CN212800533U - Atomic layer deposition device - Google Patents
Atomic layer deposition device Download PDFInfo
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- CN212800533U CN212800533U CN202021068330.1U CN202021068330U CN212800533U CN 212800533 U CN212800533 U CN 212800533U CN 202021068330 U CN202021068330 U CN 202021068330U CN 212800533 U CN212800533 U CN 212800533U
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Abstract
The utility model provides an atomic layer deposition device for the powder cladding, including powder container, dispersion pole and power, the powder container is used for holding the powder, the dispersion pole sets up in the powder container, two electrodes of power respectively with the dispersion pole with the powder container electricity is connected, the dispersion pole is at least partially located in the powder container just stretch into part of dispersion pole with form the electric field between the powder container. The powder can be dispersed in an electrostatic dispersion mode by enabling the dispersing rod to be at least partially positioned in the powder container and enabling the extending part of the dispersing rod to form an electric field with the powder container, so that the powder can be fully contacted with a reaction substance while powder agglomeration is avoided, and the powder coating effect is improved.
Description
Technical Field
The utility model relates to an atomic layer deposition technical field, in particular to atomic layer deposition device.
Background
With the increasingly intensive research in the field of materials, powders are becoming the focus of research due to their unique physical and chemical properties. However, as the size of the powder is reduced, the specific surface area and the surface energy are increased, and the powder is very prone to spontaneous coagulation and agglomeration, so that the powder cannot exert the excellent performance.
In order to avoid the phenomenon of spontaneous coagulation and agglomeration of the powder, the surface of the powder can be coated with a film, namely the surface of the powder is coated with a layer of other materials. Powder surface coating is typically achieved by atomic layer deposition techniques. However, the conventional atomic layer deposition apparatus is mostly suitable for large-sized surface coating, such as silicon wafer coating, and still has many problems when used for powder coating, such as the conventional problem of how to make the powder fully contact with the reactive substance during the coating process, and the problem that the powder is agglomerated, so that the coated film cannot fully grow on the surface of the powder.
Therefore, there is an urgent need for improvement of the existing atomic layer deposition apparatus to solve the problems of insufficient contact of the powder with the reaction substance and agglomeration of the powder.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide an atomic layer deposition apparatus to solve the powder and can not fully contact with reaction mass, and the problem of powder reunion.
In order to solve the technical problem, the utility model provides an atomic layer deposition device for the powder cladding, including powder container, dispersion pole and power, the powder container is used for holding the powder, the dispersion pole sets up in the powder container, two electrodes of power respectively with the dispersion pole with the powder container electricity is connected, the dispersion pole is at least partially located in the powder container just stretch into part of dispersion pole with form the electric field between the powder container.
Optionally, still include cavity, a drive arrangement and coupling assembling, the powder container sets up in the cavity, the cavity with the powder container passes through coupling assembling and rotates the connection, a drive arrangement passes through coupling assembling drive powder container and rotates.
Optionally, the dispersion rod includes a dispersion body, and at least two dispersion needles extending from an outer surface of the dispersion body in a direction outwardly away from the outer surface.
Optionally, the dispersion needle is in the form of an elongated needle or bur.
Optionally, the dispersing device further comprises a second driving device, wherein the second driving device is used for driving the dispersing rod to rotate through the connecting assembly and driving the dispersing rod to move in the axial direction through the connecting assembly.
Optionally, the heating device further comprises a heat insulation layer and a heater arranged in the heat insulation layer, wherein the heat insulation layer is arranged on the outer surface of the cavity.
Optionally, the device further comprises a vacuumizing device, a precursor gas conveying device, an air inlet and an air outlet, wherein the vacuumizing device is communicated with the cavity through the air outlet, the precursor gas conveying device is communicated with the cavity through the air inlet, and the precursor gas conveying device is used for conveying precursor gas into the cavity.
