CN212741580U - MO source bottle serial source supply device for MOCVD - Google Patents
MO source bottle serial source supply device for MOCVD Download PDFInfo
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- CN212741580U CN212741580U CN202020224657.7U CN202020224657U CN212741580U CN 212741580 U CN212741580 U CN 212741580U CN 202020224657 U CN202020224657 U CN 202020224657U CN 212741580 U CN212741580 U CN 212741580U
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Abstract
The utility model discloses a MO source bottle serial supply device for MOCVD, with conventional MO source jar valves unit panel phase-match, be provided with carrier gas inlet end female head and carrier gas outlet end female head on the panel, the device includes two sets of pipeline components that communicate each other, all include a diaphragm valve in every group pipeline component, two connect female head and a connection public head, wherein the public head of connection in a set of pipeline component is connected with carrier gas inlet end female head, the public head of connection in another set of pipeline component is connected with carrier gas outlet end female head, two in every group pipeline component connect female head all with an MO source bottle tube coupling. The utility model discloses can direct mount on current equipment, need not to do any change to former MO source jar valves unit panel, change and the installation very convenient its quick very, provide facility, ensured holistic gallium nitride epitaxial wafer preparation efficiency for the installation and debugging of equipment on furthest.
Description
Technical Field
The utility model relates to a supply source system particularly, relates to a MO source bottle serial supply source device that is used for MOCVD that can use in gallium nitride epitaxial wafer preparation process, belongs to vacuum apparatus technical field.
Background
Gallium nitride (GaN), a compound of nitrogen and Gallium, a semiconductor with direct bandgap, belongs to the third generation of semiconductor materials, and has a wide prospect in the application fields of photoelectrons, high-temperature high-power devices and high-temperature microwave devices. In recent years, the research and application of gallium nitride materials are the hot spot and the leading edge of the current global semiconductor research field.
Currently, a Metal Organic Chemical Vapor Deposition (MOCVD) method is mainly adopted in the industry for preparing the gallium nitride material, and when the gallium nitride material is prepared by the method, the used main production raw materials are metal organic sources (MO sources), and the MO sources are carried into a reaction chamber by carrier gases such as high-purity nitrogen or high-purity hydrogen and the like to participate in chemical reaction. Therefore, the concentration of the MO source in the carrier gas directly affects the process control progress of the chemical reaction in the reaction chamber, and further affects the crystal quality of the gallium nitride crystal.
Since the saturation vapor pressure of the MO source in the carrier gas is constant, the concentration of the MO source in the carrier gas is also constant after the MO source reaches the saturation vapor pressure under the conditions of a constant flow rate, temperature, pressure, and the like. Under ideal conditions, the amount of the MO source flowing into the reaction chamber in unit time can be controlled by controlling the flow, the temperature and the pressure of the MO source pipeline system. Based on the method, the control of important parameters in the MOCVD crystal process growth can be realized.
The MO source is divided into a liquid source and a solid source, generally speaking, the liquid source is easy to evaporate at normal temperature, and in the actual use process, the concentration error between the concentration of the MO source in a carrier gas and the saturated vapor pressure in an ideal state is extremely low, so that the MO source has little influence on the production process. However, some metal organic compounds, such as trimethylindium (TMIn) and magnesium diclomentate (CP2Mg), which are solid at room temperature, are used, and the difficulty of sublimating these solid substances is much greater than that of the liquid substances, so that the concentration of the metal organic compounds in the carrier gas varies greatly.
A solution commonly used in the art to address the above problem is to increase the contact time of the carrier gas with the solid MO source, such as a two-bottle series of MO sources. However, in the narrow space design of the existing MOCVD system, the serial power supply scheme of the solid MO source bottle is mostly limited to the type-selected installation of the original factory. The reason is that the pipeline arrangement of the current double-bottle serial MO source tank valve group unit panel and the conventional MO source tank valve group unit panel is greatly different, the two are incompatible and cannot be adjusted in the later period, so that the later period once the process needs to be changed and upgraded, higher cost can be spent, a plurality of parts in the whole system need to be replaced, the system is shut down, and the preparation efficiency is influenced.
In summary, how to provide a serial MO source bottle supply device that occupies a small space, can be directly connected to a panel of a conventional MO source tank valve set unit, and does not require any modification to the panel of the conventional MO source tank valve set unit based on the prior art is a problem to be solved by those skilled in the art.
Disclosure of Invention
In view of the above-mentioned defects existing in the prior art, the utility model provides a MO source bottle serial source device for MOCVD that can use in gallium nitride epitaxial wafer preparation process, specifically as follows.
The utility model provides a MO source bottle serial confession source device for MOCVD, with MO source jar valves unit panel phase-match, be provided with carrier gas inlet end female head and carrier gas outlet end female head on the MO source jar valves unit panel, the device includes two sets of pipeline components that communicate each other, every group all include a diaphragm valve, two connect female head and a connection public head among the pipeline components, wherein a set of connect public head among the pipeline components with carrier gas inlet end female head is connected, another group connect public head among the pipeline components with carrier gas outlet end female head is connected, every group two among the pipeline components connect female head all with an MO source bottle tube coupling.
Preferably, the pipeline assembly comprises a first pipeline assembly and a second pipeline assembly, wherein the first pipeline assembly and the second pipeline assembly are symmetrically arranged and communicated through a connecting pipeline.
Preferably, the first pipeline assembly includes a first diaphragm valve, a first female connection head, a second female connection head, and a first male connection head, a port on one side of the first diaphragm valve is communicated with the second female connection head through a connection pipeline, a port on the other side of the first diaphragm valve is respectively communicated with the first male connection head and the first female connection head through a connection pipeline, and the first diaphragm valve, the first male connection head, and the first female connection head are connected by means of a three-way joint.
Preferably, first pipeline subassembly passes through MO source jar socle and first MO source bottle tube coupling, be provided with on the MO source jar socle and be used for control the air inlet valve and the air outlet valve of first MO source bottle switching, in the first pipeline subassembly first female head of connecting with MO source air outlet on the MO source jar socle holds public head and is connected, in the first pipeline subassembly female head of connecting with MO source air inlet on the MO source jar socle holds public head and is connected.
Preferably, the second pipeline assembly comprises a second diaphragm valve, a third connecting female head, a fourth connecting female head and a second connecting male head, a port on one side of the second diaphragm valve is communicated with the third connecting female head through a connecting pipeline, a port on the other side of the first diaphragm valve is respectively communicated with the second connecting male head and the fourth connecting female head through connecting pipelines, and the second diaphragm valve, the second connecting male head and the fourth connecting female head are connected through a three-way joint.
Preferably, the second pipeline subassembly passes through MO source jar socle and second MO source bottle tube coupling, be provided with on the MO source jar socle and be used for control the air inlet valve and the air outlet valve of second MO source bottle switching, in the second pipeline subassembly female head is connected to the fourth with MO source on the MO source jar socle is given vent to anger and is held public head and be connected, in the first pipeline subassembly female head is connected to the third with MO source on the MO source jar socle is held public head and is connected.
Preferably, a side port of the first diaphragm valve is connected with a side port of the second diaphragm valve through a connecting pipeline.
Preferably, the diaphragm valves in each set of pipeline assemblies are 316L VIM-VAR stainless steel diaphragm valves.
Preferably, the female connecting head, the male connecting head and the connecting pipeline in each group of pipeline assemblies are stainless steel connecting pieces.
Compared with the prior art, the utility model has the advantages as follows:
the utility model provides a MO source bottle serial source supply device for MOCVD, but direct mount need not to do any change to former MO source tank valves unit panel on the conventional MO source tank valves unit panel among the existing equipment, it is very convenient its quick with the installation, not only practiced thrift the processing enterprise and carried out the hardware cost of technology change upgrading in-process, moreover for the installation and debugging of equipment provide convenience, ensured holistic gallium nitride epitaxial wafer preparation efficiency on furthest.
The utility model discloses a what the system chooseed for use is easy, common industrial part, and each manufacturing enterprise can obtain through combination, repacking to current spare part according to the actual production current situation the technical scheme of the utility model for the holistic manufacturing cost of system and subsequent maintenance cost reduce, have very high use and spreading value. And simultaneously, the utility model discloses a 316L VIM-VAR stainless steel is chooseed for use to the device material entire body, and is applicable in the ultra-high pure gas environment, avoids causing the pollution to the pipeline environment.
Furthermore, the utility model discloses a device structure is exquisite, and whole height is steerable within 8cm, thickness control within 10cm, length can be according to the MOCVD of the different models that match adjustment by oneself, and the holistic suitability of device is strong. The user can also use this scheme to extend as the basis, is applied to other relevant technical scheme who supplies the source device with similar device in to further extend the utility model discloses an application prospect.
The following detailed description is made of specific embodiments of the present invention with reference to the accompanying drawings, so as to make the technical solution of the present invention easier to understand and master.
Drawings
FIG. 1 is a schematic structural diagram of the device of the present invention;
FIG. 2 is a schematic view of the device of the present invention in an assembled state;
FIG. 3 is a schematic view of the flow direction of the process gas stream when using the apparatus of the present invention;
fig. 4 and 5 are schematic diagrams illustrating the serial MO source replacement process when using the device of the present invention.
Wherein: 1. a carrier gas inlet end female head; 2. a carrier gas outlet end female head; 3. a first diaphragm valve; 4. a first connecting female; 5. a second connecting female head; 6. a first connecting male; 7. a second diaphragm valve; 8. a third connecting female head; 9. a fourth connecting female head; 10. a second connecting male head; 11. a first MO source bottle; 12. a second MO source bottle; 13. an MO source air inlet end male head; 14. MO source air outlet end male head.
Detailed Description
The utility model discloses a can be used in gallium nitride epitaxial wafer preparation process for MO source bottle serial source supply device of MOCVD specifically as follows.
As shown in fig. 1-2, an MO source bottle serial source supply device for MOCVD is matched with an MO source tank valve group unit panel, and a carrier gas inlet end female head 1 and a carrier gas outlet end female head 2 are arranged on the MO source tank valve group unit panel.
The utility model discloses a device includes two sets of pipeline subassemblies that communicate each other, every group all include a diaphragm valve, two connection female heads and a connection public head in the pipeline subassembly, wherein a set of the public head of connection in the pipeline subassembly with carrier gas inlet end female head 1 is connected, another group the public head of connection in the pipeline subassembly with carrier gas is given vent to anger and is held female head 2 and be connected, every group two connection female heads in the pipeline subassembly all with a MO source bottle tube coupling.
Specifically, the device comprises a first pipeline assembly and a second pipeline assembly, wherein the first pipeline assembly and the second pipeline assembly are symmetrically arranged and communicated through a connecting pipeline.
The first pipeline assembly comprises a first diaphragm valve 3, a first female connecting head 4, a second female connecting head 5 and a first male connecting head 6, a port on one side of the first diaphragm valve 3 is communicated with the second female connecting head 5 through a connecting pipeline, a port on the other side of the first diaphragm valve 3 is respectively communicated with the first male connecting head 6 and the first female connecting head 4 through connecting pipelines, and the first diaphragm valve 3, the first male connecting head 6 and the first female connecting head 4 are connected through a three-way joint.
First pipeline subassembly passes through MO source jar socle and 11 tube coupling of first MO source bottle, be provided with on the MO source jar socle and be used for control the air inlet valve and the air outlet valve of 11 switching of first MO source bottle, in the first pipeline subassembly first female head of connecting 4 with the public head 14 of MO source air outlet end on the MO source jar socle is connected, in the first pipeline subassembly female head of connecting 5 with the public head 13 of MO source air inlet end on the MO source jar socle is connected.
The second pipeline assembly comprises a second diaphragm valve 7, a third connecting female head 8, a fourth connecting female head 9 and a second connecting male head 10, a port on one side of the second diaphragm valve 7 is communicated with the third connecting female head 8 through a connecting pipeline, a port on the other side of the first diaphragm valve 3 is respectively communicated with the second connecting male head 10 and the fourth connecting female head 9 through connecting pipelines, and the second diaphragm valve 7, the second connecting male head 10 and the fourth connecting female head 9 are connected through a three-way joint.
Second pipeline subassembly passes through MO source jar socle and 12 tube coupling of second MO source bottle, be provided with on the MO source jar socle and be used for control the air inlet valve and the air outlet valve of 12 switching of second MO source bottle, in the second pipeline subassembly female head 9 is connected to the fourth with MO source on the MO source jar socle is given vent to anger and is held public head 14 and be connected, in the first pipeline subassembly female head 8 is connected to the third with MO source on the MO source jar socle is held public head 13 and is connected.
Further, a port on one side of the first diaphragm valve 3 is connected to a port on one side of the second diaphragm valve 7 via a connecting line.
Considering the ultra-pure gas environment in the use state, in order to avoid the influence and pollution of the device material on the pipeline environment, in this embodiment, the diaphragm valves in each group of pipeline assemblies are 316L VIM-VAR stainless steel diaphragm valves; the female connecting head, the male connecting head and the connecting pipeline in each group of pipeline components are all seamless ultra-pure 316L and 1/4in stainless steel connecting pieces which are electro-polished to 0.25 mu m/10 mu in.Ra.
