CN213022084U - Pressure sensor - Google Patents

Pressure sensor Download PDF

Info

Publication number
CN213022084U
CN213022084U CN202022101729.1U CN202022101729U CN213022084U CN 213022084 U CN213022084 U CN 213022084U CN 202022101729 U CN202022101729 U CN 202022101729U CN 213022084 U CN213022084 U CN 213022084U
Authority
CN
China
Prior art keywords
pressure sensor
equal
diaphragm
annular convex
less
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202022101729.1U
Other languages
Chinese (zh)
Inventor
王小平
曹万
李凡亮
吴登峰
施涛
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wuhan Finemems Inc
Original Assignee
Wuhan Finemems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wuhan Finemems Inc filed Critical Wuhan Finemems Inc
Priority to CN202022101729.1U priority Critical patent/CN213022084U/en
Application granted granted Critical
Publication of CN213022084U publication Critical patent/CN213022084U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Measuring Fluid Pressure (AREA)

Abstract

The utility model provides a pressure sensor, this pressure sensor including the structure that shakes of feeling that is used for pressure sensor, this a structure that shakes of feeling that is used for pressure sensor includes the diaphragm, the diaphragm have neutral surface, with a plurality of annular convex parts of neutral surface concentric and be located a plurality of annular convex parts with the crimping section of one side that the neutral surface is opposite, the roughness of crimping section is A, and 0 is less than or equal to A and is less than or equal to 0.025 mm.

Description

Pressure sensor
Technical Field
The embodiment of the utility model provides a relate to pressure sensor technical field, in particular to pressure sensor.
Background
In the pressure sensor, in order to effectively isolate the sensitive element of the pressure sensor from the measured medium, a vibration-sensing structure is generally required to be isolated, and the vibration-sensing structure not only plays a role of isolation, but also plays a role of transmitting the pressure to the sensitive element without damage by filling silicon oil between the vibration-sensing structure and the sensitive element.
However, the vibration sensing structure in the prior art is easy to have the phenomena of loose sealing, oil leakage and the like.
SUMMERY OF THE UTILITY MODEL
An embodiment of the utility model provides a pressure sensor aims at improving pressure sensor's sealed effect.
In order to solve the technical problem, the utility model provides a pressure sensor, including the structure that shakes that is used for pressure sensor's sense, a structure that shakes includes the diaphragm for pressure sensor's sense, the diaphragm have neutral face, with a plurality of annular convex parts of neutral face concentric and be located a plurality of annular convex parts with the crimping section of the opposite one side of neutral face, the roughness of crimping section is A, and 0 is less than or equal to A and is less than or equal to 0.025 mm.
Preferably, the diameter of the neutral plane is D1, and D1 is more than or equal to 0.0190 and less than or equal to 0.02 mm.
Preferably, D1 is 0.0195 mm.
Preferably, the height of each annular convex part is H, and H is more than or equal to 0.10mm and less than or equal to 0.12 mm.
Preferably, the number of the annular convex parts is B, and the number of the annular convex parts is more than or equal to 3 and less than or equal to 7.
Preferably, the diameter of the membrane is D2, 14.38mm & lt, D2 & lt, 14.5mm, and B is 5.
Preferably, the distance between two adjacent annular convex parts is d, and d is more than or equal to 0.95mm and less than or equal to 1.01 mm.
Preferably, d is 1 mm.
Preferably, the cross-sectional shape of the annular convex part is square or arc.
Preferably, when the cross-sectional shape of the annular convex part is an arc, the radius of the arc is 0.4 mm.
The utility model discloses a setting up the roughness of crimping section 0 is less than or equal to A and is less than or equal to 0.025mm, so, can improve sealed effect when the structure that shakes through this pressure sensor of clamping ring crimping.
Drawings
One or more embodiments are illustrated by way of example in the accompanying drawings, which correspond to the figures in which like reference numerals refer to similar elements and which are not to scale unless otherwise specified.
Fig. 1 is a cross-sectional view of an embodiment of a vibration sensing structure for a pressure sensor according to an embodiment of the present invention.
The utility model discloses the drawing reference number explains:
reference numerals Name (R) Reference numerals Name (R)
11 Neutral plane 13 Crimping section
12 Annular convex part
The objects, features and advantages of the present invention will be further described with reference to the accompanying drawings.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
It should be noted that, if directional indications (such as upper, lower, left, right, front and rear … …) are involved in the embodiment of the present invention, the directional indications are only used to explain the relative position relationship between the components, the motion situation, etc. in a specific posture (as shown in the drawings), and if the specific posture is changed, the directional indications are changed accordingly.
In addition, if there is a description relating to "first", "second", etc. in the embodiments of the present invention, the description of "first", "second", etc. is for descriptive purposes only and is not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In addition, the technical solutions in the embodiments may be combined with each other, but it must be based on the realization of those skilled in the art, and when the technical solutions are contradictory or cannot be realized, the combination of the technical solutions should not be considered to exist, and is not within the protection scope of the present invention.
The utility model provides a structure of shaking is felt for pressure sensor, please refer to fig. 1, this structure of shaking is felt for pressure sensor includes the diaphragm, the diaphragm have neutral plane 11, with a plurality of annular convex parts 12 of neutral plane 11 concentricity and be located a plurality of annular convex parts 12 with the crimping section 13 of the opposite one side of neutral plane 11, the roughness of crimping section 13 is A, and 0 is less than or equal to A and is less than or equal to 0.025 mm.
The utility model discloses a setting up the roughness of crimping section 13 at 0 and being less than or equal to A and being less than or equal to 0.025mm, so, can improve sealed effect when the crimping section 13 of the structure that shakes of this pressure sensor of clamping ring crimping.
The diameter of the neutral plane 11 is D1, and D1 is more than or equal to 0.0190 and less than or equal to 0.02 mm. In this example, D1 was 0.0195mm, 0.0196mm, 0.0198 mm.
Because the rigidity of the diaphragm is increased sharply when the height of the annular convex parts 12 is higher while other parameters are unchanged, and the characteristics of the diaphragm tend to be linear when the height of the annular convex parts 12 is higher, in the embodiment, the height of each annular convex part 12 is H, and H is more than or equal to 0.10mm and less than or equal to 0.12 mm.
The number of the annular protrusions 12 has a gentle influence on the overall performance when other parameters are not changed, but the number of the plurality of annular protrusions 12 is B, and 3. ltoreq. B.ltoreq.7.
In the embodiment, the diameter of the diaphragm is D2, when D2 is not less than 14.5mm and B is 5, the diaphragm pressure is maximum when the number of the annular convex parts 12 is 5, and the effect is better.
Further, when the overall size of the diaphragm is fixed, the distance between two adjacent annular convex portions 12 is d, d is too large, the number of the annular convex portions 12 is reduced, d is too small, and the characteristics of the diaphragm are affected, in the embodiment, d is not less than 0.95mm and not more than 1.01mm, and the effect is better. Preferably, d is 1mm, 0.96mm, 0.97mm, or 0.98 mm.
In addition, for the convenience of processing and forming, the cross-sectional shape of the annular convex part 12 is square or arc, in this embodiment, the cross-sectional shape of the annular convex part 12 is arc, and the radius of the arc is 0.4mm, and in other embodiments, the radius may be 0.42mm, 0.39 mm.
The utility model also provides a pressure sensor, this pressure sensor include foretell be used for pressure sensor's the structure that shakes, this pressure sensor includes that the aforesaid is used for pressure sensor's all embodiments of the structure that shakes.
The above is only the preferred embodiment of the present invention, not so limiting the patent scope of the present invention, all of which are in the utility model discloses a conceive, utilize the equivalent structure transform that the content of the specification and the attached drawings did, or directly/indirectly use all to include in other relevant technical fields the patent protection scope of the present invention.

