CN212855551U - Etching sub-liquid preparation equipment - Google Patents
Etching sub-liquid preparation equipment Download PDFInfo
- Publication number
- CN212855551U CN212855551U CN202020808221.2U CN202020808221U CN212855551U CN 212855551 U CN212855551 U CN 212855551U CN 202020808221 U CN202020808221 U CN 202020808221U CN 212855551 U CN212855551 U CN 212855551U
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- Prior art keywords
- liquid storage
- tree
- storage tank
- shaped pipeline
- air inlet
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Abstract
The utility model discloses etching solution preparation equipment, which comprises a horizontally placed cylindrical liquid storage tank, wherein a water inlet, a water inlet pipe communicated with a water pump, an air inlet pipe connected with a gas conveying device, a liquid level sensor, a medicine adding port and a sealing cover covering the medicine adding port are arranged on the liquid storage tank, and an etching solution discharge pipe is arranged below the liquid storage tank; the liquid storage tank is internally provided with a tree-shaped pipeline, the tree-shaped pipeline is divided into a trunk part and a plurality of branch parts, one end of the trunk part of the tree-shaped pipeline is connected with the branch parts of the tree-shaped pipeline, the other end of the trunk part of the tree-shaped pipeline is connected with the air inlet, the other ends of the branch parts of the tree-shaped pipeline extend towards the inner bottom surface of the liquid storage tank, and the height from the inner bottom surface of the liquid storage tank is greater than 5cm and less than one. Different solutes under this condition that need not to install traditional agitating unit of configuration equipment are mixed together, fully dissolve, and concentration is even, save material simultaneously, and easy operation is intelligent, uses manpower sparingly to reach saving manufacturing cost.
Description
[ technical field ] A method for producing a semiconductor device
The utility model relates to a chemical industry auxiliary agent configuration equipment field, concretely relates to etching liquid configuration equipment.
[ background of the invention ]
Most liquid preparation equipment in the existing market is large in size, high in cost, expensive, and the operation mode is not simplest, and different solutes are mixed together, so that the uniformity is insufficient under the stirring of a stirring device, the condition of uneven concentration of the solution is easily caused, and the uniformity of the prepared liquid finished product is poor. For satisfying the production needs of mill, independently design a simple and easy configuration etching liquid's equipment, need not to install under traditional agitating unit's the condition different solutes and mix together, fully dissolve, the concentration is even, save material simultaneously, easy operation is intelligent, uses manpower sparingly to reach saving manufacturing cost.
[ Utility model ] content
In order to solve the problems, the etching sub-liquid preparation equipment is provided, different solutes are mixed together without installing a traditional stirring device, the solutes are fully dissolved, the concentration is uniform, materials are saved, the operation is simple and intelligent, and the labor is saved, so that the production cost is saved.
The technical scheme of the utility model as follows:
an etching solution preparation device comprises a horizontal cylindrical liquid storage tank 1, wherein a water inlet, a water inlet pipe 2 which is communicated with a water pump outwards, an air inlet 3, an air inlet pipe 4 which is connected with a gas conveying device, a liquid level sensor 5, a medicine adding port and a sealing cover 7 which covers the medicine adding port are arranged on the upper surface of the liquid storage tank 1, and an etching solution discharge pipe is arranged on the lower surface of the liquid storage tank; be equipped with a tree type pipeline in the liquid storage pot, tree type pipeline divide into a trunk 8 and a plurality of branch portion 9, and 8 one end of tree type pipeline trunk are connected with tree type pipeline branch portion 9, and its other end is connected with air inlet 3, and the other end of a plurality of branch portion 9 of tree type pipeline extends to the inside bottom surface of liquid storage pot, and the distance liquid storage pot inside bottom surface height is greater than 5cm, is less than the quarter of liquid storage pot height.
Further, the branch parts 9 of the tree-shaped pipeline are different in length: either all of the lengths are different or some of the same portion are different.
Further, the length of the trunk part 8 of the tree-shaped pipeline does not exceed one fourth of the height of the liquid storage tank.
[ description of the drawings ]
Fig. 1 is a front view of the present invention;
FIG. 2 is a schematic view of the tree-shaped pipeline of the present invention;
[ detailed description ] embodiments
In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the invention.
