CN213103724U - Automatic dust collection device for semiconductor etching machine - Google Patents
Automatic dust collection device for semiconductor etching machine Download PDFInfo
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- CN213103724U CN213103724U CN202021805215.8U CN202021805215U CN213103724U CN 213103724 U CN213103724 U CN 213103724U CN 202021805215 U CN202021805215 U CN 202021805215U CN 213103724 U CN213103724 U CN 213103724U
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- storehouse
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- etching machine
- semiconductor etching
- automatic dust
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Abstract
The utility model relates to a semiconductor etching machine technical field specifically is an automatic dust extraction based on semiconductor etching machine, including organism and air-blower, one side fixedly connected with mechanism that induced drafts of organism, the surface mounting who collects storehouse one end has the air-blower, the ash hole has been seted up on the surface of collecting the storehouse opposite side, one side of collecting the storehouse is provided with first connecting pipe, induced draft pipe fitting is all installed at the both ends of first connecting pipe opposite side, the inlet scoop has evenly been seted up on the surface of induced draft pipe fitting. The utility model discloses the user only need be simple open the air-blower, then can be quick absorb external dust, and the device plays certain protecting effect to the button, avoids traditional device button directly to expose in the external world, and the user is when needs normally open the device, directly presses the button, and the user directly presses the button, and long-time operation easily causes certain damage to the button.
Description
Technical Field
The utility model relates to a semiconductor etching machine technical field specifically is a based on automatic dust extraction for semiconductor etching machine.
Background
The action principle of the photo conductor etcher is to form plasma from gas exposed to an electron region, so as to generate ionized gas and release gas consisting of high-energy electrons, thereby forming plasma, and when ionized gas atoms are accelerated by an electric field, enough force is released to tightly adhere materials or etch surfaces with surface expulsion force;
most require to keep away from the great place of dust to light conductor etching machine processing condition, require the dustless of processing environment, but present most etching machines do not have certain dust collecting equipment, operating personnel when processing production, add the light conductor to the etching machine inside and process, open the door storehouse of organism, can carry certain dust entering device often in the process of adding inside, long-time operation, the dust stays in the device is inside, can seriously influence the normal etching of light guide plate.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide an automatic dust extraction based on semiconductor etching machine to solve present most etching machines that propose in the above-mentioned background art and do not have certain dust collecting equipment, operating personnel when processing production, add the light conductor to the etching machine inside and process, open the door storehouse of organism, add the process and often can carry certain dust entering device inside, long-time operation, the dust stays in the device is inside, can seriously influence the problem of the normal etching of light guide plate.
In order to achieve the above object, the utility model provides a following technical scheme: an automatic dust suction device for a semiconductor etching machine comprises a machine body and an air blower, wherein one side of the machine body is fixedly connected with an air suction mechanism, the air suction mechanism comprises a collection bin, the surface of one end of the collection bin is provided with the air blower, the air suction end of the air blower penetrates through the collection bin and extends to the inside of the collection bin, the surface of the other side of the collection bin is provided with an ash outlet, a plug piece is inserted into the surface of one side, away from the ash outlet, of the collection bin, one side of the collection bin is provided with a first communicating pipe, one side, close to the collection bin, of the first communicating pipe is provided with a second communicating pipe, the inside of the second communicating pipe is communicated with the inside of the first communicating pipe, one end of the second communicating pipe penetrates through the collection bin and extends to the inside of the collection bin, air suction pipe fittings are mounted at the two ends of the, the surface of the air suction pipe fitting is evenly provided with an air suction opening, the surface of the machine body is provided with two groups of buttons, the surfaces of the buttons are all sleeved with a protection mechanism, and the protection mechanism is fixedly connected with the surface of the machine body.
Preferably, the inside of collecting the storehouse is provided with the filter, and all around of filter all with the inside fixed connection who collects the storehouse, and the surface of filter one side is close to with the end that induced drafts of air-blower.
Preferably, the inner wall of collecting storehouse one end is conical hopper-shaped, the bore of collecting storehouse inner wall one end is less than the bore of collecting storehouse other end inner wall.
Preferably, the surface of one side of the plug part is glued with a sealing gasket, and the surface of the sealing gasket is tightly attached to the inner wall of the ash outlet.
Preferably, the protection machanism includes the installation circle, the fixed surface of one side and the organism of installation circle is connected, the surface of installation circle opposite side is provided with the retainer plate, and one side of retainer plate extends to the inside of installation circle, the surface veneer of retainer plate opposite side has the plastics cover, and the inside of plastics cover is provided with the conflict piece to the one end of conflict piece and the inner wall fixed connection of plastics cover, the surface and the button of the conflict piece other end are contradicted each other.
Preferably, the surface cover of conflict piece is equipped with the spring, the one end of spring and the inner wall fixed connection of plastic sheath, the other end of spring and the fixed surface of conflict piece are connected.
Preferably, the surface of one side, close to each other, of the contact block and the button is glued with a rubber pad, and the shape of the rubber pad is convex.
Preferably, the inner wall of the mounting ring is provided with an internal thread, and the surface of the fixing ring is provided with an external thread.
Compared with the prior art, the beneficial effects of the utility model are that: the utility model discloses the user only needs simple to open the air-blower, then can be quick absorb external dust, and the device plays certain protective effect to the button, avoids traditional device button direct exposure in the external world, and the user directly pushes the button when needing to carry out normal opening to the device, and the user directly pushes the button, and long-time operation easily causes certain damage to the button;
1. by arranging the air suction mechanism, when a user uses the device to operate, and adds the light conductor into the device, the user firstly starts the air blower, and continuously sucks the air through the air suction port due to the start of the air blower, so that the external dust is quickly absorbed;
2. through being provided with protection machanism, the user is when operating using the device, the user directly presses the plastic sheath, make the plastic sheath drive the conflict piece and contradict each other with the button, open the device, play certain protecting effect to the button simultaneously, avoid traditional device button directly to expose in the external world, the user is when needs normally open the device, directly press the button, long-term operation, the user directly presses the button, long-time operation easily causes certain damage to the button, make contact failure's phenomenon appear in the button.
Drawings
FIG. 1 is a schematic sectional view of the front view of the structure of the present invention;
fig. 2 is a schematic structural front sectional view of the middle air suction mechanism of the present invention;
FIG. 3 is a schematic side view of the structure of the present invention;
FIG. 4 is a schematic side view of the protection mechanism according to the present invention;
fig. 5 is a schematic front view of the structure of the present invention.
In the figure: 1. a body; 2. an air suction mechanism; 21. a collection bin; 22. a blower; 23. a filter plate; 24. an ash outlet; 25. a plug member; 26. a first communication pipe; 27. a second communicating pipe; 28. an air suction pipe fitting; 29. an air suction opening; 3. a protection mechanism; 31. installing a ring; 32. a stationary ring; 33. a plastic sheath; 34. a contact block; 4. a button.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1-5, the present invention provides an embodiment:
an automatic dust suction device for a semiconductor etching machine comprises a machine body 1 and an air blower 22, wherein one side of the machine body 1 is fixedly connected with an air suction mechanism 2, the air suction mechanism 2 comprises a collection bin 21, the surface of one end of the collection bin 21 is provided with the air blower 22, the air suction end of the air blower 22 penetrates through the collection bin 21 and extends to the inside of the collection bin 21, the surface of the other side of the collection bin 21 is provided with an ash outlet 24, a plug 25 is inserted into the surface of one side, far away from the collection bin 21, of the ash outlet 24, one side of the collection bin 21 is provided with a first communicating pipe 26, one side, close to the collection bin 21, of the first communicating pipe 26 is provided with a second communicating pipe 27, the inside of the second communicating pipe 27 is communicated with the inside of the first communicating pipe 26, one end of the second communicating pipe 27 penetrates through the collection bin 21 and extends to the inside of, the interior of the air suction pipe 28 is communicated with the interior of the first communicating pipe 26, air suction ports 29 are uniformly formed in the surface of the air suction pipe 28, two groups of buttons 4 are mounted on the surface of the machine body 1, the surfaces of the buttons 4 are all sleeved with protection mechanisms 3, and the protection mechanisms 3 are all fixedly connected with the surface of the machine body 1;
furthermore, the filter plate 23 is arranged inside the collection bin 21, the periphery of the filter plate 23 is fixedly connected with the inside of the collection bin 21, the surface of one side of the filter plate 23 is close to the air suction end of the air blower 22, the filter plate 23 is arranged inside the collection bin 21, dust sucked inside the collection bin 21 can be prevented from entering the air blower 22, certain damage to the air blower 22 is caused, normal use of the air blower 22 is affected, and certain filtration is performed on the dust quickly;
furthermore, the inner wall of one end of the collection bin 21 is conical funnel-shaped, the caliber of one end of the inner wall of the collection bin 21 is smaller than the caliber of the inner wall of the other end of the collection bin 21, a user can open the interior of the collection bin 21 outwards by twisting the plug piece 25, and the dust stored in the collection bin 21 can be quickly discharged outwards due to the conical funnel-shaped inner wall of the collection bin 21;
furthermore, a sealing gasket is glued on the surface of one side of the plug 25, the surface of the sealing gasket is tightly attached to the inner wall of the ash outlet 24, and a user can seal the inside of the collection bin 21 through the sealing gasket glued on the surface of the plug 35. The friction force of the sealing gasket when the sealing gasket is contacted with the inner wall of the ash outlet 24 can be increased through the sealing gasket, so that the slipping is avoided;
further, the protection mechanism 3 comprises an installation ring 31, one side of the installation ring 31 is fixedly connected with the surface of the machine body 1, the surface of the other side of the installation ring 31 is provided with a fixed ring 32, one side of the fixed ring 32 extends into the installation ring 31, the surface of the other side of the fixed ring 32 is glued with a plastic sleeve 33, a touch block 34 is arranged inside the plastic sleeve 33, one end of the touch block 34 is fixedly connected with the inner wall of the plastic sleeve 33, the surface of the other end of the touch block 34 is mutually touched with the button 4, and a user can protect the button 4 to a certain extent through the protection mechanism 3, so that the situation that the user directly presses the button manually for a long time and is easy to damage the button 4 to a certain extent is avoided;
further, the surface cover of conflict piece 34 is equipped with the spring, the one end of spring and the inner wall fixed connection of plastics cover 33, the other end of spring and the fixed surface of conflict piece 34 are connected, the user is through pressing plastics cover 33, make plastics cover 33 drive to touch piece 34 and remove to one side fast, constantly extrude button 4, make the device obtain opening the operation fast, when touch piece 34 removes the extrusion simultaneously, make the spring on touch piece 34 surface extrude, the spring takes place deformation, if button 4 presses the completion back, the user no longer presses plastics cover 33, resilience force through the spring, can drive to touch piece 34 automatic the reseing.
Further, conflict piece 34 and button 4 are close to the surface veneer of one side each other and have the rubber pad, and the appearance of rubber pad is the convex, and conflict piece 34 when with button 4 mutual contact, the rubber pad of accessible conflict piece 34 one side veneer can carry out certain buffering when contacting conflict piece 34, avoids conflict piece 34 direct and button 4 mutual contact, and the appearance through the rubber pad is the convex, reducible contact piece 34 and button 4's contact surface, increase contact force.
Further, the inner wall of retainer plate 31 is seted up there is the internal thread, and the external screw thread has been seted up on the surface of retainer plate 32, and the user can constantly twist and move retainer plate 32, and the retainer plate 32 is mutually supported through the helicitic texture of seting up with retainer plate 31 for the retainer plate 32 constantly outwards removes, leaves the inside of retainer plate 31, makes retainer plate 32 no longer fix with retainer plate 31, and the user can be quick changes plastic sheath 33.
The working principle is as follows: when a user uses the device to operate, when a semiconductor is added into the device, the user can firstly need to connect the external power supply of the air blower 22 of the device, so that the air blower 22 is normally opened, the air blower 22 continuously and quickly sucks air in the collecting bin 21, the first communicating pipe 26 and the air suction pipe fitting 28 are continuously acted through the second communicating pipe 27, so that the air suction pipe fitting 28 continuously and quickly sucks air outwards through the air suction opening 29 to generate wind power, when an element is added, part of dust carried by outside air is quickly absorbed, the phenomenon that part of dust in the outside air directly enters the device when the element is added in the traditional way, the dust is detained in the device for a long time to influence the etching effect of the semi-guide plate of the device is avoided, the sucked dust is continuously injected into the collecting bin 21 through the second communicating pipe 27 and is collected in the collecting bin 21 and falls at the bottom end of the collecting bin 21, after the interior of the collection bin 21 is collected for a period of time, a user can continuously twist the plug piece 25, so that the plug piece 25 moves downwards rapidly and leaves the interior of the dust outlet 24, so that dust stored in the interior of the collection bin 21 is discharged outwards rapidly, and the dust stored and collected in the interior of the collection bin 21 is discharged rapidly;
then when a user needs to operate the operation of the device, the user can press the plastic sleeve 33 to enable the plastic sleeve 33 to drive the contact block 34 to move towards one side rapidly, the button 4 is extruded continuously, the device is opened and operated rapidly, meanwhile, when the contact block 34 is extruded in a moving mode, the spring on the surface of the contact block 34 is extruded, the spring deforms, if the button 4 is pressed, the user does not press the plastic sleeve 33 any more, the contact block 34 can be driven to reset automatically through the resilience force of the spring, the plastic sleeve 33 can reset automatically through the resilience of the plastic, and when the button is pressed for a long time, the user can continuously screw the fixed ring 32, the fixed ring 32 is matched with the thread structure arranged on the mounting ring 31, the fixed ring 32 moves outwards continuously and leaves the inside of the mounting ring 31, so that the fixed ring 32 is not fixed with the mounting ring 31, the user can quickly replace the plastic sheath 33.
It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Claims (8)
1. An automatic dust collection device for a semiconductor etching machine comprises a machine body (1) and a blower (22), and is characterized in that: the utility model discloses a dust collector, including organism (1) one side fixedly connected with induced draft mechanism (2), and induced draft mechanism (2) including collection storehouse (21), the surface mounting of collection storehouse (21) one end has air-blower (22) to induced draft end of air-blower (22) passes collection storehouse (21) and extends to the inside of collection storehouse (21), the surface of collection storehouse (21) opposite side has seted up ash hole (24), and ash hole (24) keep away from the surface of collecting storehouse (21) one side and insert and be equipped with plug member (25), one side of collecting storehouse (21) is provided with first communicating pipe (26), and first communicating pipe (26) are close to one side of collecting storehouse (21) and install second communicating pipe (27) to the inside of second communicating pipe (27) is linked together with the inside of first communicating pipe (26), the one end of second communicating pipe (27) is passed collection storehouse (21) and is extended to the inside of collecting storehouse (21), air suction pipe fittings (28) are all installed at the both ends of first intercommunication pipe (26) opposite side, and the inside of air suction pipe fittings (28) is linked together with the inside of first intercommunication pipe (26), inlet scoop (29) have evenly been seted up on the surface of air suction pipe fittings (28), the surface mounting of organism (1) has two sets of buttons (4), and the surface of button (4) all overlaps and is equipped with protection machanism (3) to protection machanism (3) all are connected with the fixed surface of organism (1).
