CN213026078U - Air extractor and vacuum conveying system - Google Patents

Abstract

The application provides an air exhaust device for realize the pressure balance between the reaction cavity and the conveying cavity of intercommunication. The air extracting device comprises a first air extracting assembly communicated with the reaction cavity, a second air extracting assembly communicated with the conveying cavity, and a connecting assembly connected between the first air extracting assembly and the second air extracting assembly. The first air pumping assembly comprises an automatic pressure control valve, a high polymer pump, a first vacuum pump, an annular small pipe and a bypass valve, and the annular small pipe and the bypass valve are connected with the automatic pressure control valve in parallel; the second air pumping assembly comprises a second vacuum pump; the connecting assembly comprises a connecting pipeline and a connecting valve. This application air exhaust device can realize the vacuum conveying between reaction cavity and the conveying cavity for before the chamber door between two devices is opened, the pressure differential in two devices is balanced relatively, and then avoids the polymer to raise in the data send process and pollutes the product surface, reaches the effect that promotes the product yield.

Description

Air extractor and vacuum conveying system

Technical Field

The application relates to the technical field of etching, in particular to an air exhaust device and a vacuum conveying system comprising the air exhaust device.

Background

Before manufacturing chips, products such as wafers need to be etched to form specific structures. The etching process is carried out under vacuum in a reaction chamber in which the etching of a particular product produces waste residues, i.e. polymers. And after the etching is finished, the product is required to be kept in a vacuum state and is conveyed to the next process, and the etching is realized through a conveying cavity communicated with the reaction cavity.

Under the vacuum condition, when a cavity door between the conveying cavity and the reaction cavity is opened, the air pressure of the conveying cavity is higher, the air pressure of the reaction cavity is lower, and pressure difference exists between the conveying cavity and the reaction cavity, so that turbulent flow flowing from the conveying cavity to the reaction cavity is easily caused. At the moment, reaction residues in the reaction cavity can be lifted along with the turbulent flow and splashed to the surface of a product, so that the quality of the product is influenced, the product defect is caused, and the product is scrapped when the product is serious.

SUMMERY OF THE UTILITY MODEL

The utility model provides a not enough of prior art is solved to the aim at of this application, has proposed an air exhaust device to solve the phenomenon of the product pollution that probably appears in the data send process, specifically include following technical scheme:

the utility model provides an air extractor for realizing the pressure balance between the communicated reaction cavity and the conveying cavity, which comprises a first air extracting component communicated with the reaction cavity, a second air extracting component communicated with the conveying cavity, and a connecting component connected between the first air extracting component and the second air extracting component;

the first air pumping assembly comprises an automatic pressure control valve, a polymer pump, a first vacuum pump, an annular small pipe and a bypass valve, the automatic pressure control valve, the polymer pump and the first vacuum pump are sequentially communicated with the reaction cavity, and the annular small pipe and the bypass valve are connected in series and are connected between the reaction cavity and the polymer pump;

the second air pumping assembly comprises a second vacuum pump communicated to the conveying cavity;

coupling assembling includes connecting tube and connecting valve, the one end of connecting tube connect in automatic pressure control valve with between the polymer pump, and be located the bypass valve with between the polymer pump, the other end of connecting tube connect in the conveying cavity with between the second vacuum pump.

This application air exhaust device is through respectively will first bleed the subassembly with the reaction cavity connects, and will the second bleed the subassembly with the conveying cavity connects, and first bleed the subassembly with the second is bled and is set up between the subassembly coupling assembling has realized the reaction cavity with switch on between the conveying cavity. The reaction cavity and the conveying cavity are respectively pumped by the first air pumping assembly and the second air pumping assembly, so that the pressure between the two devices is relatively balanced. The small annular pipe also has a certain buffering function, when the first air exhaust assembly is communicated with the second air exhaust assembly and performs air exhaust balance, the high pressure in the conveying cavity can be prevented from directly entering the reaction cavity, so that the reaction cavity is protected, and in the process that the product is conveyed towards the conveying cavity, the polymer in the reaction cavity is prevented from being lifted and splashed to the surface of the product. Therefore, the phenomenon that the product is polluted is avoided, and the yield of the product is improved.

Optionally, the annular small tube comprises a curved section, and the curved section is in a spiral structure.

The annular small pipe is used for preventing air pressure from flowing back to the reaction cavity, and when the bent section of the annular small pipe is of a spiral structure, the effect of preventing air flow from passing quickly can be effectively achieved.