Claims (10)

1. A pressure sensor is characterized by comprising a vibration sensing structure for the pressure sensor, wherein the vibration sensing structure for the pressure sensor comprises a diaphragm, the diaphragm is provided with a neutral surface, a plurality of annular convex parts concentric with the neutral surface, and a pressure welding section positioned on the opposite side of the annular convex parts from the neutral surface, and the flatness of the pressure welding section is A, and A is more than or equal to 0 and less than or equal to 0.025 mm.
2. The pressure sensor of claim 1, wherein the diameter of the neutral plane is D1,0.0190 ≦ D1 ≦ 0.02 mm.
3. The pressure sensor of claim 2, wherein D1 is 0.0195 mm.
4. The pressure sensor of claim 1, wherein each of the annular protrusions has a height H, 0.10mm ≦ H ≦ 0.12 mm.
5. The pressure sensor according to claim 1, wherein the number of the plurality of annular protrusions is B, and 3. ltoreq. B.ltoreq.7.
6. The pressure sensor of claim 5, wherein the diaphragm has a diameter D2, 14.38mm D2 mm 14.5mm, and B is 5.
7. The pressure sensor according to claim 6, wherein the distance between two adjacent annular projections is d, and 0.95 mm. ltoreq. d.ltoreq.1.01 mm.
8. The pressure sensor of claim 7, wherein d is 1 mm.
9. The pressure sensor of claim 1, wherein the cross-sectional shape of the annular protrusion is square or arcuate.
10. The pressure sensor of claim 9, wherein the cross-sectional shape of the annular protrusion is an arc having a radius of 0.4 mm.
CN202022101729.1U 2020-09-23 2020-09-23 Pressure sensor Active CN213022084U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202022101729.1U CN213022084U (en) 2020-09-23 2020-09-23 Pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202022101729.1U CN213022084U (en) 2020-09-23 2020-09-23 Pressure sensor

Publications (1)

Publication Number Publication Date
CN213022084U true CN213022084U (en) 2021-04-20

Family

ID=75479130

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202022101729.1U Active CN213022084U (en) 2020-09-23 2020-09-23 Pressure sensor

Country Status (1)

Country Link
CN (1) CN213022084U (en)

Similar Documents

Publication Publication Date Title
EP0211519A2 (en) Capacitive differential pressure transducer
US6006607A (en) Piezoresistive pressure sensor with sculpted diaphragm
US6588281B2 (en) Double stop structure for a pressure transducer
US20160370244A1 (en) Pressure sensor chip
CN213022084U (en) Pressure sensor
CN213022085U (en) Vibration sensing structure for pressure sensor
JP2012018049A (en) Pressure measurement instrument
CN208902682U (en) Nitrogen oxide sensor with waterproof ventilated membrane
CN110779654B (en) Pressure sensor chip
JPH03211434A (en) Diaphragm type pressure sensor
JP2001281075A (en) Electrostatic capacity type load sensor
US7559248B2 (en) High pressure transducer having an H shaped cross-section
KR20200012730A (en) Pressure sensor chip
US11187605B2 (en) Sealing glass geometries for sensitivity enhancement of thick-film piezoresistive pressure sensors
US20240125658A1 (en) Membrane of a sensor with multiple ranges
CN213516135U (en) Isolated packaging pressure sensor
JPH081468Y2 (en) Differential pressure measuring device
JP2545547B2 (en) Air spring device
CN213832865U (en) Packaging structure
CN213022069U (en) Base assembly for pressure sensor
CN213022052U (en) Pressure sensor
WO2021193469A1 (en) Sensor
JP2024145666A (en) Pressure Sensors
JPH056344U (en) Differential pressure measuring device
JPS5841456B2 (en) pressure transmitter

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant