CN213141809U

CN213141809U - Vacuumizing device for vacuum melting process of quartz crucible

Info

Publication number: CN213141809U
Application number: CN202021735281.2U
Authority: CN
Inventors: 张国忠; 高文送; 汪涵; 朱海江; 李国洪; 朱燕亚
Original assignee: Wuxi Shangling Quartz Technology Co ltd
Current assignee: Wuxi Shangling Quartz Technology Co ltd
Priority date: 2020-08-19
Filing date: 2020-08-19
Publication date: 2021-05-07
Anticipated expiration: 2030-08-19

Abstract

The utility model discloses a vacuum extractor for quartz crucible vacuum melting technology, which relates to the technical field of vacuum melting technology. The utility model discloses an exhaust tube, ooff valve, vacuum pump and the joint of bleeding, the fixed intercommunication of exhaust tube one end and the extraction opening of vacuum pump, the joint of bleeding includes stiff end and link, and the stiff end is fixed with first flange including fixed pipe, fixed pipe one end, and first flange top is fixed with the sleeve, and upper portion is equipped with the screw thread channel in the sleeve. The utility model discloses a protruding cooperation of screw thread channel way and screw thread is convenient for fixed and demolish between link and the stiff end, and through setting up interior ring body, outer ring body and mechanical seal, when the link carries out thread fixing with the stiff end, rotation can not be followed to ooff valve and exhaust tube one end to make things convenient for fixed and demolish between exhaust tube one end and ooff valve and the evacuation region, thereby person of facilitating the use's use.

Description

Vacuumizing device for vacuum melting process of quartz crucible

Technical Field

The utility model belongs to the technical field of the vacuum melting technology, especially relate to an evacuating device that is used for quartz crucible vacuum melting technology.

Background

To the vacuum tube that vacuum melting technology used, can carry trace material or temperature along with gaseous flow at the in-process of bleeding, consequently need be long to maintain the vacuum tube, clean and regular change, the mode that current pipe connection used flange or clamp is fixed more, is unfavorable for the installation and the demolition of pipeline tip, and the leakproofness is not enough relatively simultaneously.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide an evacuating device for quartz crucible vacuum founds technology, the cooperation through screw channel and screw thread arch is convenient for link and stiff end between fixed with demolish, through setting up interior loop, outer loop and mechanical seal, when link and stiff end carry out the thread tightening, the rotation can not be followed to ooff valve and exhaust tube one end to make things convenient for the fixed of exhaust tube one end and ooff valve and evacuation between the region and demolish, thereby the person's of facilitating the use.

In order to solve the technical problem, the utility model discloses a realize through following technical scheme:

the utility model relates to a vacuum pumping device for a vacuum melting process of a quartz crucible, which comprises an exhaust tube, a switch valve, a vacuum pump and an exhaust joint, wherein one end of the exhaust tube is fixedly communicated with an exhaust opening of the vacuum pump;

the air extraction joint comprises a fixed end and a connecting end;

the fixed end comprises a fixed pipe, a first flange is fixed at one end of the fixed pipe, a sleeve is fixed at the top of the first flange, a threaded channel is formed in the upper portion of the interior of the sleeve, and a first edge is formed at the top end of the sleeve;

the connecting end comprises a connecting pipe, a second edge is fixed at one end of the connecting pipe, a threaded bulge is arranged at one end of the peripheral side surface of the connecting pipe, which is close to the second edge, and the connecting pipe is arranged in the sleeve and is fixedly connected with the sleeve through the threaded bulge and the threaded channel;

an inner ring body is fixed at the top of the second edge, the peripheral side surface of the inner ring body is rotationally connected with an outer ring body through mechanical seal, and a second flange is fixed at the top of the outer ring body;

the other end of the exhaust tube is fixed on one valve port of the switch valve, and the connecting end is fixedly communicated with the other valve port of the switch valve through a second flange.

Further, the sleeve inboard is equipped with the bulge loop, the bulge loop top is equipped with first seal groove, the connecting pipe is located the inside one end of sleeve and is located first seal groove and with first seal groove clearance fit, be equipped with first sealing ring between connecting pipe and the first seal groove.

Furthermore, an annular groove is formed in the top surface of the second edge, the bottom end of the outer ring body is arranged in the annular groove and is in clearance fit with the annular groove, and a second sealing ring is arranged between the bottom end of the outer ring body and the annular groove.

Further, the inboard side that is equipped with of second flange, the internal ring inner wall is fixed with the backing ring, be equipped with the second seal groove on the backing ring, the side ring bottom set up in the second seal groove and with second seal groove clearance fit, be equipped with the third sealing ring between side ring and the second seal groove.

Further, the exhaust tube is a spiral hose, and a steel wire is arranged at a thread groove on the spiral hose.

Further, be equipped with sealed the pad between first border and the second border, first border and second border outside are equipped with the clamp.

The utility model discloses following beneficial effect has:

1. the utility model discloses a protruding cooperation of screw thread channel way and screw thread is convenient for fixed and demolish between link and the stiff end, and through setting up interior ring body, outer ring body and mechanical seal, when the link carries out thread fixing with the stiff end, rotation can not be followed to ooff valve and exhaust tube one end to make things convenient for fixed and demolish between exhaust tube one end and ooff valve and the evacuation region, thereby person of facilitating the use's use.

2. The utility model discloses a bulge loop, the cooperation of first seal groove and first sealing ring is used and can is improved the sealing performance between connecting pipe and the sleeve, through the ring channel, the cooperation of outer loop body and second sealing ring is used and can is improved the sealing performance between second border and the outer loop body, through the side ring, the backing ring, the cooperation of second seal groove and third sealing ring is used and can is improved the sealing performance between second flange and the inner loop body, can the efficient improve the leakproofness of even bleeding joint, the leakproofness of evacuation pipeline has been guaranteed, avoid appearing gas leakage pressure release and influence the problem of production technology.

Of course, it is not necessary for any particular product to achieve all of the above-described advantages at the same time.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to these drawings without creative efforts.

FIG. 1 is a schematic structural view of a vacuum extractor for a vacuum melting process of a quartz crucible according to the present invention;

FIG. 2 is a cross-sectional view of the suction fitting;

FIG. 3 is an enlarged view of a portion of FIG. 2 at A;

in the drawings, the components represented by the respective reference numerals are listed below:

1-an exhaust pipe, 2-a switch valve, 3-an exhaust joint, 4-a fixed end, 5-a connecting end, 6-a hoop, 401-a fixed pipe, 402-a first flange, 403-a sleeve, 404-a threaded channel, 405-a first edge, 406-a convex ring, 407-a first sealing groove, 408-a first sealing ring, 501-a connecting pipe, 502-a second edge, 503-a threaded protrusion, 504-an inner ring, 505-an outer ring, 506-a second flange, 507-an annular groove, 508-a second sealing ring, 509-a side ring, 510-a backing ring, 511-a second sealing groove, 512-a third sealing ring, 513-a mechanical seal, 514-a sealing gasket.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by a person of ordinary skill in the art without creative efforts belong to the protection scope of the present invention.

Referring to fig. 1-3, the present invention relates to a vacuum pumping device for vacuum melting process of quartz crucible, comprising an exhaust tube 1, a switch valve 2, a vacuum pump and an exhaust joint 3, wherein one end of the exhaust tube 1 is fixedly connected with an exhaust opening of the vacuum pump, and a fixed support or a movable support is arranged outside the vacuum pump;

the air extraction joint 3 comprises a fixed end 4 and a connecting end 5;

the fixed end 4 comprises a fixed pipe 401, one end of the fixed pipe 401 is fixed with a first flange 402, the top of the first flange 402 is fixed with a sleeve 403, the upper part in the sleeve 403 is provided with a thread groove 404, the top end of the sleeve 403 is provided with a first edge 405, and the fixed pipe 401 is embedded and installed in a vacuum-pumping area through the first flange 402 and screws;

the connecting end 5 comprises a connecting pipe 501, a second edge 502 is fixed at one end of the connecting pipe 501, a threaded protrusion 503 is arranged on the peripheral side surface of the connecting pipe 501 and one end close to the second edge 502, and the connecting pipe 501 is arranged in the sleeve 403 and is fixedly connected with the sleeve 403 through the threaded protrusion 503 and the threaded groove 404;

an inner ring body 504 is fixed at the top of the second edge 502, an outer ring body 505 is rotatably connected to the peripheral side surface of the inner ring body 504 through a mechanical seal 513, and a second flange 506 is fixed at the top of the outer ring body 505;

the other end of the exhaust tube 1 is fixed on one of the ports of the switch valve 2, and the connection end 5 is fixedly communicated with the other port of the switch valve 2 through a second flange 506.

As shown in fig. 2-3, a convex ring 406 is disposed inside the sleeve 403, a first sealing groove 407 is disposed at a top of the convex ring 406, one end of the connecting pipe 501 located inside the sleeve 403 is located inside the first sealing groove 407 and is in clearance fit with the first sealing groove 407, and a first sealing ring 408 is disposed between the connecting pipe 501 and the first sealing groove 407, so as to improve a sealing performance between the connecting pipe 501 and the sleeve 403.

As shown in fig. 2-3, the top surface of the second rim 502 is provided with an annular groove 507, the bottom end of the outer ring body 505 is disposed in the annular groove 507 and is in clearance fit with the annular groove 507, and a second sealing ring 508 is disposed between the bottom end of the outer ring body 505 and the annular groove 507, so as to improve the sealing performance between the second rim 502 and the outer ring body 505.

As shown in fig. 2-3, a side ring 509 is disposed on the inner side of the second flange 506, a backing ring 510 is fixed on the inner wall of the inner ring 504, a second sealing groove 511 is disposed on the backing ring 510, the bottom end of the side ring 509 is disposed in the second sealing groove 511 and is in clearance fit with the second sealing groove 511, and a third sealing ring 512 is disposed between the side ring 509 and the second sealing groove 511, so that the sealing performance between the second flange 506 and the inner ring 504 can be improved.

Wherein, exhaust tube 1 is coiled tubing, and thread groove department on the coiled tubing is equipped with the steel wire, can improve exhaust tube 1's resistant deformability, avoids exhaust tube 1 to bend and causes the problem that the gas flow is not in order.

As shown in fig. 1 to 3, a sealing gasket 514 is provided between the first edge 405 and the second edge 502, and a clamping band 6 is provided outside the first edge 405 and the second edge 502, so that the fixing ability between the fixing end 4 and the connecting end 5 can be further improved by the clamping band 6.

In the description herein, references to the description of "one embodiment," "an example," "a specific example," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

The preferred embodiments of the present invention disclosed above are intended only to help illustrate the present invention. The preferred embodiments are not intended to be exhaustive or to limit the invention to the precise embodiments disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and its practical applications, to thereby enable others skilled in the art to best understand the invention for and utilize the invention. The present invention is limited only by the claims and their full scope and equivalents.

Claims

1. The utility model provides an evacuating device for quartz crucible vacuum melting technology, includes exhaust tube (1), ooff valve (2) and vacuum pump, exhaust tube (1) one end is fixed the intercommunication with the extraction opening of vacuum pump, its characterized in that: also comprises an air extraction joint (3);

the air extraction joint (3) comprises a fixed end (4) and a connecting end (5);

the fixing end (4) comprises a fixing pipe (401), a first flange (402) is fixed at one end of the fixing pipe (401), a sleeve (403) is fixed at the top of the first flange (402), a threaded channel (404) is arranged at the upper part in the sleeve (403), and a first edge (405) is arranged at the top end of the sleeve (403);

the connecting end (5) comprises a connecting pipe (501), a second edge (502) is fixed at one end of the connecting pipe (501), a thread bulge (503) is arranged on the peripheral side surface of the connecting pipe (501) and one end close to the second edge (502), and the connecting pipe (501) is arranged in the sleeve (403) and is fixedly connected with the sleeve (403) through the thread bulge (503) and the thread groove (404);

an inner ring body (504) is fixed at the top of the second edge (502), an outer ring body (505) is rotatably connected to the peripheral side surface of the inner ring body (504) through a mechanical seal (513), and a second flange (506) is fixed at the top of the outer ring body (505);

the other end of the exhaust pipe (1) is fixed on one valve port of the switch valve (2), and the connecting end (5) is fixedly communicated with the other valve port of the switch valve (2) through a second flange (506).

2. The vacuum-pumping device for the vacuum melting process of the quartz crucible as claimed in claim 1, wherein a convex ring (406) is arranged inside the sleeve (403), a first sealing groove (407) is arranged at the top of the convex ring (406), one end of the connecting pipe (501) located inside the sleeve (403) is located in the first sealing groove (407) and is in clearance fit with the first sealing groove (407), and a first sealing ring (408) is arranged between the connecting pipe (501) and the first sealing groove (407).

3. The vacuum-pumping device for the vacuum melting process of the quartz crucible as claimed in claim 1, wherein the second rim (502) is provided with an annular groove (507) at the top surface thereof, the bottom end of the outer ring body (505) is arranged in the annular groove (507) and is in clearance fit with the annular groove (507), and a second sealing ring (508) is arranged between the bottom end of the outer ring body (505) and the annular groove (507).

4. The vacuumizing apparatus for a quartz crucible vacuum melting process according to claim 1, wherein a side ring (509) is disposed inside the second flange (506), a backing ring (510) is fixed to an inner wall of the inner ring body (504), a second sealing groove (511) is disposed on the backing ring (510), a bottom end of the side ring (509) is disposed in the second sealing groove (511) and is in clearance fit with the second sealing groove (511), and a third sealing ring (512) is disposed between the side ring (509) and the second sealing groove (511).

5. The vacuum extractor for the vacuum melting process of the quartz crucible as claimed in claim 1, wherein the extraction tube (1) is a spiral hose, and a steel wire is arranged at a thread groove on the spiral hose.

6. The vacuum extractor for the vacuum melting process of the quartz crucible as claimed in claim 1, wherein a sealing gasket (514) is arranged between the first rim (405) and the second rim (502), and a clamping hoop (6) is arranged outside the first rim (405) and the second rim (502).