Optionally, the connecting assembly includes a first end cap, a first sealer, a rotating pipe, a second end cap, a second sealer, a power rod and a transmission rod, the first end cap is disposed on the opening of the cavity, the first sealer is fixedly connected with the first end cap, the first sealer is rotatably connected with the rotating pipe, the powder container is fixedly connected with the rotating pipe, the second end cap is fixedly connected with the rotating pipe or integrally disposed with the rotating pipe, the second sealer is fixedly connected with the second end cap, one end of the second sealer is connected with the power rod, the other end of the second sealer is connected with the transmission rod, the transmission rod is connected with the dispersion rod, the first driving device drives the second sealer to rotate so as to drive the rotating pipe to rotate, the second driving device is used for driving the power rod to rotate so as to drive the transmission rod and the dispersion rod to rotate, and driving the power rod to move along the axial direction so as to drive the transmission rod and the dispersion rod to move.
Optionally, the powder container is clamped to the rotary tube, and the transmission rod is clamped to the dispersion rod.
Optionally, the first end cap and the first sealer are arranged in an insulating manner, and the rotating pipe and the second sealer are arranged in an insulating manner.
The utility model provides a pair of atomic layer deposition apparatus has following beneficial effect:
the two electrodes of the power supply are respectively electrically connected with the dispersing rod and the powder container, the dispersing rod is at least partially positioned in the powder container, and an electric field is formed between the extending part of the dispersing rod and the powder container, so that the powder can be dispersed in an electrostatic dispersion mode, the powder can be fully contacted with a reaction substance while powder agglomeration is avoided, and the powder coating effect is improved.
Drawings
FIG. 1 is a schematic diagram of an atomic layer deposition apparatus according to an embodiment of the present invention;
fig. 2 is a schematic structural view of the powder container and the rotary tube being connected in a snap-fit manner according to an embodiment of the present invention.
Reference numerals:
100-powder container; 110-a container body; 120-a container lid;
200-a dispersion rod; 210-a dispersed entity; 220-a dispersion needle;
300-a cavity;
400-an insulating layer;
500-an air inlet;
600-an exhaust port;
710-a first end cap; 720-a first sealer; 730-rotating the tube; 740-a second end cap; 750-a second sealer; 770-a power rod; 780-a transmission rod;
810-T type groove; 820-limit bulge
900-powder dust plug.
Detailed Description
The atomic layer deposition apparatus provided by the present invention will be described in further detail with reference to the accompanying drawings and specific examples. The advantages and features of the present invention will become more apparent from the following description. It should be noted that the drawings are in simplified form and are not to precise scale, and are provided for convenience and clarity in order to facilitate the description of the embodiments of the present invention.
The embodiment provides an atomic layer deposition device for coating powder. Referring to fig. 1, fig. 1 is a schematic structural diagram of an atomic layer deposition apparatus according to an embodiment of the present invention, the atomic layer deposition apparatus includes a powder container 100, a dispersion rod 200, and a power source, the powder container 100 is used for containing powder, the dispersion rod 200 is disposed in the powder container 100, the dispersion rod 200 is insulated from the powder container 100, two electrodes of the power source are electrically connected to the dispersion rod 200 and the powder container 100, respectively, the dispersion rod 200 is at least partially disposed in the powder container 100, and an electric field is formed between an extending portion of the dispersion rod 200 and the powder container 100.
Because two electrodes of the power supply are respectively and electrically connected with the dispersion rod 200 and the powder container 100, the dispersion rod 200 is at least partially positioned in the powder container 100, and an electric field is formed between the extending part of the dispersion rod 200 and the powder container 100, the powder can be dispersed in an electrostatic dispersion mode, the powder agglomeration is avoided, and the powder can be fully contacted with the reaction substances in the powder container 100.
The atomic layer deposition apparatus further includes a chamber 300, a first driving device, and a connection assembly. The powder container 100 is disposed in the cavity 300, the cavity 300 and the powder container 100 are rotatably connected through a connecting assembly, and the first driving device drives the powder container 100 to rotate through the connecting assembly. Therefore, the powder container 100 can be driven by the first driving device to rotate relative to the cavity 300, and the powder container 100 drives the powder to roll and shed, so that the contact area between the powder and the reaction substance in the powder container 100 is increased, and the powder is favorably in full contact with the precursor gas. The reactive substance may coat the surface of the powder, typically a precursor gas that may react with the powder.