2. The automatic dust suction device for the semiconductor etching machine according to claim 1, wherein: collect the inside in storehouse (21) and be provided with filter (23), and all with the inside fixed connection who collects storehouse (21) all around filter (23), and the surface of filter (23) one side is close to with the end that induced drafts of air-blower (22).
3. The automatic dust suction device for the semiconductor etching machine according to claim 1, wherein: the inner wall of collecting storehouse (21) one end is conical hopper-shaped, the bore of collecting storehouse (21) inner wall one end is less than the bore of collecting storehouse (21) other end inner wall.
4. The automatic dust suction device for the semiconductor etching machine according to claim 1, wherein: the surface of one side of the plug piece (25) is glued with a sealing gasket, and the surface of the sealing gasket is tightly attached to the inner wall of the ash outlet (24).
5. The automatic dust suction device for the semiconductor etching machine according to claim 1, wherein: protection machanism (3) are including installation circle (31), the fixed surface of one side and organism (1) of installation circle (31) is connected, the surface of installation circle (31) opposite side is provided with retainer plate (32), and one side of retainer plate (32) extends to the inside of installation circle (31), the surface veneer of retainer plate (32) opposite side has plastic sleeve (33), and the inside of plastic sleeve (33) is provided with and supports touch multitouch (34) to the one end of support touch multitouch (34) and the inner wall fixed connection of plastic sleeve (33), the surface and button (4) of support touch multitouch (34) other end are contradicted each other.
6. The automatic dust suction device for the semiconductor etching machine according to claim 5, wherein: the surface cover of contact block (34) is equipped with the spring, the inner wall fixed connection of the one end of spring and plastic sheath (33), the other end of spring and the fixed surface connection of contact block (34).
7. The automatic dust suction device for the semiconductor etching machine according to claim 5, wherein: the surface of one side, close to each other, of the contact block (34) and the button (4) is glued with a rubber pad, and the shape of the rubber pad is convex.
8. The automatic dust suction device for the semiconductor etching machine according to claim 5, wherein: the inner wall of the mounting ring (31) is provided with internal threads, and the surface of the fixing ring (32) is provided with external threads.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021805215.8U CN213103724U (en) | 2020-08-26 | 2020-08-26 | Automatic dust collection device for semiconductor etching machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021805215.8U CN213103724U (en) | 2020-08-26 | 2020-08-26 | Automatic dust collection device for semiconductor etching machine |
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| Publication Number | Publication Date |
|---|---|
| CN213103724U true CN213103724U (en) | 2021-05-04 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202021805215.8U Active CN213103724U (en) | 2020-08-26 | 2020-08-26 | Automatic dust collection device for semiconductor etching machine |
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| CN (1) | CN213103724U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114618658A (en) * | 2022-03-22 | 2022-06-14 | 陈杰聪 | Grinding dispersion machine for graphene preparation and cleaning method thereof |
-
2020
- 2020-08-26 CN CN202021805215.8U patent/CN213103724U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114618658A (en) * | 2022-03-22 | 2022-06-14 | 陈杰聪 | Grinding dispersion machine for graphene preparation and cleaning method thereof |
| CN114618658B (en) * | 2022-03-22 | 2024-05-17 | 辽宁丹炭新材料有限公司 | Grinding and dispersing machine for graphene preparation and cleaning method thereof |
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Legal Events
| Date | Code | Title | Description |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20230707 Address after: Room 307, Building 2, No. 30, Eling South Road, Huicheng District, Huizhou, Guangdong Province, 516000 Patentee after: Dong Fenge Address before: 511400 room 602, building 2, 1st Street, 116 Xili South Road, Panyu District, Guangzhou City, Guangdong Province Patentee before: Chen Xia |
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| TR01 | Transfer of patent right |