CN212905398U - Three-dimensional magnetic field probe station test system - Google Patents

Abstract

A three-dimensional magnetic field probe station test system comprising: the device comprises a base, a three-dimensional electromagnet module, a sample bearing module, a probe station module and a microscopic measuring device; the three-dimensional electromagnet module includes: the three-dimensional electromagnet comprises a vertical magnetic pole and four horizontal magnetic poles or a quadrupole electromagnet and comprises four horizontal magnetic poles; an excitation power supply is used for simultaneously providing corresponding current for coils with five or four magnetic poles, a magnetic field comprising a horizontal direction and/or a vertical direction is obtained, the space between the magnetic poles of the three-dimensional electromagnet can be adjusted and a sample table is selected according to the geometric size of a sample, a 24-inch sample can be compatible at most for testing, and the requirement of a wafer-level sample testing probe table is met; the utility model discloses can realize three-dimensional magnetic field probe test function, satisfy the test demand of great sample, stability is high to can be through computer software automatic control.

Description

Three-dimensional magnetic field probe station test system

Technical Field

The utility model relates to a physics and semiconductor test technical field especially relate to a can provide probe station test system and test method in three-dimensional magnetic field.

Background

In the fields of physics and semiconductors, probe station testing is a nondestructive testing means with wide application, and can be used for testing the electrical characteristics, the photoelectric characteristics, the high-frequency characteristics (radio frequency, microwave, millimeter wave and terahertz wave) and the like of material samples or devices. The magnetic field probe station testing system can provide a magnetic field for a material sample or device, and researches relevant characteristics of the material sample or device under the magnetic field, wherein typical applications of the magnetic field probe station testing system include magnetics, spintronics, semiconductor physics and devices, quantum devices and the like.

With the intensive research on magnetic devices and spintronic devices, a magnetic field probe station needs to meet the requirements of multi-dimensional magnetic fields and electrical tests, and currently, technicians propose a probe station system integrated with a magnetic field, which can generate an in-plane magnetic field or a vertical magnetic field, and the prior art document 1 (von et al. two-dimensional magnetic field probe station test system [ P ]. CN104950269A,2015-09-30.) discloses a two-dimensional magnetic field probe station test system, but has the disadvantages that the magnetic field probe station mainly provides a magnetic field with one dimension (direction) or two dimensions (directions), cannot generate a three-dimensional magnetic field, and cannot meet the characteristic test requirements of research materials or devices under the condition of complicated magnetic field direction changes;

the three-dimensional magnet structure forms adopted by the prior art document 2 (Weffanan et al. variable structure three-dimensional magnetic field generation system [ P ]. CN110265204A,2019-09-20.) and the prior document 3 (Yanghai east. three-dimensional electromagnet [ P ]. CN210039818U,2020-02-07.) are complicated in structure. In addition, in the prior art 1-3, the magnetic field intensity generated by the electromagnet cannot meet the test requirement due to the fact that the distance between the magnetic poles cannot be too large, the existing test system has limitation on the sizes of samples and devices, generally, the tested samples are small and about 10mm multiplied by 10mm in size, and the samples with large sizes need to be cut into blocks when being tested.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a three-dimensional magnetic field probe station test system, which can solve the problem that the existing magnetic field probe station can not generate three-dimensional vector magnetic field in any direction and can not limit the size of a test sample; one-dimensional, two-dimensional and three-dimensional magnetic fields can be respectively provided by changing the electrifying mode of the electromagnet, a three-dimensional vector magnetic field in any direction is generated, an iron core is added in the coil, and the magnetic field intensity of the generated three-dimensional magnetic field is greatly improved; the structure is compact, the residual space of the probe plane is large so as to add more probes, the test of a large-size sample is compatible, the test device can be used for testing samples below 24 inches according to requirements, and the test device can be widely applied to various scenes of physical and semiconductor tests.

