CN212932758U - Current sensor - Google Patents
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- CN212932758U CN212932758U CN202021071924.8U CN202021071924U CN212932758U CN 212932758 U CN212932758 U CN 212932758U CN 202021071924 U CN202021071924 U CN 202021071924U CN 212932758 U CN212932758 U CN 212932758U
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Abstract
The utility model provides a current sensor, it includes: a current carrying conductor for providing a passage for a current to be measured to flow through; a magnetic sensor including first and second magnetic sensor cells of the same structure, the magnetic sensor cell including a first conductivity type substrate, a second conductivity type well extending downwardly into the first conductivity type substrate along an upper surface of the first conductivity type substrate, and a plurality of second conductivity type ports extending downwardly into the second conductivity type well along an upper surface of the second conductivity type well. Compared with the prior art, the utility model discloses can increase from the coupling constant in electric current to magnetic field to the detection precision of lifting current.
Description
[ technical field ] A method for producing a semiconductor device
The utility model relates to a current sensor technical field especially relates to a current sensor based on perpendicular hall effect.
[ background of the invention ]
Current sensors for measuring the magnitude of current are widely used in various electronic devices. In the conventional current sensor based on the planar hall effect, for the hall sensor unit outside the current-carrying conductor connecting portion, the coupling constant from current to a magnetic field is small, so that the sensitivity of the current sensor is low, and the detection accuracy is reduced.
Therefore, it is necessary to provide a technical solution to overcome the above problems.
[ Utility model ] content
An object of the utility model is to provide a current sensor, its detection precision that can promote the electric current.
According to an aspect of the utility model, the utility model provides a current sensor, it includes: a current carrying conductor for providing a passage for a current to be measured to flow through; a magnetic sensor including first and second magnetic sensor cells of the same structure, the magnetic sensor cell including a first conductivity type substrate, a second conductivity type well extending downwardly into the first conductivity type substrate along an upper surface of the first conductivity type substrate, and a plurality of second conductivity type ports extending downwardly into the second conductivity type well along an upper surface of the second conductivity type well.
Further, the current carrying conductor includes a first leg, a second leg, and a connection between the first and second legs; the first magnetic sensor unit is arranged around the first leg, and the second magnetic sensor unit is arranged around the second leg; the first and second magnetic sensor cells form a differential output.
Further, the first and second magnetic sensor units are located above the first and second legs, respectively: or the first magnetic sensor unit and the second magnetic sensor unit are respectively positioned below the first leg and the second leg.
Further, the first conductive type substrate is a p-type substrate; the second conductive type well is an n-well; the second conductivity type port is an n + port.
Further, the first conductive type substrate is an n-type substrate; the second conductive type well is a p-well; the second conductivity type port is a p + port.
Further, the number of the second conductive type ports is 5; the 5 second conduction type ports are arranged in parallel to the longitudinal direction of the first leg part and the second leg part; the 5 second conductive-type ports include a power terminal, a first ground terminal, a second ground terminal, a signal positive terminal, and a signal negative terminal.
Further, the second conductive type well is formed by diffusion or implantation into the first conductive type substrate; the second conductive-type port is formed by diffusion or implantation into the second conductive-type well.
Further, the magnetic sensor is a vertical hall sensor, and the magnetic sensor detects the current to be measured by sensing a magnetic field generated by the current flowing through the current-carrying conductor and perpendicular to the longitudinal direction of the first leg and the second leg.
Further, the second conductivity type port has a second conductivity type doping concentration higher than that of the second conductivity type well.
Further, the first leg portion and the second leg portion are located on the same side of the connecting portion; one end of the first leg portion serves as one end of the current-carrying conductor, and the other end of the first leg portion is connected with one end of the connecting portion; one end of the second leg portion serves as the other end of the current-carrying conductor, and the other end of the second leg portion is connected with the other end of the connecting portion.
Compared with the prior art, the utility model provides a current sensor includes current-carrying conductor and magnetic sensor, magnetic sensor includes the same first magnetic sensor unit and the second magnetic sensor unit of structure, the magnetic sensor unit includes first conductivity type substrate, along the upper surface downwardly extending of first conductivity type substrate to the second conductivity type trap in the first conductivity type substrate to and along the upper surface downwardly extending of second conductivity type trap to a plurality of second conductivity type port in the second conductivity type trap. Thus, the utility model discloses can increase from the coupling constant of electric current to magnetic field to the detection precision of lifting current.
[ description of the drawings ]
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to these drawings without inventive labor. Wherein:
fig. 1 is a schematic structural diagram of a current sensor based on a vertical hall effect according to an embodiment of the present invention;
fig. 2 is a schematic cross-sectional view of the first vertical hall sensor unit 102a of fig. 1 along a sectional line a-a.
[ detailed description ] embodiments
In order to make the above objects, features and advantages of the present invention more comprehensible, the present invention is described in detail with reference to the accompanying drawings and the detailed description.
Reference herein to "one embodiment" or "an embodiment" means that a particular feature, structure, or characteristic described in connection with at least one implementation of the invention is included. The appearances of the phrase "in one embodiment" in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. Unless otherwise specified, the terms connected, and connected as used herein mean electrically connected, directly or indirectly.
Please refer to fig. 1, which is a schematic structural diagram of a current sensor based on the vertical hall effect according to an embodiment of the present invention. The current sensor 100 shown in fig. 1 includes a current carrying conductor 101 and a magnetic sensor 102.
The current-carrying conductor 101 is used for providing a flow channel for a current I to be measured, so that the current I to be measured can flow through the current-carrying conductor 101.
In the embodiment shown in fig. 1, the current carrying conductor 101 is a U-shaped conductor, which includes a first leg portion 101a, a second leg portion 101b, and a connecting portion 101c located between the first leg portion 101a and the second leg portion 101 b. Wherein the first leg 101a and the second leg 101b are located on the same side of the connecting portion 101 c; one end of the first leg portion 101a serves as one end of the current-carrying conductor 101, and the other end of the first leg portion 101a is connected to one end of the connecting portion 101 c; one end of the second leg portion 101b serves as the other end of the current-carrying conductor 101, and the other end of the second leg portion 101b is connected to the other end of the connecting portion 101 c.
The current I to be measured flows in from one end of the first leg 101a, sequentially flows through the first leg 101a, the connecting portion 101c, and the second leg 101b, and flows out from one end of the second leg 101 b.
To facilitate the following description, a Cartesian coordinate system is defined in FIG. 1, with an x-axis perpendicular to the longitudinal orientation of first leg 101a and second leg 101b, and a y-axis parallel to the longitudinal orientation of first leg 101a and second leg 101b, and a z-axis satisfying the right hand rule with the x-axis and the y-axis.
The magnetic sensor 102 is a vertical hall sensor, and includes a first vertical hall sensor unit (or referred to as a first magnetic sensor unit) 102a and a second vertical hall sensor unit (or referred to as a second magnetic sensor unit) 102b, and the first vertical hall sensor unit 102a and the second vertical hall sensor unit 102b form a differential output. Wherein the first vertical hall sensor unit 102a is disposed around the first leg 101 a; a second vertical hall sensor unit 102b is disposed around the second leg 101 b; the first and second vertical hall sensor units 102a and 102b have the same structure.
Referring to fig. 2, a cross-sectional view of the first vertical hall sensor unit 102a of fig. 1 along a sectional line a-a is shown.
Since the first and second vertical hall sensor units 102a and 102b have the same structure, the first and second vertical hall sensor units 102a and 102b are collectively referred to as a vertical hall sensor unit.
As can be seen from fig. 1 and 2, the vertical hall sensor cells 102a, 102b include a p-type substrate 103, an n-well 104 extending down into the p-type substrate 103 along an upper surface of the p-type substrate 103, and 5 n + ports 105 extending down into the n-well 104 along an upper surface of the n-well 104. Wherein the n-well 104 is formed by diffusion or implantation into the p-type substrate 103; the n + port 105 is formed by diffusion or implantation into the n-well 104; the 5 n + ports 105 include a power terminal 105a, a first ground terminal 105b, a second ground terminal 105c, a signal positive terminal 105d, and a signal negative terminal 105 e; the 5 n + ports 105 form a straight line along the y-axis, i.e. the 5 n + ports are arranged parallel to the longitudinal run of the first leg 101a and the second leg 101 b. The two ground terminals are located at the outermost sides, the power terminal 105a is located at the innermost side, and the signal positive terminal and the signal negative terminal are respectively located between the ground terminals and the power terminal.
In the embodiment shown in fig. 1, the first and second vertical hall sensor units 102a, 102b are located above the first and second legs 101a, 101b, respectively: or the first and second vertical hall sensor units 102a and 102b are located above the first leg 101a and below the second leg 101b, respectively.
The current I in the current carrying conductor 101, the magnetic field generated at the first vertical Hall sensor unit 102a along the x-axis direction is Hx11The magnetic field generated at the second vertical hall sensor unit 102b in the x-axis direction is-Hx12. The vertical hall sensor cells 102a, 102b only sense magnetic fields in the x-axis direction. That is, the hall sensor 102 senses the measured current I by sensing a magnetic field generated by the current flowing through the current carrying conductor 101 and perpendicular to the longitudinal direction of the first leg 101a and the second leg 101 b.
The output of the first vertical hall sensor unit 102a is V11＝S[(Hx11/I)I+H0]Where S is the sensitivity of the vertical Hall sensor unit with respect to the magnetic field, H0Is an external magnetic field, Hx11I is the coupling constant from current to magnetic field; the output of the second vertical hall sensor unit 102b is V12＝S[-(Hx12/I)I+H0](ii) a The output of the vertical Hall sensor 102 is V1＝V11-V12＝S[(Hx11+Hx12)/I]I. In the conventional current sensor based on the planar hall effect, for the hall sensor unit outside the current-carrying conductor connecting portion 101c, the coupling constant from the current to the magnetic field is small, so that the sensitivity of the current sensor is low, thereby reducing the detection accuracy. The utility model provides a current sensor 100 based on vertical Hall effect has increased the coupling constant from electric current to magnetic field, has promoted the detection precision of electric current.
It is specifically noted that in another embodiment, the p-type substrate 103 in fig. 1 may be replaced by an n-type substrate; replacing the n-well 104 in FIG. 1 with a p-well; the n + port 105 in fig. 1 is replaced with a p + port.
That is, the vertical hall sensor cells 102a, 102b in the present invention include a first conductivity type substrate 103, a second conductivity type well 104 extending downward into the first conductivity type substrate 103 along an upper surface of the first conductivity type substrate 103, and a plurality of second conductivity type ports 105 extending downward into the second conductivity type well 104 along an upper surface of the second conductivity type well 104.
In the embodiment shown in fig. 1, the first conductivity type substrate 103 is a p-type substrate; the second conductive type well 104 is an n-well; the second conductivity type port 105 is an n + port; the number of the second conductive type ports 105 is 5, wherein the n-type doping concentration of the n + port 105 is higher than that of the n-type doping concentration of the n well 104.
In another embodiment, the first conductive type substrate 103 is an n-type substrate; the second conductive type well is a p well; the second conductivity type port 105 is a p + port; the number of the second conductive type ports 105 is 5, wherein the p-type doping concentration of the p + port 105 is higher than that of the p-well 104.
To sum up, the current sensor in the present invention includes a current-carrying conductor 101 and a magnetic sensor 102, the magnetic sensor 102 includes a first vertical hall sensor unit 102a and a second vertical hall sensor unit 102b which are identical in structure, the vertical hall sensor units 102a, 102b include a first conductivity type substrate 103, a second conductivity type well 104 extending downward into the first conductivity type substrate 103 along an upper surface of the first conductivity type substrate 103, and a plurality of second conductivity type ports 105 extending downward into the second conductivity type well 104 along an upper surface of the second conductivity type well 104. The hall sensor 102 detects the current I to be measured by sensing a magnetic field generated by the current flowing through the current-carrying conductor 101 and perpendicular to the longitudinal direction of the first leg 101a and the second leg 101 b. Thus, the utility model discloses can increase from the coupling constant of electric current to magnetic field to the detection precision of lifting current.
The "U-shaped" herein refers to a shape similar to U in a broad sense, and does not need to be strictly consistent with the shape of the letter U, and certain modifications can be made.
In the present invention, the terms "connected", "connecting", and the like denote electrical connections, and, unless otherwise specified, may denote direct or indirect electrical connections.
The above description is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above embodiment, but all equivalent modifications or changes made by those skilled in the art according to the present invention should be included in the protection scope of the claims.
Claims (10)
1. A current sensor, characterized in that it comprises:
a current carrying conductor for providing a passage for a current to be measured to flow through;
a magnetic sensor including first and second magnetic sensor cells of the same structure, the magnetic sensor cell including a first conductivity type substrate, a second conductivity type well extending downwardly into the first conductivity type substrate along an upper surface of the first conductivity type substrate, and a plurality of second conductivity type ports extending downwardly into the second conductivity type well along an upper surface of the second conductivity type well.
2. The current sensor of claim 1,
the current carrying conductor includes a first leg, a second leg, and a connection between the first and second legs;
the first magnetic sensor unit is arranged around the first leg, and the second magnetic sensor unit is arranged around the second leg;
the first and second magnetic sensor cells form a differential output.
3. The current sensor of claim 2,
the first and second magnetic sensor units are located above the first and second legs, respectively: or
The first and second magnetic sensor units are located below the first and second legs, respectively.
4. The current sensor of claim 2,
the first conductive type substrate is a p-type substrate;
the second conductive type well is an n-well;
the second conductivity type port is an n + port.
5. The current sensor of claim 2,
the first conductive type substrate is an n-type substrate;
the second conductive type well is a p-well;
the second conductivity type port is a p + port.
6. Current sensor according to claim 4 or 5,
the number of the second conduction type ports is 5;
the 5 second conduction type ports are arranged in parallel to the longitudinal direction of the first leg part and the second leg part;
the 5 second conductive-type ports include a power terminal, a first ground terminal, a second ground terminal, a signal positive terminal, and a signal negative terminal.
7. The current sensor of claim 1,
the second conductive type well is formed by diffusion or implantation into the first conductive type substrate;
the second conductive-type port is formed by diffusion or implantation into the second conductive-type well.
8. The current sensor of claim 2,
the magnetic sensor is a vertical hall sensor,
the magnetic sensor detects the current to be measured by sensing a magnetic field generated by the current flowing through the current-carrying conductor and perpendicular to the longitudinal direction of the first leg and the second leg.
9. The current sensor of claim 1,
the second conductive type port has a second conductive type doping concentration higher than that of the second conductive type well.
10. The current sensor of claim 2,
the first leg and the second leg are located on the same side of the connecting portion;
one end of the first leg portion serves as one end of the current-carrying conductor, and the other end of the first leg portion is connected with one end of the connecting portion;
one end of the second leg portion serves as the other end of the current-carrying conductor, and the other end of the second leg portion is connected with the other end of the connecting portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021071924.8U CN212932758U (en) | 2020-06-11 | 2020-06-11 | Current sensor |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202021071924.8U CN212932758U (en) | 2020-06-11 | 2020-06-11 | Current sensor |
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| CN212932758U true CN212932758U (en) | 2021-04-09 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20230280378A1 (en) * | 2022-03-02 | 2023-09-07 | Globalfoundries Singapore Pte. Ltd. | On-chip current sensor |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20230280378A1 (en) * | 2022-03-02 | 2023-09-07 | Globalfoundries Singapore Pte. Ltd. | On-chip current sensor |
| US11821924B2 (en) * | 2022-03-02 | 2023-11-21 | Globalfoundries Singapore Pte. Ltd. | On-chip current sensor |
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