CN213069562U - Coating equipment remote control system based on Internet of things and coating equipment - Google Patents

Coating equipment remote control system based on Internet of things and coating equipment Download PDF

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Publication number
CN213069562U
CN213069562U CN202021910260.XU CN202021910260U CN213069562U CN 213069562 U CN213069562 U CN 213069562U CN 202021910260 U CN202021910260 U CN 202021910260U CN 213069562 U CN213069562 U CN 213069562U
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China
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coating equipment
internet
things
control device
automatic control
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CN202021910260.XU
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Chinese (zh)
Inventor
冀鸣
林秀刚
刘伟基
赵刚
易洪波
张军
陈文俊
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Zhongshan Bodun Optoelectronics Technology Co ltd
Foshan Bolton Photoelectric Technology Co ltd
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Zhongshan Bodun Optoelectronics Technology Co ltd
Foshan Bolton Photoelectric Technology Co ltd
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Abstract

The application relates to a filming equipment remote control system and filming equipment based on thing networking, this remote control system includes: the system comprises an automatic control device, a PLC (programmable logic controller) connected with the automatic control device, a cloud platform deployed at the cloud end and a control terminal; the automatic control device is in communication connection with the cloud platform through the Internet of things; the control terminal is in communication connection with the cloud platform through the intent network; the PLC is also connected with a sensor unit arranged on the film coating equipment; the PLC is respectively connected with each sub-component of the film coating equipment. According to the technical scheme, the remote control platform is built based on the Internet of things technology, remote monitoring and control can be carried out on the current coating equipment based on the remote control platform, convenience in the control process of the coating equipment and control efficiency of the coating equipment are improved, and development of the coating industry is promoted.

Description

Coating equipment remote control system based on Internet of things and coating equipment
Technical Field
The application relates to the technical field of vacuum coating, in particular to a remote control system of coating equipment based on the Internet of things and the coating equipment.
Background
The coating equipment is used for coating an object, the existing coating equipment is mainly vacuum coating, and the vacuum coating equipment is a type of equipment needing coating under a higher vacuum degree, mainly comprises two types of evaporation and sputtering, and specifically comprises vacuum example evaporation, magnetron sputtering, MBE molecular epitaxy, PLD laser sputtering deposition and the like; for example, in thin film deposition, coating of optical parts, etc., ion sources are generally used.
The existing vacuum coating equipment is generally characterized in that all equipment parts are connected to an upper computer (industrial personal computer) with a display screen, all the equipment parts are controlled through an embedded human-computer interface, a control system is integrated in the upper computer, a user can only control and monitor the equipment through the operation of the upper computer on site, the use convenience of the technology is extremely poor, and the control efficiency of the coating equipment is seriously influenced.
SUMMERY OF THE UTILITY MODEL
The purpose of this application aims at solving one of foretell technical defect, especially provides a filming equipment remote control system and filming equipment based on thing networking to the convenience that promotes and the control efficiency of filming equipment.
In order to achieve the above object, the present application provides the following technical solutions:
the utility model provides a filming equipment remote control system based on thing networking, includes: the system comprises an automatic control device, a PLC (programmable logic controller) connected with the automatic control device, a cloud platform deployed at the cloud end and a control terminal;
the automatic control device is in communication connection with the cloud platform through the Internet of things; the control terminal is in communication connection with the cloud platform through the intent network;
the PLC is also connected with a sensor unit arranged on the film coating equipment; the PLC is respectively connected with each sub-component of the film coating equipment.
In one embodiment, the PLC controls the acquisition of the detection parameters of the sensor unit and the state data of the sub-components to be sent to an automatic control device, and the automatic control device uploads the detection parameter sub-component state data to a cloud-end platform through the Internet of things; the control terminal accesses the data of the cloud platform and issues a control instruction to the automatic control device through the cloud platform, and the automatic control device remotely controls each sub-component of the film coating equipment.
In one embodiment, the coating device remote control system based on the internet of things further includes: the simulation unit and the switch unit are respectively connected with the PLC;
the PLC is respectively connected with each sub-component of the coating equipment through the simulation unit and the switch unit;
the sensor unit is connected to the PLC through the analog unit;
the PLC controls and collects the switch data and the analog quantity data of each sub-component of the film coating equipment and sends the switch data and the analog quantity data to the automatic control device, and the automatic control device uploads the switch data and the analog quantity data to the cloud-end platform through the Internet of things.
In one embodiment, the automatic control device issues control instructions to each sub-component of the coating equipment through the PLC to remotely control the coating equipment;
or
And the automatic control device issues a control instruction to each sub-component of the coating equipment to remotely control the coating equipment.
In one embodiment, the coating device remote control system based on the internet of things further includes: a digital unit connected with the automatic control device;
the digital unit is connected with each sub-component of the film coating equipment, and acquires digital quantity data of each sub-component of the film coating equipment and sends the digital quantity data to an automatic control device.
In one embodiment, the control terminal comprises one or more of an online process design terminal, a real-time operation monitoring terminal, a history record backtracking terminal and a data statistical analysis terminal.
In one embodiment, the sensor unit comprises at least one or more of a vacuum chamber sensor, a light sensor, and an air pressure sensor.
In one embodiment, each sub-component of the coating device comprises at least one or more of an ion source, a light emitting module and a crystal control instrument.
In one embodiment, the automatic control device comprises an edge controller.
The coating equipment is controlled by the coating equipment remote control system based on the Internet of things.
Above-mentioned filming equipment remote control system and filming equipment based on thing networking has set up a remote control platform based on internet of things, can carry out remote monitoring and control to current filming equipment based on this control platform, has promoted the convenience of filming equipment control process and the control efficiency of filming equipment, promotes the filming industrial development.
Additional aspects and advantages of the present application will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the present application.
Drawings
The foregoing and/or additional aspects and advantages of the present application will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
FIG. 1 is a block diagram of a remote control system of a filming device based on the Internet of things according to an embodiment;
FIG. 2 is a block diagram of a remote control system of a filming device based on the Internet of things according to another embodiment;
FIG. 3 is a block diagram of a remote control system of a filming device based on the Internet of things according to another embodiment;
FIG. 4 is a block diagram of an exemplary implementation framework of a remote monitoring system for a coating device;
fig. 5 is a schematic diagram of management functions implemented by an example cloud platform.
Detailed Description
Reference will now be made in detail to embodiments of the present application, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present application and are not to be construed as limiting the present application.
As used herein, the singular forms "a", "an", "the" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of stated features, integers, steps, or operations, but do not preclude the presence or addition of one or more other features, integers, steps, operations, or groups thereof.
It will be understood by those within the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the prior art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
Referring to fig. 1, fig. 1 is a block diagram of a remote control system of a filming device based on the internet of things according to an embodiment. The application provides a filming equipment remote control system based on thing networking includes: the system comprises an automatic control device, a PLC (programmable logic controller) connected with the automatic control device, a cloud platform deployed at the cloud end and a control terminal; the automatic control device is in communication connection with the cloud platform through the Internet of things; the control terminal is in communication connection with the cloud platform through the intent network; the PLC is also connected with a sensor unit arranged on the film coating equipment; the PLC is respectively connected with each sub-component of the film coating equipment.
In one embodiment, for the control system, the PLC controls the acquisition of the detection parameters of the sensor unit and the state data of the sub-components to be sent to an automatic control device, and the automatic control device uploads the state data of the detection parameters of the sub-components to a cloud-end platform through the Internet of things; the control terminal accesses the data of the cloud platform and issues a control instruction to the automatic control device through the cloud platform, and the automatic control device remotely controls each sub-component of the film coating equipment.
In one embodiment, referring to fig. 2, fig. 2 is a block diagram of a remote control system of a filming device based on the internet of things according to another embodiment.
The coating equipment remote control system based on the Internet of things further comprises: the simulation unit and the switch unit are respectively connected with the PLC; the PLC is respectively connected with each sub-component of the coating equipment through the simulation unit and the switch unit; the sensor unit is connected to the PLC through the analog unit; the PLC controls and collects the switch data and the analog quantity data of each sub-component of the film coating equipment and sends the switch data and the analog quantity data to the automatic control device, and the automatic control device uploads the switch data and the analog quantity data to the cloud-end platform through the Internet of things.
Specifically, as shown in fig. 2, the switch input amount of each sub-component of the film plating equipment can be detected by the switch unit, the state of the film plating equipment can be detected by the sensor unit, and the detection data of the sensor and the related data of the sub-components of the film plating equipment can be converted from analog quantity to digital quantity by the analog unit, so that the PLC controller is suitable for processing.
In an embodiment, with continued reference to fig. 2, the remote control system for filming equipment based on internet of things further includes: a digital unit connected with the automatic control device; the digital unit is connected with each sub-component of the film coating equipment, and acquires digital quantity data of each sub-component of the film coating equipment and sends the digital quantity data to an automatic control device.
In one embodiment, referring to fig. 3, fig. 3 is a block diagram of a remote control system of a filming device based on the internet of things according to another embodiment.
The automatic control device issues control instructions to each sub-component of the coating equipment through the PLC to remotely control the coating equipment; or the automatic control device issues a control instruction to each sub-component of the coating equipment to remotely control the coating equipment.
Specifically, the automatic control device receives the issued control instruction, can remotely control each sub-component of the film plating equipment through the PLC, and can also remotely control each sub-component of the film plating equipment by directly sending the control instruction (through an RS485 protocol) to each sub-component of the film plating equipment.
In one embodiment, referring to fig. 2 and 3, the control terminal includes one or more of an on-line process design terminal, a real-time operation monitoring terminal, a history backtracking terminal, and a data statistical analysis terminal.
For the control terminal, the control terminal is a device capable of accessing the cloud platform, and for the cloud platform, devices such as a PC device and a mobile terminal can also be used for accessing.
In one embodiment, referring to fig. 2-3, the sensor unit includes at least one or more of a vacuum chamber sensor, a light sensor, and an air pressure sensor.
Specifically, the vacuum cavity sensor is used for detecting the vacuum state in the coating equipment, the optical sensor can detect light data in the vacuum cavity, and the air pressure sensor can detect air pressure data in the vacuum cavity.
In one embodiment, referring to FIGS. 1-3, the various sub-components of the coating apparatus include at least one or more of an ion source, a light emitting module, and a crystal control instrument.
Specifically, the sub-components of the coating equipment refer to relevant components of the coating equipment, wherein the ion source is a component for generating ion beams, the light-emitting module is a component for emitting light, and the crystal control instrument is an instrument for controlling the thickness of a film layer in the coating process.
In one embodiment, the automatic control device comprises an edge controller.
The application also provides a coating device, and the coating device is controlled through the coating device remote control system based on the Internet of things.
The remote control system for the coating equipment based on the Internet of things can build a remote control platform based on the IOT (Internet of things technology), can effectively control and manage the current coating equipment based on the control platform, and improves the functions of the coating equipment.
An IOT module may be designed in the automatic control device, and data information to be uploaded is uploaded to the cloud platform through the IOT base station. In the operation of the coating equipment, each sub-component can upload equipment state parameters to the cloud platform. The control terminal can log in the cloud platform to access, so that centralized management, remote control instructions, data backtracking, real-time state monitoring, remote version upgrading and the like of the coating equipment are realized.
Through online process design terminal, real-time operation monitor terminal, historical record backtracking terminal, data statistics analysis terminal etc. can visit high in the clouds platform through the network, for example, carry out remote access through clients such as web mode, APP procedure.
In order to make clearer the effect of the coating equipment remote control system based on the internet of things, the following explanation is combined with the application in an actual scene.
Referring to fig. 4, fig. 4 is a structural diagram of an implementation framework of an exemplary remote monitoring system for a coating device, and mainly includes:
the edge controller is used for realizing a control function, mainly comprises equipment communication adaptation service of an equipment part, realizes a communication function with the equipment part, adapts various types of equipment, and converts the equipment into a standard MQTT protocol, thereby realizing communication connection with a cloud. Each sub-component of the equipment part is connected into the edge control module through a serial port, and each sub-component is communicated with the edge controller based on the MODBUS protocol. The cloud platform deployed at the cloud serves as a central service, has the functions of equipment management, safety authentication, real-time monitoring, process design, data analysis and the like, can be provided for the client to access in a WEB service form, realizes remote interactive control of the film coating machine, and can support the access of a PC client and a mobile phone client.
As for the implementation function of the cloud platform, the implementation function can be designed according to requirements, and referring to fig. 5, fig. 5 is a schematic diagram of an exemplary management function implemented by the cloud platform.
The method mainly comprises the following steps: open API, business orchestration, rules engine, big data analysis, SIM card management, connection management, device management, security authentication, etc.
Based on this application's coating equipment remote control system based on thing networking can be through the access of control terminal to high in the clouds platform to the realization is to various monitoring and the control function of coating equipment, for example:
(1) centralized management of equipment;
taking an ion source as an example, the ion source management comprises centralized management of an ion source module, registration, information editing and deletion of equipment, monitoring of equipment, entry of module upgrading and the like. And managing basic information of the equipment, including equipment model, installation position, user and the like, and realizing equipment access registration, authentication and the like.
Registration and authentication: platform registration of devices to authorize device admission, identification of devices by unique device numbers, and maintenance of device basic information
Customer management: after the equipment is sold, the customer information is registered, and the information of the equipment used by the customer is maintained so as to support maintenance service.
Position information: and maintaining the installation position of the equipment, including longitude and latitude data, so that the positioning can be quickly realized, and the map rendering can be realized.
(2) A remote control instruction;
the remote issuing of the control instruction is realized through the communication of the Internet of things, so that the remote debugging and optimization can be realized for the client.
Establishing a data transmission channel between the ion source and the platform, and adopting a data transparent transmission mode to meet the anti-interference performance; collecting data on an ion source, assembling and transmitting the data to a module according to a protocol, receiving the module data, and analyzing a response command; and the server program which is independently researched and developed realizes data analysis and assembly, data storage, real-time visual display and the like.
(3) Data backtracking analysis;
the stored data are collected through the cloud platform, the process production process of the coating equipment can be traced back, production is effectively guaranteed, and efficiency is optimized and improved.
The ion source operation data stored through the cloud platform are acquired, the state data continuously reported by the ion source are inquired, analyzed and derived according to the voltage data, the current data and the fault data, the technological production process can be traced back, production is effectively guaranteed, and the efficiency is optimized and improved.
(4) Monitoring the state in real time;
through the communication of the Internet of things, real-time data of the operation of the coating equipment is transmitted according to a designed protocol, and the real-time parameters of the operation of the coating equipment are monitored by a PC (personal computer) end.
And remote version upgrading, namely issuing the bin file of the new version to the film coating equipment according to a designed protocol through the communication of the Internet of things, so that the remote upgrading is realized, and the improvement service is continuously provided for the client.
(5) Managing a process parameter template;
the parameter template is used for management, the basic information of each parameter is defined and used as the element with the finest granularity, and a foundation is provided for the on-line editing of the process.
The expandability is realized, and all parameters can be flexibly increased and deleted through a configuration mode, so that the coating equipment with different specifications is adapted; by setting the validity range of the parameter values, the verification in the process of editing is realized, and the influence of illegal values on the normal operation of equipment is avoided.
The foregoing is only a partial embodiment of the present application, and it should be noted that, for those skilled in the art, several modifications and decorations can be made without departing from the principle of the present application, and these modifications and decorations should also be regarded as the protection scope of the present application.

Claims (10)

1. The utility model provides a filming equipment remote control system based on thing networking which characterized in that includes: the system comprises an automatic control device, a PLC (programmable logic controller) connected with the automatic control device, a cloud platform deployed at the cloud end and a control terminal;
the automatic control device is in communication connection with the cloud platform through the Internet of things; the control terminal is in communication connection with the cloud platform through the intent network;
the PLC is also connected with a sensor unit arranged on the film coating equipment; the PLC is respectively connected with each sub-component of the film coating equipment.
2. The remote control system for coating equipment based on the internet of things of claim 1, wherein the PLC controls the acquisition of the detection parameters of the sensor unit and the state data of the subcomponents to be sent to an automatic control device, and the automatic control device uploads the state data of the detected parameters of the subcomponents to a cloud-end platform through the internet of things; the control terminal accesses the data of the cloud platform and issues a control instruction to the automatic control device through the cloud platform, and the automatic control device remotely controls each sub-component of the film coating equipment.
3. The coating equipment remote control system based on the internet of things of claim 1, further comprising: the simulation unit and the switch unit are respectively connected with the PLC;
the PLC is respectively connected with each sub-component of the coating equipment through the simulation unit and the switch unit;
the sensor unit is connected to the PLC through the analog unit;
the PLC controls and collects the switch data and the analog quantity data of each sub-component of the film coating equipment and sends the switch data and the analog quantity data to the automatic control device, and the automatic control device uploads the switch data and the analog quantity data to the cloud-end platform through the Internet of things.
4. The remote control system for coating equipment based on the Internet of things of claim 2, wherein the automatic control device issues control instructions to each sub-component of the coating equipment through the PLC to remotely control the coating equipment;
or
And the automatic control device issues a control instruction to each sub-component of the coating equipment to remotely control the coating equipment.
5. The coating equipment remote control system based on the internet of things of claim 1, further comprising: a digital unit connected with the automatic control device;
the digital unit is connected with each sub-component of the film coating equipment, and acquires digital quantity data of each sub-component of the film coating equipment and sends the digital quantity data to an automatic control device.
6. The coating equipment remote control system based on the Internet of things of claim 1, wherein the control terminal comprises one or more of an online process design terminal, a real-time operation monitoring terminal, a history record backtracking terminal and a data statistics analysis terminal.
7. The remote control system for coating equipment based on the internet of things of claim 1, wherein the sensor unit comprises at least one or more of a vacuum chamber sensor, a light sensor and an air pressure sensor.
8. The remote control system for coating equipment based on the internet of things of claim 1, wherein each sub-component of the coating equipment comprises at least one or more of an ion source, a light emitting module and a crystal control instrument.
9. The internet-of-things-based remote control system for coating equipment according to claim 1, wherein the automatic control device comprises an edge controller.
10. A coating device, characterized in that the coating device is controlled by the internet-of-things-based coating device remote control system according to any one of claims 1 to 9.
CN202021910260.XU 2020-09-03 2020-09-03 Coating equipment remote control system based on Internet of things and coating equipment Active CN213069562U (en)

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Application Number Priority Date Filing Date Title
CN202021910260.XU CN213069562U (en) 2020-09-03 2020-09-03 Coating equipment remote control system based on Internet of things and coating equipment

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Application Number Priority Date Filing Date Title
CN202021910260.XU CN213069562U (en) 2020-09-03 2020-09-03 Coating equipment remote control system based on Internet of things and coating equipment

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115305450A (en) * 2022-09-06 2022-11-08 嘉兴云浩纳米技术有限公司 Production line system based on digital factory intelligent networking nano coating

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115305450A (en) * 2022-09-06 2022-11-08 嘉兴云浩纳米技术有限公司 Production line system based on digital factory intelligent networking nano coating

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