CN212932850U - Device capable of detecting multi-topology unit power semiconductor device - Google Patents

Device capable of detecting multi-topology unit power semiconductor device Download PDF

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Publication number
CN212932850U
CN212932850U CN202021052335.5U CN202021052335U CN212932850U CN 212932850 U CN212932850 U CN 212932850U CN 202021052335 U CN202021052335 U CN 202021052335U CN 212932850 U CN212932850 U CN 212932850U
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carrying disc
power semiconductor
semiconductor device
adapter plate
element carrying
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梁林杰
张文亮
孙元鹏
张军辉
姚启明
朱阳军
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Shandong Yuexin Electronic Technology Co ltd
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Shandong Yuexin Electronic Technology Co ltd
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Abstract

The utility model relates to a device capable of detecting multi-topology unit power semiconductor devices, which comprises an element carrying disc capable of supporting and positioning the power semiconductor devices and a carrying disc lifting driving mechanism capable of driving the element carrying disc to lift; the adapter plate is arranged above the element carrying disc, a connector which can be in adaptive electric connection with the power semiconductor device is arranged on the adapter plate, the adapter plate can translate above the element carrying disc, after the adapter plate translates on the element carrying disc, the connector on the adapter plate can be aligned with the corresponding topological unit on the power semiconductor device, and after the element carrying disc is driven to ascend through the carrying disc lifting mechanism, the connector on the adapter plate can be electrically connected with the corresponding topological unit on the power semiconductor device. The utility model discloses compact structure can reduce the test cost, improves measuring accuracy and efficiency of software testing, convenient to use, safe and reliable.

Description

Device capable of detecting multi-topology unit power semiconductor device
Technical Field
The utility model relates to a detection device, especially a can detect device of many topological unit power semiconductor device belongs to the technical field that power semiconductor device detected.
Background
Different circuit topologies are usually present inside the power semiconductor device, but in many cases these circuit topologies can be divided into a plurality of topology units. For example, half-bridge topology (one topology unit), H-bridge topology (two topology units), three-phase bridge (three topology units), etc. In general, the power semiconductor device inspection apparatus can inspect only one topology unit at a time. For a power semiconductor device having a plurality of topology units, each topology unit needs to be detected one by one in a plurality of times. In specific implementation, different topology units are sequentially connected with the test unit through the switch device and detected; however, this solution has a number of disadvantages, such as: the system is complex, the reliability is poor, the cost is high, the error is large, and the like.
Typically, power semiconductor device packages having a plurality of topological elements and electrical connection terminals have translational symmetry. The good translational symmetry enables the power semiconductor device to be capable of enabling the plurality of topological units to be connected with the test equipment one by one and detecting the topological units through simple position translation.
In a few cases, power semiconductor device packages with multiple topological cells and electrical connection terminals do not have translational symmetry. In this case, it is also possible to switch topology units in a position-shifting manner by means of a suitable adapter design. However, in this case, the circuit wirings of the topology units are not completely identical, and the detection results may be different.
During testing, the power semiconductor device under test is usually placed on a component carrier. The element carrying disc is specially designed according to the packaging appearance of the power semiconductor device to be tested, so that the position of the power semiconductor device to be tested is limited after the power semiconductor device to be tested is placed on the element carrying disc, and the positioning is finished. For example, the power semiconductor device to be tested can be embedded on the element carrying disc in the X (left-right) and Y (front-back) directions in a groove mode, and therefore limiting in the X and Y directions is achieved. The Z (up-down) direction can be limited by gravity. The component carrier plate is connected to a mechanism (or cylinder, electric cylinder, etc.) that is movable in the Z direction. When the moving mechanism moves in the Z direction, the component carrying disc moves up and down along with the moving mechanism, and the power semiconductor device to be tested on the component carrying disc also moves along with the moving mechanism.
In general, the movement mechanism can only be switched between two positions, i.e. component carrier lifting or component carrier lowering. When the component carrier is lifted, the power semiconductor device under test is pushed onto the adapter board on which the connector is mounted. The adapter plate is used for realizing the electrical connection between the power semiconductor device to be tested and the detection equipment, and the adapter plate is provided with a connector (such as a spring pin or a spring leaf). The connector can generally be compressed for a particular stroke. The installation mode of the connector is matched with the packaging appearance of the power semiconductor device to be tested, and the reliable connection between the electrical connection terminal and the connector when the power semiconductor device to be tested is jacked up is ensured. Therefore, the power semiconductor device to be tested is electrically connected with the test equipment, and can be electrically tested. When the test is completed, the component carrier plate is lowered and the sample is separated from the adapter plate. The power semiconductor device under test can be replaced at this time.
