CN213023528U - Probe card needle point pressure detection equipment - Google Patents
Probe card needle point pressure detection equipment Download PDFInfo
- Publication number
- CN213023528U CN213023528U CN202021450561.9U CN202021450561U CN213023528U CN 213023528 U CN213023528 U CN 213023528U CN 202021450561 U CN202021450561 U CN 202021450561U CN 213023528 U CN213023528 U CN 213023528U
- Authority
- CN
- China
- Prior art keywords
- base
- probe card
- fine adjustment
- adjustment platform
- dimensional fine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
The utility model discloses a probe card needle point pressure measurement equipment, including the base, be provided with the detection zone that supplies the probe card that awaits measuring to place on the base. The base is also provided with an observation mechanism and a detection mechanism, the detection mechanism comprises a three-dimensional fine adjustment platform fixed on the base, the three-dimensional fine adjustment platform is provided with a height sensor for detecting the lifting height of a Z-direction output shaft of the three-dimensional fine adjustment platform, the Z-direction output shaft of the three-dimensional fine adjustment platform is fixedly connected with a pressure sensor, a test thimble is arranged on a test head of the pressure sensor, and the test thimble is positioned right above a detection area; the observation mechanism comprises a gantry fixing frame fixed on the base, a moving seat capable of moving in a cross manner is arranged on the gantry fixing frame, an integral microscope is fixedly connected onto the moving seat, and the integral microscope is positioned right above the detection area. Simple structure, the simple operation can short-term test needle point's pressure and deflection.
Description
Technical Field
The utility model relates to a probe card detects technical field, especially relates to probe card needle point pressure measurement equipment.
Background
The probe card is a test interface, and is mainly used for testing a bare chip, and testing parameters of the chip by connecting a test machine and the chip and transmitting signals. The probe card comprises a substrate and probes arranged on the substrate, and when the probe card is used, the probes are abutted against a chip to be detected, so that the pressure detection of the probes on the probe card is very important when the probe card leaves a factory.
The existing probe card tip detection method generally calculates pressure through the deformation of the probe card tip, and is single in detection method, complex in operation and not visual enough.
SUMMERY OF THE UTILITY MODEL
In order to overcome the defects, the utility model aims to provide a probe card needle point pressure detection device, simple structure, simple operation can detect the pressure and the deflection of needle point fast.
In order to achieve the above purpose, the utility model discloses a technical scheme is: probe card needle point pressure test equipment, including the base, be provided with the detection zone that supplies the probe card that awaits measuring to place on the base, its characterized in that: the base is further provided with an observation mechanism and a detection mechanism, the detection mechanism comprises a three-dimensional fine adjustment platform fixed on the base, a height sensor for detecting the lifting height of a Z-direction output shaft of the three-dimensional fine adjustment platform is arranged on the three-dimensional fine adjustment platform, a pressure sensor is fixedly connected with the Z-direction output shaft of the three-dimensional fine adjustment platform, a test thimble is arranged on a test head of the pressure sensor, and the test thimble is positioned right above a detection area; the observing mechanism comprises a gantry fixing frame fixed on the base, a moving seat capable of moving in a cross manner is arranged on the gantry fixing frame, an integral microscope is fixedly connected to the moving seat, and the integral microscope is located right above the detection area.
Further, the three-dimensional fine adjustment platform is fixed on one side of the detection area, the pressure sensor is fixedly connected with a Z-direction output shaft of the three-dimensional fine adjustment platform through a cross beam, and two ends of the cross beam are fixedly connected with the pressure sensor and the Z-direction output shaft of the three-dimensional fine adjustment platform respectively. The pressure sensor is fixed with a Z-direction output shaft of the three-dimensional fine adjustment platform through the cross beam and can extend to the detection area.
Further, a left guide rail and a right guide rail are fixed on a transverse plate of the gantry fixing frame, a left sliding plate and a right sliding plate which slide along the left guide rail and the right guide rail are connected on the left guide rail and the right guide rail in a sliding mode, a front sliding seat and a rear sliding seat are arranged at the upper ends of the left sliding plate and the right sliding plate, a front guide rail and a rear guide rail which can slide along the front sliding seat and the rear sliding seat are connected in the front sliding. The motion seat realizes cross-shaped movement in the front-back and left-right directions through the left guide rail, the right guide rail, the left sliding plate, the right sliding plate, the front sliding seat, the back sliding seat and the front guide rail, so that the position above a detection area of the body type microscope is adjusted, and the probe card can be observed conveniently.