Optionally, the number m of spiral turns on the bending section satisfies: m is more than or equal to 3.

When the number of spiral turns on the bending section is more than or equal to 3, the length of the annular small pipe can be increased, the integral curvature of the annular small pipe can be improved, and the effect of preventing air pressure from flowing back to the reaction cavity is improved.

Optionally, the inner diameter r of the annular small tube satisfies: r is less than or equal to 10 mm.

The restriction of the inner diameter of the small annular pipe can play a role in buffering the gas pressure when the communication between the reaction cavity and the conveying cavity is realized.

Optionally, a third pneumatic valve is arranged between the automatic pressure control valve and the polymer pump, and the bypass valve is connected between the third pneumatic valve and the polymer pump.

Through the arrangement, the annular small pipe and the pipeline where the automatic pressure control valve is located are connected in parallel, so that the work of the annular small pipe and the pipeline where the automatic pressure control valve is located is not interfered with each other, the third pneumatic valve is used for achieving the on-off of the pipeline where the automatic pressure control valve is located, and the bypass valve is used for achieving the on-off of the annular small pipe.

Optionally, a rough pumping pipeline and a rough pumping valve are further arranged between the reaction cavity and the first vacuum pump. The rough pumping pipeline is positioned between the reaction cavity and the first vacuum pump, and can directly perform vacuum rough pumping on the pressure in the reaction cavity through the first vacuum pump.

Optionally, the connection position of the rough air-operated valve and the first vacuum pump is arranged between the polymer pump and the third pneumatic valve. The rough pumping pipeline is used for performing vacuum rough pumping on the reaction cavity before the polymer pump performs air pumping on the reaction cavity, so that the pressure in the reaction cavity is reduced, and the polymer pump is protected.

Optionally, the reaction chamber and the conveying chamber are respectively provided with a pressure gauge.

The reaction cavity and the conveying cavity are respectively provided with one pressure gauge, so that the pressure in the reaction cavity and/or the conveying cavity can be detected in real time.

Optionally, at least one of the pressure gauges is provided with a monitoring module.

The monitoring module can monitor whether the pressure gauge is in a normal working state or not in real time.

A vacuum conveying system comprises a reaction cavity, a conveying cavity and the air extracting device, wherein the reaction cavity is communicated with the conveying cavity, and the air extracting device is communicated with the reaction cavity and the conveying cavity respectively.

The application provides a vacuum transfer system, by the reaction cavity conveying cavity and the aforesaid air exhaust device constitutes, can make the reaction cavity with reach the relative balance of pressure between the conveying cavity, carry out the vacuum conveying of product, avoid the pollution of product, promote the yields of product.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.

FIG. 1 is a schematic view of an air extractor provided in the present invention;

FIG. 2 is a schematic view of an embodiment of the air extractor of the present invention;

FIG. 3 is a schematic view of a state of an air extractor provided in another embodiment of the present invention;

FIG. 4 is a partial schematic view of an air extractor provided in an embodiment of the present invention;

FIG. 5 is a schematic view of an air extractor provided in an embodiment of the present invention;

FIG. 6 is a schematic view of an air extractor provided in another embodiment of the present invention;

FIG. 7 is a schematic view of an air extractor in accordance with yet another embodiment of the present invention.

Description of reference numerals:

1-a vacuum transfer system; 10-a reaction chamber; 20-a transfer chamber; 30-an air extraction device; 21-a cavity door; 100-a first pumping assembly; 200-a second pumping assembly; 300-a connection assembly; 101-a first vacuum pump; 111-a first pneumatic valve; 102-an automatic pressure control valve; 112-a third pneumatic valve; 103-a polymer pump; 104-a ring-shaped tubule; 114-a bypass valve; 115-rough exhaust pneumatic valve; 201-a second vacuum pump; 211-a second pneumatic valve; 301-connecting valve; 401-connecting a pipe; 402-rough pumping pipeline; 501-a pressure gauge; 502-a monitoring module; 01-first connection; 010-a first end; 020-second end.

Detailed Description

The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. It should be understood that the described embodiments are only some of the described embodiments of the present invention, and not all of them. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

For better understanding of the technical solutions of the present invention, the following detailed descriptions of the embodiments of the present invention are provided with reference to the accompanying drawings.