The technical scheme of the utility model as follows:

a three-dimensional magnetic field probe station test system, comprising: the device comprises a base, a sample bearing module, a probe station module, a micro-measuring device and a three-dimensional electromagnet module, wherein the base is used for damping and supporting other components, the sample bearing module is used for placing a sample, the probe station module is used for testing the sample under different testing magnetic field environments, the micro-measuring device is used for observing the probe station module and the sample to perform pricking operation and acquiring image data, and the three-dimensional electromagnet module comprises: the excitation power supply is arranged on the magnet bridge frame on the base, and the three-dimensional electromagnet is detachably arranged on the magnet bridge frame and generates a magnetic field under the excitation of the excitation power supply; the sample support module comprises: the device comprises a sample table for placing a sample and a displacement table for moving the sample table, wherein the sample plate area of the sample table is the maximum and is compatible with a 24-inch sample to be tested.

Preferably, the three-dimensional electromagnet is a five-pole electromagnet and comprises a vertical magnetic pole and four horizontal magnetic poles, the four horizontal magnetic poles are positioned in the same horizontal plane, two horizontal magnetic poles oppositely arranged on the X axis are a first horizontal magnetic pole pair, two horizontal magnetic poles oppositely arranged on the Y axis are a second horizontal magnetic pole pair, gaps are left among the five magnetic poles, the space among the five magnetic poles can accommodate a sample tray of the sample table, and a coil is wound on each magnetic pole;

preferably, the three-dimensional electromagnet is a four-pole electromagnet and comprises four horizontal magnetic poles, the four horizontal magnetic poles are located in the same horizontal plane, the two horizontal magnetic poles which are oppositely arranged on the X axis are a third horizontal magnetic pole pair, the two horizontal magnetic poles which are oppositely arranged on the Y axis are a fourth horizontal magnetic pole pair, gaps are reserved among the four magnetic poles, the distance between the four magnetic poles can be adjusted according to the area of a sample tray of the sample table, and a coil is wound on each magnetic pole.

Preferably, a magnetic sensor is arranged near the tip of one or more magnetic poles, and the signal of a single magnetic sensor or the combination of signals of a plurality of magnetic sensors is fed back to a computer or a singlechip device to read the magnetic field.

Preferably, the sample is fixed on a sample stage, and the sample stage is positioned between the horizontal magnetic pole and the vertical magnetic pole of the three-dimensional electromagnet and senses a three-dimensional magnetic field.

Preferably, the displacement table is arranged below the magnet bridge, the upper part of the displacement table is connected to the sample table, the lower part of the displacement table is fixed on the base, and the sample table is driven to generate XY two-axis displacement and/or rotation around the Z axis during testing through manual or electric adjustment of the displacement table.

Preferably, the probe station module includes: the three-dimensional electromagnetic probe comprises a probe which is connected with at least one direct current or high-frequency instrument and used for contacting a sample to test, a probe seat which finely adjusts the probe in the direction of three axes XYZ, and a probe platform which is arranged above the three-dimensional electromagnet and used for bearing and fixing the probe seat, wherein a plurality of groups of probe seats and probes are uniformly arranged around the middle opening of the probe platform.

The probe platform is fixed on the base through a plurality of probe platform support columns, and the probe platform support columns drive the probe platform to lift along the Z-axis direction.

Preferably, the microscopic measuring device is fixed on the base and used for observing the needle point of the probe and a sample to perform a needle inserting operation and acquiring image data, and an optical microscope of the microscopic measuring device can perform XYZ three-axis movement and is simultaneously provided with a camera to perform imaging display.

Preferably, the microscopic measuring device is an optical microscope including a light source, a camera module, a microscopic imaging module, or alternatively, it may be replaced with a microscope apparatus for magnetic field testing based on the magneto-optical kerr effect, which includes a light source, a polarizer, and an optical-electrical signal converter.

The utility model has the advantages as follows: compared with the prior art, the utility model discloses a three-dimensional magnetic field probe test function can be realized to magnetic field probe platform, can effectively change the magnetic field direction through computer software control current direction and size, is suitable for different test demands, provides the one-dimensional of equidirectional, two-dimensional magnetic field. The three-dimensional electromagnet of the utility model adds the iron core in the coil, and the magnetic field intensity of the generated three-dimensional electromagnetic field is greatly improved; and the structure is compact, and the residual space of the probe plane is large so as to add more probes. The utility model discloses a test system is equally better with other electricity instrument compatibility, makes things convenient for other instruments and meters to participate in the sample test. Meanwhile, the sample table and the displacement table of the utility model can meet the test requirement of a larger sample and ensure the overall stability of the test system and the stability of the sample test; the whole set of test system can be transformed into computer software automatic control, and can be applied to scenes of large-batch physical and semiconductor tests compared with manual tests of the existing magnetic field probe station.