Further, a pressure display which is in communication connection with the pressure sensor is fixed on the base, and the height sensor is connected with a height display screen which displays the measured value of the height sensor. The data between the displacement of the probe in the height direction and the pressure can be recorded visually.
Further, be fixed with the light towards the detection zone on the base, the illumination of light to the probe card that awaits measuring in detection zone is convenient for the inspector to observe the state of leaning on of probe syringe needle and test thimble through style microscope.
Furthermore, handles are arranged at four corners of the base, so that the whole pressure detection device can be conveniently and manually moved.
The beneficial effects of the utility model reside in that: the probe card to be tested is placed in the testing area, the three-dimensional fine adjustment platform is adjusted, the testing thimble is positioned to the position of the needle point to be tested to be abutted against the needle point, the body type microscope is moved to the best observation position to observe the contact and pressing-down conditions of the testing thimble and the needle point, the Z-direction output shaft of the three-dimensional fine adjustment platform drives the testing thimble to be pressed down to reach the set deformation amount, the pressure sensor and the height sensor are used for recording the pressure value and the height value, and the pressure detection of the needle point. The whole detection device is simple in structure and convenient to operate, and detection results can be observed and recorded conveniently.
Drawings
Fig. 1 is a schematic perspective view of an embodiment of the present invention;
fig. 2 is a schematic perspective view of an embodiment of the present invention; (ii) a
Fig. 3 is a top view of an embodiment of the present invention.
In the figure:
the method comprises the following steps of 1-a base, 1 a-a detection area, 2-a three-dimensional fine adjustment platform, 3-a height sensor, 4-a pressure sensor, 5-a test thimble, 6-a gantry fixing frame, 7-a moving seat, 8-a body type microscope, 9-a cross beam, 10-left and right guide rails, 11-left and right sliding plates, 12-front and rear guide rails, 13-a pressure display, 14-a height display screen and 15-a handle.
Detailed Description
The following detailed description of the preferred embodiments of the present invention will be provided in conjunction with the accompanying drawings, so as to enable those skilled in the art to more easily understand the advantages and features of the present invention, and thereby define the scope of the invention more clearly and clearly.
Examples
Referring to fig. 1-3, the probe card needle point pressure detecting apparatus of the present invention includes a base 1, the base 1 is fixed on a table, and a detecting area 1a for placing a probe card to be detected is provided on the base 1. The base 1 is also provided with an observation mechanism and a detection mechanism.
The detection mechanism comprises a three-dimensional fine adjustment platform 2 fixed on a base 1, the three-dimensional fine adjustment platform realizes the three-dimensional movement of the pressure sensor 4 in an X axis, a Y axis and a Z axis, and the pressure sensor 4 is ensured to move right above a needle point corresponding to a probe card to be detected. The three-axis fine tuning platform is a prior art, is widely cited in the field of optical detection, is disclosed in chinese patent with application number CN201420154806.1, and is not described herein again. The three-dimensional fine adjustment platform is provided with a height sensor 3 for detecting the lifting height of a Z-direction output shaft of the three-dimensional fine adjustment platform, the height sensor 3 is fixed on the Z-direction output shaft of the three-dimensional fine adjustment platform through a fixing frame, the height sensor 3 is connected with a height display screen 14 for displaying the measured value of the height sensor, and the height change, namely the deformation quantity, of the probe card to be detected on the needle point is recorded visually. A pressure sensor 4 is fixedly connected with a Z-direction output shaft of the three-dimensional fine adjustment platform, a test thimble 5 is arranged on a test head of the pressure sensor 4, and the test thimble 5 is positioned right above the detection area 1a and used for abutting against a needle point of a probe card to be tested.
