CN211603213U - Optical waveguide multi-micro-channel detection system - Google Patents

Abstract

The utility model provides a many miniflow channels of optical waveguide detecting system, include. Has the advantages that: the structure of an integrated matrix of the optical waveguide and the multiple micro-channels is formed, the analysis performance higher than that of a traditional optical system is realized through the multiple micro-fluid channels and the large-scale matrixing optical waveguide, the chip-level on-chip optical detection and analysis system of the high-flux biological sample is quickly constructed, and the high-flux chip of biological detection under the micro-nano scale is realized.

Description

Optical waveguide multi-micro-channel detection system

Technical Field

The utility model relates to a many miniflow channels of optical waveguide body detecting system especially relates to a many miniflow channels of optical waveguide body biological detection system.

Background

In modern biochemical analysis procedures, high-throughput detection devices have been widely used. Most of these devices use biochips based on microfluidic technology or microwell arrays, loaded in high performance optical systems, to perform analysis of biological samples of different sizes, such as nucleic acids, proteins, viruses, bacteria, cells, etc. The design of these optical systems is usually based on complex geometric optics, which is bulky, costly, requires optical alignment, and is costly to maintain.

In the precise medical age, miniaturized, high-performance, low-cost and mobile integrated analysis systems are of great concern. In particular, the lab on chip concept has advanced a lot of progress in manipulating a biological sample based on a microfluidic technology after decades of development, but a real lab on chip system still lacks an integrated system for chip-level on-chip optical detection and analysis of a high-throughput biological sample on a micro-nano scale.

Meanwhile, materials such as optical silicon nitride films and the like are deposited on the high polymer film, the integrated optical device taking SiN as the waveguide is separated from the silicon or glass substrate, and the polymer has certain ductility, so that the application range of the integrated optical device taking SiN and the like as the waveguide is greatly enlarged.

The lower the deposition temperature is, the better the deposition temperature is, in order to not destroy the molecular structure of the polymer, when the film is deposited on the high molecular polymer, the growth temperature of the SiN film which is the mainstream at present is about 400 ℃, and is still too high.

SUMMERY OF THE UTILITY MODEL

The device aims to solve a series of new requirements of miniaturization, mobility, integration and the like of the modern biochemical analysis instrument which is large in size and high in cost and meets the requirements of the precise medical era. The utility model discloses an integrated circuit volume production technology produces this kind of chip level optical detection and analytic system, and the function with traditional optical system is realized through integrated optics or on-chip optical device, not only can narrow down traditional desk-top even large-scale optical system to the chip size, but also guarantees equal more outstanding analytical performance even, realizes receiving the biological sample's under the yardstick high flux chip level optical detection and analysis integrated system a little, reduces system's cost by a wide margin.

The utility model provides a many miniflow channels of optical waveguide detecting system, include: a microfluidic chip, a spectrum collection device and an analysis device; it is characterized in that the preparation method is characterized in that,

the microfluidic chip comprises a microfluidic set comprising a first quantity of microfluidics;

the microfluid comprises an optical waveguide group and a microchannel, wherein the optical waveguide group comprises a second number of optical waveguides which are used for guiding light into the microchannel along the horizontal direction;

the spectrum collecting device comprises a microscope and a measuring device, the microscope is used for collecting optical signals in the micro flow channel and transmitting the optical signals to the measuring device, the measuring device is used for processing the optical signals, generating signals to be analyzed and transmitting the signals to be analyzed to the analyzing device, and the analyzing device analyzes the signals to be analyzed to form a spectrum;

the microfluidic chip further comprises: the optical waveguide comprises a lower cladding, a waveguide layer, an upper cladding and a flow channel cover plate which are arranged from bottom to top in sequence, wherein the waveguide layer is made of silicon nitride materials and is used for forming the optical waveguide;

the micro-channel penetrates through the upper cladding and the waveguide layer from top to bottom and extends into the lower cladding;

the flow channel cover plate covers the upper opening of the micro flow channel, and the micro flow channel cover plate comprises a liquid injection port for injecting a solution containing the biomolecules to be detected into the micro flow channel;

the lower cladding is made of a high polymer material with the thickness of 15-30 mu m, the upper cladding is made of a high polymer material with the thickness of 15-30 mu m, the micro-channel does not penetrate through the lower cladding, and the width of the micro-channel is 10-100 mu m.

Preferably, the optical waveguide group comprises a second number of optical waveguides parallel to each other to guide light into the micro flow channel, and the width of the optical waveguides is 300-600 nm.

Preferably, the second number is 1, and the whole or most of the waveguide layers corresponding to the microfluid form a sheet of the optical waveguide.

Preferably, the waveguide layer thickness is 150-1000 nm.

Preferably, the optical waveguide is a coupling optical waveguide;

the coupling optical waveguide comprises an incident grating, and light above the upper cladding is guided into the coupling optical waveguide until being guided into the micro channel; the incident grating protrudes from the waveguide layer and extends upwards into the upper cladding layer.

Preferably, the thickness of the waveguide layer is 150-1000nm, and the width of the coupling optical waveguide is 300-600 nm.

Preferably, the optical waveguide device further comprises a light guide structure, wherein the light guide structure comprises a trunk light guide and a light guide group, the light guide group is led out from the trunk light guide, and the light guide group is optically connected with the light guide group.

Preferably, the light guide group is led out from the trunk light guide by adopting a light splitting structure.

Preferably, the trunk light guide includes a first light guide, the light guide group includes a second light guide, and the first light guide and the second light guide are crossed by a cross-layer structure.

Preferably, the crossed cross-layer structure comprises a first light guiding overlap region and a second light guiding overlap region; the first light guide is disconnected at the intersection, and a first acute angle light guide end face and a second acute angle light guide end face are formed at two opposite disconnected ends; the second light guide forms a first acute angle light guide surface and a second acute angle light guide surface which are respectively matched with the first acute angle light guide end surface and the second acute angle light guide end surface at the intersection; the first light guide overlapping area comprises the first acute angle light guide end face and the first acute angle light guide face, and the second light guide overlapping area comprises the second acute angle light guide end face and the second acute angle light guide face.

The utility model provides a many miniflow channels of optical waveguide detecting system has beneficial effect: the structure of an integrated matrix of the optical waveguide and the multiple micro-channels is formed, the analysis performance higher than that of a traditional optical system is realized through the multiple micro-fluid channels and the large-scale matrixing optical waveguide, the chip-level on-chip optical detection and analysis system of the high-flux biological sample is quickly constructed, and the high-flux chip of biological detection under the micro-nano scale is realized.

Drawings

FIG. 1 is a side view of an optical waveguide multi-microchannel detection system according to the present invention;

FIG. 2 is a side view of a single microfluidic device of FIG. 1;

FIG. 3 is a top view of FIG. 2;

FIG. 4 is a top view of the slab optical waveguide of FIG. 2;

FIG. 5 is a schematic view of a light guide structure;

FIG. 6 is an enlarged view of A of FIG. 5;

FIG. 7 is an enlarged view of B of FIG. 5;

FIG. 8 is a cross-sectional view of FIG. 7;

FIG. 9 is a side view of a coupled optical waveguide microfluidic detection system;

fig. 10 is a side view of one of the coupled optical waveguide microfluidics of fig. 9.

Detailed Description

The following detailed description of the embodiments of the present invention will be made with reference to the accompanying drawings.

In the drawings, the dimensional ratios of layers and regions are not actual ratios for the convenience of description. When a layer (or film) is referred to as being "on" another layer or substrate, it can be directly on the other layer or substrate, or intervening layers may also be present. In addition, when a layer is referred to as being "under" another layer, it can be directly under, and one or more intervening layers may also be present. In addition, when a layer is referred to as being between two layers, it can be the only layer between the two layers, or one or more intervening layers may also be present. Like reference numerals refer to like elements throughout. In addition, when two components are referred to as being "connected," they include physical connections, including, but not limited to, electrical connections, contact connections, and wireless signal connections, unless the specification expressly dictates otherwise.

