CN213022085U

CN213022085U - Vibration sensing structure for pressure sensor

Info

Publication number: CN213022085U
Application number: CN202022109096.9U
Authority: CN
Inventors: 王小平; 曹万; 李凡亮; 吴登峰; 施涛
Original assignee: Wuhan Finemems Inc
Current assignee: Wuhan Finemems Inc
Priority date: 2020-09-23
Filing date: 2020-09-23
Publication date: 2021-04-20
Anticipated expiration: 2030-09-23

Abstract

The utility model provides a structure of shaking is felt to pressure sensor, this a structure of shaking is felt to pressure sensor includes the diaphragm, the diaphragm have neutral face, with a plurality of annular convex parts of neutral face concentric and be located a plurality of annular convex parts with the crimping section of the opposite one side of neutral face, the roughness of crimping section is A, and 0 is less than or equal to A and is less than or equal to 0.025 mm.

Description

Vibration sensing structure for pressure sensor

Technical Field

The embodiment of the utility model provides a relate to pressure sensor technical field, in particular to a feel structure of shaking for pressure sensor.

Background

In the pressure sensor, in order to effectively isolate the sensitive element of the pressure sensor from the measured medium, a vibration-sensing structure is generally required to be isolated, and the vibration-sensing structure not only plays a role of isolation, but also plays a role of transmitting the pressure to the sensitive element without damage by filling silicon oil between the vibration-sensing structure and the sensitive element.

However, the vibration sensing structure in the prior art is easy to have the phenomena of loose sealing, oil leakage and the like.

SUMMERY OF THE UTILITY MODEL

An embodiment of the utility model provides a feel structure of shaking for pressure sensor aims at providing the sealed effect that improves pressure sensor.

In order to solve the technical problem, the utility model provides an embodiment provides a structure of shaking is felt for pressure sensor, which comprises a diaphragm, the diaphragm have neutral face, with a plurality of annular convex parts of neutral face concentric and be located a plurality of annular convex parts with the crimping section of the opposite one side of neutral face, the roughness of crimping section is A, and 0 is less than or equal to A and is less than or equal to 0.025 mm.

Preferably, the diameter of the neutral plane is D1, and D1 is more than or equal to 0.0190 and less than or equal to 0.02 mm.

Preferably, D1 is 0.0195 mm.

Preferably, the height of each annular convex part is H, and H is more than or equal to 0.10mm and less than or equal to 0.12 mm.

Preferably, the number of the annular convex parts is B, and the number of the annular convex parts is more than or equal to 3 and less than or equal to 7.

Preferably, the diameter of the membrane is D2, 14.38mm & lt, D2 & lt, 14.5mm, and B is 5.

Preferably, the distance between two adjacent annular convex parts is d, and d is more than or equal to 0.95mm and less than or equal to 1.01 mm.

Preferably, d is 1 mm.

Preferably, the cross-sectional shape of the annular convex part is square or arc.

Preferably, when the cross-sectional shape of the annular convex part is an arc, the radius of the arc is 0.4 mm.

The utility model discloses a setting up the roughness of crimping section 0 is less than or equal to A and is less than or equal to 0.025mm, so, can improve sealed effect when the structure that shakes through this pressure sensor of clamping ring crimping.

Drawings

One or more embodiments are illustrated by way of example in the accompanying drawings, which correspond to the figures in which like reference numerals refer to similar elements and which are not to scale unless otherwise specified.

Fig. 1 is a cross-sectional view of an embodiment of a vibration sensing structure for a pressure sensor according to an embodiment of the present invention.

The utility model discloses the drawing reference number explains:

reference numerals	Name (R)	Reference numerals	Name (R)
				11	Neutral plane	13	Crimping section
12	Annular convex part

The objects, features and advantages of the present invention will be further described with reference to the accompanying drawings.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.

It should be noted that, if directional indications (such as upper, lower, left, right, front and rear … …) are involved in the embodiment of the present invention, the directional indications are only used to explain the relative position relationship between the components, the motion situation, etc. in a specific posture (as shown in the drawings), and if the specific posture is changed, the directional indications are changed accordingly.

In addition, if there is a description relating to "first", "second", etc. in the embodiments of the present invention, the description of "first", "second", etc. is for descriptive purposes only and is not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In addition, the technical solutions in the embodiments may be combined with each other, but it must be based on the realization of those skilled in the art, and when the technical solutions are contradictory or cannot be realized, the combination of the technical solutions should not be considered to exist, and is not within the protection scope of the present invention.