For a power semiconductor device with a plurality of topological units, the placement and connection of the power semiconductor device during detection are similar to those of a power semiconductor device with only a single topological unit. When the power semiconductor device is jacked up, all the topological units of the power semiconductor device to be tested are connected with the adapter. However, only one test unit is often arranged in the detection device, and each topology unit needs to be connected with the test unit in sequence through a switch device during detection. During specific testing, when a first topology unit needs to be tested, the switch array of the first topology unit can be closed, and the switch arrays of other topology units are disconnected. When the second topological unit needs to be tested, the switch array of the second topological unit can be closed, and the switch arrays of other topological units are disconnected. By analogy, the test of each topological unit can be realized.
Although widely used at present, the method for testing a plurality of topological units by switching the switching device has the following disadvantages:
1) and the circuit for realizing the switching function is complex and has lower reliability.
2) Due to the testing requirements of the power semiconductor device, a switching device in the switching circuit needs to be capable of bearing large current when being switched on, needs to be capable of bearing high withstand voltage when being switched off, and has small leakage current. Switching devices that can meet this requirement are often very expensive, resulting in expensive test equipment.
3) The use of the switching devices for switching the topology unit lengthens the routing of the detection circuit, and the switching devices have larger volume, so that the detection circuit introduces larger parasitic parameters. For dynamic characteristic detection, severe current or voltage oscillation is introduced, and the detection result is influenced.
When different circuit topology units are connected with the test unit, circuit paths have larger difference, so that parasitic inductance introduced by a current channel has larger difference. For the dynamic characteristic test, the magnitude of the parasitic inductance affects the test result. The parasitic inductance difference introduced by the switching circuit causes larger difference of the measurement results, and the test consistency is influenced.
Disclosure of Invention
The utility model aims at overcoming the not enough of existence among the prior art, providing a can detect device of many topological unit power semiconductor device, its compact structure can reduce test cost, improves measuring accuracy and efficiency of software testing, convenient to use, safe and reliable.
According to the technical scheme provided by the utility model, the device capable of detecting the multi-topology unit power semiconductor device comprises an element carrying disc capable of supporting and positioning the power semiconductor device and a carrying disc lifting driving mechanism capable of driving the element carrying disc to lift; the adapter plate is arranged above the element carrying disc, a connector which can be in adaptive electric connection with the power semiconductor device is arranged on the adapter plate, the adapter plate can translate above the element carrying disc, after the adapter plate translates on the element carrying disc, the connector on the adapter plate can be aligned with the corresponding topological unit on the power semiconductor device, and after the element carrying disc is driven to ascend through the carrying disc lifting mechanism, the connector on the adapter plate can be electrically connected with the corresponding topological unit on the power semiconductor device.
The carrying disc lifting mechanism comprises a jacking cylinder, and the element carrying disc is fixedly connected with a piston rod of the jacking cylinder.
The device capable of detecting the multi-topology unit power semiconductor device comprises a component carrying disc and a carrying disc lifting driving mechanism, wherein the component carrying disc can support and position the power semiconductor device, and the carrying disc lifting driving mechanism can drive the component carrying disc to lift; the element carrying disc is also provided with a plurality of positioning pins vertical to the element carrying disc, the positioning pins can penetrate through the through holes for fixed installation on the power semiconductor device, and the positions of the topological units to be detected of the power semiconductor device can be determined by matching the positioning pins with the power semiconductor device;
an adapter plate is arranged above the element carrying disc, a connector which can be in adaptive electric connection with the power semiconductor device is arranged on the adapter plate, topological units of the power semiconductor device are defined between the connector on the adapter plate and the positioning pins to be aligned, and after the element carrying disc is driven to ascend through the carrying disc lifting mechanism, the connector on the adapter plate can be in electric connection with the corresponding topological units on the power semiconductor device.
According to another similar technical scheme, the device capable of detecting the multi-topology unit power semiconductor device comprises an element carrying disc and a carrying disc lifting driving mechanism, wherein the element carrying disc can support and position the power semiconductor device, and the carrying disc lifting driving mechanism can drive the element carrying disc to lift; the horizontal motion driving mechanism comprises a bearing carrying disc for supporting the carrying disc lifting driving mechanism and a carrying disc horizontal motion mechanism for driving the bearing carrying disc to move horizontally;
an adapter plate is arranged above the element carrying disc, a connector which can be in adaptive electric connection with the power semiconductor device is arranged on the adapter plate, when the bearing carrying disc is driven to move by the carrying disc horizontal movement mechanism, the topological unit to be detected on the power semiconductor device can be aligned with the connector on the adapter plate, and after the element carrying disc is driven to ascend by the carrying disc lifting mechanism, the connector on the adapter plate can be electrically connected with the corresponding topological unit on the power semiconductor device.
The carrying disc lifting mechanism comprises a jacking cylinder, and the element carrying disc is fixedly connected with a piston rod of the jacking cylinder.
The horizontal movement mechanism of the loading disc comprises a screw rod seat and a rotating screw rod which is connected with the screw rod seat in an adaptive mode, a screw rod sliding block is arranged on the rotating screw rod and fixed with a loading disc above the rotating screw rod, and one end of the rotating screw rod is connected with a screw rod motor which is used for driving the rotating screw rod to rotate.
The utility model has the advantages that: the adapter plate can move on the element carrying disc, or is matched with the power semiconductor device through the positioning pin, or drives the carrying disc lifting mechanism and the element carrying disc to move horizontally through the horizontal movement driving mechanism, so that the alignment of the connector on the adapter plate and the topological unit on the power semiconductor device can be realized, the jacking cylinder can be used for enabling the connector to be electrically connected with the corresponding topological unit on the power semiconductor device, and the detection of the corresponding topological unit on the power semiconductor device can be realized. The circuit is simple, and the reliability of the test equipment is high. A switching device is not used for switching the topology unit, so that the hardware cost of the test equipment is greatly reduced. Meanwhile, the detection circuit can be designed to be more compact, parasitic parameters of the circuit are reduced, the quality of detected waveforms can be effectively improved, and the detection precision is improved. For the packaging form with translational symmetry, the connection modes of different topological units of the power semiconductor device and the connector of the adapter board are completely consistent, so that the difference of parasitic parameters is greatly reduced, and the test consistency is improved. By using the scheme, a plurality of power semiconductor devices can be placed at one time for testing, the feeding and discharging times can be reduced, and the overall testing efficiency is improved.
Drawings
Fig. 1 is a schematic diagram of an implementation structure of the present invention.
FIG. 2 is a schematic diagram of the embodiment of FIG. 1.
Fig. 3 is a schematic diagram of the embodiment of fig. 2 for testing the topology unit of the power semiconductor device.
Fig. 4 is a schematic diagram of the present invention for positioning the topology unit of the power semiconductor device by using the positioning pin.
Fig. 5 is a schematic diagram of the topology unit of the power semiconductor device in fig. 4.
Description of reference numerals: the device comprises a 1-horizontal movement driving mechanism, a 2-bearing carrying disc, a 3-carrying disc lifting driving mechanism, a 4-element carrying disc, a 5-power semiconductor device, a 6-adapter plate, a 7-connector, an 8-lead screw motor, a 9-lead screw sliding block, a 10-rotating lead screw, an 11-lead screw seat, a 12-jacking cylinder and a 13-positioning pin.
Detailed Description
The invention is further described with reference to the following specific drawings and examples.
In order to reduce the testing cost and improve the testing precision and the testing efficiency, the utility model comprises an element carrying disk 4 which can support and position the power semiconductor device 5 and a carrying disk lifting driving mechanism which can drive the element carrying disk 4 to lift; an adapter plate 6 is arranged above the element carrying disc 4, a connector 7 which can be in adaptive electric connection with the power semiconductor device 5 is arranged on the adapter plate 6, the adapter plate 6 can translate above the element carrying disc 4, after the adapter plate 6 translates on the element carrying disc 4, the connector 7 on the adapter plate 6 can be aligned with a corresponding topological unit on the power semiconductor device 5, and after the element carrying disc 4 is driven to ascend through a carrying disc lifting mechanism, the connector 7 on the adapter plate 6 can be electrically connected with the corresponding topological unit on the power semiconductor device 5.
Specifically, the power semiconductor device 5 is a conventional power device, and can be specifically selected as needed, and the power semiconductor device 5 can be supported and positioned by the component carrying tray 4, that is, after the power semiconductor device 5 is placed on the component carrying tray 4, the power semiconductor device 5 can be positioned in the horizontal direction by using the component carrying tray 4, so that the stability of the power semiconductor device 5 on the component carrying tray 4 is ensured, and a guarantee is provided for subsequent detection. The power semiconductor device 5 may be vertically positioned by gravity, which may be the same as the prior art and is not described herein again.
