 160-mobile device platform; 161-a carrier; 163-lifting drive; 165-moving chassis; 167-a moving wheel; 170-gas heating means; 171-heating the body; 1711-barrel; 1713 heating wires; 173-air inlet connecting pipe; 1731-air inlet fitting; 175-air outlet connection pipe; 1751-air outlet joint; 180-nitrogen source; 190-negative pressure pump.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", and the like indicate the position or positional relationship based on the position or positional relationship shown in the drawings, or the position or positional relationship which is usually placed when the utility model is used, and are only for convenience of description and simplification of the description, but do not indicate or imply that the device or element to be referred must have a specific position, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
As disclosed in the background art, in the field of semiconductor manufacturing, a Chemical Vapor Deposition (CVD) machine usually has a cavity structure such as a transfer cavity or a buffer cavity, when the machine cavity is maintained, an inner wall needs to be wiped, and a reagent used in wiping usually includes absolute alcohol and ultrapure water, and such a reagent usually remains gas or liquid in the machine cavity, for example, gas or micro water droplets generated by volatilization of alcohol, and atomized liquid, and the like, so that it is difficult to establish a vacuum environment in the machine cavity, and meanwhile, contamination easily occurs, and product quality is affected.
The existing solution is to replace the gas, water vapor, etc. in the machine cavity by gas replacement, specifically, by continuously introducing nitrogen into the machine cavity, mixing the nitrogen with the original gas in the machine cavity, and then pumping the mixed gas out of the machine cavity by using a vacuum pump, etc., after mixing and replacing for a long time, the proportion of nitrogen in the machine cavity is gradually increased, and the proportion of the rest residual gas is gradually reduced and approaches to zero, thereby discharging the gas, water vapor, etc. in the machine cavity almost completely. However, since the gas impurities are invisible to the naked eye, whether the residual gas in the chamber of the machine is removed can only be determined by the vacuum state after multiple replacements, which takes a long time to prolong the cleaning time and cause time waste.
The utility model provides a pair of gaseous replacement equipment of platform through letting in the nitrogen gas after heating in to the board cavity, can make the mixing efficiency improvement of nitrogen gas and residual gas or steam for nitrogen gas accomplishes the replacement rapidly, simultaneously through promoting board cavity temperature, has accelerated steam and liquid gasification's process, thereby can further reduce that the steam is residual in the board cavity, gets rid of the steam in the board cavity, greatly reduced holistic clean time, improved clean efficiency.
Examples
Referring to fig. 1 to 3, the present embodiment provides a machine gas replacement apparatus 100, which introduces hot nitrogen into a machine cavity 110 to increase gas activity and remove water vapor, thereby reducing cleaning time.
The apparatus 100 for replacing a machine gas provided in this embodiment includes a machine cavity 110, a replacement pipe 130, an air exhaust pipe 150 and a gas heating device 170, wherein the replacement pipe 130 is connected to the machine cavity 110 and is configured to introduce a shielding gas into the machine cavity 110, the air exhaust pipe 150 is connected to the machine cavity 110 and is configured to exhaust the gas in the machine cavity 110, and the gas heating device 170 is connected to the replacement pipe 130 and is configured to heat the shielding gas in the replacement pipe 130.
In this embodiment, the chamber 110 may be a Transfer chamber (Transfer) or a buffer chamber (Load lock) of a CVD tool, and the chamber 110 is maintained by using ultrapure water and absolute alcohol, and after the shielding gas is heated by the gas heating device 170, on the one hand, the mixing efficiency of the shielding gas and the residual gas or water vapor in the chamber 110 is improved under the action of the thermal molecules of the gas, so that the shielding gas is replaced quickly, the content of the shielding gas in the chamber 110 is increased quickly, and the mixed gas is exhausted from the exhaust pipe. On the other hand, the temperature in the machine cavity 110 is raised by heating the protective gas, so that the process of gasifying water vapor and liquid is accelerated, the water vapor remaining in the machine cavity 110 can be further reduced, and the water vapor in the machine cavity 110 is removed.
