CN212780508U - Array waveguide grating sensor with micro-flow channel - Google Patents
Array waveguide grating sensor with micro-flow channel Download PDFInfo
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- CN212780508U CN212780508U CN202020930903.0U CN202020930903U CN212780508U CN 212780508 U CN212780508 U CN 212780508U CN 202020930903 U CN202020930903 U CN 202020930903U CN 212780508 U CN212780508 U CN 212780508U
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Abstract
The utility model discloses an array waveguide grating sensor with a microflow channel, which mainly comprises a broadband light source, an input waveguide, an input free transmission area, an array waveguide with a microflow channel, an output free transmission area, an output waveguide and a light detector array; light emitted from a broadband light source sequentially passes through an input waveguide, an input free transmission area, an array waveguide with a microfluidic channel and an output free transmission area, then is focused to each output waveguide by different wavelengths, and is received by a photoelectric detector array to obtain optical power of different wavelengths; when the liquid to be detected is injected into the microchannel, the obtained optical power value can be changed, so that the refractive index of the liquid to be detected is obtained by reverse thrust, and real-time monitoring is realized. The sensor has the advantages of high sensitivity, accurate measurement, small volume and the like, and can be widely applied to the detection field in other biochemical aspects or medical aspects.
Description
Technical Field
The patent of the utility model relates to a sensitive optical sensor design based on array waveguide grating and amorphous silicon are integrated.
Background
Arrayed-Waveguide gratings (AWGs) are one of the key components in Dense Wavelength Division Multiplexing (DWDM) systems, and are commonly used for optical multiplexing in WDM systems. The array waveguide grating has the advantages of high wavelength resolution, large channel number, small insertion loss and crosstalk, low manufacturing cost and the like.
Microfluidics (Microfluidics) refers to science and technology involved in systems using microchannels (with dimensions of tens to hundreds of microns) to process or manipulate tiny fluids, is an emerging interdiscipline related to chemistry, fluid physics, microelectronics, new materials, biology and biomedical engineering, and has the advantages of high detection speed, simple operation, small size and portability.
Compared with a common grating sensor, the microfluidic analysis designed by the scheme of 'a device for monitoring the temperature and the refractive index of running water in real time CN 203857986U' has high efficiency, and a plurality of analysis processes can be completed within minutes; the consumption of samples and reagents is low, and the energy consumption is low; easy integration, portability, simple operation and easy realization of automation.
The advantages of the micro-fluidic chip provide wide prospects for the application of the micro-fluidic chip in numerous fields such as biomedicine, high-throughput drug synthesis screening, preferable breeding of crops, environmental detection and protection, health immunity, judicial identification, detection of biological warfare agents, astronomy biological research and the like.
In addition, the arrayed waveguide grating is easy to couple with optical fibers and is combined with active devices such as a semiconductor laser, an optical amplifier and the like to realize integration.
SUMMERY OF THE UTILITY MODEL
To some not enough among the prior art, the utility model provides an optical sensor's design with high sensitivity.
In order to realize the purpose, the utility model adopts the technical scheme that:
an arrayed waveguide grating sensor with a microfluidic channel is composed of a broadband light source (6), an input waveguide (1), an input free transmission area (2), an arrayed waveguide (3), a microfluidic channel (8), an output free transmission area (4), an output waveguide (5) and a photoelectric detector array (7); light emitted from the broadband light source (6) sequentially passes through the input waveguide, the input free transmission area, the array waveguide with the microfluidic channel, the output free transmission area and the light with different wavelengths to be focused to each output waveguide, and is received by the photoelectric detector array to obtain light power with different wavelengths; when the liquid (9) to be detected is injected into the microfluidic channel (8), the obtained optical power value can be changed, so that the refractive index of the liquid (12) to be detected is obtained through reverse deduction, and real-time monitoring is realized.
The working wave band of the broadband light source (6) and the photoelectric detector array is 1500nm to 1600 nm.
The micro-flow channel (8) of the arrayed waveguide grating sensor with the micro-flow channel comprises a sample introduction channel (10), a main body channel layer (11), a sample discharge channel (12) and a bottom structure (13); the sample introduction channel (10) is connected with the main body channel layer (11), and the main body channel layer (11) is connected with the sample outlet channel (12).
An array waveguide grating sensor with miniflow passageway, the structure of input free transmission district (2) and output free transmission district (4) be the rowland circle structure, length is 3500 microns, array waveguide (3) figure be 205, the array waveguide interval is 8 microns, output waveguide (5) figure be 16.
An array waveguide grating sensor with miniflow passageway, input waveguide (1), input free transmission district (2), array waveguide (3), miniflow passageway (8), output free transmission district (4), output waveguide (5) all be based on silica waveguide structure, the waveguide width is 6 microns with highly being.
The utility model has the characteristics advantage be sensitivity high, measure accurate, small, easily operation, but the wide application is in other biochemistry aspect, or the detection area in the aspect of medical science.
Drawings
Fig. 1 is a schematic diagram of the design of the optical sensor of the present invention.
FIG. 2 is a view of the microfluidic channel incorporated in FIG. 1.
FIG. 3 is a flow chart of a basic fabrication process for a microfluidic channel.
Fig. 4 shows the optical power of the liquid to be detected at three different concentrations detected on 16 channels of the photodetector array.
Detailed Description
As shown in fig. 1, the arrayed waveguide grating sensor with a microfluidic channel is composed of a broadband light source (6), an input waveguide (1), an input free transmission area (2), an arrayed waveguide (3), a microfluidic channel (8), an output free transmission area (4), an output waveguide (5), and a photodetector array (7); light emitted from the broadband light source (6) sequentially passes through the input waveguide, the input free transmission area, the array waveguide with the microfluidic channel, the output free transmission area and the light with different wavelengths to be focused to each output waveguide, and is received by the photoelectric detector array to obtain the light power with different wavelengths.
As shown in fig. 2, for the design sketch map of miniflow channel comprises sampling channel (10), main part channel layer (11), appearance passageway (12), substructure (13), obtains one kind and treats that the liquid passes through sampling channel (10) and gets into in the micro-fluidic, makes in waiting to detect the liquid and evenly gets into main part channel layer (11), treats that liquid is full of the main part passageway after, detects and obtains experimental data after, liquid flows through appearance passageway (12).
As shown in fig. 3, a waveguide layer consisting of a core layer (6 μm by 6 μm) and an under-cladding layer of 12 μm silica was sequentially formed on a silicon substrate by thin film deposition using plasma enhanced chemical vapor deposition; spin-coating photoresist AZ5214, and performing the following steps of 1: 1 to make the drawn pattern into a mask and transferring the pattern to a photoresist layer by an exposure technique. The method comprises the following steps of (1) carrying out contact exposure, then developing an exposed substrate, and cleaning photoresist which does not undergo photopolymerization reaction under the action of alkali liquor; sputtering metal. Plating metal on the photoresist layer by adopting a magnetron sputtering method, and selecting Cr as a mask material in an experiment, wherein the thickness of the Cr is 200 nm. Then removing the photoresist, stripping the metal and the photoresist layer, and leaving the mask pattern on the substrate; and etching is carried out. The experiment used a reactive ion etching technique common to dry etching. Transferring the pattern on the metal mask to the waveguide layer, and etching to obtain a waveguide structure; then removing residual metal; and finally, depositing an upper cladding film. The experiment adopts a plasma enhanced chemical vapor deposition method to deposit silicon dioxide with 12 mu m on the surface of a chip as an upper surface coating layer. The alignment was hollowed out a portion of the upper cladding layer and polymer SU8 was used in the hollowed-out area for microfluidic channels.
As shown in fig. 4, the optical power of the liquid to be detected at three different concentrations is detected on 16 channels of the photodetector array. Firstly, by means of RSOFT software, a silicon dioxide waveguide is arranged, the size structure of the cross section of the waveguide is 6 microns, the communication wavelength is 1.55 microns, the refractive index of a core layer and the refractive index of a cladding layer are arranged, and different parameters of the refractive index (n) of the cladding layer are arranged to obtain different effective refractive indexes (n) of the arrayed waveguidea) And carrying out differential fitting on the data by using MATLAB to finally obtain:
na＝1.0020n+0.0021
and using the diffraction equation:
ns(λ)dasinθi+naΔL+nsdasinθ0＝mλ
wherein, thetaiIs the angle, θ, between the central input waveguide and the normal to the Rowland circle0Is the angle formed by the output waveguide and the normal to the Rowland circle, daIs the spacing between adjacent arrayed waveguides. Calculating the effective refractive index naIn relation to the channel wavelength λ, central channel θ i0, distance of adjacently arranged waveguides 8 μm, diffraction order 50. The optical power of different wavelengths is detected by the photodetector array, and the obtained 16 groups of data are used for interpolation fitting to obtain continuous images, so as to finally obtain optical power graphs of the liquid to be detected at three different concentrations on the 16 channels of the photodetector array as shown in fig. 4.
According to the utility model discloses a method can carry out optimal design to target analysis, drug discovery, drug development and disease diagnosis etc. of biotechnology and drug research, can also provide effective help in the aspect of preferred good rearing, environmental detection and the protection of crops, the utility model discloses a scope of protection is not restricted to above embodiment.
Claims (5)
1. An arrayed waveguide grating sensor having a microfluidic channel, comprising: the device comprises a broadband light source (6), an input waveguide (1), an input free transmission area (2), an array waveguide (3), a microfluidic channel (8), an output free transmission area (4), an output waveguide (5) and a photoelectric detector array (7); light emitted from the broadband light source (6) sequentially passes through the input waveguide, the input free transmission area, the array waveguide with the microfluidic channel and the output free transmission area, is focused to each output waveguide by different wavelengths, and is received by the photodetector array to obtain optical power of different wavelengths.
2. An arrayed waveguide grating sensor having a microfluidic channel as claimed in claim 1, wherein: the broadband light source (6) and the photoelectric detector array (7) have the working wavelength band of 1500nm to 1600 nm.
3. An arrayed waveguide grating sensor having a microfluidic channel as claimed in claim 1, wherein: the microfluidic channel (8) comprises a sample inlet channel (10), a main body channel layer (11), a sample outlet channel (12) and a bottom structure (13); the sample introduction channel (10) is connected with the main body channel layer (11), and the main body channel layer (11) is connected with the sample outlet channel (12).
4. An arrayed waveguide grating sensor having a microfluidic channel as claimed in claim 1, wherein: the input free transmission region (2) and the output free transmission region (4) are in a Rowland circle structure, the length is 3500 micrometers, the number of the array waveguides (3) is 205, the array waveguide interval is 8 micrometers, and the number of the output waveguides (5) is 16.
5. An arrayed waveguide grating sensor having a microfluidic channel as claimed in claim 1, wherein: the input waveguide (1), the input free transmission area (2), the array waveguide (3), the microfluidic channel (8), the output free transmission area (4) and the output waveguide (5) are all based on a silicon dioxide waveguide structure, and the width and the height of the waveguides are all 6 micrometers.
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| CN202020930903.0U CN212780508U (en) | 2020-05-28 | 2020-05-28 | Array waveguide grating sensor with micro-flow channel |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113091941A (en) * | 2021-04-30 | 2021-07-09 | 杭州电子科技大学 | Microfluidic temperature sensing module and temperature characterization method thereof |
| CN113280918A (en) * | 2021-04-28 | 2021-08-20 | 厦门大学 | Dispersion detection chip and manufacturing method thereof |
-
2020
- 2020-05-28 CN CN202020930903.0U patent/CN212780508U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113280918A (en) * | 2021-04-28 | 2021-08-20 | 厦门大学 | Dispersion detection chip and manufacturing method thereof |
| CN113091941A (en) * | 2021-04-30 | 2021-07-09 | 杭州电子科技大学 | Microfluidic temperature sensing module and temperature characterization method thereof |
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