In the embodiment of the utility model, carry a set elevating system and include jacking cylinder 12, the component carries the piston rod fixed connection of dish 4 and jacking cylinder 12. The jacking cylinder 12 can realize jacking or descending control of the element carrying disc 4, and when the element carrying disc 4 goes up and down, the element carrying disc 4 can drive the power semiconductor device 5 positioned on the element carrying disc 4 to move synchronously, namely, the connection and matching with the connector 7 above the element carrying disc 4 can be realized.
The adapter plate 6 is located above the element carrying disc 4, the adapter plate 6 is provided with the connector 7, the adapter plate 6 and the connector 7 can adopt the form commonly used in the prior art, in order to realize the electrical connection with different topological units on the power semiconductor device 5, the adapter plate 6 can drive the connector 7 to move, and after the element carrying disc 4 is driven to ascend through the carrying disc lifting mechanism, the connector 7 on the adapter plate 6 can be electrically connected with the corresponding topological unit on the power semiconductor device 5. The embodiment of the utility model provides an in, after connector 7 on the adapter plate 6 is connected with the topology unit electricity on the power semiconductor device 5, can realize being connected of topology unit and test equipment of power semiconductor device 5 to can realize the detection to corresponding topology unit on the power semiconductor device 5, specific testing process is known for this technical field personnel, and this is no longer repeated here. In specific implementation, when the power semiconductor device 5 has a plurality of topology units, only the connector 7 on the adapter board 6 needs to be moved to the corresponding topology unit to be aligned, and the motion mode of the adapter board 6 above the component carrying tray 4 can be selected and determined according to the requirement in the conventional common modes such as mechanical arm driving, guide rail motion and the like, as long as the motion above the component carrying tray 4 can be realized. The adapter board 6 needs to be able to remain in the current position state after being moved to the desired position in order to perform the connection test.
As shown in fig. 4 and 5, in order to realize the detection of different topology units on the power semiconductor device 5, the present invention can also adopt another implementation, specifically, the present invention includes an element carrying tray 4 capable of supporting and positioning the power semiconductor device 5 and a carrying tray lifting driving mechanism capable of driving the element carrying tray 4 to lift; a plurality of positioning pins 13 perpendicular to the element carrying disc 4 are further arranged on the element carrying disc 4, the positioning pins 13 can penetrate through holes used for fixing and mounting on the power semiconductor device 5, and the positions of the topological units to be detected of the power semiconductor device 5 can be determined through the matching of the positioning pins 13 and the power semiconductor device 5;
an adapter plate 6 is arranged above the element carrying disc 4, a connector 7 which can be in adaptive electrical connection with the power semiconductor device 5 is arranged on the adapter plate 6, topological units of the power semiconductor device 5 defined between the connector 7 on the adapter plate 6 and the positioning pins 13 are aligned, and after the element carrying disc 4 is driven to ascend through the carrying disc lifting mechanism, the connector 7 on the adapter plate 6 can be electrically connected with the corresponding topological unit on the power semiconductor device 5.
In particular, instead of the above-described adapter plate 6 being movable over the component carrier plate 4, in the present embodiment, the power semiconductor device 5 is moved over the component carrier plate 4 and the positioning of the different topological elements on the power semiconductor device 5 is achieved by means of the positioning pins 13, while the adapter plate 6 and the connectors 7 remain stationary over the component carrier plate 4 and the alignment of the corresponding topological elements on the power semiconductor device 5 with the corresponding connectors 7 on the adapter plate 6 can be achieved only by moving the power semiconductor device 5 over the component carrier plate 4. Certainly, in order to implement the detection of the topology unit corresponding to the power semiconductor device 5, a through hole capable of being adapted to the positioning pin 13 needs to be provided on the power semiconductor device 5, the tray lifting driving mechanism 3 may also adopt the jacking cylinder 12, and the process of implementing the detection of the topology unit by matching the adapter plate 6, the connector 7 and the power semiconductor device 5 may refer to the above description, which is not described herein again.
When testing of different topological elements on the power semiconductor device 5 is required, it is necessary to mate the corresponding through holes on the power semiconductor device 5 with the positioning pins 13 and to enable the topological elements to be tested on the power semiconductor device 5 to be aligned with the connectors 7 on the adapter board 6. Generally, the power semiconductor device 5 can be moved by manually engaging different through holes on the power semiconductor device 5 with the positioning pins 13 under the adapter plate 6.