The three-dimensional fine adjustment platform is fixed on one side of the detection area 1a, the pressure sensor 4 is fixedly connected with a Z-direction output shaft of the three-dimensional fine adjustment platform through a cross beam 9, and two ends of the cross beam 9 are fixedly connected with the pressure sensor 4 and the Z-direction output shaft of the three-dimensional fine adjustment platform respectively. The pressure sensor 4 is fixed with a Z-direction output shaft of the three-dimensional fine adjustment platform through a cross beam 9 and can extend to the detection area 1 a. And a pressure display 13 which is in communication connection with the pressure sensor 4 is fixed on the base 1 and can visually record the pressure applied to the needle point of the probe card to be tested.
The observation mechanism comprises a gantry fixing frame 6 fixed on the base 1, a moving seat 7 capable of moving in a cross manner is arranged on the gantry fixing frame 6, an integral microscope 8 is fixedly connected onto the moving seat 7, and the integral microscope 8 is positioned right above the detection area 1 a. The transverse plate of the gantry fixing frame 6 is fixed with a left guide rail 10 and a right guide rail 10, the left guide rail 10 and the right guide rail are connected with a left sliding plate 11 and a right sliding plate 11 which slide along the left guide rail 10 in a sliding way, the upper ends of the left sliding plate 11 and the right sliding plate are provided with a front sliding seat and a rear sliding seat, the front sliding seat and the rear sliding seat are connected with a front guide rail 12 which can slide along the front sliding seat and the rear sliding seat in a. The motion base 7 realizes cross-shaped movement in the front-back and left-right directions through the left and right guide rails 10, the left and right slide plates 11, the front and back slide bases, and the front and back guide rails 12 to realize the adjustment of the position above the detection area 1a of the body type microscope 8, thereby facilitating the observation of the probe card.
Be fixed with the light towards detection zone 1a on the base 1, the illumination of light to the probe card that awaits measuring of detection zone 1a, the person of being convenient for the detection observes the state of leaning on of probe syringe needle and test thimble 5 through style microscope 8. Handles 15 are arranged at four corners of the base 1, so that the whole pressure detection device can be conveniently and manually moved.
The probe card to be detected is placed in the detection area 1a, the three-dimensional fine adjustment platform 2 is adjusted, the test thimble 5 is positioned to the position of the needle point to be detected to be abutted against the needle point, the body type microscope 8 is moved to the optimal observation position, and the contact and pressing conditions of the test thimble and the needle point are observed. And a Z-direction output shaft of the three-dimensional fine adjustment platform 2 drives the test thimble 5 to be pressed down to reach a set deformation amount, and a pressure value and a height value are recorded through the pressure sensor 4 and the height sensor 3 to complete pressure detection of the probe point of the probe card to be detected. The whole detection device is simple in structure and convenient to operate, and detection results can be observed and recorded conveniently.
The above embodiments are only for illustrating the technical concept and features of the present invention, and the purpose thereof is to enable those skilled in the art to understand the contents of the present invention and implement the present invention, so as not to limit the protection scope of the present invention, and all equivalent changes or modifications made according to the spirit of the present invention should be covered in the protection scope of the present invention.
Claims (6)
1. Probe card needle point pressure test equipment, including the base, be provided with the detection zone that supplies the probe card that awaits measuring to place on the base, its characterized in that: the base is further provided with an observation mechanism and a detection mechanism, the detection mechanism comprises a three-dimensional fine adjustment platform fixed on the base, a height sensor for detecting the lifting height of a Z-direction output shaft of the three-dimensional fine adjustment platform is arranged on the three-dimensional fine adjustment platform, a pressure sensor is fixedly connected with the Z-direction output shaft of the three-dimensional fine adjustment platform, a test thimble is arranged on a test head of the pressure sensor, and the test thimble is positioned right above a detection area; the observing mechanism comprises a gantry fixing frame fixed on the base, a moving seat capable of moving in a cross manner is arranged on the gantry fixing frame, an integral microscope is fixedly connected to the moving seat, and the integral microscope is located right above the detection area.
2. The probe card tip pressure detecting apparatus of claim 1, wherein: the three-dimensional fine adjustment platform is fixed on one side of the detection area, the pressure sensor is fixedly connected with a Z-direction output shaft of the three-dimensional fine adjustment platform through a cross beam, and two ends of the cross beam are fixedly connected with the pressure sensor and the Z-direction output shaft of the three-dimensional fine adjustment platform respectively.
