CN212791668U

CN212791668U - Spin coater with automatic drying effect

Info

Publication number: CN212791668U
Application number: CN202021377362.XU
Authority: CN
Inventors: 周焱文
Original assignee: Wuhan Puhao Technology Co ltd
Current assignee: Wuhan Puhao Technology Co ltd
Priority date: 2020-07-14
Filing date: 2020-07-14
Publication date: 2021-03-26
Anticipated expiration: 2030-07-14

Abstract

The utility model discloses an even machine of gluing with automatic stoving effect, clearance mechanism includes driving motor and clearance board, driving motor's output shaft passes through shaft coupling fixedly connected with lift lead screw, one side at clearance board top is run through and is seted up the thread groove, the surface of lift lead screw and the internal surface threaded connection of thread groove, the top fixedly connected with hollow cylinder of clearance board, the utility model relates to an even machine of gluing technical field. This even machine of gluing with automatic stoving effect, through driving motor, clearance board, the lift lead screw, thread groove and hollow cylinder's cooperation is used, utilize driving motor to drive the lift lead screw and rotate, realize that the clearance board can the up-and-down motion, consequently the clearance board can be cleared up the inner wall of tray, solved current even machine of gluing when work, the glue solution can be got rid of and need people to go to clear up the tray inner wall on the inner wall of tray, the problem that leads to extravagant people's time.

Description

Spin coater with automatic drying effect

Technical Field

The utility model relates to an even machine of glue technical field specifically is an even machine of glue with automatic stoving effect.

Background

The spin coater is a device which drips various glue solutions on a substrate rotating at a high speed, and the glue solutions dripped on the substrate are uniformly coated on the substrate by utilizing centrifugal force, and the thickness of a film depends on the rotating speed of the spin coater and the viscosity of the glue solution. The spin coater has one or more glue dripping systems and can coat different kinds of photoresist. The glue dripping mode includes static wafer dripping or rotating glue dripping. As the size of the wafer increases, a multi-drop or a gate-moving drop occurs. The thickness of the glue film is generally 500-1000nm, and the error between the same wafer and the wafer is less than + -5 nm. The glue dripping pump has two types of bellows type and film type, and is provided with a flow meter for constant control. The wafer coated with the photoresist has the functions of scraping edges up and down, and the redundant photoresist on the front side and the back side of the wafer is removed.

Present spin coater is in work, because the glue solution receives the effect of centrifugal force, on the glue solution can be got rid of the inner wall of tray, this must need people to clear up the tray inner wall after using, leads to extravagant people's time, consequently, the utility model provides a spin coater with automatic stoving effect to solve the above-mentioned problem.

SUMMERY OF THE UTILITY MODEL

Not enough to prior art, the utility model provides an even machine of gluing with automatic stoving effect has solved current even machine of gluing and has needed people to remove the clearance tray inner wall on the inner wall that the glue solution can be got rid of the tray in work, leads to the problem of extravagant people's time.

In order to achieve the above purpose, the utility model discloses a following technical scheme realizes: the utility model provides an even machine of glue with automatic stoving effect, includes control box and the tray of setting at the control box top, the equal fixedly connected with support column in four corners department of control box bottom, the front of control box is provided with control panel, the inside of tray is provided with the axis of rotation, the top fixedly connected with operation panel of axis of rotation, the inside of tray is provided with clearance mechanism.

The cleaning mechanism comprises a driving motor and a cleaning plate, an output shaft of the driving motor is connected with a lifting lead screw through a shaft coupling fixedly, one side of the top of the cleaning plate is provided with a threaded groove in a penetrating mode, the outer surface of the lifting lead screw is connected with the inner surface of the threaded groove in a threaded mode, the top of the cleaning plate is fixedly connected with a hollow cylinder, and a first through groove is formed in the top of the cleaning plate and located under the hollow cylinder in a penetrating mode.

Preferably, the driving motor is fixedly connected to one side of the bottom of the inner wall of the tray, the limiting rod is fixedly connected to the other side of the bottom of the inner wall of the tray, a first through hole is formed in the other side of the top of the cleaning plate in a penetrating mode, and the outer surface of the limiting rod is connected with the inner surface of the first through hole in a sliding mode.

Preferably, one side fixedly connected with fixed block of tray inner wall, the bottom of fixed block is run through and is seted up the second through-hole, the internal surface of second through-hole and the surface sliding connection of gag lever post, the fixed block is located the below of clearance board.

Preferably, the bottom of the cleaning plate is fixedly connected with a circular truncated cone, and the top of the circular truncated cone is provided with a second through groove.

Preferably, the bottom of the cleaning plate and the outer side of the first through groove are provided with a placing groove, and the inside of the placing groove is fixedly connected with an electric heating ring.

Preferably, the diameters of the inner parts of the first through groove and the second through groove are larger than the diameter of the outer surface of the operating platform.

Advantageous effects

The utility model provides a spin coater with automatic stoving effect. Compared with the prior art, the method has the following beneficial effects:

(1) the glue homogenizing machine with the automatic drying effect comprises a driving motor and a cleaning plate, wherein an output shaft of the driving motor is fixedly connected with a lifting lead screw through a coupler, a threaded groove is formed in one side of the top of the cleaning plate in a penetrating mode, the outer surface of the lifting lead screw is in threaded connection with the inner surface of the threaded groove, a hollow cylinder is fixedly connected to the top of the cleaning plate, a first through groove is formed in the top of the cleaning plate and is located right below the hollow cylinder in a penetrating mode, the cleaning plate can clean the inner wall of a tray by driving the lifting lead screw to rotate through the driving motor, the problem that glue liquid is thrown onto the inner wall of the tray and needs people to clean the inner wall of the tray when the existing glue homogenizing machine works is solved, resulting in a problem of wasting time of people.

(2) This spin coater with automatic stoving effect, through the bottom fixedly connected with round platform at the cleaning plate, the second leads to the groove has been seted up at the top of round platform, the standing groove has been seted up to the bottom of cleaning plate and the outside that is located first logical groove, the inside fixedly connected with electric heat ring of standing groove, through setting up the electric heat ring, the cooperation that round platform and second lead to the groove is used, move to the top of operation panel when the cleaning plate, produce the heat through the electric heat ring, utilize the characteristics realization that the second led to the groove to reflect the heat, make the staff when carrying out the secondary and film, can needn't take off the sample and dry, can dry on spin coater and handle the direct secondary after and film.

Drawings

Fig. 1 is a perspective view of the present invention;

FIG. 2 is a front view of the internal mechanism of the tray of the present invention;

FIG. 3 is a perspective view of the cleaning plate and the hollow cylinder of the present invention;

FIG. 4 is a bottom view of the external structure of the cleaning plate of the present invention;

fig. 5 is a perspective view of the circular truncated cone of the present invention.

In the figure: 1-a control box, 2-a tray, 3-a support column, 4-a control panel, 5-a rotating shaft, 6-an operation table, 7-a cleaning mechanism, 71-a driving motor, 72-a cleaning plate, 73-a lifting screw rod, 74-a thread groove, 75-a hollow cylinder, 76-a first through groove, 8-a limiting rod, 9-a first through hole, 10-a second through hole, 11-a fixed block, 12-a circular table, 13-a second through groove, 14-a placing groove and 15-an electric heating ring.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-5, the present invention provides a technical solution: a glue homogenizing machine with an automatic drying effect comprises a control box 1 and a tray 2 arranged at the top of the control box 1, wherein one side of the inner wall of the tray 2 is fixedly connected with a fixed block 11, the bottom of the fixed block 11 is provided with a second through hole 10 in a penetrating manner, the inner surface of the second through hole 10 is connected with the outer surface of a limiting rod 8 in a sliding manner, the fixed block 11 is positioned below a cleaning plate 72, supporting columns 3 are fixedly connected at four corners of the bottom of the control box 1, a control panel 4 is arranged on the front surface of the control box 1, a rotating shaft 5 is arranged inside the tray 2, an operation table 6 is fixedly connected to the top of the rotating shaft 5, and a cleaning mechanism 7 is arranged inside the tray 2; the cleaning mechanism 7 comprises a driving motor 71 and a cleaning plate 72, the driving motor 71 is a three-phase asynchronous motor, a placing groove 14 is formed in the bottom of the cleaning plate 72 and located on the outer side of a first through groove 76, an electric heating ring 15 is fixedly connected inside the placing groove 14, the electric heating ring 15 is electrically connected with an external power supply, through the arrangement of the electric heating ring 15, a circular table 12 and a second through groove 13, when the cleaning plate 72 moves to the upper side of the operating platform 6, heat is generated through the electric heating ring 15, the heat is reflected by utilizing the characteristics of the second through groove 13, so that a worker can directly perform secondary film coating on the uniform glue machine without taking down a sample to dry the sample, the direct secondary film coating can be performed on the uniform glue machine after drying treatment, the circular table 12 is fixedly connected to the bottom of the cleaning plate 72, the second through groove 13 is formed in the top of the circular table 12, the driving motor 71 is fixedly connected, the other side of the bottom of the inner wall of the tray 2 is fixedly connected with a limiting rod 8, the other side of the top of the cleaning plate 72 is provided with a first through hole 9 in a penetrating way, the outer surface of the limiting rod 8 is connected with the inner surface of the first through hole 9 in a sliding way, the output shaft of the driving motor 71 is fixedly connected with a lifting screw rod 73 through a coupler, one side of the top of the cleaning plate 72 is provided with a threaded groove 74 in a penetrating way, the outer surface of the lifting screw rod 73 is connected with the inner surface of the threaded groove 74 in a threaded way, the top of the cleaning plate 72 is fixedly connected with a hollow cylinder 75, the hollow cylinder 75 can prevent glue from dripping from the first through groove 76 to the bottom of the inner wall of the tray 2, the top of the cleaning plate 72 is provided with a first through groove 76 in a penetrating way under the hollow cylinder 75, and the driving motor 71 is used for driving the lifting screw rod, realize clearance board 72 can the up-and-down motion, consequently clearance board 72 can clear up the inner wall of tray 2, has solved current spin coater in work, and the glue solution can be got rid of and need people to clear up the tray inner wall on the inner wall of tray, leads to the problem of extravagant people's time, and the inside diameter of first logical groove 76 and second logical groove 13 all is greater than the surface diameter of operation panel 6.

And those not described in detail in this specification are well within the skill of those in the art.

When the glue spreader works, the driving motor 71 and the electric heating ring 15 are connected with an external power supply, the driving motor 71 is started to drive the lifting screw rod 73 to rotate, the lifting screw rod 73 rotates to drive the cleaning plate 72 to move upwards when the lifting screw rod 73 rotates forwards, the cleaning plate 72 is driven to move downwards when the lifting screw rod 73 rotates backwards, the inner wall of the tray 2 can be cleaned through the up-and-down movement of the cleaning plate 72, the problem that glue liquid is thrown onto the inner wall of the tray to be cleaned by people when the existing glue spreader works and the time of people is wasted is solved, the cleaning plate 72 is moved to the position above the operating platform 6 after the glue spreading is finished, the electric heating ring 15 is started to generate heat, and the heat is reflected by utilizing the characteristics of the second through groove 13, when the secondary coating is carried out by the working personnel, the sample does not need to be taken down and dried, and the secondary coating can be directly carried out after the drying treatment is carried out on the spin coater.

It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides an even machine of gluing with automatic stoving effect, includes control box (1) and tray (2) of setting at control box (1) top, the equal fixedly connected with support column (3) of four corners department of control box (1) bottom, the front of control box (1) is provided with control panel (4), the inside of tray (2) is provided with axis of rotation (5), its characterized in that: the top of the rotating shaft (5) is fixedly connected with an operating table (6), and a cleaning mechanism (7) is arranged in the tray (2);

clearance mechanism (7) are including driving motor (71) and clearance board (72), the output shaft of driving motor (71) passes through shaft coupling fixedly connected with lift lead screw (73), one side at clearance board (72) top is run through and is seted up thread groove (74), the surface of lift lead screw (73) and the internal surface threaded connection of thread groove (74), the top fixedly connected with hollow cylinder (75) of clearance board (72), the top of clearance board (72) just is located hollow cylinder (75) and runs through under and has seted up first logical groove (76).

2. The spin coater with automatic drying effect according to claim 1, wherein: driving motor (71) fixed connection is in one side of tray (2) inner wall bottom, opposite side fixedly connected with gag lever post (8) of tray (2) inner wall bottom, the opposite side at cleaning plate (72) top is run through and is seted up first through-hole (9), the surface of gag lever post (8) and the internal surface sliding connection of first through-hole (9).

3. The spin coater with automatic drying effect according to claim 1, wherein: tray (2) one side fixedly connected with fixed block (11) of inner wall, second through-hole (10) have been seted up in the bottom of fixed block (11) run through, the internal surface of second through-hole (10) and the surface sliding connection of gag lever post (8), fixed block (11) are located the below of clearance board (72).

4. The spin coater with automatic drying effect according to claim 1, wherein: the bottom of the cleaning plate (72) is fixedly connected with a circular truncated cone (12), and a second through groove (13) is formed in the top of the circular truncated cone (12).

5. The spin coater with automatic drying effect according to claim 1, wherein: the bottom of the cleaning plate (72) and the outer side of the first through groove (76) are provided with a placing groove (14), and an electric heating ring (15) is fixedly connected inside the placing groove (14).

6. The spin coater with automatic drying effect according to claim 4, wherein: the diameters of the inner parts of the first through groove (76) and the second through groove (13) are larger than the diameter of the outer surface of the operating platform (6).