As shown in fig. 1, fig. 2 and fig. 3, in order to realize the detection of different topology units on the power semiconductor device 5, the present invention can also adopt a third implementation case, specifically, including an element carrying tray 4 capable of supporting and positioning the power semiconductor device 5 and a carrying tray lifting driving mechanism 3 capable of driving the element carrying tray 4 to lift; the horizontal motion driving mechanism 1 can drive the carrying disc lifting driving mechanism to move horizontally, and the horizontal motion driving mechanism comprises a bearing carrying disc 2 for supporting the carrying disc lifting driving mechanism and a carrying disc horizontal motion mechanism for driving the bearing carrying disc 2 to move horizontally;
an adapter plate 6 is arranged above the element carrying disc 4, a connector 7 which can be in adaptive electric connection with the power semiconductor device 5 is arranged on the adapter plate 6, when the bearing carrying disc 2 is driven to move by the carrying disc horizontal movement mechanism, the topological unit to be detected on the power semiconductor device 5 can be aligned with the connector 7 on the adapter plate 6, and after the element carrying disc 4 is driven to ascend by the carrying disc lifting mechanism, the connector 7 on the adapter plate 6 can be electrically connected with the corresponding topological unit on the power semiconductor device 5.
In this embodiment, the horizontal movement driving mechanism 1 can support and drive the tray lifting driving mechanism 3, so as to drive the component tray 4 to move, and then realize the movement of the power semiconductor device 5 on the component tray 4, so as to realize the corresponding matching between the topology unit on the power semiconductor device 5 and the connector 7 of the adapter board 6. In contrast to the two embodiments described above, no positioning pins 13 need to be provided on the component carrier disk 4 and no movement of the adapter plate 6 needs to be driven.
During specific implementation, the carrying disc lifting mechanism 3 comprises a jacking cylinder 12, and the element carrying disc 4 is fixedly connected with a piston rod of the jacking cylinder 12. The horizontal movement mechanism of the loading disc comprises a screw rod seat 11 and a rotary screw rod 10 which is connected with the screw rod seat 11 in an adaptive mode, a screw rod sliding block 9 is arranged on the rotary screw rod 10, the screw rod sliding block 9 is fixed with a bearing loading disc 2 above the rotary screw rod 10, and one end of the rotary screw rod 10 is connected with a screw rod motor 8 which is used for driving the rotary screw rod 10 to rotate. The screw rod motor 8 and the screw rod seat 11 are installed on the position required by the ground, the screw rod motor 8 drives the rotary screw rod 10 to rotate, and after the rotary screw rod 10 rotates, the screw rod sliding block 9 can move along the length direction of the rotary screw rod 10, so that the load bearing carrying disc 2 and the jacking air cylinder 12 are driven to synchronously move, and the horizontal direction movement of the drive element carrying disc 4 can be further realized.
To sum up, the utility model discloses accessible adapter plate 6 carries to move on dish 4 at the component, or through locating pin 13 and the cooperation of power semiconductor device 5, or carry a set elevating system 3 and the component through the drive of horizontal motion actuating mechanism 1 and carry 4 horizontal motions of dish, thereby can realize that connector 7 on the adapter plate 6 can align with the topological unit on the power semiconductor device 5, utilize jacking cylinder 12 can make connector 7 and the corresponding topological unit electricity of power semiconductor device 5 be connected, thereby can realize the detection to the corresponding topological unit of power semiconductor device 5. The circuit is simple, and the reliability of the test equipment is high. A switching device is not used for switching the topology unit, so that the hardware cost of the test equipment is greatly reduced. Meanwhile, the detection circuit can be designed to be more compact, parasitic parameters of the circuit are reduced, the quality of detected waveforms can be effectively improved, and the detection precision is improved. For the packaging form with translational symmetry, the connection modes of different topological units of the power semiconductor device 5 and the connector 7 of the adapter board 6 are completely consistent, so that the difference of parasitic parameters is greatly reduced, and the test consistency is improved. By using the scheme, a plurality of power semiconductor devices 5 can be placed at one time for testing, the feeding and discharging times can be reduced, and the overall testing efficiency is improved.