The reaction chamber 10 and the transfer chamber 20 are connected by a chamber door 21 between the two devices, and when a desired product is etched in the reaction chamber 10, the chamber door 21 is closed to ensure a vacuum environment of the reaction chamber 10. After etching is completed, the product is transferred through the transfer chamber 20, and the chamber door 21 is opened for the product to pass through. The air extractor 30 provided by the present application is used for simultaneously conducting the reaction cavity 10 and the transfer cavity 20, and can sequentially perform air extraction and communicating air extraction on the reaction cavity 10 and the transfer cavity 20 respectively to realize the relative balance of air pressure between the reaction cavity 10 and the transfer cavity 20.

Referring to fig. 1, an exemplary embodiment of an air extractor 30 according to the present invention is shown, in which the air extractor 30 includes a first air extracting assembly 100 connected to the reaction chamber 10, a second air extracting assembly 200 connected to the transfer chamber 20, and a connecting assembly 300 connected between the first air extracting assembly 100 and the second air extracting assembly 200. The coupling assembly 300 is used to facilitate communication between the first pumping assembly 100 and the second pumping assembly 200 during a pressure-to-pressure balancing process.

With continued reference to fig. 1, the first pumping assembly 100 includes an automatic pressure control valve 102, a polymer pump 103, a first vacuum pump 101, a small annular tube 104, and a bypass valve 114 sequentially connected to the reaction chamber 10. A first connection point 01 is formed between the automatic pressure control valve 102 and the polymer pump 103, and the annular small pipe 104 and the bypass valve 114 are connected between the reaction chamber 10 and the first connection point 01. That is, the annular small pipe 104 and the bypass valve 114 are connected in parallel with the automatic pressure control valve 102 at the first connection 01. The second pumping assembly 200 includes a second vacuum pump 201, and the second vacuum pump 201 is connected to the transfer chamber 20. The linkage assembly 300 includes a linkage conduit 401 and a linkage valve 301, the linkage conduit 401 including a first end 010 in communication with the first pumping assembly 100 and a second end 020 in communication with the second pumping assembly 200. The first end 010 of the connection pipe 401 is connected between the automatic pressure control valve 102 and the polymer pump 103 and located between the bypass valve 114 and the polymer pump 103, and the second end 020 of the connection pipe 401 is connected between the transfer chamber 20 and the second vacuum pump 201, so as to achieve the communication between the first pumping assembly 100 and the second pumping assembly 200. That is, the communication between the reaction chamber 10 and the transfer chamber 20 is achieved by the first pumping assembly 100, the second pumping assembly 200 and the connecting assembly 300.

Referring to fig. 2, before the product is transferred, the door 21 between the reaction chamber 10 and the transfer chamber 20 is in a closed state, and at this time, there is a difference in air pressure between the reaction chamber 10 and the transfer chamber 20, and the product transfer in a vacuum state is not facilitated after the door 21 is opened, so that the air pressure in the reaction chamber 10 and the transfer chamber 20 in a state where the door 21 is closed needs to be pumped to achieve a vacuum condition required for transferring the product. During the air-extracting operation of the air-extracting device 30, the third pneumatic valve 112 and the first pneumatic valve 111 in the first air-extracting assembly 100 are in an open state, and the bypass valve 114 on the small annular tube 104 is in a closed state; meanwhile, the second pneumatic valve 211 in the second pumping assembly 200 is in an open state; the connecting valve 301 in the connecting assembly 300 is in a closed state.

Specifically, in this embodiment, before performing the pumping operation on the reaction cavity 10, the air pressure in the reaction cavity 10 is 200mttor or less, at this time, the automatic pressure control valve 102 in the first pumping assembly 100 is opened, and the third pneumatic valve 112 and the first pneumatic valve 111 connected between the polymer pump 103 and the first vacuum pump 101 are simultaneously opened, a passage connected between the reaction cavity 10 and the first vacuum pump 101 is formed in the first pumping assembly 100, at this time, the polymer pump 103 and the first vacuum pump 101 pump the air pressure in the reaction cavity 10, so that the air pressure in the reaction cavity 10 after the pumping operation is completed can be continuously below 1mttor, and after the air pressure in the reaction cavity 10 reaches below 1mttor, the polymer pump 103 and the first vacuum pump 101 always maintain the pumping operation state.

With continued reference to FIG. 2, the second pneumatic valve 211 in the second pumping assembly 200 is opened, and a path is formed in the second pumping assembly 200 between the transfer chamber 20 and the second vacuum pump 201. The second vacuum pump 201 is used for evacuating the air pressure in the transmission cavity 20, so that the air pressure in the transmission cavity 20 is kept below 200mttor, and the second vacuum pump 201 is always kept in an evacuating working state after the air pressure in the transmission cavity 20 reaches below 200 mttor.