The patent of the utility model provides a horizontal optical waveguide and microfluid channel integration module scheme provides many microfluid channel system matrixing scheme simultaneously, founds the chip level on-chip optical detection and the analysis integrated system of high flux biological sample under the scale of receiving a little fast. The horizontal optical waveguide is an optical waveguide for guiding light into a microchannel in a horizontal direction

An optical waveguide multi-microchannel detection system, as shown in fig. 1, comprises: a microfluidic chip (not shown), a spectrum collection device and an analysis device 5;

the microfluidic chip comprises a microfluidic set (not shown) comprising a first number of microfluidics (not shown), as shown in fig. 1, the first number being m;

the microfluid comprises an optical waveguide set and a micro channel, and one microfluid shown in FIG. 2 comprises a waveguide set 131 and a micro channel 201; the optical waveguide assembly comprises a second number of optical waveguides, as shown in fig. 2 and 3, the second number being n, and the optical waveguide assembly 131 comprises n optical waveguides 1311, 1312 … 131n, to form an n x m matrix detection system.

As shown in fig. 3, the optical waveguides 1311, 1312 … 131n are used to guide light into the microchannel 201 in the horizontal direction;

as shown in fig. 1, the spectrum collection device comprises a microscope 3 and a measurement device 4, the microscope 3 is used for collecting the optical signal in the microchannel 201, 202 … 20m and transmitting the optical signal to the measurement device 4, the measurement device 4 is used for processing the optical signal and generating a signal to be analyzed and transmitting the signal to be analyzed to the analysis device 5, and the analysis device 5 analyzes the signal to be analyzed to form a spectrum;

as shown in fig. 1, the microfluidic chip further comprises: the lower cladding layer 141, the waveguide layer 13, the upper cladding layer 142 and the flow channel cover plate 15 are sequentially arranged from bottom to top, the waveguide layer 13 is made of silicon nitride, and the waveguide layer 13 is used for forming the optical waveguide groups 131 and 132 … 13 m;

as shown in fig. 1, the micro flow channels 201, 202 … 20m extend from top to bottom through the upper cladding layer 142 and the waveguide layer 13 into the lower cladding layer 141;

as shown in fig. 1, the flow channel cover plate 15 covers the upper opening of the micro flow channel 201, 202 … 20m, and the micro flow channel cover plate 15 includes an injection port 151, 152 … 15m for injecting a solution containing a biomolecule to be detected into the micro flow channel 201, 202 … 20 m; it should be noted that, a liquid outlet (not shown) is further included to form a circulation system corresponding to the liquid injection ports 151, 152 … 15m, and the liquid outlet may be an opening on the flow path cover plate 15; this liquid outlet also can be the opening at miniflow channel both ends, the utility model discloses do not do the restriction here.

As shown in fig. 1, the lower cladding 141 is a polymer material with a thickness of 15 to 30 μm, the upper cladding 142 is a polymer material with a thickness of 15 to 30 μm, the microchannels 201 and 202 … 20m do not penetrate through the lower cladding 141, and the microchannels 201 and 202 … 20m have a width of 10 to 100 μm; and forming a structure of an integrated matrix of the optical waveguide and the multiple microchannels, and quickly constructing a chip-level on-chip optical detection and analysis integrated system of the high-flux biological sample under the micro-nano scale.

It should be noted that the first number m of microfluids may form one microfluid group, and a microfluid matrix of a third number of microfluid groups may be further constructed, where the third number is k, so that a detection system with a total number of optical waveguides n × m × k may be formed; and forming a structure of an integrated matrix of the optical waveguide and the multiple microchannels, and quickly constructing a chip-level on-chip optical detection and analysis integrated system of the high-flux biological sample under the micro-nano scale.