Drawings

Fig. 1 is a three-dimensional magnetic field probe station test system of the present invention;

fig. 2 is a preferred structure of the three-dimensional electromagnet of the present invention;

fig. 3 is another preferred structure of the three-dimensional electromagnet of the present invention;

fig. 4 is another preferred structure of the three-dimensional electromagnet of the present invention;

FIG. 5 is a schematic diagram of a one-dimensional magnetic field that may be generated by the present invention;

fig. 6 is a side view of a two-dimensional magnetic field that may be generated by the present invention;

FIG. 7 is a top view of a two-dimensional magnetic field that may be generated by the present invention;

fig. 8 is a schematic diagram of a three-dimensional magnetic field that may be generated by the present invention;

fig. 9 is a view of the magnet fixing device of the present invention;

fig. 10 shows a magnet bridge structure according to the present invention;

FIG. 11 shows a sample stage and a large-sized sample stage according to the present invention;

FIG. 12 is a probe platform with an opening according to the present invention;

fig. 13 is a flowchart of a testing method using the three-dimensional magnetic field probe station testing system according to the present invention.

The device comprises a base 1, a magnet bridge 2, a three-dimensional electromagnet 3, a probe table support column 4, a probe platform 5, a sample table 6, a displacement table 7, a probe seat 8, a probe 9, a microscopic measuring device 10, a horizontal magnetic pole 11-14, a vertical magnetic pole 15, a coil 16, a sample to be detected 19, a magnet fixing device 20, a magnet fixing device support column 21 and an opening 22.

Detailed Description

The technical solutions described in the claims and the contents of the present invention will be further explained and explained in detail with reference to the drawings attached to the specification.

For expressing the convenience, the utility model discloses in introduce space rectangular coordinate system, will dispose X axle and Y axle on the horizontal plane, the Z axle is vertical, and their positive direction accords with the right hand rule.

Fig. 1 shows a three-dimensional magnetic field probe station test system according to a preferred embodiment of the present invention, which includes: the device comprises a base 1 for bearing and fixing other components, a three-dimensional electromagnet module for generating a magnetic field, a sample bearing module for placing a sample, a probe station module for testing different characteristics of the sample under different testing magnetic field environments, and a micro-measurement device 10 for observing the probe station module and the sample pricking operation and acquiring image data. It is noted that some of the structures in fig. 1 are omitted so as not to obscure the other structures.

The base 1 has a shock absorption function, and can ensure that the whole equipment is not influenced by vibration. Vibration generated outside the system in the magnetic test process has great influence on the test result of the sample, the vibration source is in modes of earth transmission, air transmission and the like, and the most main source is earth transmission. The base 1 may be cushioned in a manner including, but not limited to, air bearing cushioning, damping cushioning, marble cushioning, rubber cushions, and the like to reduce the effect of vibration on the test system.

The three-dimensional electromagnet module comprises: the three-dimensional electromagnet 3, a group of magnet bridges 2 and an excitation power supply; the three-dimensional electromagnet 3 is detachably arranged on the magnet bridge 2 and used for generating a magnetic field under the excitation of an excitation power supply, and the magnet bridge 2 is arranged on the base 1 and used for fixing the three-dimensional electromagnet 3.

As shown in fig. 2, the three-dimensional electromagnet 3 may be a five-pole electromagnet including four horizontal magnetic poles 11-14 and one vertical magnetic pole 15. The four horizontal magnetic poles 11-14 are located in the same horizontal plane, and the two horizontal magnetic poles 11, 13 oppositely arranged on the X axis are a first horizontal magnetic pole pair, and the two horizontal magnetic poles 12, 14 oppositely arranged on the Y axis are a second horizontal magnetic pole pair. In order to ensure that the generated magnetic field strength meets the test requirement, gaps are reserved among the five-pole electromagnets, namely, certain gaps are reserved among the four horizontal magnetic poles 11-14, and certain gaps are reserved between the horizontal magnetic poles 11-14 and the vertical magnetic pole 15. Each pole 11-15 is wound with a coil 16, as shown in fig. 3, and the position of the coil 16 can also be shifted according to space requirements. An iron core is added in the coil of the three-dimensional electromagnet, so that the magnetic field intensity of the generated three-dimensional electromagnetic field is greatly improved; and the structure is compact, and the residual space of the probe plane is large so as to add more probes.

As shown in fig. 4, the three-dimensional electromagnet may also be a four-pole electromagnet, and includes four horizontal magnetic poles, the four horizontal magnetic poles are located in the same horizontal plane, two horizontal magnetic poles oppositely disposed on the X axis are a third horizontal magnetic pole pair, two horizontal magnetic poles oppositely disposed on the Y axis are a fourth horizontal magnetic pole pair, a gap is left between the four magnetic poles, the distance between the four magnetic poles can be adjusted according to the area of the sample tray of the sample stage 6, and a position-adjustable coil is wound on each magnetic pole. The three-dimensional magnetic field probe station test system can be simultaneously provided with a five-pole electromagnet and a four-pole electromagnet and can be disassembled and replaced under different test requirements.

As shown in fig. 5, 6, 7 and 8, when the five-pole electromagnet is used, the exciting power supply is used to supply corresponding current to the coils of the first horizontal magnetic pole pair or the second horizontal magnetic pole pair, so that a one-dimensional vector magnetic field in the X-axis or Y-axis direction can be obtained; the exciting power supply is used for providing corresponding current for the coils of the first horizontal magnetic pole pair and the second horizontal magnetic pole pair, so that a two-dimensional vector magnetic field comprising the X-axis direction and the Y-axis direction can be obtained simultaneously; the excitation power supply is used for providing current with corresponding directions for the coils of the first horizontal magnetic pole pair and the vertical magnetic pole, or the excitation power supply is used for providing current with corresponding directions for the coils of the second horizontal magnetic pole pair and the vertical magnetic pole, so that a two-dimensional vector magnetic field vertical to the sample can be obtained; an excitation power supply is used for simultaneously providing corresponding currents for coils of five magnetic poles, so that a three-dimensional vector magnetic field in any direction can be obtained; the computer can control each excitation power supply, thereby realizing the control of the three-dimensional magnetic field.

Arranging a magnetic sensor near the tip of one or more magnetic poles, feeding back a signal of a single magnetic sensor or a combination of signals of a plurality of magnetic sensors to a computer or a singlechip device, and reading a magnetic field; furthermore, the current of each excitation coil can be adjusted according to the read magnetic field, so that the magnetic field is subjected to feedback adjustment.

Similarly, when a four-pole electromagnet is used, the third and fourth horizontal pole pairs can be excited to generate magnetic fields in the corresponding directions, similar to when a five-pole electromagnet is used.

As shown in fig. 9, further, considering that when a large sample is tested, due to the large gap size between the magnetic poles, the magnetic poles generate a large attractive force under the action of a magnetic field to cause the deformation of the magnetic poles, a magnet fixing device 20 may be added on the three-dimensional electromagnet 3, the magnet fixing device 20 is disposed between the probe platform and four horizontal magnetic poles in the three-dimensional electromagnet 3, and is fixed on the bottom base 1 through supporting columns, and non-magnetic materials including but not limited to aluminum alloy or non-magnetic stainless steel are selected, and the magnet fixing device 20 is rigidly connected with the upper magnetic pole, so as to achieve the effect of protecting the magnet from deformation.

The sample support module comprises: a sample stage 6, a displacement stage 7; the sample stage 6 is used for placing a sample to be tested, is arranged in the center of the three-dimensional electromagnet 3, is positioned between a vertical magnetic pole and a horizontal magnetic pole in the three-dimensional electromagnet 3, and is connected with the lower direction moving stage 7 through upright columns on two sides; the upper part of the displacement table 7 is connected to the sample table 6, and the lower part of the displacement table is fixed on the base 1 and used for driving the sample table 6 and adjusting the sample testing position.

The sample can be fixed on the sample table 6 by means of vacuum adsorption, tabletting, gluing and the like, a three-dimensional magnetic field is sensed, and after the sample is fixed, as shown in fig. 10, through manual adjustment or electric adjustment of a displacement table 7 arranged below the magnet bridge 2, the sample table 6 is driven by the displacement table 7 and is used for driving the sample table 6 to generate displacement of an XY axis and/or rotation around a Z axis during testing so as to test each area of the sample.

As shown in fig. 11, by adjusting the spacing between the horizontal poles of the three-dimensional electromagnet 3 and the area of the sample disk, samples within 24 inches can be compatible. Meanwhile, the sample table is correspondingly modified, so that the high-temperature or low-temperature test requirements of the sample can be met. Further, when the two-dimensional horizontal magnetic field test of a small-size sample is carried out, the sample table can be lifted to be positioned at the central positions of the four horizontal magnetic poles 11-14, and the magnetic field test can be carried out in a two-dimensional plane parallel to the plane of the sample.

As shown in fig. 1, the probe station module includes: a probe platform 5, a plurality of groups of probe seats 8 and probes 9 matched with the test system. The probe platform 5 is arranged above the three-dimensional electromagnet 3 and used for bearing and fixing a probe seat 8, and an opening is reserved in the center of the probe 9. The probes 9 are fixed on the probe seats 8 and used for contacting samples on the sample table 6 to test, and the groups of probe seats 8 and probes 9 are uniformly distributed around the central opening of the probe platform 5.

The probe platform 5 is fixed on the base 1 through a plurality of probe platform support columns 4 which are uniformly arranged, the heights of the probe platform support columns 4 are the same, and preferably, the probe platform support columns 4 are in a structure including but not limited to mechanical, pneumatic, hydraulic or electric structures and the like, and are used for driving the probe platform 5 to lift along the Z-axis direction, so that the rapid lifting of a plurality of groups of probe seats 8 and probes 9 is realized. Further, as shown in fig. 12, to facilitate the taking and placing of large-sized samples, an opening 22 may be provided at the outer side of the probe platform.

The probe 9 can be connected to a plurality of direct current or high frequency instruments through cables, and can test different characteristics of the sample under different test magnetic field environments.

The probe seat 8 is fixed on the probe platform 5 by selecting modes including but not limited to vacuum adsorption, bolts, clamping and the like according to the surface condition of the probe platform.

The probe seat 8 finely adjusts the probes 9 in the XYZ triaxial directions so that the probes 9 can contact the sample during the test, and the probes 9 are connected with a corresponding dc or high frequency instrument through cables, wherein the dc or high frequency instrument includes but is not limited to: the device comprises a current source meter, a high-frequency signal source, a nano-volt meter, a semiconductor parameter analyzer, a lock-in amplifier, a high-frequency spectrograph, a high-frequency vector network analyzer and the like.

The probe seat 8 and the probe 9 select direct current or high frequency according to different test environments, and the high frequency comprises radio frequency, microwave, millimeter wave and terahertz wave frequency bands; preferably, the probe holder 8 can be replaced with a probe card capable of simultaneously mounting a plurality of probes, and a rapid test can be performed in cooperation with the elevation of the probe platform 5.

The microscopic measuring device 10 is fixed on the bottom base 1 through a fixing device and is used for observing the needle point of the probe 9 and performing needle inserting operation on a sample, ensuring that the probe is accurately contacted with the sample in a test area range during measurement, and observing and acquiring image data of the sample under test excitation during the test. The optical microscope of the micro-measuring device can move in three axes of XYZ, and simultaneously, the images are transmitted to an external computer through a mounted camera to be analyzed and stored, and are imaged and displayed on an externally mounted display.

The computer is connected with an excitation power supply, a direct current or high-frequency instrument, a microscopic measuring device and the like through a data control line, works such as controlling the current size, the magnetic field size and direction, automatically controlling the instrument, collecting and processing data and images and the like are controlled through programmed software, and the intelligent three-dimensional magnetic field probe station testing system is integrated.

Preferably, the microscopic measuring device 10 is an optical microscope including a light source, a camera module, a microscopic imaging module, or alternatively, it may be a microscope apparatus for magnetic field testing based on the magneto-optical kerr effect, which includes a light source, a polarizer, and an optical-electrical signal converter. .

As shown in fig. 13, in order to describe the three-dimensional magnetic field probe station testing system of the present invention more clearly, a testing method using the three-dimensional magnetic field probe station testing system is described as follows, the method includes:

step 1: selecting a sample table with a proper size according to the geometric size of a sample, adjusting the distance between the magnetic poles of the three-dimensional electromagnet, and fixing the sample on the sample table;

step 2: exciting the three-dimensional electromagnet by using an excitation power supply to generate a magnetic field for testing;

and step 3: adjusting the spatial positions of the sample stage and the probe, and contacting the sample to perform testing;

and 4, step 4: and adjusting the microscopic measuring device to observe the needle point of the probe and the sample to perform needle inserting operation and acquire image data.

Preferably, in step 2, the magnitude and direction of the current provided by the excitation power supply to the three-dimensional electromagnet coil are adjusted, the magnitude and direction of the magnetic field used in the test are controlled, and at least one of steps 2.1-2.4 is used for excitation:

step 2.1, providing corresponding current for coils of a horizontal magnetic pole pair positioned in the X-axis direction or a horizontal magnetic pole pair positioned in the Y-axis direction by using an excitation power supply to obtain a one-dimensional magnetic field in the X-axis direction or the Y-axis direction; or

2.2, providing corresponding current for coils of the horizontal magnetic pole pair in the X-axis direction and the horizontal magnetic pole pair in the Y-axis direction by using an excitation power supply, and simultaneously obtaining a two-dimensional magnetic field in a horizontal plane; or

Step 2.3, providing corresponding current for the horizontal magnetic pole pair in the X-axis direction and the coil of the vertical magnetic pole in the Z-axis direction by using an excitation power supply, or providing corresponding current for the horizontal magnetic pole pair in the Y-axis direction and the coil of the vertical magnetic pole in the Z-axis direction by using the excitation power supply, and obtaining a one-dimensional magnetic field vertical to the sample; or

And 2.4, using an excitation power supply to simultaneously provide corresponding currents for coils of five magnetic poles and simultaneously obtain a three-dimensional magnetic field consisting of a horizontal direction and a vertical direction.

The step 2 further comprises: fixing a magnetic sensor near the tip of one or more magnetic poles, feeding back a signal of a single magnetic sensor or a combination of signals of a plurality of magnetic sensors to a computer or a singlechip device, and reading a magnetic field; further, the currents of the respective exciting coils are adjusted in accordance with the read magnetic field, thereby performing feedback adjustment of the magnetic field.

Preferably, step 3 comprises:

and 3.1, manually or electrically adjusting the displacement table, driving the sample table to generate the displacement of the XY axis and/or the rotation around the Z axis, and testing each area of the sample.

And 3.2, finely adjusting the probe in the XYZ triaxial direction to enable the probe to contact with the sample during testing.

Step 4 comprises the following steps:

the microscopic measuring device is adjusted in the XYZ axis direction, and the microscopic measuring device carries out imaging display through a camera.

The utility model has the advantages that compared with the prior art, the magnetic field probe station of the utility model can realize the three-dimensional magnetic field probe test function, the magnetic field direction can be effectively changed by controlling the current direction and the magnitude through the computer software, the magnetic field probe station is suitable for different test requirements, and one-dimensional and two-dimensional magnetic fields in different directions are provided; meanwhile, the sample table and the displacement table of the utility model can meet the test requirement of a larger sample and ensure the overall stability of the test system and the stability of the sample test; the whole set of test system can be transformed into computer software automatic control, and can be applied to scenes of large-batch physical and semiconductor tests compared with manual tests of the existing magnetic field probe station.

The applicant of the present invention has made detailed description and description of the embodiments of the present invention with reference to the drawings, but those skilled in the art should understand that the above embodiments are only the preferred embodiments of the present invention, and the detailed description is only for helping the reader to better understand the spirit of the present invention, and not for the limitation of the protection scope of the present invention, on the contrary, any improvement or modification made based on the spirit of the present invention should fall within the protection scope of the present invention.

Claims (10)

1. A three-dimensional magnetic field probe station test system, comprising: a base (1), a sample bearing module for placing a sample, a probe station module for testing the sample under different testing magnetic field environments, a micro-measuring device (10) for observing the probe station module and the sample to perform a needle inserting operation and collecting image data, and a three-dimensional electromagnet module, which is characterized in that,

the three-dimensional electromagnet module comprises: the magnetic field generator comprises an excitation power supply, a magnet bridge (2) arranged on a base (1), and a three-dimensional electromagnet (3) which is detachably arranged on the magnet bridge (2) and generates a magnetic field under the excitation of the excitation power supply;

the sample support module comprises: a sample table (6) for placing a sample and a displacement table (7) for moving the sample table (6), wherein the sample plate area of the sample table (6) is at most compatible with a 24-inch sample to be tested.

2. The three-dimensional magnetic field probe station test system of claim 1, wherein:

the three-dimensional electromagnet (3) is a five-pole electromagnet and comprises a vertical magnetic pole and four horizontal magnetic poles, the four horizontal magnetic poles are positioned in the same horizontal plane, the two horizontal magnetic poles which are oppositely arranged on the X axis are a first horizontal magnetic pole pair, the two horizontal magnetic poles which are oppositely arranged on the Y axis are a second horizontal magnetic pole pair, gaps are reserved among the five magnetic poles, the space among the five magnetic poles can accommodate a sample disc of the sample table (6), and each magnetic pole is wound with a coil.

3. The three-dimensional magnetic field probe station test system of claim 1, wherein:

the three-dimensional electromagnet is a four-pole electromagnet and comprises four horizontal magnetic poles, the four horizontal magnetic poles are positioned in the same horizontal plane, two horizontal magnetic poles which are oppositely arranged on an X axis are a third horizontal magnetic pole pair, two horizontal magnetic poles which are oppositely arranged on a Y axis are a fourth horizontal magnetic pole pair, gaps are reserved among the four magnetic poles, the distance among the four magnetic poles can be adjusted according to the area of a sample disc of the sample table (6), and a coil is wound on each magnetic pole.

4. The three-dimensional magnetic field probe station test system according to any one of claims 1 to 3, characterized in that:

the magnetic sensor is arranged near the tip of one or more magnetic poles, and the signal of a single magnetic sensor or the combination of the signals of a plurality of magnetic sensors is fed back to a computer or a singlechip device to read the magnetic field.

5. The three-dimensional magnetic field probe station test system according to claim 1 or 2, characterized in that:

the sample is fixed on the sample table (6), and the sample table (6) is positioned between the horizontal magnetic pole and the vertical magnetic pole of the three-dimensional electromagnet (3) and senses a three-dimensional magnetic field.

6. The three-dimensional magnetic field probe station test system of claim 5, wherein:

the displacement platform (7) is arranged below the magnet bridge (2), the upper part of the displacement platform (7) is connected to the sample platform (6), the lower part of the displacement platform is fixed on the base (1), and the displacement platform (7) is manually or electrically adjusted to drive the sample platform (6) to generate XY two-axis displacement and/or rotate around the Z axis during testing.

7. The three-dimensional magnetic field probe station test system according to any one of claims 1-3, wherein:

the probe station module includes: the three-dimensional electromagnetic probe comprises a probe (9) which is connected with at least one direct current or high-frequency instrument and used for contacting a sample to test, a probe seat (8) for finely adjusting the probe (9) in the three-axis direction of XYZ, and a probe platform (5) which is arranged above a three-dimensional electromagnet (3) and used for bearing and fixing the probe seat (8), wherein a plurality of groups of probe seats (8) and probes (9) are uniformly arranged around the middle opening of the probe platform (5).

8. The three-dimensional magnetic field probe station test system of claim 7, wherein:

the probe platform (5) is fixed on the base (1) through a plurality of probe platform support columns (4), and the probe platform support columns (4) drive the probe platform (5) to lift along the Z-axis direction.

9. The three-dimensional magnetic field probe station test system according to any one of claims 1 to 3, characterized in that:

the microscopic measuring device (10) is fixed on the base (1) and used for observing the needle point of the probe (9) and a sample to perform needle inserting operation and acquiring image data, and an optical microscope of the microscopic measuring device can perform XYZ three-axis movement and is simultaneously provided with a camera to perform imaging display.

10. A three-dimensional magnetic field probe station test system according to any of claims 1-3, wherein:

the microscopic measuring device (10) is an optical microscope and comprises a light source, a camera module and a microscopic imaging module, or can be replaced by microscope equipment for carrying out magnetic field test based on magneto-optical Kerr effect, and the microscope equipment for carrying out magnetic field test based on magneto-optical Kerr effect comprises a light source, a polarizer and an optical-electrical signal converter.

Images