In this embodiment, the shielding gas is nitrogen (N)2) The equipment 100 further includes a nitrogen source 180, and the nitrogen source 180 is connected to the displacement pipe 130 to introduce nitrogen into the equipment cavity 110 through the displacement pipe 130. Wherein the nitrogen source 180 may be a compressed nitrogen tank or an external nitrogen pipe or other device capable of providing nitrogen. Of course, the shielding gas may be other rare gases, such as argon (Ar) or helium (He), and the nitrogen source 180 may be replaced by a rare gas source, such as an argon gas source or a helium gas source, where the type of the shielding gas is merely illustrated and not specifically limited.
In this embodiment, the tool gas replacement apparatus 100 further includes a negative pressure pump 190, and the negative pressure pump 190 is connected to the pumping duct 150 to pump the gas in the tool cavity 110 through the pumping duct 150. Specifically, the negative pressure pump 190 is disposed to rapidly pump the gas in the machine cavity 110 through the pumping duct 150, but in other preferred embodiments, the gas in the machine cavity 110 may be directly pumped to other gas receiving devices by directly mounting the gas pump on the pumping duct 150, which is not limited herein.
In this embodiment, the replacement pipe 130 and the pumping pipe 150 are respectively disposed on different sidewalls of the machine cavity 110, so that the nitrogen flowing into the machine cavity 110 from the replacement pipe 130 can be fully mixed with the original gas in the machine cavity 110 and then discharged from the pumping pipe 150. The replacement pipeline 130 and the pumping pipeline 150 may be arranged in a right-hand position or a staggered position.
In this embodiment, a first three-way valve 131 and a second three-way valve 133 are sequentially disposed on the replacement pipe 130 in a gas flow direction, and the gas heating apparatus 170 is connected to the first three-way valve 131 and the second three-way valve 133, respectively. Specifically, the first three-way valve 131 has a first inlet 1311, a first outlet 1313, and a first direction changing port 1315, the first inlet 1311 and the first outlet 1313 are connected to the replacement pipe 130, the gas inlet end of the gas heating apparatus 170 is connected to the first direction changing port 1315, the second three-way valve 133 has a second inlet 1331, a second outlet 1333, and a second direction changing port 1335, the second inlet 1331 and the second outlet 1333 are connected to the replacement pipe 130, and the gas outlet end of the gas heating apparatus 170 is connected to the second direction changing port 1335.
It should be noted that the first three-way valve 131 and the second three-way valve 133 in this embodiment are both manual three-way valves, and the handle is manually pulled to drive the internal valve core to rotate, so as to implement different paths.
In the present embodiment, by providing the first and second three- way valves 131 and 133 while the gas heating apparatus 170 is connected to the first and second three- way valves 131 and 133, respectively, the change of the gas passage can be achieved by the first and second three- way valves 131 and 133, thereby selectively performing heating using the gas heating apparatus 170. Specifically, when gas heating is required, the first three-way valve 131 and the second three-way valve 133 are manually pulled, so that the first inlet 1311 and the first reversing connector 1315 are opened, the first outlet 1313 is closed, and the gas inlet end of the gas heating device 170 is communicated with the replacement pipeline 130; meanwhile, the second outlet 1333 and the second reversing connector 1335 are opened, the second inlet 1331 is closed, and the gas outlet end of the gas heating device 170 is communicated with the replacement pipeline 130, so that the gas passes through the first inlet 1311, the first reversing connector 1315, the gas heating device 170, the second reversing connector 1335 and the second outlet 1333 in sequence and is heated inside the gas heating device 170. When gas heating is not needed, manually pulling the first three-way valve 131 and the second three-way valve 133 to open the first inlet 1311 and the first outlet 1313, close the first reversing connector 1315, and isolate the gas inlet end of the gas heating device 170 from the replacement pipe 130; meanwhile, the second inlet 1331 and the second outlet 1333 are opened, the second reversing interface 1335 is closed, the gas outlet end of the gas heating device 170 is isolated from the replacement pipeline 130, so that the gas passes through the first inlet 1311, the first outlet 1313, the second inlet 1331 and the second outlet 1333 in sequence, and the gas heating device 170 does not participate in the nitrogen gas introduction process.