Specifically, the powder container 100 is a material having a porous structure, and the pore diameter of the powder container 100 is smaller than the outer diameter of the powder. The porous structure facilitates the exchange of gas between the interior of the powder container 100 and the exterior, which facilitates the sufficient contact between the precursor gas and the powder.
The powder container 100 is preferably cylindrical, and the material may be aluminum, copper, nickel, stainless steel, or the like. The material of the powder container 100 is preferably stainless steel in view of corrosion resistance and durability in the reaction process.
The powder container 100 includes a container body 110 and a container cover 120, wherein one end of the container body 110 is open, the container cover 120 is covered on the container body 110, and the container cover 120 and the container body 110 can be fixedly connected through a quick-release flange and a quick-release clamp.
The powder container 100 further includes a non-stick layer disposed on an inner wall of the powder container 100. This may facilitate cleaning of the powder container 100. The material of the non-stick layer is preferably PTFE (polytetrafluoroethylene).
The portion of the container body 110 near the opening is funnel-shaped, so that dead corners on the container body 110 can be prevented from affecting the powder pouring from the powder container 100.
The chamber 300 may be made of aluminum or stainless steel.
The first driving device can drive the powder container 100 to do uniform circular motion or variable-speed circular motion, but the centrifugal force generated by the rotation of the powder container 100 is always slightly smaller than the gravity of the powder. Preferably, the first driving device drives the powder container 100 to do a periodic circular motion with a variable speed, so that the powder can be thrown up as high as possible without the powder completely adhering to the inner wall of the powder container 100 to rotate due to an excessive centrifugal force.
Referring to fig. 1, the dispersion bar 200 includes a dispersion body 210, and at least two dispersion needles 220 extending from an outer surface of the dispersion body 210 in a direction outwardly away from the outer surface. The distribution needles 220 may be arranged in rows on the distribution body 210, and each row of the distribution needles 220 may be arranged at any interval on the outer circumferential surface of the distribution body 210. The dispersing needle 220 may be fixedly disposed on the dispersing body 210 by welding, or may be integrally formed with the dispersing body 210. The dispersion needle 220 has an elongated needle shape or a bur shape.
The atomic layer deposition apparatus further comprises a second driving device for driving the dispersion rod 200 to rotate through the connection assembly. Preferably, the dispersion rod 200 is rotated in the opposite direction to the powder container 100. In this manner, the powder thrown by the rotation of the powder container 100 can be sheared by the dispersing needle 220, and the powder can be stirred to further disperse the powder.
The second driving means is also used to drive the dispersion rod 200 to reciprocate in the axial direction. In this way, the powder can be arbitrarily stirred in a three-dimensional space.
The atomic layer deposition device further comprises a heat insulation layer 400 and a heater arranged in the heat insulation layer 400, wherein the heat insulation layer 400 is arranged on the outer surface of the cavity 300. The heater can be a flexible heating wire, a heating coil or an oil bath heater. The material of the insulating layer 400 may be insulating material such as insulating foam, glass fiber, insulating ceramic, aerogel, etc.
The atomic layer deposition device further comprises a vacuumizing device, a precursor gas conveying device, a gas inlet 500 and a gas outlet 600, wherein the vacuumizing device is communicated with the cavity 300 through the gas outlet 600, the precursor gas conveying device is communicated with the cavity 300 through the gas inlet 500, and the precursor gas conveying device is used for conveying precursor gas into the cavity 300.
Referring to fig. 1, the connection assembly includes a first end cap 710, a first sealer 720, a rotary tube 730, a second end cap 740, a second sealer 750, a power rod 770, and a drive rod 780.