The technical scheme of the utility model as follows:
an etching solution preparation device comprises a horizontal cylindrical liquid storage tank 1, wherein a water inlet, a water inlet pipe 2 which is communicated with a water pump outwards, an air inlet 3, an air inlet pipe 4 which is connected with a gas conveying device, a liquid level sensor 5, a medicine adding port and a sealing cover 7 which covers the medicine adding port are arranged on the upper surface of the liquid storage tank 1, and an etching solution discharge pipe is arranged on the lower surface of the liquid storage tank; be equipped with a tree type pipeline in the liquid storage pot, tree type pipeline divide into a trunk 8 and a plurality of branch portion 9, and 8 one end of tree type pipeline trunk are connected with tree type pipeline branch portion 9, and its other end is connected with air inlet 3, and the other end of a plurality of branch portion 9 of tree type pipeline extends to the inside bottom surface of liquid storage pot, and the distance liquid storage pot inside bottom surface height is greater than 5cm, is less than the quarter of liquid storage pot height.
Further, the branch parts 9 of the tree-shaped pipeline are different in length: either all of the lengths are different or some of the same portion are different.
Further, the length of the trunk part 8 of the tree-shaped pipeline does not exceed one fourth of the height of the liquid storage tank.
When the solution is prepared, open inlet tube ooff valve and add water to the liquid storage pot, open medicine interpolation mouth closing cap again, pour ammonium chloride and etching additive into to the liquid storage pot from medicine interpolation mouth, when showing the volume of adding water as required capacity according to the liquid level inductor, stop adding water, open inlet tube ooff valve when adding water, squeeze into the air to the liquid storage pot, because tree type pipeline divides trunk portion length to differ, the local gas of difference in the solution, the gas stirring solution of squeezing into, make the solute fully dissolve in the solution, simultaneously because the gas of squeezing into makes the incessant flow of liquid, so that the concentration of solution is even, half an hour later, make etching daughter liquid under the stirring of air.
The above description is only for the preferred embodiment of the present invention, and is not intended to limit the present invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included within the protection scope of the present invention.
Claims (3)
1. An etching solution preparation device comprises a horizontal cylindrical liquid storage tank (1), wherein a water inlet, a water inlet pipe (2) communicated with a water pump outwards, an air inlet (3), an air inlet pipe (4) connected with a gas conveying device, a liquid level sensor (5), a medicine adding port and a sealing cover (7) covering the medicine adding port are arranged on the upper surface of the liquid storage tank (1), and an etching solution discharge pipe is arranged on the lower surface of the liquid storage tank;
the method is characterized in that: be equipped with a tree type pipeline in the liquid storage pot, tree type pipeline divide into a trunk (8) and a plurality of branch portion (9), and tree type pipeline trunk (8) one end is connected with tree type pipeline branch portion (9), and its other end is connected with air inlet (3), and the other end of a plurality of branch portion (9) of tree type pipeline extends to the inside bottom surface of liquid storage pot, and the distance liquid storage pot inside bottom surface height is greater than 5cm, is less than the quarter of liquid storage pot height.
2. The etchant dispensing apparatus of claim 1, wherein: the branch parts (9) of the tree-shaped pipeline are different in length: either all of the lengths are different or some of the same portion are different.
3. The etchant dispensing apparatus of claim 1, wherein: the length of the tree-shaped pipeline trunk part (8) does not exceed one fourth of the height of the liquid storage tank.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202020808221.2U CN212855551U (en) | 2020-05-14 | 2020-05-14 | Etching sub-liquid preparation equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202020808221.2U CN212855551U (en) | 2020-05-14 | 2020-05-14 | Etching sub-liquid preparation equipment |
Publications (1)
Publication Number | Publication Date |
---|---|
CN212855551U true CN212855551U (en) | 2021-04-02 |
Family
ID=75204695
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202020808221.2U Expired - Fee Related CN212855551U (en) | 2020-05-14 | 2020-05-14 | Etching sub-liquid preparation equipment |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN212855551U (en) |
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2020
- 2020-05-14 CN CN202020808221.2U patent/CN212855551U/en not_active Expired - Fee Related
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
GR01 | Patent grant | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20210402 |