It is to be noted that the polymer pumps 103, the first vacuum pump 101, and the second vacuum pump 201 in the first pumping assembly 100 and the second pumping assembly 200 are always kept in the open state, and the states thereof are not necessarily linked to the open and closed states of the third pneumatic valve 112, the first pneumatic valve 111, and the second pneumatic valve 211. In the pumping process, the polymer pump 103 and the first vacuum pump 101 are used to pump the reaction chamber 10, and the second vacuum pump 201 is used to pump the transfer chamber 20, so that a fixed pressure difference is formed between the reaction chamber 10 and the transfer chamber 20, thereby preparing for the subsequent pressure balancing process.

In one embodiment, referring to FIG. 3, in the pressure balancing process, to achieve the relative pressure balance between the reaction chamber 10 and the transfer chamber 20, the third pneumatic valve 112 in the first pumping assembly 100 is closed, and the first pneumatic valve 111 and the bypass valve 114 on the annular small tube 104 are opened; the second pneumatic valve 211 in the second pumping assembly 200 is in a closed state; the connecting valve 301 in the connecting assembly 300 is in an open state. At this time, the communication between the first pumping assembly 100, the second pumping assembly 200 and the connecting assembly 300 can realize the communication between the reaction chamber 10 and the transfer chamber 20, so as to form a passage for realizing the relative pressure balance. Since the pressure in the reaction chamber 10 before the process is 1mttor or less and the pressure in the transfer chamber 20 is 200mttor or less, there is a difference in pressure between the two devices. Therefore, after the two devices are communicated with the first vacuum pump 101 and the polymer pump 103 through the annular small tube 104 in the first pumping assembly 100, the connecting assembly 300 and the second pumping assembly 200, in order to achieve the relative balance of the air pressure, the air pressure in the conveying cavity 20 can rapidly recharge the air flow into the reaction cavity 10, but the arrangement of the annular small tube 104 can buffer the recharging air flow, and meanwhile, the polymer pump 103 continuously pumps the air pressure in the pipeline, so that the air flow is not recharged into the reaction cavity 10 and is pumped away by the polymer pump 103, and at the moment, when the air pressure in the reaction cavity 10 and the conveying cavity 20 is pumped to the limit, the relative balance of the air pressure between the two devices can be achieved. And the equilibrium limit β satisfies: beta is not less than 0.1mttor and not more than 1 mttor.

It should be noted that the present application provides for the connection of the various components in the gas-extracting device 30 through pipes, and the connection between the gas-extracting device 30 and the reaction chamber 10 and the transfer chamber 20 is also through pipes.

The two air exhaust states of the air exhaust device 30 shown in fig. 2 and fig. 3 can make the pressure between the reaction cavity 10 and the transfer cavity 20 reach a relative equilibrium state, when the cavity door 21 is opened, the interior of the reaction cavity 10 and the interior of the transfer cavity 20 are both in a vacuum state, and at this time, the transferred product can ensure that no polymer is lifted up in the reaction cavity 10 and splashed to the surface of the product to cause product pollution, which affects the yield of the product. The air extractor 30 provided by the application can enable the air pressure in the reaction cavity 10 and the air pressure in the conveying cavity 20 to reach relative balance, so that the quality of products can be improved, and the yield of the products can be increased.

In one embodiment, with continued reference to fig. 3, the annular small tube 104 includes a curved section, and the curved section of the annular small tube 104 is in a spiral configuration.

Specifically, referring to fig. 4, in the present embodiment, the curved section of the small annular tube 104 is in a spiral structure, and when the curved section of the small annular tube 104 is in the spiral structure, the curved section can be used for blocking the air pressure from flowing back to the reaction chamber 10, and the effect of blocking the air pressure from flowing back can be effectively achieved.

Referring to fig. 4, the number m of turns of the curved portion of the small annular tube 104 satisfies: m is more than or equal to 3.

Specifically, in the present embodiment, when the number of spiral turns of the curved section of the small annular tube 104 is greater than or equal to 3, the length of the small annular tube 104 can be increased, the overall curvature of the small annular tube 104 can be improved, and the effect of blocking the gas pressure from flowing back to the reaction chamber 10 can be improved.

Referring again to fig. 4, in one embodiment, the inner diameter r of the small annular tube 104 satisfies: r is less than or equal to 10 mm.

