CN213181162U

CN213181162U - Clean room dust particle analysis and AMC gas analysis system

Info

Publication number: CN213181162U
Application number: CN202022229155.6U
Authority: CN
Inventors: 田晓芳
Original assignee: Nanjing Junzhiye Technology Co ltd
Current assignee: Nanjing Junzhiye Technology Co ltd
Priority date: 2020-10-09
Filing date: 2020-10-09
Publication date: 2021-05-11
Anticipated expiration: 2030-10-09

Abstract

The utility model discloses a little dirt particle analysis of toilet and AMC gas analysis system, including box, gas holder and little dirt particle detector. The corresponding second valves are opened, the second valves of other channels are closed simultaneously, and then the second vacuum pump, the micro dust particle detector and the AMC air detector are started through a switch, the second vacuum pump conveys air at one end of the corresponding air inlet hopper into the air storage tank, the air in the air inlet barrel is conveyed to the detection end of the micro dust particle detector through the first connecting pipe to detect micro dust particles in the air, the air in the air inlet barrel is conveyed to the detection end of the AMC air detector to detect air molecular pollutants, the first vacuum pump conveys the air in the air storage tank to the outside through the second exhaust pipe, after the air in the air storage tank is emptied, the first vacuum pump is closed, the corresponding second valves are opened, the second valves of other channels are closed, and then the air at multiple positions in the clean room is convenient to detect and analyze.

Description

Clean room dust particle analysis and AMC gas analysis system

Technical Field

The utility model relates to a micronic dust particle analysis and AMC gas analysis system specifically are a clean room micronic dust particle analysis and AMC gas analysis system.

Background

Clean rooms, also known as clean rooms, clean rooms or clean rooms. Refers to an environment having a low level of contamination, where the source of the contamination is dust, airborne microorganisms, suspended particles, and chemically volatile gases. More precisely, a clean room has a controlled level of contamination, which can be determined by the number of particles per cubic meter, or by the maximum particle size. Low level cleanrooms are generally not disinfected (e.g., free of controlled microorganisms) and are more concerned with airborne dust. Clean rooms are widely used in industries that are particularly sensitive to environmental pollution, such as semiconductor production, biochemical technology, biotechnology, precision machinery, pharmacy, hospitals, etc., wherein the semiconductor industry has particularly strict requirements on indoor temperature and humidity and cleanliness, so that the semiconductor industry needs to be controlled within a certain required range to avoid affecting the manufacturing process. As a production facility, a clean room may occupy many locations in a factory building. The detection of the dust particles in the air in the clean room is carried out by a dust particle detector, and the detection of the air molecular pollutants is carried out by an AMC gas detector.

When the existing dust particle and air molecule pollutant in the clean room air are detected and analyzed, most of the dust particle and air molecule pollutant in one position in the clean room air can only be detected, and a plurality of positions can not be detected, so that personnel can know the air quality in the clean room in one piece, and further improvement is needed.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a clean room micronic dust particle analysis and AMC gas analysis system to solve the problem that proposes in the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme:

a clean room dust particle analysis and AMC gas analysis system comprises a box body, wherein a second vacuum pump, a gas storage tank, a dust particle detector and an AMC gas detector are fixedly connected to the inner wall of the box body, a first connecting pipe and a second connecting pipe are fixedly connected to the side wall of the gas storage tank in a penetrating manner, one end of the first connecting pipe is fixedly connected with the detection end of the dust particle detector, one end of the second connecting pipe is fixedly connected with the detection end of the AMC gas detector, a first exhaust pipe is fixedly connected to the top of the gas storage tank in a penetrating manner, a fourth air inlet pipe is fixedly connected to the inlet end of the second vacuum pump, a first air inlet pipe is fixedly connected to the outlet end of the second vacuum pump, one end of the first air inlet pipe penetrates through the side wall of the gas storage tank and then extends to the inner cavity of the first air inlet pipe, an air inlet barrel is fixedly connected to the, the lateral wall fixedly connected with a plurality of air inlet mechanism of bucket admits air, air inlet mechanism includes second intake pipe, second valve, third intake pipe and air intake fill, the one end of second intake pipe runs through and extends its inner chamber behind the lateral wall of bucket admits air, the other end of second intake pipe and the one end fixed connection of second valve, the other end and the one end fixed connection of third intake pipe of second valve, the other end and the one end fixed connection of air intake fill of third intake pipe.

As a further aspect of the present invention: a first vacuum pump is arranged above the first exhaust pipe, the top end of the first exhaust pipe is fixedly connected with the inlet end of the first vacuum pump, and the outlet end of the first vacuum pump is fixedly connected with a second exhaust pipe.

As a further aspect of the present invention: the side wall of the gas storage tank is fixedly connected with a switch.

As a further aspect of the present invention: the door is characterized in that the two sliding rails are symmetrically and fixedly connected to the front surface of the box body, the outer walls of the two sliding rails are jointly connected with a door plate in a sliding mode, the rear surface of the door plate is attached to the front surface of the box body, and a handle is fixedly connected to the front surface of the door plate.

As a further aspect of the present invention: the bottom of the box body is symmetrically and fixedly connected with four supporting legs.

