CN213018876U - Gas optimized conveying system - Google Patents
Gas optimized conveying system Download PDFInfo
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- CN213018876U CN213018876U CN202020518759.XU CN202020518759U CN213018876U CN 213018876 U CN213018876 U CN 213018876U CN 202020518759 U CN202020518759 U CN 202020518759U CN 213018876 U CN213018876 U CN 213018876U
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Abstract
The utility model discloses a gaseous conveying system that optimizes, include: the device comprises a gas container at the side A, a gas container at the side B, a primary decompression automatic switching disc and a purifying device; the gas container at the side A is connected with one input end of the primary pressure-reducing automatic switching disc through a pipeline A, the gas container at the side B is connected with the other input end of the primary pressure-reducing automatic switching disc through a pipeline B, the output end of the primary pressure-reducing automatic switching disc is connected with the input end of a purifying device, and the output end of the purifying device is connected with an external terminal gas supply device; one end of the auxiliary passage pipeline is communicated with the main passage pipeline positioned between the secondary pressure regulating valve group and the purification device, and the other end of the auxiliary passage pipeline is correspondingly communicated with the pipeline A and the pipeline B one by one through two auxiliary branch pipes; the utility model discloses an adopt the main passageway pipeline and assist the mode of passageway pipeline sharing main gas source, have the effect of saving space, solved the inconvenient problem of maintenance when assisting air supply occupation space and trouble among the current electronic bulk gas supply system.
Description
Technical Field
The utility model belongs to the technical field of gaseous conveying equipment, concretely relates to gaseous conveying system that optimizes.
Background
The continuous supply of gases is highly demanding in bulk gas delivery processes, particularly for the delivery of electronic bulk gases for semiconductors. And when planning an electronic bulk gas station, the gas station is usually limited by the space of the gas station, and is not suitable for storing excessive gas source containers.
The air supply is gaseous bulk gas transport, the air supply is high-pressure vessel splendid attire high-pressure gas usually, through the low pressure terminal point of use delivery gas of low reaches after the decompression, for guaranteeing the incessant air feed of low reaches, can adopt a plurality of air supplies to close the parallel supply of pressure relief device usually, air supply pressure step-down or the trouble of pressure relief device all probably bring the pressure fluctuation for the downstream supply, in order to reduce above-mentioned risk, need design the follow-up supplementary decompression system of the supplementary air supply collocation of a less stock volume, with the supply risk that the trouble that reduces main air supply pressure low and main decompression system brought.
SUMMERY OF THE UTILITY MODEL
In view of this, the utility model provides a gaseous conveying system that optimizes through the mode that adopts main passageway pipeline and supplementary access pipeline sharing main gas source, has the effect of saving space, has solved the inconvenient problem of maintenance when supplementary gas source occupation space and trouble among the current electronic bulk gas supply system.
The utility model discloses a realize through following technical scheme:
a gas-optimized delivery system comprising: the device comprises a gas container at the side A, a gas container at the side B, a primary pressure reduction automatic switching disc, a secondary pressure regulating valve group, a purifying device, a primary pressure reducing valve, a secondary pressure reducing valve and a valve;
the gas container at the side A and the gas container at the side B are filled with high-pressure gas;
the overall connection relationship is as follows: the gas container at the side A is connected with one input end of the primary pressure-reducing automatic switching disc through a pipeline A, the gas container at the side B is connected with the other input end of the primary pressure-reducing automatic switching disc through a pipeline B, the output end of the primary pressure-reducing automatic switching disc is connected with the input end of the purifying device through a section of main passage pipeline, and the output end of the purifying device is connected with an external terminal gas supply device through another section of main passage pipeline;
a secondary pressure regulating valve set is arranged on a main passage pipeline between the pressure reducing automatic switching disc and the purifying device;
one end of the auxiliary passage pipeline is communicated with the main passage pipeline positioned between the secondary pressure regulating valve bank and the purification device, and the other end of the auxiliary passage pipeline is communicated with the pipeline A and the pipeline B in a one-to-one correspondence manner through two auxiliary branch pipes;
the auxiliary passage pipeline is provided with a primary pressure reducing valve and a secondary pressure reducing valve;
and valves are arranged on the pipeline A, the pipeline B and the two auxiliary branch pipes.