Specifically, in the present embodiment, the inner diameter of the small annular pipe 104 is limited, so that the sectional area of the small annular pipe 104 is much smaller than the sectional area of other pipes in the gas exhaust device 30, and the gas pressure can be buffered when the communication between the reaction chamber 10 and the transfer chamber 20 is realized. When the reaction chamber 10 and the transfer chamber 20 are communicated, the air pressure in the transfer chamber 20 will not rapidly enter the reaction chamber 10 due to the air pressure difference, thereby affecting the product quality in the reaction chamber 10. In the process, the small annular pipe 104 enables the air pressure in the transfer chamber 20 to be pumped away by the polymer pump 103 without entering the reaction chamber 10, so as to achieve the relative balance of the pressure between the two devices.

Referring again to fig. 1, in one embodiment, a third pneumatic valve 112 is disposed between the automatic pressure control valve 102 and the polymer pump 103, and a bypass valve 114 is connected between the third pneumatic valve 112 and the polymer pump 103.

Specifically, in the present embodiment, the automatic pressure control valve 102 and the third pneumatic valve 112 form a parallel pipeline with the small annular pipe 104 and the bypass valve 114 and are connected to the first connection point 01, and are connected and conducted with the polymer pump 103. The third pneumatic valve 112 is arranged to protect the automatic pressure control valve 102 to a certain extent and to enable the automatic pressure control valve 102 to be on or off by the air pressure on the pipeline. The annular small pipe 104 and the pipeline where the automatic pressure control valve 102 is located are connected in parallel, so that the work between the two is not interfered with each other, and the functions of the two can be realized.

Referring to fig. 5, a rough exhaust pipe 402 and a rough exhaust valve 115 are disposed between the reaction chamber 10 and the first vacuum pump 101.

Specifically, in this embodiment, the rough exhaust pipe 402 and the rough exhaust valve 115 may be connected between the reaction chamber 10 and the first vacuum pump 101, that is, the rough exhaust pipe 402 and the rough exhaust valve 115 are connected between the reaction chamber 10 and the first pneumatic valve 111, and the first pneumatic valve 111 is located between the rough exhaust valve 115 and the first vacuum pump 101. The first vacuum pump 101 is used for rough vacuum pumping of the reaction chamber 10, and after the reaction chamber 10 is maintained and/or opened due to abnormal processing, the rough pumping valve 115 can establish a vacuum environment after the chamber is returned to the original position, and can make the air pressure in the reaction chamber 10 reach below 200mttor, so as to prepare for the relative balance of the pressure between the subsequent reaction chamber 10 and the transfer chamber 20.

In another embodiment, referring to fig. 6, the connection position of the rough exhaust valve 115 and the first vacuum pump 101 is disposed between the polymer pump 103 and the third pneumatic valve 112.

Before carrying out pressure relative balance between reaction cavity 10 and the transfer cavity 20, need carry out the vacuum rough pumping to reaction cavity 10 earlier, the in-process is taken out in the vacuum rough pumping, open the first pneumatic valve 111 of connecting between macromolecular pump 103 and first vacuum pump 101, close all other valves, make first vacuum pump 101 act on reaction cavity 10 and extract air to reaction cavity 10, atmospheric pressure in the reaction cavity 10 after the vacuum rough pumping can reach 200mttor and below, open macromolecular pump 103 again after the vacuum rough pumping, carry out the operation of extracting air of first subassembly 100 of extracting air. The pressure relative balance process is implemented after the air pressure in the reaction cavity 10 can reach below 200mttor, so that the polymer pump 103 which continuously operates in the pressure relative balance process can be protected, and the damage of the polymer pump 103 caused by overlarge air pressure is avoided.

It should be noted that the reaction chamber 10 needs to be periodically maintained before rough vacuum pumping, and the first pneumatic valve 111 needs to be closed to protect the first vacuum pump 101 during maintenance. Since a large amount of air may be introduced into the reaction chamber 10 during maintenance and service, if the first vacuum pump 101 is turned on, the first vacuum pump 101 may be damaged due to the introduction of air.

In one embodiment, referring to fig. 7, a pressure gauge 501 is disposed on each of the reaction chamber 10 and the transfer chamber 20.

Specifically, in this embodiment, the pressure gauge 501 is configured to detect the pressure value in the reaction chamber 10 and/or the transfer chamber 20 in real time, so as to provide a detection environment for the relative pressure balancing process, avoid misoperation caused by a wrong pressure value in the reaction chamber 10 and/or the transfer chamber 20, and protect the polymer pump 103, the first vacuum pump 101, the second vacuum pump 201, and the like.