3. The probe card tip pressure detecting apparatus of claim 1, wherein: the transverse plate of the gantry fixing frame is fixedly provided with a left guide rail and a right guide rail, the left guide rail and the right guide rail are connected with a left sliding plate and a right sliding plate which slide along the left guide rail and the right guide rail in a sliding way, the upper ends of the left sliding plate and the right sliding plate are provided with a front sliding seat and a rear sliding seat, the front sliding seat and the rear sliding seat are connected with a front guide rail and a rear guide rail which can slide.
4. The probe card tip pressure detecting apparatus of claim 1, wherein: and a pressure display which is in communication connection with the pressure sensor is fixed on the base, and the height sensor is connected with a height display screen for displaying the measured value of the height sensor.
5. The probe card tip pressure detecting apparatus of claim 1, wherein: and an illuminating lamp facing the detection area is fixed on the base.
6. The probe card tip pressure detecting apparatus of claim 1, wherein: handles are arranged at four corners of the base.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021450561.9U CN213023528U (en) | 2020-07-21 | 2020-07-21 | Probe card needle point pressure detection equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021450561.9U CN213023528U (en) | 2020-07-21 | 2020-07-21 | Probe card needle point pressure detection equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN213023528U true CN213023528U (en) | 2021-04-20 |
Family
ID=75517132
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202021450561.9U Active CN213023528U (en) | 2020-07-21 | 2020-07-21 | Probe card needle point pressure detection equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN213023528U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114112143A (en) * | 2021-09-07 | 2022-03-01 | 凯盛光伏材料有限公司 | Instrument for measuring elasticity value of thimble of junction box in photovoltaic module |
-
2020
- 2020-07-21 CN CN202021450561.9U patent/CN213023528U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114112143A (en) * | 2021-09-07 | 2022-03-01 | 凯盛光伏材料有限公司 | Instrument for measuring elasticity value of thimble of junction box in photovoltaic module |
| CN114112143B (en) * | 2021-09-07 | 2024-02-13 | 凯盛光伏材料有限公司 | Instrument for measuring elastic value of junction box thimble in photovoltaic module |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN208049348U (en) | A kind of novel sitting body anteflexion tester | |
| CN105716855B (en) | Dial key switch test device and its test method | |
| CN213023528U (en) | Probe card needle point pressure detection equipment | |
| CN108548563A (en) | A kind of contact lithium battery measuring device | |
| CN209727605U (en) | A kind of determination of pencil hardness instrument | |
| CN212432068U (en) | Flatness measuring device | |
| US3452589A (en) | Apparatus for measuring stress-strain characteristics | |
| KR20100058033A (en) | Probe for tactile measurement device and the measurement device using it | |
| CN207881677U (en) | A kind of measuring device of end-tooth flatness | |
| CN204259967U (en) | 3D pin shape scanner | |
| CN212843486U (en) | Contact silicon chip thickness gauge | |
| CN212409626U (en) | High-precision size measuring device and adjusting mechanism | |
| CN215993931U (en) | Multifunctional gathering near-point inspection tester | |
| CN215677943U (en) | Rockwell hardness tester based on indentation depth | |
| CN215866979U (en) | Novel multifunctional detection tool for detecting photoelectric characteristics of chip in high-low temperature environment | |
| CN217110843U (en) | Flatness non-contact measurement system and probe station | |
| CN212722437U (en) | Full-automatic winding life test machine | |
| CN206696087U (en) | A kind of tension and compression force tester | |
| CN212206005U (en) | Tolerance automatic detection platform | |
| CN214434165U (en) | Standardized outer eye image and data acquisition comprehensive analyzer | |
| CN217819185U (en) | Medical air bag air tightness detection device | |
| CN210513898U (en) | Hardness testing machine | |
| CN214408517U (en) | Full-automatic blossometer sclerometer | |
| CN109612928A (en) | A kind of high molecular material coefficient of friction inclination measuring device and measurement method | |
| CN111487118A (en) | Needle tester |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |