CN212881057U - Trimethyl aluminum evaporation conveying equipment with source liquid tank - Google Patents
Trimethyl aluminum evaporation conveying equipment with source liquid tank Download PDFInfo
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- CN212881057U CN212881057U CN202020841222.7U CN202020841222U CN212881057U CN 212881057 U CN212881057 U CN 212881057U CN 202020841222 U CN202020841222 U CN 202020841222U CN 212881057 U CN212881057 U CN 212881057U
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Abstract
The utility model discloses source liquid evaporation cabinet field especially relates to a take source liquid jar trimethyl aluminium evaporation conveying equipment, include: the device comprises a cabinet body, a buffer tank, a source liquid tank, an evaporator, a vacuum generator, a plurality of output pipe valves and a blow pipe valve, wherein the buffer tank, the source liquid tank, the evaporator and the vacuum generator are arranged in the cabinet body; by adopting the utility model, the source liquid tank is matched with the buffer tank to realize the application of the evaporation cabinet with the source, and the online replacement of the source liquid tank is realized through the buffer tank; the liquid flow meters are arranged at the liquid outlet ends of the source liquid tank and the buffer tank, the gas flow meter is arranged at the rear section of the manual diaphragm valve, the microcontroller is matched to realize data acquisition of information, the vacuum generator and the evaporator are controlled by signals, and information and automation of display operation are realized.
Description
Technical Field
The utility model discloses source liquid evaporation cabinet field especially relates to a take source liquid jar trimethyl aluminium evaporation conveying equipment.
Background
In recent years, some large solar cell manufacturing companies have studied to increase the conversion efficiency of solar cells by adding a thin film of alumina on the surface of a silicon-based solar cell. Trimethylaluminum is one of core raw materials for manufacturing an alumina film, and the required equipment is a device capable of mixing and gasifying trimethylaluminum stock solution and argon in a certain proportion.
In the existing market, a plurality of small and medium-sized plants are not provided with the condition of a peripheral pipeline of trimethylaluminum, the evaporation cabinet of the old style before can not be used, a source evaporation cabinet is needed, and a raw material bottle for replacing the common source evaporation cabinet has certain leakage hidden trouble.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a can directly supply source liquid, it is safer to change the source bottle, sweeps automatic evaporation conveying equipment.
A take source liquid jar trimethyl aluminum evaporation conveying equipment includes: the device comprises a cabinet body, a buffer tank, a source liquid tank, an evaporator, a vacuum generator, a plurality of output pipe valves and a blow pipe valve, wherein the buffer tank, the source liquid tank, the evaporator and the vacuum generator are arranged in the cabinet body;
the top end of the cabinet body is provided with a plurality of output ports, argon gas inlet holes and scavenging and blowing outlet holes, the output pipe valve is fixed on the inner wall of the cabinet body and is installed in a matched mode with the output ports, the argon gas inlet holes are used for connecting an external argon gas pipeline and a manual diaphragm valve, and external argon gas enters the pipeline inside the cabinet body through the manual diaphragm valve; the rear section of the manual diaphragm valve is provided with a first filter and a pressure regulating valve;
the evaporator is connected with the buffer tank, the source liquid tank, the manual diaphragm valve and the output pipe valve; a liquid flow meter is arranged on a liquid inlet pipeline of the evaporator, and a gas flow meter is arranged on a gas inlet pipeline;
the vacuum generator is connected with the external tail exhaust treatment device and an internal pipeline of the cabinet body, one end of the blowpipe valve is connected with the internal pipeline, and the other end of the blowpipe valve is connected with a blowpipe air hole; the front-section pipeline of the sweeping and blowing pipe valve is also provided with a second filter and a pneumatic micro-leakage valve; the vacuum generator is a suction-blowing integrated generator;
the evaporator, the liquid flowmeter, the gas flowmeter and the vacuum generator are in signal connection with the microcontroller.
Furthermore, a pneumatic diaphragm valve and a pressure gauge are further arranged on the rear-section pipeline of the manual diaphragm valve.
Furthermore, a check valve and a pressure sensor are arranged on a liquid inlet pipeline of the buffer tank and the source liquid tank leading to the evaporator.
Further, the top of the outer wall of the cabinet body is also provided with a warning lamp, and the warning lamp is in signal connection with the microcontroller.
Furthermore, a fire-fighting interface is further arranged at the top of the cabinet body.
Further, the cabinet body is also provided with an internal pressure gauge.
Further, the internal branch of the cabinet body is pipeline district and jar body and places the district, jar body is placed and is provided with the first fixing device who is used for installing the buffer tank in the district and is used for the second fixing device of fixed source fluid reservoir.
Further, in the inner wall in the district is placed to the jar body of cabinet internal portion, be provided with the fireproof cotton intermediate layer, place the district lower floor and be provided with jar body mount, be provided with vermiculite under the jar body mount.
Furthermore, the buffer tank in the cabinet body and the placing area of the source liquid tank are both provided with smoke alarms.
Further, the microcontroller is a PLC controller with a display screen
The utility model has the advantages that:
the utility model provides a concrete operating condition as follows: under normal work, a source liquid tank and a buffer tank which are arranged in a cabinet body are used for conveying trimethylaluminum source liquid to an evaporator, the source liquid tank and the buffer tank are communicated with a liquid inlet pipeline of the evaporator, a liquid flowmeter is arranged, the flow of the trimethylaluminum solution can be accurately monitored, external argon gas is communicated with a manual diaphragm valve through an argon gas inlet hole, flows through a first filter to prevent external impurities from entering, the pressure of a pipe is kept stable through a pressure regulating valve, then flows through a gas flowmeter, enters the evaporator, is evaporated and mixed through the evaporator, is communicated with the pipeline in the cabinet body, enters an output pipe valve, and flows to external process equipment, so that the evaporation cabinet with the source is realized, a plant area without related trimethylaluminum peripheral pipelines is facilitated, and the production work can be put into as quickly as possible; the device comprises a tank changing operation, a buffer tank serving as a standby tank body is arranged and matched with a source liquid tank, the replacement of the source liquid tank under the non-stop state of equipment can be realized, a vacuum generator is a blowing and sucking integrated generator, the blowing and vacuum operation of a pipeline in a cabinet body can be integrated by connecting an external air pump, when the source liquid tank is replaced, a corresponding emptying pipeline is reserved, the pipeline is blown and cleaned after the vacuum generator is emptied, the blowing gas flows to the outside of the cabinet body through a sweeping and blowing pipe valve, when the replacement is finished, other air impurities are not needed in the pipeline, the vacuum generator is in a suction mode, a vacuumizing environment is formed, the pneumatic micro-leakage valve arranged at the front section of the sweeping and blowing pipe valve at present can balance the internal pressure of the pipeline and is used for keeping a stable state, and a second filter prevents the external impurities; the evaporator, the liquid flowmeter, the gas flowmeter and the vacuum generator are in signal connection with the microcontroller, so that parameter visualization monthly informatization management is realized, and pipeline sweeping and blowing work and vacuumizing work are completed through related programs;
by adopting the utility model, the source liquid tank is matched with the buffer tank to realize the application of the evaporation cabinet with the source, and the online replacement of the source liquid tank is realized through the buffer tank; the liquid flow meters are arranged at the liquid outlet ends of the source liquid tank and the buffer tank, the gas flow meter is arranged at the rear section of the manual diaphragm valve, the microcontroller is matched to realize data acquisition of information, the vacuum generator and the evaporator are controlled by signals, and information and automation of display operation are realized.
Drawings
FIG. 1 is a schematic view of the present invention showing a partially hidden inclined structure;
fig. 2 is a schematic view of the left internal structure of the present invention;
fig. 3 is a schematic view of the right side internal structure of the present invention;
fig. 4 is an overall front view schematic diagram of the present invention;
reference numerals: 1-a pneumatic diaphragm valve, 2-a pressure gauge, 3-a manual diaphragm valve, 4-a pressure regulating valve, 5-a first filter, 6-a vacuum generator, 7-a gas flowmeter, 8-a liquid flowmeter, 9-an evaporator, 10-a second filter, 11-a one-way valve, 12-a pressure sensor, 13-a pneumatic microleakage valve, 14-a buffer tank, 15-source liquid tank, 16-cabinet body, 17-internal pressure meter, 18-fire-fighting interface, 19-warning lamp, 20-first fixing device, 21-second fixing device, 22-microcontroller, 23-smoke alarm, 24-output pipe valve, 25-output port, 26-argon gas inlet hole, 27-sweeping and blowing pipe valve and 28-sweeping and blowing air outlet hole.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.
Referring to fig. 1-4, a trimethylaluminum evaporation conveying device with a source liquid tank comprises: a cabinet 16, a buffer tank 14, a source liquid tank 15, an evaporator 9, a vacuum generator 6, a plurality of output pipe valves 24 and a blow-pipe sweeping valve 27 which are arranged in the cabinet 16, and a microcontroller 22 arranged on the outer shell of the cabinet 16;
the top end of the cabinet body 16 is provided with a plurality of output ports 25, argon gas inlet holes 26 and a sweeping and blowing gas outlet hole 28, the output pipe valve 24 is fixed on the inner wall of the cabinet body 16 and is installed in a matching manner with the output ports 25, the argon gas inlet holes 26 are used for connecting an external argon gas pipeline and a manual diaphragm valve 3, and external argon gas enters the pipeline inside the cabinet body 16 through the manual diaphragm valve 3; the rear section of the manual diaphragm valve 3 is provided with a first filter 5 and a pressure regulating valve 4;
the evaporator 9 is connected with the buffer tank 14, the source liquid tank 15, the manual diaphragm valve 3 and the output pipe valve 24; a liquid flow meter 8 is arranged on a liquid inlet pipeline of the evaporator 9, and a gas flow meter 7 is arranged on a gas inlet pipeline;
the vacuum generator 6 is connected with an external air pump and an internal pipeline of the cabinet body 16, one end of the blowpipe valve 27 is connected with the internal pipeline, and the other end of the blowpipe valve is connected with a blowpipe air hole 28; the front-section pipeline of the purge pipe valve 27 is also provided with a second filter 10 and a pneumatic micro-leakage valve 13; the vacuum generator 6 is a suction-blowing integrated generator;
the evaporator 9, the liquid flowmeter 8, the gas flowmeter 7 and the vacuum generator 6 are in signal connection with the microcontroller 22.
The utility model provides a concrete operating condition as follows: under normal work, a source liquid tank 15 and a buffer tank 14 which are arranged in a cabinet body 16 are used for conveying trimethyl aluminum source liquid to an evaporator 9, the source liquid tank 15 and the buffer tank 14 are communicated to a liquid inlet pipeline of the evaporator 9, a liquid flowmeter 8 is arranged, the flow of the trimethyl aluminum solution can be accurately monitored, external argon gas is communicated to a manual diaphragm valve 3 through an argon gas inlet hole 26, flows through a first filter 5 to prevent external impurities from entering, is kept stable in pipe pressure through a pressure regulating valve 4, flows through a gas flowmeter 7, enters the evaporator 9, is evaporated and mixed through the evaporator 9, is communicated to an internal pipeline of the cabinet body 16, flows into an output pipe valve 24, and finally flows to external process equipment, so that the application of the evaporation cabinet with the source is realized, a plant area without related trimethyl aluminum peripheral pipelines is convenient, and the production work can be rapidly carried out as far as possible; under the operation of changing the pot, there is buffer tank 14 as the spare tank body, cooperate with the source fluid reservoir 15, can realize the change of the source fluid reservoir 15 under the non-stop state of the apparatus, the vacuum generator 6 is a blowing and sucking integrated generator, through connecting the external air pump, can realize the sweeping of the internal pipeline of the cabinet 16 and operate integrally with vacuum, when beginning to change the source fluid reservoir 15, leave the corresponding emptying pipeline, carry on the sweeping operation through the pipeline after the evacuation of this vacuum generator 6, the purge gas flows to the outside of the cabinet 16 through the valve 27 of the purge tube, when finishing changing, the pipeline is inside, do not need other air impurity, the vacuum generator 6 starts the suction mode, the environment of vacuuming, the pneumatic microleakage valve 13 that is set up in the anterior segment of the valve 27 of purge tube at present can balance the internal gas pressure of the pipeline, is used for keeping the steady state, the second filter 10 prevents the; the evaporator 9, the liquid flowmeter 8, the gas flowmeter 7 and the vacuum generator 6 are in signal connection with the microcontroller 9, so that parameter visualization monthly informatization management is realized, and pipeline sweeping and blowing work and vacuumizing work are completed through related programs.
By adopting the utility model, the source liquid tank 15 is matched with the buffer tank 14 to realize the application of the evaporation cabinet with source, and the online replacement of the source liquid tank 15 is realized through the buffer tank 14; the liquid outlet end of the source liquid tank 15 and the liquid outlet end of the residual buffer tank 14 are provided with a liquid flow meter 8, the rear section of the manual diaphragm valve 3 is provided with a gas flow meter, the microcontroller 22 is matched to realize data acquisition of information, the vacuum generator 6 and the evaporator 9 are controlled by signals, and information and automation of display operation are realized.
Referring to fig. 1-4, a trimethyl aluminum evaporation conveying device with a source liquid tank, further, a pneumatic diaphragm valve 1 and a pressure gauge 2 are further arranged on a rear-end pipeline of the manual diaphragm valve 3; and the pneumatic diaphragm valve 1 and the pressure gauge 2 are in signal connection with the microcontroller 22 and are used for detecting the internal pressure of the pipeline, so that the regulation is stable.
In this embodiment, further, a check valve 11 and a pressure sensor 12 are disposed on liquid inlet pipelines of the buffer tank 14 and the source liquid tank 15 leading to the evaporator 9; the check valve 11 can prevent impurities in the pipeline from entering the buffer tank 14 and the source liquid tank 15 after the evaporator 9 or the pipeline is in fault, and the pressure sensor 12 is in signal connection with the microcontroller 22, so that the tank data can be detected more comprehensively.
In this embodiment, further, a warning lamp 17 is further disposed at the top of the outer wall of the cabinet 16, and the warning lamp 19 is in signal connection with the microcontroller 22; the warning lamp 17 is connected with the microcontroller 22, and can play a role in warning and prompting workers when equipment fails.
In this embodiment, further, a fire-fighting interface 18 is further opened at the top of the cabinet 16.
In this embodiment, further, the cabinet 16 is further provided with an internal pressure gauge 17.
In this embodiment, the inside of the cabinet 16 is further divided into a pipeline area and a tank placing area, and the tank placing area is provided with a first fixing device 20 for installing the buffer tank 14 and a second fixing device 21 for fixing the source liquid tank 15; the buffer tank 14 and the source liquid tank 15 can be firmly fixed in the tank body placing area at the lower part of the cabinet 16.
In this embodiment, further, the buffer tank 14 and the source liquid tank 15 in the cabinet 16 are both provided with a smoke alarm 23; the state of the positions of the source liquid tank 15 and the buffer tank 14 stored in the cabinet body 16 can be monitored in real time, and the phenomenon of displacement and leakage is avoided.
In this embodiment, further, the microcontroller 22 is a PLC controller with a display screen.
The specific embodiments described herein are merely illustrative of the spirit of the invention. Various modifications, additions and substitutions for the specific embodiments described may be made by those skilled in the art without departing from the scope and spirit of the invention as defined by the accompanying claims.
Claims (10)
1. The utility model provides a take source liquid jar trimethyl aluminum evaporation conveying equipment which characterized in that includes: the device comprises a cabinet body (16), a buffer tank (14), a source liquid tank (15), an evaporator (9), a vacuum generator (6), a plurality of output pipe valves (24) and a sweeping and blowing pipe valve (27) which are arranged in the cabinet body (16), and a microcontroller (22) arranged on the outer shell of the cabinet body (16);
the top end of the cabinet body (16) is provided with a plurality of output ports (25), argon gas inlet holes (26) and a sweeping and blowing air outlet hole (28), the output pipe valve (24) is fixed on the inner wall of the cabinet body (16) and is installed in a matched mode with the output ports (25), the argon gas inlet holes (26) are used for connecting an external argon pipeline and a manual diaphragm valve (3), and external argon gas enters the pipeline inside the cabinet body (16) through the manual diaphragm valve (3); the rear section of the manual diaphragm valve (3) is provided with a first filter (5) and a pressure regulating valve (4);
the evaporator (9) is connected with the buffer tank (14), the source liquid tank (15), the manual diaphragm valve (3) and the output pipe valve (24); a liquid flow meter (8) is arranged on a liquid inlet pipeline of the evaporator (9), and a gas flow meter (7) is arranged on a gas inlet pipeline;
the vacuum generator (6) is connected with an external tail exhaust treatment device and an internal pipeline of the cabinet body (16), one end of the sweeping and blowing pipe valve (27) is connected with the internal pipeline, and the other end of the sweeping and blowing pipe valve is connected with a sweeping and blowing air outlet hole (28); the front-section pipeline of the sweeping and blowing pipe valve (27) is also provided with a second filter (10) and a pneumatic micro-leakage valve (13); the vacuum generator (6) is a suction-blowing integrated generator;
the evaporator (9), the liquid flowmeter (8), the gas flowmeter (7) and the vacuum generator (6) are in signal connection with the microcontroller (22).
2. The trimethylaluminum evaporation conveying equipment with the source liquid tank as claimed in claim 1, wherein the rear pipeline of the manual diaphragm valve (3) is further provided with a pneumatic diaphragm valve (1) and a pressure gauge (2).
3. The trimethylaluminum evaporation conveying equipment with the source liquid tank is characterized in that a one-way valve (11) and a pressure sensor (12) are arranged on a liquid inlet pipeline of the buffer tank (14) and the source liquid tank (15) which lead to the evaporator (9).
4. The trimethylaluminum evaporation conveying equipment with the source liquid tank as claimed in claim 1, wherein a warning lamp (19) is further arranged on the top of the outer wall of the cabinet body (16), and the warning lamp (19) is in signal connection with the microcontroller (22).
5. The trimethylaluminum evaporation conveying equipment with the source liquid tank as claimed in claim 1, wherein the top of the cabinet body (16) is further provided with a fire-fighting interface (18).
6. The trimethylaluminum evaporation conveying equipment with the source liquid tank as recited in claim 1, wherein the cabinet body (16) is further provided with an internal pressure gauge (17).
7. The trimethylaluminum evaporation conveying equipment with the source liquid tank is characterized in that the inner part of the cabinet body (16) is divided into a pipeline area and a tank body placing area, and a first fixing device (20) for installing the buffer tank (14) and a second fixing device (21) for fixing the source liquid tank (15) are arranged in the tank body placing area.
8. The trimethylaluminum evaporation conveying equipment with the source liquid tank as claimed in claim 7, wherein a fireproof interlayer is arranged in the inner wall of the tank body placing area inside the cabinet body (16), a tank body fixing frame is arranged on the lower bottom surface of the placing area, and vermiculite is arranged below the tank body fixing frame.
9. The trimethylaluminum evaporation conveying equipment with the source liquid tank is characterized in that a smoke alarm (23) is arranged in a placing area of the buffer tank (14) and the source liquid tank (15) in the cabinet body (16).
10. The trimethylaluminum evaporation conveying equipment with the source liquid tank as recited in claim 1, wherein the microcontroller (22) is a PLC controller with a display screen.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020841222.7U CN212881057U (en) | 2020-05-19 | 2020-05-19 | Trimethyl aluminum evaporation conveying equipment with source liquid tank |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020841222.7U CN212881057U (en) | 2020-05-19 | 2020-05-19 | Trimethyl aluminum evaporation conveying equipment with source liquid tank |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212881057U true CN212881057U (en) | 2021-04-06 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202020841222.7U Active CN212881057U (en) | 2020-05-19 | 2020-05-19 | Trimethyl aluminum evaporation conveying equipment with source liquid tank |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN212881057U (en) |
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2020
- 2020-05-19 CN CN202020841222.7U patent/CN212881057U/en active Active
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