With continued reference to fig. 7, at least one pressure gauge 501 is provided with a monitoring module 502.

Specifically, in this embodiment, whether the pressure gauge 501 is in a normal working state or not can be monitored in real time through the monitoring module 502 arranged on the pressure gauge 501, and product abnormality and scrapping caused by the failure of the pressure gauge 501 are avoided.

It should be noted that the location of the monitoring module 502 shown in the illustrated embodiment is not limited, and may be located inside and/or outside the pressure gauge 501, i.e., anywhere that its monitoring function can be implemented. Besides, the monitoring module 502 disposed in the pressure gauge 501 can monitor whether the pressure gauge 501 is in a normal working state in real time, and can also determine whether the pressure gauge 501 is in a normal working state through the pressure difference between the reaction chamber 10 and the transmission chamber 20. In the pumping process, the pressure values in the reaction chamber 10 and the transfer chamber 20 are respectively below 1mttor and below 200mttor, i.e. there is a pressure difference between the reaction chamber 10 and the transfer chamber 20, and if the pressure difference is not formed and/or the pressure value difference is incorrect, the pressure gauge 501 can be used to warn that the pressure gauge 501 may have a fault, and the pressure gauge 501 can be periodically corrected or replaced.

Referring to fig. 7, the present application further relates to a vacuum transfer system 1, wherein the vacuum transfer system 1 comprises a reaction chamber 10, a transfer chamber 20, and the above-mentioned pumping device 30.

Specifically, the vacuum conveying system 1 can realize the relative balance of the air pressure between the reaction cavity 10 and the conveying cavity 20, and the conveying of the products from the reaction cavity 10 to the conveying cavity 20 is carried out after the relative balance of the air pressure is realized, the relative balance of the pressure in the two devices can ensure that the polymers in the reaction cavity 10 cannot be lifted and splashed to the surface of the products to cause the pollution of the products in the conveying process, and the product quality can be improved in the conveying process.

The above is an implementation manner of the embodiments of the present invention, and it should be noted that, for those skilled in the art, a plurality of improvements and decorations can be made without departing from the principles of the embodiments of the present invention, and these improvements and decorations are also considered as the protection scope of the present invention.

Claims (10)

1. An air extractor is used for realizing pressure balance between a communicated reaction cavity and a communicated conveying cavity and is characterized by comprising a first air extracting component communicated with the reaction cavity, a second air extracting component communicated with the conveying cavity and a connecting component connected between the first air extracting component and the second air extracting component;

the first air pumping assembly comprises an automatic pressure control valve, a polymer pump, a first vacuum pump, an annular small pipe and a bypass valve, the automatic pressure control valve, the polymer pump and the first vacuum pump are sequentially communicated with the reaction cavity, and the annular small pipe and the bypass valve are connected in series and are connected between the reaction cavity and the polymer pump;

the second air pumping assembly comprises a second vacuum pump communicated to the conveying cavity;

coupling assembling includes connecting tube and connecting valve, the one end of connecting tube connect in automatic pressure control valve with between the polymer pump, and be located the bypass valve with between the polymer pump, the other end of connecting tube connect in the conveying cavity with between the second vacuum pump.

2. The suction device of claim 1 wherein said small annular tube includes a curved section, said curved section having a helical configuration.

3. The suction device according to claim 2, characterized in that the number m of turns of the helix on said curved section satisfies: m is more than or equal to 3.

4. The suction device according to claim 2, characterized in that the inner diameter r of said small annular tube satisfies: r is less than or equal to 10 mm.

5. An air extractor according to any of claims 1-4, wherein a third pneumatic valve is provided between the automatic pressure control valve and the polymer pump, and the bypass valve is connected between the third pneumatic valve and the polymer pump.

6. The gas evacuation apparatus of claim 5, wherein a roughing conduit and a roughing valve are further disposed between said reaction chamber and said first vacuum pump.

7. The suction device of claim 6 wherein the rough suction valve is connected to the first vacuum pump at a location between the polymer pump and the third pneumatic valve.

8. An air extractor according to any of claims 1-4, wherein a pressure gauge is provided on each of said reaction chamber and said transfer chamber.

9. The suction device according to claim 8, characterized in that at least one of said pressure gauges is provided with a monitoring module.

10. A vacuum transfer system comprising a reaction chamber, a transfer chamber, and the evacuation device of any of claims 1-9, said reaction chamber being in communication with said transfer chamber, said evacuation device being in communication with said reaction chamber and said transfer chamber, respectively.

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