In other preferred embodiments of the present invention, the first three-way valve 131 and the second three-way valve 133 can also adopt a three-way valve structure that can be automatically controlled, such as a pneumatic three-way valve or an electric three-way valve, so as to realize automatic control without manual operation.
The gas heating apparatus 170 includes a heating body 171, an inlet connection pipe 173 and an outlet connection pipe 175, the inlet connection pipe 173 is disposed at an inlet end of the heating body 171 and detachably connected to the first three-way valve 131, and the outlet connection pipe 175 is disposed at an outlet end of the heating body 171 and detachably connected to the second three-way valve 133. Specifically, the air inlet connecting pipe 173 is detachably connected to the first reversing connector 1315, the air outlet connecting pipe 175 is detachably connected to the second reversing connector 1335, and the air heating device 170 can be detached from the replacement pipeline 130 when air heating is not required through the detachable connection mode of the air inlet connecting pipe 173 and the air outlet connecting pipe 175, so that the functions of mounting immediately after use and detaching immediately after use are realized, the mounting space is not occupied for a long time, and meanwhile, the air inlet connecting pipe can be detached and mounted on other replacement pipelines 130, so that the applicability of the air inlet connecting pipe is improved.
In this embodiment, the gas heating apparatus 170 further includes a moving apparatus platform 160 freely movable with respect to the replacement duct 130, and the heating body 171 is disposed on the moving apparatus platform 160. By arranging the moving device platform 160, the gas heating device 170 can be more conveniently moved to different machines or different machine cavities 110, and the gas heating device 170 is prevented from being manually taken.
The moving device platform 160 includes a bearing frame 161, a lifting driving member 163 and a moving chassis 165, the lifting driving member 163 is disposed on the moving chassis 165, a plurality of moving wheels 167 are disposed at the bottom of the moving chassis 165, the bearing frame 161 is disposed on the lifting driving member 163, and is configured to move up and down relative to the moving chassis 165 under the driving of the lifting driving member 163, and the heating body 171 is disposed on the bearing frame 161. By providing the lifting/lowering driving member 163, the carriage 161 can be lifted or lowered, so that the height of the heating body 171 can be adjusted, and the gas heating apparatus 170 can be applied to replacement pipes 130 having different installation heights, thereby further improving the applicability thereof.
In this embodiment, the moving wheel 167 is a universal wheel structure, which facilitates moving, and after moving in place, the moving wheel 167 can be positioned by a brake structure disposed on the moving wheel 167, so as to prevent the moving device from shifting in a working state.
In this embodiment, the first three-way valve 131 is provided with a first plug connector 1317, the air inlet end of the air inlet connection pipe 173 is provided with an air inlet connector 1731, and the first plug connector 1317 is used for being inserted into the air inlet connector 1731; the second three-way valve 133 is provided with a second plug-in connector 1337, the air outlet end of the air outlet connection pipe 175 is provided with an air outlet connector 1751, and the second plug-in connector 1337 is used for being connected to the air outlet connector 1751 in an inserting mode. Specifically, the first plug connector 1317 is fixedly disposed on the first direction changing interface 1315, the air inlet connector 1731 is in sealed insertion with the first insertion connector, the second plug connector 1337 is fixedly disposed on the second direction changing interface 1335, and the air outlet connector 1751 is in sealed insertion with the second insertion connector.
In this embodiment, the outer peripheral surface of the first plug connector 1317 is provided with an external thread, the air inlet connector 1731 is annular and is sleeved at the air inlet end of the air inlet connecting pipe 173, the air inlet connector 1731 is connected with the outer peripheral surface of the air inlet connecting pipe 173 in a sealing manner, the inner peripheral surface of the air inlet connector 1731 is provided with an internal thread, and the first plug connector 1317 is inserted into the air inlet connector 1731 and is connected with the air inlet connector 1731 in a threaded manner, so that the fixing effect is ensured. The outer peripheral face of second plug 1337 is provided with the external screw thread, gives vent to anger and connects 1751 and be the annular and cover and establish the end of giving vent to anger of takeover 175, and gives vent to anger and connect 1751 and give vent to anger between the outer peripheral face of takeover 175 sealing connection, and the inner peripheral surface of giving vent to anger and connecting 1751 is provided with the internal thread, and second plug 1337 pegs graft on giving vent to anger and connecting 1751 to and give vent to anger between the joint 1751 threaded connection, guarantee.