Claims (6)

1. The device capable of detecting the multi-topology unit power semiconductor device comprises an element carrying disc (4) capable of supporting and positioning the power semiconductor device (5) and a carrying disc lifting driving mechanism capable of driving the element carrying disc (4) to lift; the method is characterized in that: an adapter plate (6) is arranged above the element carrying disc (4), a connector (7) which can be in adaptive electric connection with the power semiconductor device (5) is arranged on the adapter plate (6), the adapter plate (6) can translate above the element carrying disc (4), after the adapter plate (6) translates on the element carrying disc (4), the connector (7) on the adapter plate (6) can be aligned with a corresponding topological unit on the power semiconductor device (5), and after the element carrying disc (4) is driven to ascend through a carrying disc lifting mechanism, the connector (7) on the adapter plate (6) can be electrically connected with the corresponding topological unit on the power semiconductor device (5).
2. The apparatus of claim 1, wherein: the carrying disc lifting mechanism comprises a jacking cylinder (12), and the element carrying disc (4) is fixedly connected with a piston rod of the jacking cylinder (12).
3. The device capable of detecting the multi-topology unit power semiconductor device comprises an element carrying disc (4) capable of supporting and positioning the power semiconductor device (5) and a carrying disc lifting driving mechanism capable of driving the element carrying disc (4) to lift; the method is characterized in that: a plurality of positioning pins (13) perpendicular to the element carrying disc (4) are further arranged on the element carrying disc (4), the positioning pins (13) can penetrate through holes used for fixing and mounting on the power semiconductor device (5), and the positions of topological units to be detected of the power semiconductor device (5) can be determined through the matching of the positioning pins (13) and the power semiconductor device (5);
an adapter plate (6) is arranged above the element carrying disc (4), a connector (7) which can be in adaptive electric connection with the power semiconductor device (5) is arranged on the adapter plate (6), topological units of the power semiconductor device (5) are defined between the connector (7) on the adapter plate (6) and the positioning pins (13) to be aligned, and after the element carrying disc (4) is driven to ascend through a carrying disc lifting mechanism, the connector (7) on the adapter plate (6) can be in electric connection with the corresponding topological unit on the power semiconductor device (5).
4. The device capable of detecting the multi-topology unit power semiconductor device comprises an element carrying disc (4) capable of supporting and positioning the power semiconductor device (5) and a carrying disc lifting driving mechanism (3) capable of driving the element carrying disc (4) to lift; the method is characterized in that: the horizontal motion driving mechanism (1) can drive the carrying disc lifting driving mechanism to move horizontally, and the horizontal motion driving mechanism comprises a bearing carrying disc (2) used for supporting the carrying disc lifting driving mechanism and a carrying disc horizontal motion mechanism used for driving the bearing carrying disc (2) to move horizontally;
an adaptive plate (6) is arranged above the element carrying disc (4), a connector (7) which can be in adaptive electric connection with the power semiconductor device (5) is arranged on the adaptive plate (6), when the bearing carrying disc (2) is driven to move by the carrying disc horizontal movement mechanism, a topological unit to be detected on the power semiconductor device (5) can be aligned with the connector (7) on the adaptive plate (6), and after the element carrying disc (4) is driven to ascend by the carrying disc lifting mechanism, the connector (7) on the adaptive plate (6) can be electrically connected with the corresponding topological unit on the power semiconductor device (5).
5. The apparatus capable of detecting multi-topology cell power semiconductor devices of claim 4, wherein: the carrying disc lifting mechanism comprises a jacking cylinder (12), and the element carrying disc (4) is fixedly connected with a piston rod of the jacking cylinder (12).
6. Apparatus capable of detecting a multi-topology cell power semiconductor device according to claim 4 or 5, characterized by: carry a set horizontal movement mechanism include lead screw seat (11) and with lead screw seat (11) adaptation connection's rotation lead screw (10) set up lead screw slider (9) on rotation lead screw (10), lead screw slider (9) are fixed with the bearing year dish (2) of rotation lead screw (10) top, the one end that rotates lead screw (10) with be used for the drive rotate lead screw (10) pivoted lead screw motor (8) and be connected.
CN202021052335.5U 2020-06-09 2020-06-09 Device capable of detecting multi-topology unit power semiconductor device Active CN212932850U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202021052335.5U CN212932850U (en) 2020-06-09 2020-06-09 Device capable of detecting multi-topology unit power semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202021052335.5U CN212932850U (en) 2020-06-09 2020-06-09 Device capable of detecting multi-topology unit power semiconductor device

Publications (1)

Publication Number Publication Date
CN212932850U true CN212932850U (en) 2021-04-09

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