It should be noted that the optical waveguide group includes a second number n of the optical waveguides parallel to each other, as shown in fig. 1 and fig. 3, the optical waveguide group 131 includes a second number n of the optical waveguides 1311, 1312 … 131n parallel to each other to introduce light into the micro flow channel 201 along the horizontal direction, and the width of the optical waveguides is 300-600 nm.

Wherein the light source directions are different according to the waveguide set 131, such as: fig. 2 illustrates the introduction of the light source from an optical fiber (not shown) at the left end of the optical waveguide group 131, and fig. 3 illustrates the introduction of the light source from above the optical waveguide group 131, respectively.

Fig. 1 to 5 are described below, which are optical waveguide multi-microchannel detection systems with light sources introduced from light guide sets 601 and 602 … 60m at the left end of the optical waveguide set 131:

as shown in fig. 2, the optical waveguide group 131, 132 … 13m may include only one optical waveguide.

As shown in fig. 3, the optical waveguide set 131 includes a plurality of optical waveguides 1311, 1312 … 131n, e.g., n, parallel to each other, to guide light into the micro flow channel 201 in a horizontal direction, and in actual detection, for biomolecules with different labels in the micro flow channel 201, the optical waveguides 1311, 1312 … 131n can guide light with wavelengths λ 1, λ 2 … λ n into the micro flow channel 201 in the horizontal direction, and the labeled biomolecules 21 with different labels are excited by the light with different wavelengths to simultaneously identify the biomolecules, while the non-excited biomolecules 20 in the excitation light field guided by the optical waveguides 1311, 1312 … 131n will not be identified, and the non-excited biomolecules 20 are normal biomolecules without labels or biomolecules with labels but outside the light field and are not excited; as shown in FIG. 3, the widths of the optical waveguides 1311, 1312 … 131n are 300-600 nm.

As shown in fig. 4, the whole or most of the waveguide layer 13 corresponding to one microfluid forms a sheet-like optical waveguide 1311, and the excitation optical field introduced by the sheet-like optical waveguide 1311 can reduce the background light signal in the detection-labeled biomolecule, thereby greatly improving the detection rate of small biomolecules.

As shown in FIGS. 1-2, the waveguide layer 13 has a thickness of 150-1000nm, i.e., the optical waveguides 1311, 1312 … 131n in FIGS. 2 and 3-4 have a thickness of 150-1000 nm.

The light guide group 601 is optically connected to the optical waveguide group 131, and further optically connected to the optical waveguides 1311, 1312 … 131n in the optical waveguide group 131.