In other preferred embodiments of the present invention, the first plug connector 1317 may be directly inserted into the air inlet connector 1731, and the second plug connector 1337 may be directly inserted into the air outlet connector 1751, and the sealing and fixing may be achieved by winding a sealing tape on the outside.
The heating body 171 comprises a barrel 1711 and heating wires 1713 arranged around the barrel 1711, wherein the barrel 1711 is provided with air inlet holes and air outlet holes, the air inlet connecting pipe 173 is connected to the air inlet holes, and the air outlet connecting pipe 175 is connected to the air outlet holes. Specifically, the heating wire 1713 is connected to an external power source through a joint, or may be directly connected to a commercial power grid (220V) through a wire and a joint, and the power supply mode of the heating wire 1713 is not limited specifically again.
In this embodiment, the bottom of the barrel 1711 is further provided with a mounting bracket, and the barrel 1711 is fixed on the top of the carrier 161 by the mounting bracket, specifically, the mounting bracket is fixed on the top of the carrier 161 by a screw.
In the embodiments of the present invention with other preferred embodiments, a power socket can be set on the bearing frame 161, and the power socket can be directly connected to the power supply equipment such as the utility grid or the built-in battery, so as to directly plug the joint of the heating wire 1713 into the power socket, and realize the electrical connection, thereby avoiding the overlong power connector of the heating wire 1713, so that when the gas heating device 170 is damaged and needs to be replaced, it can be directly taken down from the bearing frame 161, which is very convenient.
In this embodiment, the cylindrical body 1711 is made of a material having a good thermal conductivity, such as aluminum or copper, and an insulating varnish is coated on the outer circumferential surface of the cylindrical body 1711 to prevent a short circuit between the heating wire 1713 and the cylindrical body 1711. Meanwhile, the cylinder 1711 is a sealed cylindrical cylinder, the air inlet and the air outlet are respectively arranged on two end faces of the cylinder 1711, and sealing structures are respectively arranged between the air inlet and the air inlet connecting pipe 173 and between the air outlet and the air outlet connecting pipe 175, so that the phenomenon of air leakage at the joint is avoided.
In this embodiment, the air inlet pipe 173 and the air outlet pipe 175 are both flexible hoses, so that the gas replacement device can be connected within a certain installation error range, and the applicability is improved. Specifically, the air inlet pipe 173 and the air outlet pipe 175 are made of heat-resistant rubber, so that high temperature resistance is guaranteed, bending within a certain range is achieved, and the air replacement device is conveniently connected.
In summary, in the apparatus 100 for replacing table gas provided in this embodiment, the detachable gas heating device 170 is disposed, and the gas heating device 170 is connected to the replacement pipeline 130, so as to heat the shielding gas in the replacement pipeline 130, and increase the temperature of the shielding gas entering the table cavity 110, on one hand, under the action of the gas thermal molecules, the mixing efficiency of the shielding gas and the residual gas or water vapor in the table cavity 110 is improved, so that the shielding gas is replaced quickly, the content of the shielding gas in the table cavity 110 is increased quickly, and the mixed gas is exhausted from the exhaust pipeline. On the other hand, the temperature in the machine cavity 110 is raised by heating the protective gas, so that the process of gasifying water vapor and liquid is accelerated, the water vapor remaining in the machine cavity 110 can be further reduced, and the water vapor in the machine cavity 110 is removed. In addition, the gas heating device 170 is moved by the moving device platform 160, so that the gas heating device can be adapted to and installed on different replacement pipelines 130, thereby improving the applicability, facilitating the use of different machine cavities 110 after maintenance, and improving the overall cleaning efficiency.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. The utility model provides a gaseous replacement equipment of platform, its characterized in that, includes the board cavity, replaces pipeline, exhaust duct and gaseous heating device, replace the pipeline with the board cavity is connected, be used for to protective gas lets in the board cavity, exhaust duct with the board cavity is connected, is used for the extraction gas in the board cavity, gaseous heating device with replace the pipe connection, be used for right replace the pipeline and heat.
