CN213017910U - Photomask box air valve - Google Patents

Abstract

The utility model discloses a light shield box pneumatic valve, including the pneumatic valve, the pneumatic valve is by the pneumatic valve shell, the piston, the guide bar, spring and adjustable ring are constituteed, the inside machine-shaping of pneumatic valve shell has gaseous chamber to say, the top of pneumatic valve shell is the slope form and has seted up gas outlet and bottom and be formed with the air inlet, the piston activity sets up in air inlet department and inside and has seted up the wearing hole, the guide bar alternates in the wearing hole, the spring housing inlays in the piston in the upper end and the lower extreme of guide bar, the adjustable ring level sets up in gaseous chamber say and include the main ring and fix the cross pole inside the main ring, it has the guide cylinder to be formed with ventilative notch and middle part machine-shaping between cross pole and the main ring, the upper end activity of guide bar sets up. The utility model discloses simplified inside structure and constitute by five group's parts, reduced the probability that spare part damaged appears in the pneumatic valve in the use to this pneumatic valve simple structure, be convenient for production and use make the pneumatic valve lightweight more.

Description

Photomask box air valve

Technical Field

The utility model relates to a light cover box technical field specifically is a light cover box pneumatic valve.

Background

With the advance of technology, the fabrication technology in the microelectronics industry has been on the rise, wherein photolithography plays an important role. The photolithography process includes the steps of forming a photoresist layer, exposing and developing (developing), etc., and the photolithography process is to completely and precisely copy the designed circuit pattern onto a substrate (e.g., a wafer or a circuit board with a copper foil layer). The designed pattern is first made into a photomask and then projected onto a substrate by applying the principle of optical imaging. Therefore, the protection and cleaning of the mask will affect the quality of the photolithography process. The reticle is typically stored in a reticle box. The mask box is usually provided with a support stand for supporting the mask. The mask is usually placed in a mask box in a single specific orientation to prevent the support base from damaging the film in the mask for protecting the mask pattern. However, before the photolithography process, the mask needs to be maintained, cleaned and inspected, and a gas valve is usually installed on the mask box to ensure the sealing performance inside.

However, the conventional gas valve for a reticle box has the following problems in the use process: (1) the existing mask box air valve has a complex internal structure and more parts, and the internal parts are easily damaged in the using process; (2) the inner cavity of the air valve of the existing light shield box is mostly of a straight line structure, so that the problem of air tightness is easily caused in the long-time use process, and the air leakage condition is caused. For this reason, a corresponding technical scheme needs to be designed to solve the existing technical problems.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a light cover box pneumatic valve, the inner structure of having solved current illumination box pneumatic valve is comparatively complicated and spare part is more, the condition that the inner part damaged appears in the in-process of using easily, this technical problem.

In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a light hood box pneumatic valve, includes the pneumatic valve, the pneumatic valve comprises pneumatic valve shell, piston, guide bar, spring and adjustable ring, the inside machine-shaping of pneumatic valve shell has gaseous chamber to say, the top of pneumatic valve shell is the slope form and has seted up gas outlet and bottom and be formed with the air inlet, the piston activity sets up in air inlet department and inside and has seted up the mouth of wearing, the guide bar alternates in the mouth, the spring housing inlays in the piston in the upper end and the lower extreme of guide bar, the adjustable ring level sets up in gaseous chamber say and includes the main ring and fix the cross pole at the main ring inside, be formed with ventilative notch and middle part machine-shaping between cross pole and the main ring and have the guide cylinder, the upper end activity of guide bar sets up in the guide cylinder.

As an optimized implementation mode of the utility model, the top of the air valve shell is of a spherical structure and is provided with a butt joint at the opening part.

As a preferred embodiment of the present invention, an inverse S structure is formed between the gas channel and the gas inlet, and the inner diameter of the gas inlet and the gas outlet is smaller than the inner diameter of the gas channel.

As an optimized embodiment of the utility model, the air inlet has annular spacing groove with the junction machine-shaping that the gas chamber said, the peripheral machine-shaping of piston has the sealing ring that cooperation annular spacing groove used.

As a preferred embodiment of the present invention, the end of the guide bar is formed with a limiting bump, and the diameter of the limiting bump is larger than the inner diameter of the through hole and contacts with the bottom of the through hole.

Compared with the prior art, the beneficial effects of the utility model are as follows:

1. the structure of this scheme light cover box pneumatic valve has improved, has simplified inside structure and comprises five group's parts, has reduced the probability that spare part damaged appears in the pneumatic valve in the use to this pneumatic valve simple structure, the production and the use of being convenient for make the pneumatic valve lightweight more.

2. The inner cavity of the air valve is designed to be sealed by the reverse S inclined plane, and the air valve has a better sealing effect compared with the existing linear cavity.

Drawings

Fig. 1 is a schematic diagram of the overall explosion of the present invention;

fig. 2 is an overall sectional structure view of the present invention.

In the figure, 1, a gas valve shell; 2. a piston; 3. a guide bar; 4. a spring; 5. an adjusting ring; 6. a gas lumen; 7. an air outlet; 8. an air inlet; 9. perforating; 10. a main ring; 11. a cross bar; 12. a vent slot; 13. a guide cylinder; 14. a butt joint port; 15. an annular limiting groove; 16. a seal ring; 17. and a limiting bump.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-2, the present invention provides a technical solution: the utility model provides a light hood box pneumatic valve, including the pneumatic valve, the pneumatic valve is by pneumatic valve shell 1, piston 2, guide bar 3, spring 4 and adjustable ring 5 are constituteed, pneumatic valve shell 1's inside machine-shaping has gaseous chamber to say 6, pneumatic valve shell 1's top is the slope form and has seted up gas outlet 7 and bottom and be formed with air inlet 8, piston 2 activity sets up in air inlet 8 department and inside and has seted up wearing hole 9, guide bar 3 alternates in wearing hole 9, spring 4 cover inlays in guide bar 3's upper end and lower extreme are embedded in piston 2, adjustable ring 5 level sets up in gaseous chamber way 6 and includes main ring 10 and fix the inside cross rod 11 of main ring 10, be formed with ventilative notch 12 and middle part machine-shaping between cross rod 11 and the main ring 10 and have a guide cylinder 13, the upper end activity of guide bar 3 sets up in guide cylinder 13.

Further improved, as shown in fig. 2: the top of the air valve shell 1 is in a spherical structure, and a butt joint port 14 is formed at the opening.

Further improved, as shown in fig. 2: an inverse S structure is formed between the gas cavity channel 6 and the gas inlet 8, the inner diameters of the gas inlet 8 and the gas outlet 7 are smaller than that of the gas cavity channel 6, and the sealing performance of the gas valve can be improved through the inverse S design structure.

Further improved, as shown in fig. 2: an annular limiting groove 15 is formed at the joint of the air inlet 8 and the gas cavity 6 in a machining mode, a sealing ring 16 matched with the annular limiting groove 15 is formed on the periphery of the piston 2 in a machining mode, and the purpose of sealing and butting the piston 2 and the air inlet 8 can be achieved through butting of the annular limiting groove 15 and the sealing ring 16.

Specifically, the tail end of the guide rod 3 is processed and formed with a limiting lug 17, the diameter of the limiting lug 17 is larger than the inner diameter of the penetrating opening 9 and is in contact with the bottom of the penetrating opening 9, and the design mode is convenient for the guide rod 3 and the piston 2 to be installed in a butt joint mode and seals the penetrating opening 9 through the limiting lug 17.

When in use: the utility model discloses inside spring 4 conflict piston 2 docks air inlet 8 under the conventional condition to through the butt joint of outlying annular spacing groove 15 and sealing ring 16, reach the purpose sealed to air inlet 8, piston 2 of gaseous conflict below when air inlet 8 below makes guide bar 3 along guide cylinder 13 rebound, and in gaseous entering into gas chamber way 6, and enter into gas outlet 7 through ventilative notch 12 and arrange outward.

Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described in the foregoing embodiments, or equivalents may be substituted for elements thereof. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (5)

1. The utility model provides a light cover box pneumatic valve, includes the pneumatic valve, its characterized in that: the air valve consists of an air valve shell (1), a piston (2), a guide rod (3), a spring (4) and an adjusting ring (5), wherein a gas cavity channel (6) is formed in the air valve shell (1), an air outlet (7) is formed in the top of the air valve shell (1) in an inclined manner, an air inlet (8) is formed in the bottom of the air valve shell, the piston (2) is movably arranged at the air inlet (8) and internally provided with a through hole (9), the guide rod (3) is inserted into the through hole (9), the spring (4) is embedded in the piston (2) at the upper end and the lower end of the guide rod (3), the adjusting ring (5) is horizontally arranged in the gas cavity channel (6) and comprises a main ring (10) and a cross rod (11) fixed inside the main ring (10), a ventilating groove opening (12) is formed between the cross rod (11) and the main ring (10), and a guide cylinder (13) is formed in the middle of the air valve shell, the upper end of the guide rod (3) is movably arranged in the guide cylinder (13).

2. A reticle pod air valve as recited in claim 1 further comprising: the top of the air valve shell (1) is of a spherical structure, and a butt joint (14) is formed at the opening in a machining mode.

3. A reticle pod air valve as recited in claim 1 further comprising: an inverse S structure is formed between the gas cavity channel (6) and the gas inlet (8), and the inner diameters of the gas inlet (8) and the gas outlet (7) are smaller than that of the gas cavity channel (6).

4. A reticle pod air valve as recited in claim 3 wherein: the connecting part of the air inlet (8) and the gas cavity (6) is machined and formed with an annular limiting groove (15), and the periphery of the piston (2) is machined and formed with a sealing ring (16) matched with the annular limiting groove (15) for use.

5. A reticle pod air valve as recited in claim 1 further comprising: the tail end of the guide rod (3) is processed and formed with a limiting lug (17), and the diameter of the limiting lug (17) is larger than the inner diameter of the penetrating opening (9) and is in contact with the bottom of the penetrating opening (9).

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