CN212967610U

CN212967610U - Transfer module apparatus

Info

Publication number: CN212967610U
Application number: CN202021546742.1U
Authority: CN
Inventors: 李润辉
Original assignee: Shanghai Huali Integrated Circuit Manufacturing Co Ltd
Current assignee: Shanghai Huali Integrated Circuit Manufacturing Co Ltd
Priority date: 2020-07-30
Filing date: 2020-07-30
Publication date: 2021-04-13
Anticipated expiration: 2030-07-30

Abstract

The utility model provides a conveying module device, at the gas piping end, set up a gas diffuser before getting into the conveying module cavity, with the perpendicular upwards flow direction of original gas, change into in the even horizontal diffusion of conveying arm below to take out gas through the dry pump in the arm below, make the air current can not cause the product pollution through the arm top, and keep original accuse pressure ability.

Description

Transfer module apparatus

Technical Field

The present invention relates to semiconductor manufacturing equipment, and more particularly to a transfer module apparatus.

Background

In the semiconductor manufacturing process, some semiconductor intermediate products need to be conveyed, and certain temperature and humidity requirements need to be carried out in the cavity in the conveying process, so that gas meeting the requirements of the production process needs to be introduced.

The gas in the gas pipeline of the existing conveying module directly enters the cavity of the conveying module in the vertical upward direction, so that particles at the bottom of the cavity of the conveying module are easily raised to damage the environment, and the product quality is influenced.

Therefore, there is a need for a conveyor that can meet the requirement of filling the cavity with a temperature and humidity that meet the process conditions during product delivery, without affecting product contamination, and with the need to control the gas flow.

SUMMERY OF THE UTILITY MODEL

The to-be-solved technical problem of the utility model is, how can satisfy in the product data send process cavity be full of the temperature and the humidity that accord with technological condition, do not influence the pollution of product again simultaneously, need control the gas organization air current.

In order to solve the technical problem, the utility model provides a transfer module is terminal at the gas pipeline, sets up a gas diffuser before getting into the transfer module cavity, with original gaseous perpendicular upwards flow direction, changes into in the even horizontal diffusion of conveying arm below to take away gas through the dry pump in the arm below, make the air current can not cause product pollution through the arm top, and keep original accuse pressure ability.

In order to achieve the above object, the utility model provides a conveying module device, include: the cavity and the bottom of the cavity are respectively provided with an air inlet and an air outlet at the diameter opposite parts; the conveying device consists of a transmission upright post and a horizontal supporting platform, the transmission upright post penetrates through the center of the bottom of the cavity, and the horizontal supporting platform is accommodated in the cavity; the dry pump is arranged in the exhaust hole at the bottom of the cavity and used for exhausting; the diffuser is arranged in an air inlet hole at the bottom of the cavity, one end of the diffuser is connected with the air inlet pipe, and the other end of the diffuser extends into the cavity to uniformly and horizontally diffuse the entering air flow.

Preferably, the diffuser consists of a uniform horizontal diffuser cap, hollow bolts, a screw-on end cap, and an air intake interface.

Preferably, the diffuser cap on the diffuser is a flat cylinder, the lower cylindrical surface is connected with the gas inlet of the hollow bolt of the diffuser, the upper cylindrical surface is a closed surface, and the lateral periphery of the cylinder is provided with small vent holes.

Preferably, the vent holes in the side peripheral surface of the cylinder are circular or oval or flat rectangular.

Preferably, the small vent holes are uniformly distributed on the side circumferential surface of the cylinder in a staggered manner.

Preferably, the elliptical or flat rectangular vent hole in the cylindrical side peripheral surface has a major axis direction or a longitudinal direction along the circumferential direction.

Preferably, the diffusion cap on the diffuser is a flat cuboid, the bottom surface of the cuboid is connected with a gas inlet of a hollow bolt of the diffuser, the upper surface of the cuboid is a closed surface, and small ventilation holes are distributed in four side surfaces of the cuboid.

Preferably, the four-sided vent holes are circular or oval or flat rectangular.

Preferably, the long axis or the long side of the four oblong vent holes is horizontal.

Preferably, the height of the lower bottom surface of the diffusion cap on the diffuser from the bottom surface of the cavity is h1, the height of the upper cover surface of the diffusion cap from the lower bottom surface of the horizontal saddle is h2, and h1 is h 2.

Preferably, the height of the lower bottom surface of the diffusion cap on the diffuser from the bottom surface of the cavity is h1, the height of the upper cover surface of the diffusion cap from the lower bottom surface of the horizontal pallet is h2, and h1 is 2xh 2.

Preferably, the diffuser further comprises a collar portion in sealing engagement with the inner surface of the base of the chamber.

Preferably, the close fitting surface of the shaft neck part and the inner surface of the bottom of the cavity is provided with a first O-shaped sealing ring.

Preferably, a check washer is arranged between the screwing end cover and the outer surface of the cavity.

Preferably, a second O-ring seal is disposed between the screwing end cap and the outer surface of the cavity.

Preferably, the air inlet interface of the diffuser is provided with a filter mesh.

Preferably, the body material of the diffuser is PVC.

Preferably, the body material of the diffuser is cast copper.

Preferably, the body material of the diffuser is stainless steel.

The utility model provides a transfer module sets up a gas diffuser before getting into the transfer module cavity at the gas pipeline end, with original gaseous perpendicular upwards flow direction, changes into in the even horizontal diffusion of conveying arm below to take out gas through the dry pump in the arm below, make the air current can not cause product pollution through the arm top, and keep original accuse pressure capacity.

Drawings

FIG. 1 is a schematic diagram of a conventional transfer module structure and airflow configuration.

Fig. 2 is a schematic view of the structure of the conveying module and the airflow structure of the present invention.

Fig. 3 is a detailed view of the diffuser structure in the transfer module structure according to the present invention.

Fig. 4 shows a first embodiment of the vent hole on the diffusion cap of the transfer module according to the present invention.

Fig. 5 shows a second embodiment of the vent holes on the diffusion cap of the transfer module according to the present invention.

Fig. 6 shows a third embodiment of the vent holes on the diffusion cap of the transfer module according to the present invention.

Description of the reference numerals

1 cavity 2 drive column

3 air inlet and 4 air outlet

5 dry pump 6 products

7 airflow direction 8 support

9 conveyor 10 diffuser

11 air inlet pipe 12 diffusion cap

13 hollow bolt 14 screwing end cover

15 air inlet connector 16 journal part

17 first O-ring 18 check washer

19 second O-shaped sealing ring 20 filter screen sheet

21 vent hole

Detailed Description

The following describes a preferred embodiment of the present invention in detail with reference to the accompanying drawings. It is to be understood that the invention is not limited to the particular embodiments described above, and that devices and structures not described in detail are understood to be implemented in a manner common in the art; without departing from the scope of the invention, it is intended that the present invention shall not be limited to the above-described embodiments, but that the present invention shall include all modifications, equivalents and alternatives.

Referring to fig. 1, fig. 1 is a diagram of a conventional transfer module, and it can be seen that when a cavity of the conventional transfer module is filled with a temperature and a humidity meeting process conditions during a product transfer process, there is no good control over gas organization gas flow, and gas in a gas pipeline of the conventional transfer module directly enters the cavity of the transfer module in a vertical upward direction, as shown in a gas flow organization direction 7 in fig. 1, the gas directly flows through a product to be transferred, and due to a certain amount of contaminants such as dust at the bottom of the cavity, the gas may rise along with the gas flow and flow through the product under a disturbance of the gas flow, causing secondary pollution to the product, which is also a problem of the conventional transfer module.

In order to solve the above problem shown in fig. 1, referring to fig. 2, the present invention provides a structure of a transfer module, comprising:

the cavity 1, the bottom of the cavity 1 is provided with an air inlet 3 and an air outlet 4 at the radial position respectively; the conveying device 9 consists of a transmission upright post 2 and a horizontal supporting platform 8, wherein the transmission upright post 2 penetrates through the center of the bottom of the cavity 1, and the horizontal supporting platform 8 is accommodated in the cavity 1; the dry pump 5 is arranged in the exhaust hole 4 at the bottom of the cavity 1 and used for exhausting air; the diffuser 10 is arranged at the air inlet 3 at the bottom of the cavity 1, one end of the diffuser is connected with the air inlet pipe 11, and the other end of the diffuser extends into the cavity to uniformly and horizontally diffuse the entering air flow.

Referring to fig. 2, just because the utility model discloses the position of admitting air at the cavity sets up one and organizes at the internal air current that the water level of cavity was scattered, specifically see the air current direction that marks 7 in fig. 2, the air current is at the middle part of cavity apart from the height of a certain position in bottom, gaseous not direct flow through treats the product 6 of conveying, air current tissue can not disturb the pollutant of cavity bottom accumulation, satisfying process temperature, under the condition of humidity environment, also can not cause product secondary pollution, the problem that current module exists has been solved well.

Referring to fig. 3, the diffuser 10 is composed of a uniform horizontal diffuser cap 12, a hollow bolt 13, a screwed end cover 14 and an air inlet port 15, and the body of the diffuser is the hollow bolt 13, which is used for a gas circulation passage and also is considered to be connected and sealed with the bottom of the cavity, so that the structure of the hollow bolt is adopted.

Referring to fig. 4, 5 and 6, the diffuser cap 12 belongs to a key part of the diffuser, and generally adopts a flat cylindrical structure, after the gas is introduced into the cylinder, because the upper end cover of the diffuser cap is sealed, the gas only flows out from small holes on the circumference of the cap, and uniform and horizontal gas flow organization is formed. The diffuser cap 12 on the diffuser 10 is a flat cylinder, the lower cylinder surface is connected with the gas inlet of the hollow bolt 13 of the diffuser, the upper cylinder surface is a closed surface, the lateral periphery of the cylinder is distributed with the vent holes 21, the vent holes 21 on the lateral periphery of the cylinder are circular, elliptical or flat rectangular, the vent holes 21 are uniformly distributed on the lateral periphery of the cylinder, and the long axis direction or the long edge direction of the elliptical or flat rectangular vent holes 21 on the lateral periphery of the cylinder is along the circumferential direction.

In addition, the diffuser cap 12 on the diffuser 10 may be a flat cuboid, the bottom surface of the cuboid is connected with the gas inlet of the hollow bolt 13 of the diffuser, the upper surface is a closed surface, and the four side surfaces are distributed with the small ventilation holes 21, and the small ventilation holes 21 on the four side surfaces are circular, oval or flat rectangle. The long axes or the long side directions of the four oblong vent holes 21 are horizontal.

Referring to fig. 3, the height of the lower bottom surface of the diffusion cap 12 of the diffuser 10 from the bottom surface of the chamber 1 is h1, and the height of the upper cover surface of the diffusion cap 12 from the lower bottom surface of the horizontal pallet 8 is h2, h1 being h 2. Or the height of the lower bottom surface of the diffusion cap 12 on the diffuser 10 from the bottom surface of the cavity 1 is h1, the height of the upper cover surface of the diffusion cap (12) from the lower bottom surface of the horizontal saddle 8 is h2, and h1 is 2xh 2.

To seal the inside and outside of the chamber, the diffuser 10 further includes a collar 16 that mates with the inner surface of the bottom of the chamber to form a sealing surface, as shown in FIG. 3. Of course, for better sealing effect, the first O-ring 17 is disposed on the close fitting surface between the shaft neck and the inner surface of the bottom of the cavity.

Referring to fig. 3, the screwed end cap of the diffuser mainly serves as a tight connection between the diffuser and the cavity, and in order to reduce the risk of vibrations affecting the connection between the screwed end cap and the cavity, it is a good idea to provide a check washer 18 between the screwed end cap and the outer surface of the cavity. Of course, for better sealing, it is contemplated that a second O-ring seal 19 may be provided between the end cap and the outer surface of the chamber.

Referring to fig. 3, in order to further clean the entering gas and better meet the working environment, the filter mesh (20) is also an effective means for the air inlet interface of the diffuser.

The body material of the diffuser may be considered PVC, cast copper, stainless steel in consideration of manufacturing and processing costs and process convenience, and in consideration of the influence of the diffuser material on the environment. Preferably stainless steel.

As described above, the components and the connection relationship of the transfer module provided by the present invention are the same.

The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention. Various modifications and changes may occur to those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A transfer module apparatus, comprising:

comprises a cavity (1), wherein the bottom of the cavity (1) is provided with an air inlet (3) and an air outlet (4) at the diameter part respectively;

the conveying device (9) consists of a transmission upright post (2) and a horizontal supporting platform (8), the transmission upright post (2) penetrates through the center of the bottom of the cavity (1), and the horizontal supporting platform (8) is accommodated in the cavity (1);

the dry pump (5) is arranged in the exhaust hole (4) at the bottom of the cavity (1) and used for exhausting air;

the diffuser (10) is arranged at the air inlet (3) at the bottom of the cavity (1), one end of the diffuser is connected with the air inlet pipe (11), and the other end of the diffuser extends into the cavity to uniformly and horizontally diffuse the entering air flow.

2. Transport module arrangement according to claim 1, characterized in that the diffuser (10) consists of a uniform horizontal diffuser cap (12), hollow bolts (13), screwed end caps (14) and air inlet interfaces (15).

3. The transfer module apparatus of claim 2, wherein: the diffuser cap (12) on the diffuser (10) is a flat cylinder, the lower cylindrical surface is connected with a gas inlet of a hollow bolt (13) of the diffuser, the upper cylindrical surface is a closed surface, and small ventilation holes (21) are distributed on the side peripheral surface of the cylinder.

4. A transfer module device according to claim 3, characterized in that the venting apertures (21) of the cylinder side circumference are circular or oval or flat rectangular.

5. A transfer module device according to claim 3, characterized in that the venting apertures (21) are arranged staggered evenly over the cylinder side circumference.

6. A transfer module unit according to claim 4, characterised in that the oblong or flat oblong vent holes (21) of the cylinder side circumference have their long or long side direction along the circumferential direction.

7. A transport module unit according to claim 2, characterised in that the diffuser cap (12) of the diffuser (10) is a flattened cuboid whose bottom is connected to the gas inlet of the hollow bolt (13) of the diffuser, whose top is a closed surface and whose four sides are provided with aeration holes (21).

8. A transfer module arrangement according to claim 7, characterized in that the four-sided vent holes (21) are circular or oval or flat rectangular.

9. A transfer module unit according to claim 8, characterized in that the long axis or long side direction of the four oblong vent holes (21) is horizontal.

10. Transport module arrangement according to claim 2, characterized in that the height of the lower bottom surface of the diffuser cap (12) on the diffuser (10) from the bottom surface of the cavity (1) is h1 and the height of the upper cover surface of the diffuser cap (12) from the lower bottom surface of the horizontal pallet (8) is h2, h1= h 2.

11. The transfer module apparatus of claim 2, wherein the lower bottom surface of the diffuser cap (12) on the diffuser (10) is at a height h1 from the bottom surface of the cavity (1), and the upper cover surface of the diffuser cap (12) is at a height h2 from the lower bottom surface of the horizontal pallet (8), h1=2xh 2.

12. The transport module apparatus of claim 2 wherein the diffuser (10) further comprises a collar (16) that mates with the inner surface of the bottom of the chamber.

13. Transfer module device according to claim 12, characterized in that the close fitting surface of the journal portion and the inner surface of the bottom of the cavity is provided with a first O-ring seal (17).

14. Transfer module device according to claim 2, characterized in that a non-return gasket (18) is provided between the screwing end cap and the outer surface of the cavity.

15. Transfer module device according to claim 2, characterized in that a second O-ring (19) is arranged between the screw-on end cap and the outer surface of the cavity.

16. A transfer module according to any one of claims 2-6, characterised in that the air inlet interface is provided with a filter mesh (20).

17. A transfer module apparatus according to any one of claims 2-6, wherein the body material of the diffuser is PVC.

18. A transfer module apparatus according to any of claims 2-6, wherein the body material of the diffuser is cast copper.

19. A transfer module apparatus according to any of claims 2-6, wherein the body material of the diffuser is stainless steel.