As for the multi-channel monitoring system matrixing integrated optical waveguide, for the scheme that the light guide group is required to guide light into the light source shown in fig. 2, the light guide group needs to be specially designed, as shown in fig. 5 to 8, for the detection system that the optical waveguide n x m matrixing, the light guide structure 6 shown in fig. 5 is provided, which comprises a trunk light guide 60 and light guide groups 601, 602 … 60m led out from each first light guide 61 in the trunk light guide 60, so as to respectively transmit light to micro channels 201, 202 … 20 m; the trunk light guide 60 includes n first light guides 61, and the optical wavelengths transmitted by the first light guides are λ 1, λ 2, and λ 3 … λ n, respectively, so as to be transmitted to the optical waveguides 1311, 1312 … 131n in the optical waveguide group 131, respectively. The leading-out nodes of the light guide groups 601 and 602 … 60m leading out from the trunk light guide 60 and the intersection nodes of the second light guide 62 and the first light guide 61 in the trunk light guide 60 need to be specially designed; the light guide groups 601 and 602 … 60m are led out from the trunk light guide 60 by using a light splitting structure a, and as shown in fig. 6, the light splitting structure a is used for leading out the second optical waveguides 62 in the light guide groups 601 and 602 … 60m from the first light guide 61 in the trunk light guide 60; as shown in fig. 7 to 8, the light guide structure is a cross-layer structure B with cross nodes, the trunk light guide 60 includes a first light guide 61, the light guide group 601 includes a second light guide 62, and the first light guide 61 and the second light guide 62 are crossed by the cross-layer structure B; the cross-layer structure comprises a first light directing overlap region 610 and a second light directing overlap region 620; the first light guide 61 is broken at the intersection, and a first acute angle light guide end surface 611 and a second acute angle light guide end surface 612 are formed at two opposite ends of the broken first light guide; the second light guide 62 forms a first acute angle light guide surface 621 and a second acute angle light guide surface 622 matched with the acute angle light guide end surface at the intersection; the first light guide overlapping region 610 includes the first acute angle light guide end surface 611 and a first acute angle light guide surface 621 matched with the acute angle light guide end surface, wherein a distance between surfaces of the first acute angle light guide end surface 611 and the first acute angle light guide surface 621 is less than 1 μm; the second light guiding overlapping region 620 comprises the second acute angle light guiding end surface 612 and a second acute angle light guiding surface 622 matched with the second acute angle light guiding end surface 612, wherein the distance between the opposite surfaces of the second acute angle light guiding end surface 612 and the second acute angle light guiding surface 622 is less than 1 μm; that is, the first light guide 61 is broken at the intersection, the first acute angle light guide end surface 611 and the second acute angle light guide end surface 612 are respectively formed at the two opposite ends of the broken first light guide 61, the first acute angle light guide surface 621 and the second acute angle light guide surface 622 which are matched with the first acute angle light guide end surface 611 and the second acute angle light guide end surface 612 and have a distance less than 1 μm are formed at the intersection of the second light guide 62 led out from the trunk light guide 60, so as to form a first light guide overlapping region 610 and a second light guide overlapping region 620, the light transmitted from the broken end of the first light guide 61 enters the second light guide 62 through the first light guide overlapping region 610 and then enters the other end of the first light guide 61 through the second light guide overlapping region 620, that is, the light transmitted from the broken end of the first light guide 61 enters the first acute angle light guide surface 621 through the first acute angle light guide end surface 611, the light guide surface is consistent with the conduction direction of the light which is not reflected, and then enters the second acute angle light guide end surface 612 through, thereby completing the cross-layer conduction of light.

In the detection system in which the total number of optical waveguides is n × m × k matrix, the light source may be continuously transmitted to the next and kth micro flow channel groups by using the light splitting structure in each optical waveguide group 601, 602 … 60 m.

Fig. 3, 9 and 10 are described below, that is, the optical waveguide multi-microchannel detection system introducing the light source from above the optical waveguide group 131 does not need to adopt a light guide structure:

as shown in fig. 3, 9 and 10, an incident grating (not shown) of silicon nitride material is further included to form a coupling optical waveguide with the optical waveguides 1311, 1312 … 131n, and the light above the upper cladding 142 is guided into the optical waveguide until being guided into the microchannel 201 in the horizontal direction, and the upper cladding 142 and the flow path cover 15 are light-transmissive layers; the entrance grating protrudes from the waveguide layer 13 and extends up into the upper cladding layer 142.

As shown in fig. 3, 9 and 10, a microfluidic includes an optical waveguide group 131 including a plurality of, e.g., n, coupled optical waveguides parallel to each other to guide light into the microchannel 201 in a horizontal direction, in an actual detection, for biomolecules with different labels in the microchannel 201, the n coupled optical waveguides can guide light with wavelengths λ 1 and λ 2 … λ n into the microchannel 201 in the horizontal direction, and the excitation of labeled biomolecules 21 with different wavelengths can simultaneously identify the biomolecules without the non-excited biomolecules 20 in the excitation light field guided by the n coupled optical waveguides being unidentified, the non-excited biomolecules 20 being normal biomolecules without labeling or biomolecules without being excited by labeling but being outside the light field; wherein, as shown in FIG. 3, the width of the n coupling optical waveguides is 300-600nm, and wherein, as shown in FIG. 9, the thickness of the waveguide layer 13 is 150-1000 nm.

In the present invention, the substrate 11 is a silicon substrate; preferably, the substrate 11 is a 4, 8, 12 inch silicon wafer.