Further, a quick-stop valve is also included;
and the emergency stop valve is arranged on a main passage pipeline between the secondary pressure regulating valve group and the purification device.
Further, the device also comprises an analyzer;
the analyzer is mounted on the main passage pipe between the purification apparatus and the external terminal gas supply apparatus connection.
Further, the device also comprises a pressure gauge;
and pressure gauges are respectively arranged on the pipeline A, the pipeline B, the main channel pipeline positioned between the purifying device and the external terminal gas supply device, the secondary pressure regulating valve set and the secondary pressure reducing valve.
Further, the device also comprises a raw material gas detection device;
the feed gas detection device is arranged on a pipeline communicated with the two auxiliary branch pipes.
Furthermore, the secondary pressure regulating valve group consists of two pressure regulating valves connected in parallel.
Furthermore, valves are arranged on a main passage pipeline between the secondary pressure regulating valve group and the emergency stop valve and an auxiliary passage pipeline between the secondary pressure reducing valve and the main passage pipeline.
Has the advantages that: the utility model adopts the mode that the auxiliary passage pipeline and the main channel pipeline share the main gas source, so that the gas container at the side A and the gas container at the side B can be used as the gas supply end of the auxiliary passage pipeline, and the storage of a standby system gas source is reduced, thereby effectively saving the occupied space of equipment in a gas station; meanwhile, when the primary pressure reduction automatic switching disc or the secondary pressure reduction valve group of the main channel pipeline breaks down and needs maintenance, the air supply can be continued by taking the air container on the side A and the air container on the side B as air supply ends through the auxiliary channel pipeline, and enough maintenance time is reserved for a fault part, so that the air supply of the system is not influenced in the fault maintenance process, and the air supply capacity of the conveying system is effectively improved.
Drawings
FIG. 1 is a structural composition diagram of the present invention;
wherein, 1, A side gas container; 2. a B-side gas container; 3. a first pressure reduction automatic switching disc; 4. a secondary pressure regulating valve bank; 5. a hard stop valve; 6. a purification device; 7. an analyzer; 8. a main passage pipe; 9. an auxiliary passage pipe; 10. a primary pressure reducing valve; 11. a secondary pressure reducing valve; 12. an auxiliary branch pipe; 13. a valve; 14. a raw material gas detection device; 15. and a pressure gauge.
Detailed Description
The present invention will be described in detail below with reference to the accompanying drawings by way of examples.
The present embodiment provides a gas optimized delivery system, see fig. 1, comprising: the device comprises a gas container 1 at the side A, a gas container 2 at the side B, a primary pressure reduction automatic switching disc 3, a secondary pressure regulating valve group 4, a quick stop valve 5, a purifying device 6, an analyzer 7, a primary pressure reducing valve 10, a secondary pressure reducing valve 11, a valve 13, a feed gas detection device 14 and a pressure gauge 15;
the gas container 1 at the side A and the gas container 2 at the side B are filled with high-pressure gas;
the secondary pressure regulating valve group 4 consists of two pressure regulating valves connected in parallel;
the model of the purification device 6 is HPC-P8-G-He-A50/1.0;
the overall connection relationship is as follows: the gas container 1 on the side A is connected with one input end of the primary decompression automatic switching disc 3 through a pipeline A, the gas container 2 on the side B is connected with the other input end of the primary decompression automatic switching disc 3 through a pipeline B, the output end of the primary decompression automatic switching disc 3 is connected with the input end of the purifying device 6 through one section of a main passage pipeline 8, and the output end of the purifying device 6 is connected with an external terminal gas supply device through the other section of the main passage pipeline 8;
a secondary pressure regulating valve group 4 and a quick stop valve 5 are sequentially arranged on the main passage pipeline 8 along the direction from the primary pressure reducing automatic switching disc 3 to the purifying device 6, and an analyzer 7 is arranged on the main passage pipeline 8 between the purifying device 6 and the external terminal gas supply device;
the raw material gas detection device 14 is communicated with a main passage pipeline 8 between the secondary pressure regulating valve group 4 and the emergency stop valve 5 through an auxiliary passage pipeline 9;
a primary pressure reducing valve 10 and a secondary pressure reducing valve 11 are sequentially arranged on the auxiliary passage pipeline 9 along the direction from the raw material gas detection device 14 to the main passage pipeline 8;
two auxiliary branch pipes 12 are arranged on the auxiliary passage pipeline 9, wherein one auxiliary branch pipe 12 is communicated with the pipeline A, and the other auxiliary branch pipe 12 is communicated with the pipeline B;
The working principle is as follows: when the device is required to supply air, a pipeline A, a pipeline B and a valve 13 on a main channel pipeline 8 between the secondary pressure regulating valve group 4 and the emergency stop valve 5 are opened; closing the two auxiliary branch pipes 12 and the valves 13 on the auxiliary passage pipes 9 between the secondary pressure reducing valves 11 and the main passage pipe 8;
one of the gas container 1 on the side A or the gas container 2 on the side B is selected as a gas supply end through the primary pressure reduction automatic switching disc 3, high-pressure gas discharged from the gas supply end is discharged into the main passage pipeline 8, and simultaneously, after primary pressure reduction is carried out through the primary pressure reduction automatic switching disc 3, secondary pressure reduction is carried out through the secondary pressure regulating valve group 4, so that the gas pressure of the high-pressure gas is regulated to a set range, at the moment, the gas with the gas pressure within the set range enters the purifying device 6 for purification after passing through the quick stop valve 5, the purity of the gas is improved, meanwhile, the components of the purified gas are analyzed through the analyzer 7, the purity of the gas is ensured to reach the set range, and finally, the purified gas enters the external terminal gas supply device to supply the gas;
when the gas supply pressure at the gas supply end is lower than the set value, the gas supply end is automatically switched by the primary decompression automatic switching disk 3, so that the other of the a-side gas container 1 or the B-side gas container 2 starts to supply gas as the gas supply end, thereby enabling the gas to be supplied continuously.
When the primary pressure-reducing automatic switching disc 3 or the secondary pressure-regulating valve group 4 fails, the pipeline A, the pipeline B and a valve 13 on a main passage pipeline 8 between the secondary pressure-regulating valve group 4 and the emergency stop valve 5 are closed, so that the gas container 1 on the side A and the gas container 2 on the side B stop delivering high-pressure gas to the primary pressure-reducing automatic switching disc 3; opening a valve 13 on an auxiliary passage pipeline 9 and any auxiliary branch pipe 12 between a secondary pressure reducing valve 11 and a main passage pipeline 8, selecting one of an A side gas container 1 or a B side gas container 2 as a gas supply end, starting to discharge high-pressure gas into the auxiliary passage pipeline 9, carrying out primary pressure reduction on the high-pressure gas through a primary pressure reducing valve 10, carrying out secondary pressure reduction through the secondary pressure reducing valve 11, regulating the gas pressure of the gas to a set range, at the moment, allowing the gas with the gas pressure within the set range to enter the main passage pipeline 8, allowing the gas to enter a purifying device 6 through a quick stop valve 5 for purification, and finally allowing the purified gas to enter an external terminal gas supply device to continue to supply the gas; in the process, a worker can maintain the fault position of the primary pressure reducing automatic switching disc 3 or the secondary pressure regulating valve group 4, so that gas can be continuously supplied in the maintenance process;
when the gas supply pressure at the gas supply end is lower than the set value, the gas supply end is switched by opening a valve 13 on one auxiliary branch pipe 12, so that the other of the a-side gas container 1 or the B-side gas container 2 starts to supply gas as the gas supply end, thereby enabling the gas to be supplied continuously.
No matter high-pressure gas in the gas supply end is transmitted to the external terminal gas supply device through the main passage pipeline 8 or the auxiliary passage pipeline 9, the high-pressure gas in the gas supply end can be input into the raw gas detection device 14 by opening the valve 13 on the auxiliary branch pipe 12 corresponding to the gas supply end, the components of the raw gas in the gas container 1 on the A side and the gas container 2 on the B side are detected through the raw gas detection device 14, and therefore the purification capacity of the purification device 6 is convenient to adjust.
When an emergency situation occurs in which the gas supply needs to be stopped, the quick stop valve 5 is closed, and the gas supply to the external terminal gas supply device through the main passage pipe 8 or the auxiliary passage pipe 9 is stopped.
In summary, the above is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (7)
1. A gas optimized delivery system, comprising: the device comprises an A side gas container (1), a B side gas container (2), a primary pressure reduction automatic switching disc (3), a secondary pressure regulating valve group (4), a purification device (6), a primary pressure reducing valve (10), a secondary pressure reducing valve (11), an auxiliary passage pipeline (9), a main passage pipeline (8) and a valve (13);
the gas container (1) at the side A and the gas container (2) at the side B are filled with high-pressure gas;
the overall connection relationship is as follows: the gas container (1) on the side A is connected with one input end of the primary pressure-reducing automatic switching disc (3) through a pipeline A, the gas container (2) on the side B is connected with the other input end of the primary pressure-reducing automatic switching disc (3) through a pipeline B, the output end of the primary pressure-reducing automatic switching disc (3) is connected with the input end of the purifying device (6) through a section of main passage pipeline (8), and the output end of the purifying device (6) is connected with an external terminal gas supply device through another section of main passage pipeline (8);
a secondary pressure regulating valve group (4) is arranged on a main passage pipeline (8) positioned between the pressure reducing automatic switching disc (3) and the purifying device (6);
one end of the auxiliary passage pipeline (9) is communicated with a main passage pipeline (8) positioned between the secondary pressure regulating valve group (4) and the purification device (6), and the other end is respectively communicated with the pipeline A and the pipeline B in a one-to-one correspondence manner through two auxiliary branch pipes (12);
the auxiliary passage pipeline (9) is provided with a primary pressure reducing valve (10) and a secondary pressure reducing valve (11);
and valves (13) are respectively arranged on the pipeline A, the pipeline B and the two auxiliary branch pipes (12).
2. A gas optimised delivery system according to claim 1, further comprising a slap-stop valve (5);
and the emergency stop valve (5) is arranged on a main passage pipeline (8) between the secondary pressure regulating valve group (4) and the purifying device (6).
3. A gas optimised delivery system according to claim 1, further comprising an analyser (7);
the analyzer (7) is mounted on the main passage pipe (8) between the purification device (6) and the external terminal gas supply connection.
4. A gas optimised delivery system according to claim 1, further comprising a pressure gauge (15);
and pressure gauges (15) are respectively arranged on the pipeline A, the pipeline B, the main channel pipeline (8) positioned between the purifying device (6) and the external terminal gas supply device, the secondary pressure regulating valve group (4) and the secondary pressure reducing valve (11).
5. A gas optimised delivery system according to claim 1, further comprising feed gas detection means (14);
the feed gas detection device (14) is arranged on a pipeline communicated with the two auxiliary branch pipes (12).
6. A gas delivery system according to claim 1, wherein the secondary set of pressure regulating valves (4) consists of two pressure regulating valves connected in parallel.
7. A gas optimized delivery system according to claim 2, characterized in that the main passage conduit (8) between the secondary pressure regulating valve block (4) and the emergency stop valve (5) and the auxiliary passage conduit (9) between the secondary pressure reducing valve (11) and the main passage conduit (8) are fitted with valves (13).
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020435930 | 2020-03-31 | ||
| CN2020204359300 | 2020-03-31 |
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| CN213018876U true CN213018876U (en) | 2021-04-20 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117450423A (en) * | 2023-09-20 | 2024-01-26 | 上海良薇机电工程有限公司 | Special gas conveying and supplying device, system and method and semiconductor process system |
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2020
- 2020-04-10 CN CN202020518759.XU patent/CN213018876U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117450423A (en) * | 2023-09-20 | 2024-01-26 | 上海良薇机电工程有限公司 | Special gas conveying and supplying device, system and method and semiconductor process system |
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