As a further aspect of the present invention: the second vacuum pump, the first vacuum pump, the dust particle detector and the AMC gas detector are all electrically connected with a switch through leads, and the switch is electrically connected with an external power supply through leads.

Compared with the prior art, the beneficial effects of the utility model are that:

1. when the air at the position of one air inlet hopper of the clean room needs to be detected, a corresponding second valve is opened, the second valves of other channels are closed, a second vacuum pump, a micro dust particle detector and an AMC air detector are started through a switch, the second vacuum pump conveys the air at one end of the corresponding air inlet hopper into an air storage tank, the air in the air inlet barrel is conveyed to the detection end of the micro dust particle detector through a first connecting pipe to detect micro dust particles in the air, the air in the air inlet barrel is conveyed to the detection end of the AMC air detector through a second connecting pipe to detect air molecular pollutants, when the air at the position of the other air inlet hoppers in the clean room needs to be detected, a first vacuum pump is opened, the air in the air storage tank is conveyed to the outside through a second exhaust pipe, and after the air in the air storage tank is exhausted, and then closing the first vacuum pump, opening the corresponding second valve, and closing the second valves of other channels, so that the detection and analysis of the micro-dust particles and the air molecular pollutants in the air at a plurality of positions in the clean room are facilitated, and through the comparison of a plurality of data, the personnel can know the air quality in the clean room more comprehensively.

2. The door plate is pulled to slide along the direction of the sliding rail through the handle, the front surface of the box body is closed through the door plate, dust is further reduced to enter the box body, and dust prevention protection is conducted on equipment in the box body.

Drawings

FIG. 1 is a schematic diagram of a clean room particle analysis and AMC gas analysis system.

FIG. 2 is a side view of a clean room particulate analysis and AMC gas analysis system.

FIG. 3 is a partial cross-sectional view of a clean room particulate analysis and AMC gas analysis system.

Shown in the figure: the device comprises a handle 1, a door panel 2, a box body 3, a first exhaust pipe 4, a first vacuum pump 5, a second exhaust pipe 6, a first air inlet pipe 7, a sliding rail 8, an air inlet barrel 9, a second air inlet pipe 10, a second valve 11, a third air inlet pipe 12, an air inlet hopper 13, a fourth air inlet pipe 14, a second vacuum pump 15, supporting legs 16, a switch 17, an air storage tank 18, a first connecting pipe 19, a micro dust particle detector 20, a second connecting pipe 21, an AMC gas detector 22 and an air inlet mechanism 23.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1 to 3, in an embodiment of the present invention, a clean room fine dust particle analysis and AMC gas analysis system includes a box 3, a second vacuum pump 15, a gas tank 18, a fine dust particle detector 20 and an AMC gas detector 22 are fixedly connected to an inner wall of the box 3, a model of the fine dust particle detector 20, AEROTRAK9310, a manufacturer, a suzhou saint light instrument ltd, a model of the AMC gas detector 22, an ares- μ VOC, a manufacturer, a beijing ducktake technologies ltec, a switch 17 is fixedly connected to a side wall of the gas tank 18, a first connecting pipe 19 and a second connecting pipe 21 are fixedly connected to a side wall of the gas tank 18, one end of the first connecting pipe 19 is fixedly connected to a detection end of the fine dust particle detector 20, one end of the second connecting pipe 21 is fixedly connected to a detection end of the

gas detector

22, 18 top of gas holder runs through fixedly connected with

first exhaust pipe

4, 4 tops of first exhaust pipe are provided with

first vacuum pump

5, 4 tops of first exhaust pipe and the entrance point fixed connection of first vacuum pump 5, the exit end fixed connection of first vacuum pump 5 has second exhaust pipe 6, the entrance point fixedly connected with fourth intake pipe 14 of second vacuum pump 15, the exit end fixedly connected with first intake pipe 7 of second vacuum pump 15, the one end of first intake pipe 7 runs through and extends to its inner chamber behind the lateral wall of gas holder 18, the lateral wall fixedly connected with of box 3 bucket of admitting air 9, the one end of fourth intake pipe 14 runs through and extends to its inner chamber behind the lateral wall of bucket of admitting air 9, the lateral wall fixedly connected with a plurality of mechanism of admitting air 23 of bucket 9 of admitting air, mechanism of admitting air 23 includes second intake pipe 10, second valve 11, A third air inlet pipe 12 and an air inlet hopper 13, wherein one end of the second air inlet pipe 10 penetrates through the side wall of the air inlet barrel 9 and extends to the inner cavity of the air inlet barrel, the other end of the second air inlet pipe 10 is fixedly connected with one end of a second valve 11, the other end of the second valve 11 is fixedly connected with one end of the third air inlet pipe 12, the other end of the third air inlet pipe 12 is fixedly connected with one end of the air inlet hopper 13, the front surface of the box body 3 is symmetrically and fixedly connected with two slide rails 8, the outer walls of the two slide rails 8 are jointly and slidably connected with a door panel 2, the rear surface of the door panel 2 is attached to the front surface of the box body 3, the front surface of the door panel 2 is fixedly connected with a handle 1, the bottom of the box body 3 is symmetrically and fixedly connected with four support legs 16, and the second vacuum pump 15, the first vacuum pump 5, the dust particle, the switch 17 is electrically connected to an external power source through a wire.

The utility model discloses a theory of operation is:

when the micro dust particles and air molecule pollutants in the clean room need to be detected and analyzed, the air inlet hoppers 13 penetrate through different positions in the clean room and are installed, when the air at the position of one air inlet hopper 13 of the clean room needs to be detected, the corresponding second valve 11 is opened, the second valves 11 of other channels are closed at the same time, then the second vacuum pump 15, the micro dust particle detector 20 and the AMC air detector 22 are started through switches, the second vacuum pump 15 enables the air at one end of the corresponding air inlet hopper 13 to be conveyed into the air storage tank 18 through the matching of the third air inlet pipe 12, the second air inlet pipe 10, the air inlet barrel 9, the fourth air inlet pipe 14 and the first air inlet pipe 7, the air in the air inlet barrel 9 is conveyed to the detection end of the micro dust particle detector 20 through the first connecting pipe 19 to detect the micro dust particles in the air, and the air in the air inlet barrel 9 is conveyed to the detection end of the air detector 22 through the second connecting pipe 21 to detect the air molecule pollutants in the air molecular pollutants in The dyestuffs detect, when the air of other air intake fill 13 position in the clean room is examined as required, start first vacuum pump 5, first vacuum pump 5 passes through second blast pipe 6 with the air in the gas holder 18 and carries to the external world, treat the air evacuation back in the gas holder 18, close first vacuum pump 5 again, open corresponding second valve 11, close the second valve 11 of other passageways again, and then be convenient for detect the analysis to micronic dust particle and air molecule pollutant in the air of a plurality of positions in the clean room, when need not carrying out the detection and analysis, slide along the direction of slide rail 8 through 1 pulling door plant of handle, time door plant 2 is closed with the front surface of box 3, and then it is inside 3 to reduce the dust entering box, carry out dustproof protection to the equipment in the box 3.

Although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments or portions thereof without departing from the spirit and scope of the invention.

Claims

1. A kind of clean room particle analysis and AMC gas analysis system, including the container body (3), characterized by that: the inner wall of the box body (3) is fixedly connected with a second vacuum pump (15), a gas storage tank (18), a dust particle detector (20) and an AMC gas detector (22), the side wall of the gas storage tank (18) is fixedly connected with a first connecting pipe (19) and a second connecting pipe (21) in a penetrating manner, one end of the first connecting pipe (19) is fixedly connected with the detection end of the dust particle detector (20), one end of the second connecting pipe (21) is fixedly connected with the detection end of the AMC gas detector (22), the top of the gas storage tank (18) is fixedly connected with a first exhaust pipe (4) in a penetrating manner, the inlet end of the second vacuum pump (15) is fixedly connected with a fourth intake pipe (14), the outlet end of the second vacuum pump (15) is fixedly connected with a first intake pipe (7), one end of the first intake pipe (7) penetrates through the side wall of the gas storage tank (18), the lateral wall fixedly connected with of box (3) bucket (9) of admitting air, the one end of fourth intake pipe (14) runs through and extends its inner chamber behind the lateral wall of bucket (9) of admitting air, the lateral wall fixedly connected with a plurality of bucket (23) of admitting air of bucket (9), admit air mechanism (23) including second intake pipe (10), second valve (11), third intake pipe (12) and fill (13) admits air, the one end of second intake pipe (10) runs through and extends its inner chamber behind the lateral wall of bucket (9) of admitting air, the other end of second intake pipe (10) and the one end fixed connection of second valve (11), the other end of second valve (11) and the one end fixed connection of third intake pipe (12), the other end of third intake pipe (12) and the one end fixed connection of the fill (13) of admitting air.

2. The clean room dust particle analysis and AMC gas analysis system of claim 1, wherein: first exhaust pipe (4) top is provided with first vacuum pump (5), the entrance point fixed connection of first exhaust pipe (4) top and first vacuum pump (5), the exit end fixedly connected with second blast pipe (6) of first vacuum pump (5).

3. The clean room dust particle analysis and AMC gas analysis system of claim 1, wherein: the side wall of the air storage tank (18) is fixedly connected with a switch (17).

4. The clean room dust particle analysis and AMC gas analysis system of claim 1, wherein: the utility model discloses a refrigerator door, including box (3), front surface symmetry fixedly connected with two slide rails (8), two the common sliding connection of outer wall of slide rail (8) has door plant (2), the rear surface of door plant (2) and the front surface laminating of box (3), the front surface fixedly connected with handle (1) of door plant (2).

5. The clean room dust particle analysis and AMC gas analysis system of claim 1, wherein: the bottom of the box body (3) is symmetrically and fixedly connected with four supporting legs (16).

6. The clean room dust particle analysis and AMC gas analysis system of claim 1, wherein: the second vacuum pump (15), the first vacuum pump (5), the dust particle detector (20) and the AMC gas detector (22) are electrically connected with a switch (17) through leads, and the switch (17) is electrically connected with an external power supply through leads.