The cavity 300 has an opening at one side, the first end cap 710 is covered on the opening of the cavity 300, the first sealer 720 is fixedly connected with the first end cap 710, the first sealer 720 is rotatably connected with the rotary tube 730, that is, the rotary tube 730 can rotate relative to the first sealer 720, and the powder container 100 is fixedly connected with the rotary tube 730. The second end cap 740 is fixedly connected with the rotary pipe 730 or integrally provided, the second sealer 750 is fixedly connected with the second end cap 740, one end of the second sealer 750 is connected with the power rod 770, the other end is connected with the transmission rod 780, and the transmission rod 780 is connected with the dispersion rod 200. The first driving device drives the second sealer 750 to rotate, so as to drive the rotating pipe 730 to rotate, and the second driving device is used for driving the power rod 770 to rotate so as to drive the transmission rod 780 and the dispersion rod 200 to rotate, and driving the power rod 770 to move in the axial direction so as to drive the transmission rod 780 and the dispersion rod 200 to move. Here, the power rod 770 moves in an axial direction, which means along a rotation axis of the power rod 770.
The connecting device further comprises a synchronous belt and a belt wheel, the belt wheel is fixedly arranged on the second sealer 750, and the first driving device drives the belt wheel to rotate through the synchronous belt, so that the second sealer 750 is driven to rotate through the belt wheel.
Since the first end cap 710 is connected to the rotary tube 730 through the first sealer 720, and the rotary tube 730 is rotatably connected to the power rod 770 through the second end cap 740 and the second sealer 750, the sealing between the first end cap 710 and the rotary tube 730, and the sealing between the power rod 770 and the rotary tube 730 can be achieved, and the sealing of the cavity 300 can be achieved.
The first sealer 720 may be one of a magnetic fluid sealer or a magnetic coupling sealer. The second sealer 750 includes a first sealer and a second sealer, the first sealer may be one of a magnetic fluid sealer or a magnetic coupling sealer, the second sealer is a bellows, and the first sealer is fixedly connected with the second sealer.
Preferably, the powder container 100 is snap-fitted to the rotary tube 730. The transmission lever 780 is engaged with the dispersion lever 200. Referring to fig. 2, fig. 2 is a schematic structural diagram of the powder container 100 and the rotary tube 730 in a clamping connection according to an embodiment of the present invention, a T-shaped groove 810 is provided on the powder container 100, the T-shaped groove 810 is located at a partial opening of the T-shaped lower end, and a limiting protrusion 820 is provided on the outer circumferential surface of the rotary tube 730. The limiting protrusion 820 may be axially inserted into the upper end of the T-shaped groove 810 from the lower end opening of the T-shaped groove 810, and the powder container 100 or the rotation tube 730 may be rotated such that the limiting protrusion 820 moves to one of both edges of the upper end of the T-shaped groove 810, thereby completing the clamping of the rotation tube 730 and the powder container 100. The path of movement of the stop protrusion 820 in the T-shaped groove 810 is shown by the arrow in fig. 2. In other embodiments, an L-shaped groove may be formed in the powder container 100, the L-shaped groove is opened at an upper end portion of the L-shaped groove, and the limiting protrusion 820 may move to only one edge of a lower end of the L-shaped groove when the rotary tube 730 or the powder container 100 is rotated. Alternatively, the powder container 100 may be provided with a stopper protrusion 820, and the rotary tube 730 may be provided with a T-shaped groove 810 or an L-shaped groove 810. The transmission rod 780 and the dispersion rod 200 can also be clamped by similar structures, for example, a limiting protrusion can be arranged on the transmission rod 780, and an L-shaped groove or a T-shaped groove can be arranged on the dispersion rod.
In this embodiment, the first cap 710 and the first sealer 720 are provided in an insulating manner, so that the first cap 710 and the rotary tube 730 are insulated from each other, thereby insulating the first cap 710 and the powder container 100, and the rotary tube 730 and the second sealer 750 are provided in an insulating manner, thereby insulating the rotary tube 730 and the power rod 770, thereby insulating the rotary tube 730 and the dispersion rod 200, even if the dispersion rod 200 and the powder container 100 connected to the rotary tube 730 are insulated from each other. Thus, when two electrodes of a power supply are electrically connected to the dispersion rod 200 and the powder container 100, respectively, an electric field can be formed between the dispersion rod 200 and the powder container 100, so that the powder can be dispersed by electrostatic dispersion. The two electrodes of the power source may be electrically connected to the dispersion rod 200 and the powder container 100, respectively, by electrically connecting one of the power rod 770 and the dispersion rod 200, and one of the rotation tube 730 and the powder container 100, to both poles of the power source, respectively.
Preferably, an insulating layer may be disposed between the first cap 710 and the first sealer 720 to insulate the first cap 710 from the first sealer 720, or an insulating layer may be disposed between the rotary tube 730 and the second sealer 750 to insulate the rotary tube 730 from the second sealer 750. The insulating layer may be a PTFE (polytetrafluoroethylene) insulating gasket. In other embodiments, the first sealer 720 and the second sealer 750 may be selected from sealers with an insulation function to insulate two components connected to the first sealer 720 or the second sealer 750 from each other, for example, the rotary tube 730 may be insulated from the first cap 710, and the rotary tube 730 may be insulated from the power rod 770 and the driving rod 780.
The atomic layer deposition apparatus further includes a powder dust plug 900, wherein the powder dust plug 900 is disposed between the container body 110 of the powder container 100 and the container cover 120, and is used for preventing powder in the container body 110 from overflowing.
The working process of the atomic layer deposition apparatus in this embodiment is substantially as follows:
first, the chamber 300 is vacuumed from the exhaust port 600 by the vacuum pumping means.
Next, the heater in the insulating layer 400 is activated to heat the powder in the powder container 100. The vacuum environment and high temperature are favorable for the volatilization of water in the powder, and can eliminate the influence of liquid bridge force on the powder agglomeration.
At the same time, the rotation tube 730 is driven to rotate by the first driving means, thereby driving the powder container 100 to rotate.
Meanwhile, the power rod 770 is driven to rotate in the direction opposite to the rotation direction of the powder container 100 by the second driving means, thereby driving the dispersion rod 200 to rotate, and the power rod 770 is driven to move in the axial direction by the second driving means, thereby driving the transmission rod 780 and the dispersion rod 200 to move in the axial direction.
At the same time, the power is turned on to disperse the powder by means of electrostatic dispersion.
And then, after the powder is uniformly dispersed, conveying the precursor gas into the cavity 300 from the gas inlet 500 through the precursor gas conveying device until the coating is finished.
The utility model discloses can heat the powder through the heater under vacuum environment to it is rotatory through a drive arrangement drive powder container at the in-process of heating, thereby realize rolling of powder and shed through the rotation of powder container, and then make the powder can more even be heated, further do benefit to the homogeneity of powder and precursor gas fully contact in order to improve the coating film. Meanwhile, the second driving device can drive the dispersion rod to rotate in the direction opposite to the rotation direction of the powder container, and the second driving device can drive the dispersion rod to move along the axial direction, so that the shearing and the stirring of the powder are realized. The powder can be electrostatically dispersed by switching on the power supply. So, can shed, stir, cut and electrostatic dispersion to the powder under vacuum heating environment for the powder is more dispersed, avoids the powder reunion, thereby does benefit to the powder and fully contacts with precursor, when making the cladding homogeneity improve, accomplishes that the powder full surface is fully clad.
The above description is only for the preferred embodiment of the present invention and is not intended to limit the scope of the present invention, and any modification and modification made by those skilled in the art according to the above disclosure are all within the scope of the claims.
Claims (10)
1. An atomic layer deposition device is used for coating powder and is characterized by comprising a powder container, a dispersing rod and a power supply, wherein the powder container is used for containing powder, the dispersing rod is arranged in the powder container, two electrodes of the power supply are respectively electrically connected with the dispersing rod and the powder container, and at least part of the dispersing rod is positioned in the powder container and an electric field is formed between the stretching part of the dispersing rod and the powder container.
2. The atomic layer deposition apparatus according to claim 1, further comprising a chamber, a first driving device, and a connecting assembly, wherein the powder container is disposed in the chamber, the chamber and the powder container are rotatably connected by the connecting assembly, and the first driving device drives the powder container to rotate by the connecting assembly.
3. The atomic layer deposition apparatus according to claim 2, wherein the dispersion bar includes a dispersion body, and at least two dispersion needles extending from an outer surface of the dispersion body in a direction outwardly away from the outer surface.
4. The atomic layer deposition apparatus according to claim 3, wherein the distribution pin is in the form of an elongated needle or bur.
5. The atomic layer deposition apparatus according to claim 2, further comprising a second drive device for driving the dispersion rod to rotate via the coupling assembly and for driving the dispersion rod to move in the axial direction via the coupling assembly.
6. The atomic layer deposition apparatus according to claim 2, further comprising an insulating layer and a heater disposed within the insulating layer, the insulating layer being disposed on an outer surface of the cavity.
7. The atomic layer deposition apparatus according to claim 2, further comprising an evacuation device in communication with the chamber through the exhaust port, a precursor gas delivery device in communication with the chamber through the inlet port, a gas inlet port, and an exhaust port, the precursor gas delivery device being configured to deliver a precursor gas into the chamber.
8. The atomic layer deposition apparatus according to claim 5, wherein the connection assembly comprises a first end cap, a first sealer, a spin tube, a second end cap, a second sealer, a power rod, and a drive rod,
one side of the cavity is provided with an opening, the first end cover is arranged on the opening of the cavity, the first sealer is fixedly connected with the first end cover, the first sealer is rotatably connected with the rotary tube, the powder container is fixedly connected with the rotary tube, the second end cover is fixedly connected with the rotating pipe or integrally arranged, the second sealer is fixedly connected with the second end cover, one end of the second sealer is connected with the power rod, the other end of the second sealer is connected with the transmission rod, the transmission rod is connected with the dispersion rod, the first driving device drives the second sealer to rotate, the second driving device is used for driving the power rod to rotate so as to drive the transmission rod and the dispersion rod to rotate, and driving the power rod to move along the axial direction so as to drive the transmission rod and the dispersion rod to move.
9. The atomic layer deposition apparatus according to claim 8, wherein the powder container is snap-fitted to the spin tube and the transfer bar is snap-fitted to the dispersion bar.
10. The atomic layer deposition apparatus according to claim 8, wherein the first end cap is insulated from the first sealer and the spin tube is insulated from the second sealer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021068330.1U CN212800533U (en) | 2020-06-11 | 2020-06-11 | Atomic layer deposition device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021068330.1U CN212800533U (en) | 2020-06-11 | 2020-06-11 | Atomic layer deposition device |
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| CN212800533U true CN212800533U (en) | 2021-03-26 |
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| CN202021068330.1U Active CN212800533U (en) | 2020-06-11 | 2020-06-11 | Atomic layer deposition device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116742182A (en) * | 2023-08-15 | 2023-09-12 | 菏泽天盈新能源有限公司 | Automatic recovery unit of old and useless lead accumulator electrolyte |
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2020
- 2020-06-11 CN CN202021068330.1U patent/CN212800533U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116742182A (en) * | 2023-08-15 | 2023-09-12 | 菏泽天盈新能源有限公司 | Automatic recovery unit of old and useless lead accumulator electrolyte |
| CN116742182B (en) * | 2023-08-15 | 2023-11-03 | 菏泽天盈新能源有限公司 | Automatic recovery unit of old and useless lead accumulator electrolyte |
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Effective date of registration: 20230512 Address after: 430070 Room 01, Floor 4, Building 4, Phase III, Wuhan Optics Valley Electronics Industrial Park, No. 28, Gaoxin 4th Road, Fozuling Street, Donghu New Technology Development Zone, Wuhan, Hubei Province Patentee after: ROUDIAN (WUHAN) TECHNOLOGY CO.,LTD. Address before: 518000 3ABC, building 6, Baoneng Science Park, Qinghu village, Qinghu community, Longhua street, Longhua District, Shenzhen City, Guangdong Province Patentee before: SHENZHEN SOFT POWER TECHNOLOGY Co.,Ltd. |