In the present invention, the polymer material is SU-8 resin, polyimide, polydimethylsilane, polyethylene or benzocyclobutene.

In the present invention, the flow channel cover plate 15 is made of PDMS or quartz, or may be made of the above-mentioned polymer material.

In the present invention, the silicon nitride waveguide layer 13 is a silicon nitride thin film layer with a thickness of 150nm-1000nm formed at a low temperature of 25-150 ℃ to prevent softening, hardening or melting of the lower cladding 141 of the polymer material, so as to integrate the silicon nitride optical waveguide on the flexible substrate such as the polymer material, which can be used for being attached to other detection devices or materials, thereby greatly increasing the application range; the refractive index of the silicon nitride film is 1.75-2.2. The silicon nitride film may be a film having a uniform refractive index, or may be a film having a non-uniform refractive index, such as a silicon nitride film having a layered refractive index structure.

Circulating tumor cells are a general term for various tumor cells that leave the tumor tissue and enter the blood circulation system of the human body. By detecting trace circulating tumor cells in peripheral blood and monitoring the trend of the change of the types and the quantity of the circulating tumor cells, the tumor dynamics can be monitored in real time, the treatment effect can be evaluated, and the real-time individual treatment can be realized. Referring to fig. 1, an embodiment of detecting circulating tumor cells by using the above optical waveguide multi-microfluidic detection system in which the total number of optical waveguides is n × m × k matrix is described as follows:

the first step is as follows: sorting and enriching various tumor cells possibly existing in the collected m x k patient blood samples by adopting an immunomagnetic bead technology (such as immunomagnetic bead positive sorting) or a microfluidic technology to obtain a solution containing circulating tumor cells, or directly adopting the patient blood samples;

the second step is that: adding an antibody group which can be specifically combined with surface antigens of various tumor cells or an aptamer group which can be combined with the surfaces of various tumor cells into the solution or the blood sample containing the circulating tumor cells, wherein the antibody group and the aptamer group modify marks, and the antibody combined with specific tumor cells or the modified marks on the aptamer have uniqueness, so as to obtain the solution or the blood sample containing the marked circulating tumor cells; the labels are n, and can be target probes of fluorescent molecules;

the third step: as shown in fig. 1, the m × k solutions or blood samples obtained in the second step are respectively added to the micro flow channels 201 and 202 … 20m (not fully listed, total number of injection ports is m × k) from the injection ports 151 and 152 … 15m (not fully listed, total number of micro flow channels is m × k), and the light guide sets 601 and 602 … 60m (not fully listed, total number of light guide sets is m × k) introduce n light of different wavelengths corresponding to the n markers into n light guides (not fully listed, total number of light guides is m × k) in the light guide sets 131 and 132 … 13m (not fully listed, total number of light guides is m × k) and then into the micro flow channels 201 and 202 … 20m in the horizontal direction (as shown in fig. 1 and 3, n light guides 1 and 1312 … 131n in the light guide set 131 are not fully listed, total number of light guides is n × k) and the tumor cells containing different fluorescent molecular markers are excited by light of specific wavelengths 13121, the microscope 3 is used for collecting fluorescence (optical signals) with specific wavelength and transmitting the fluorescence (optical signals) to the measuring device 4, the measuring device 4 processes and collects the fluorescence (optical signals) with specific wavelength and generates signals to be analyzed and transmits the signals to be analyzed to the analyzing device 5, the analyzing device 5 analyzes the spectrum of the fluorescence with specific wavelength formed by the signals to be analyzed, the types of circulating tumor cells in a solution or a blood sample can be judged by reading the spectrum, various tumor circulating cells of different patients can be detected respectively at one time, and a high-throughput chip for detecting various tumor cells under the micro-nano scale is realized, so that the tumor dynamics is monitored in real time, the treatment effect is evaluated, and the real-time individual treatment is realized.

The utility model provides a many miniflow channels of optical waveguide detecting system has beneficial effect: the structure of an integrated matrix of the optical waveguide and the multiple micro-channels is formed, the analysis performance higher than that of a traditional optical system is realized through the multiple micro-fluid channels and the large-scale matrixing optical waveguide, the chip-level on-chip optical detection and analysis system of the high-flux biological sample is quickly constructed, and the high-flux chip of biological detection under the micro-nano scale is realized.

The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of improvements and decorations can be made without departing from the principle of the present invention, and these improvements and decorations should also be regarded as the protection scope of the present invention.

Claims (10)

1. An optical waveguide multi-microchannel detection system comprising: a microfluidic chip, a spectrum collection device and an analysis device; it is characterized in that the preparation method is characterized in that,

the microfluidic chip comprises a microfluidic set comprising a first quantity of microfluidics;

the microfluid comprises an optical waveguide group and a microchannel, wherein the optical waveguide group comprises a second number of optical waveguides which are used for guiding light into the microchannel along the horizontal direction;

the spectrum collecting device comprises a microscope and a measuring device, the microscope is used for collecting optical signals in the micro flow channel and transmitting the optical signals to the measuring device, the measuring device is used for processing the optical signals, generating signals to be analyzed and transmitting the signals to be analyzed to the analyzing device, and the analyzing device analyzes the signals to be analyzed to form a spectrum;

the microfluidic chip further comprises: the optical waveguide comprises a lower cladding, a waveguide layer, an upper cladding and a flow channel cover plate which are arranged from bottom to top in sequence, wherein the waveguide layer is made of silicon nitride materials and is used for forming the optical waveguide;

the micro-channel penetrates through the upper cladding and the waveguide layer from top to bottom and extends into the lower cladding;

the flow channel cover plate covers the upper opening of the micro flow channel, and the micro flow channel cover plate comprises a liquid injection port for injecting a solution containing the biomolecules to be detected into the micro flow channel;

the lower cladding is made of a high polymer material with the thickness of 15-30 mu m, the upper cladding is made of a high polymer material with the thickness of 15-30 mu m, the micro-channel does not penetrate through the lower cladding, and the width of the micro-channel is 10-100 mu m.

2. The system as claimed in claim 1, wherein the optical waveguide assembly comprises a second number of optical waveguides parallel to each other for guiding light into the microchannel, the optical waveguides having a width of 300-600 nm.

3. The system of claim 1, wherein the second number is 1, and wherein the entire or a majority of the waveguide layers of the microfluidic array form a slab of the optical waveguide.

4. The system of claim 2 or 3, wherein the waveguide layer has a thickness of 150 and 1000 nm.

5. The system of claim 1, wherein the optical waveguide is a coupling optical waveguide;

the coupling optical waveguide comprises an incident grating, and light above the upper cladding is guided into the coupling optical waveguide until being guided into the micro channel; the incident grating protrudes from the waveguide layer and extends upwards into the upper cladding layer.

6. The system as claimed in claim 5, wherein the waveguide layer has a thickness of 150-1000nm and the coupling optical waveguide has a width of 300-600 nm.

7. The system of claim 1, further comprising a light guiding structure comprising a trunk light guide and a light guiding group, the light guiding group leading out from the trunk light guide, the light guiding group optically connected to the light guiding group.

8. The system of claim 7, wherein the light guide component is optically coupled to the trunk light guide.

9. The system of claim 7, wherein the trunk light guide comprises a first light guide, the set of light guides comprises a second light guide, and the first light guide intersects the second light guide through an intersecting cross-layer structure.

10. The system of claim 9, wherein the cross-layer structure comprises a first light directing overlap region and a second light directing overlap region; the first light guide is disconnected at the intersection, and a first acute angle light guide end face and a second acute angle light guide end face are formed at two opposite disconnected ends; the second light guide forms a first acute angle light guide surface and a second acute angle light guide surface which are respectively matched with the first acute angle light guide end surface and the second acute angle light guide end surface at the intersection; the first light guide overlapping area comprises the first acute angle light guide end face and the first acute angle light guide face, and the second light guide overlapping area comprises the second acute angle light guide end face and the second acute angle light guide face.

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