2. The machine gas replacement equipment according to claim 1, wherein a first three-way valve and a second three-way valve are sequentially disposed on the replacement pipeline along a gas flowing direction, the first three-way valve has a first inlet, a first outlet and a first reversing interface, the first inlet and the first outlet are connected to the replacement pipeline, a gas inlet of the gas heating device is connected to the first reversing interface, the second three-way valve has a second inlet, a second outlet and a second reversing interface, the second inlet and the second outlet are connected to the replacement pipeline, and a gas outlet of the gas heating device is connected to the second reversing interface.
3. The machine gas replacement equipment according to claim 2, wherein the gas heating device comprises a heating body, a gas inlet connection pipe and a gas outlet connection pipe, the gas inlet connection pipe is disposed at a gas inlet end of the heating body and detachably connected to the first reversing connector, and the gas outlet connection pipe is disposed at a gas outlet end of the heating body and detachably connected to the second reversing connector.
4. The machine gas replacement device of claim 3, wherein the gas heating device further comprises a moving device platform freely movable with respect to the replacement pipe, and the heating body is disposed on the moving device platform.
5. The table gas replacement equipment as claimed in claim 4, wherein the moving device platform comprises a supporting frame, a lifting driving member and a moving chassis, the lifting driving member is disposed on the moving chassis, a plurality of moving wheels are disposed at the bottom of the moving chassis, the supporting frame is disposed on the lifting driving member and is adapted to move up and down relative to the moving chassis under the driving of the lifting driving member, and the heating body is disposed on the supporting frame.
6. The machine gas replacement equipment according to claim 3, wherein a first plug-in connector is arranged on the first reversing connector, a gas inlet connector is arranged at a gas inlet end of the gas inlet connection pipe, and the first plug-in connector is used for being plugged into the gas inlet connector; the second reversing connector is provided with a second plug-in connector, the air outlet end of the air outlet connecting pipe is provided with an air outlet connector, and the second plug-in connector is used for being connected to the air outlet connector in an inserting mode.
7. The machine gas replacement equipment according to claim 3, wherein the heating body comprises a cylinder and heating wires arranged around the cylinder, the cylinder is provided with an air inlet hole and an air outlet hole, the air inlet connecting pipe is connected to the air inlet hole, and the air outlet connecting pipe is connected to the air outlet hole.
8. The machine gas replacement device of claim 3, wherein the gas inlet pipe and the gas outlet pipe are both flexible hoses.
9. The machine gas replacement equipment according to any one of claims 1 to 8, further comprising a nitrogen source connected to the replacement pipe for introducing nitrogen into the machine cavity through the replacement pipe.
10. The machine gas replacement device according to any one of claims 1 to 8, further comprising a negative pressure pump connected to the pumping duct for pumping the gas in the machine cavity through the pumping duct.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021728532.4U CN213207281U (en) | 2020-08-17 | 2020-08-17 | Machine table gas replacement equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021728532.4U CN213207281U (en) | 2020-08-17 | 2020-08-17 | Machine table gas replacement equipment |
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| CN213207281U true CN213207281U (en) | 2021-05-14 |
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| CN202021728532.4U Active CN213207281U (en) | 2020-08-17 | 2020-08-17 | Machine table gas replacement equipment |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023024159A1 (en) * | 2021-08-23 | 2023-03-02 | 长鑫存储技术有限公司 | Control method, device, and system for semiconductor manufacturing device, and storage medium |
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- 2020-08-17 CN CN202021728532.4U patent/CN213207281U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023024159A1 (en) * | 2021-08-23 | 2023-03-02 | 长鑫存储技术有限公司 | Control method, device, and system for semiconductor manufacturing device, and storage medium |
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