The utility model provides a structure of shaking is felt for pressure sensor, please refer to fig. 1, this structure of shaking is felt for pressure sensor includes the diaphragm, the diaphragm have neutral plane 11, with a plurality of annular convex parts 12 of neutral plane 11 concentricity and be located a plurality of annular convex parts 12 with the crimping section 13 of the opposite one side of neutral plane 11, the roughness of crimping section 13 is A, and 0 is less than or equal to A and is less than or equal to 0.025 mm.

The utility model discloses a setting up the roughness of crimping section 13 at 0 and being less than or equal to A and being less than or equal to 0.025mm, so, can improve sealed effect when the crimping section 13 of the structure that shakes of this pressure sensor of clamping ring crimping.

The diameter of the neutral plane 11 is D1, and D1 is more than or equal to 0.0190 and less than or equal to 0.02 mm. In this example, D1 was 0.0195mm, 0.0196mm, 0.0198 mm.

Because the rigidity of the diaphragm is increased sharply when the height of the annular convex parts 12 is higher while other parameters are unchanged, and the characteristics of the diaphragm tend to be linear when the height of the annular convex parts 12 is higher, in the embodiment, the height of each annular convex part 12 is H, and H is more than or equal to 0.10mm and less than or equal to 0.12 mm.

The number of the annular protrusions 12 has a gentle influence on the overall performance when other parameters are not changed, but the number of the plurality of annular protrusions 12 is B, and 3. ltoreq. B.ltoreq.7.

In the embodiment, the diameter of the diaphragm is D2, when D2 is not less than 14.5mm and B is 5, the diaphragm pressure is maximum when the number of the annular convex parts 12 is 5, and the effect is better.

Further, when the overall size of the diaphragm is fixed, the distance between two adjacent annular convex portions 12 is d, d is too large, the number of the annular convex portions 12 is reduced, d is too small, and the characteristics of the diaphragm are affected, in the embodiment, d is not less than 0.95mm and not more than 1.01mm, and the effect is better. Preferably, d is 1mm, 0.96mm, 0.97mm, or 0.98 mm.

In addition, for the convenience of processing and forming, the cross-sectional shape of the annular convex part 12 is square or arc, in this embodiment, the cross-sectional shape of the annular convex part 12 is arc, and the radius of the arc is 0.4mm, and in other embodiments, the radius may be 0.42mm, 0.39 mm.

The utility model also provides a pressure sensor, this pressure sensor include foretell be used for pressure sensor's the structure that shakes, this pressure sensor includes that the aforesaid is used for pressure sensor's all embodiments of the structure that shakes.

The above is only the preferred embodiment of the present invention, not so limiting the patent scope of the present invention, all of which are in the utility model discloses a conceive, utilize the equivalent structure transform that the content of the specification and the attached drawings did, or directly/indirectly use all to include in other relevant technical fields the patent protection scope of the present invention.

Claims

1. The vibration sensing structure for the pressure sensor is characterized by comprising a diaphragm, wherein the diaphragm is provided with a neutral surface, a plurality of annular convex parts concentric with the neutral surface and a crimping section positioned on one side of the annular convex parts opposite to the neutral surface, and the flatness of the crimping section is A, and A is more than or equal to 0 and less than or equal to 0.025 mm.

2. The vibration-sensing structure for a pressure sensor according to claim 1, wherein the diameter of the neutral plane is D1, 0.0190. ltoreq. D1. ltoreq.0.02 mm.

3. The vibration sensing structure for a pressure sensor according to claim 2, wherein D1 is 0.0195 mm.

4. The vibration-sensing structure for a pressure sensor according to claim 1, wherein each of said annular projections has a height H of 0.10 mm. ltoreq. H.ltoreq.0.12 mm.

5. The vibration-sensing structure for a pressure sensor according to claim 1, wherein the number of the plurality of annular protrusions is B, 3. ltoreq. B.ltoreq.7.

6. The vibration-sensing structure for a pressure sensor as claimed in claim 5, wherein the diaphragm has a diameter D2, 14.38mm D2 mm 14.5mm, and B is 5.

7. The vibration-sensing structure for a pressure sensor according to claim 6, wherein the distance between two adjacent annular projections is d, and d is 0.95mm or more and 1.01mm or less.

8. The vibration-sensing structure for a pressure sensor according to claim 7, wherein d is 1 mm.

9. The vibration-sensing structure for a pressure sensor according to claim 1, wherein the cross-sectional shape of the annular convex portion is a square or an arc.

10. The vibration-sensing structure for a pressure sensor according to claim 9, wherein when the cross-sectional shape of the annular protrusion is an arc, the radius of the arc is 0.4 mm.