When the device of the utility model is used, the air flow trend in the process production process is as follows:
as shown in fig. 3, when the MOCVD equipment is in normal process production, the first diaphragm valve 3 and the second diaphragm valve 7 are closed, the carrier gas enters the gas inlet end of the first MO source bottle through the carrier gas inlet end of the panel of the conventional MO source tank valve set unit, carries the MO source in the first MO source bottle 11, flows out from the gas outlet end of the first MO source bottle, flows into the gas inlet end of the second MO source bottle through the pipeline, enters the second MO source bottle 12, flows out from the gas outlet end of the second MO source bottle, and finally enters the carrier gas outlet end of the panel of the conventional MO source tank valve set unit. By this process, the concentration of the MO source carried by the carrier gas can be increased.
Use following brief description the utility model discloses a during the device, the change flow in serial MO source:
because the MO source is active in chemical property, manual diaphragm valves on all MO source bottles need to be closed for replacement, and high-purity nitrogen PN is carried out on all MO source tank pillars of the MO source for a large number of times and dozens of times2After purging, the MO source bottle can be disassembled, and high-purity nitrogen enters all the pillars of the MO source tank and is completely pumped out to form a purging cycle.
As shown in fig. 4, the PN2 enters the tandem device and MO source tank legs,
PN2the carrier gas inlet end and the carrier gas outlet end of the panel of the conventional MO source tank valve group unit are simultaneously injected into the MO source bottle serial source supply device and the MO source tank foot post, and at the moment, the first diaphragm valve 3 and the second diaphragm valve 7 are both in an open state, so that PN can be enabled2All pipelines injected above the MO source bottle valve and on the panel of the conventional MO source tank valve group unit complete PN2The gas injection action.
As shown in fig. 5, the PN2 discharge device and MO source tank leg process is,
at the beginning of the exhaust process, the MOCVD machine willAutomatically starting a vacuum system to inject PN2The evacuation action is carried out, at the moment, the vacuum system can evacuate all the gas in the serial devices and the MO source tank socle without any operation on the system, and the exhaust action is finished;
thus, PN is circulated for dozens of times according to the source type and the actual state of the field machine2After the purging action, the new MO source bottle can be replaced; and after the source bottle replacing action is finished according to the normal MOCVD source bottle replacing operation, closing the first diaphragm valve 3 and the second diaphragm valve 7, and restoring the machine to the production state.
The utility model provides a MO source bottle serial source supply device for MOCVD, but direct mount need not to do any change to former MO source tank valves unit panel on the conventional MO source tank valves unit panel among the existing equipment, it is very convenient its quick with the installation, not only practiced thrift the processing enterprise and carried out the hardware cost of technology change upgrading in-process, moreover for the installation and debugging of equipment provide convenience, ensured holistic gallium nitride epitaxial wafer preparation efficiency on furthest.
The utility model discloses a what the system chooseed for use is easy, common industrial part, and each manufacturing enterprise can obtain through combination, repacking to current spare part according to the actual production current situation the technical scheme of the utility model for the holistic manufacturing cost of system and subsequent maintenance cost reduce, have very high use and spreading value. And simultaneously, the utility model discloses a 316L VIM-VAR stainless steel is chooseed for use to the device material entire body, and is applicable in the ultra-high pure gas environment, avoids causing the pollution to the pipeline environment.
Furthermore, the utility model discloses a device structure is exquisite, and whole height is steerable within 8cm, thickness control within 10cm, length can be according to the MOCVD of the different models that match adjustment by oneself, and the holistic suitability of device is strong. The user can also use this scheme to extend as the basis, is applied to other relevant technical scheme who supplies the source device with similar device in to further extend the utility model discloses an application prospect.
It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein, and any reference signs in the claims are not intended to be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (7)
1. The utility model provides a MO source bottle serial source supply device for MOCVD, with MO source jar valves unit panel phase-match, be provided with carrier gas female head of inlet end (1) and carrier gas outlet end female head (2) on the MO source jar valves unit panel, its characterized in that: the device includes two sets of pipeline subassemblies that communicate each other, every group all include a diaphragm valve, two connect female head and a connection public head in the pipeline subassembly, wherein a set of connect public head in the pipeline subassembly with carrier gas inlet end female head (1) is connected, another group connect public head in the pipeline subassembly with carrier gas outlet end female head (2) is connected, every group two connect female head in the pipeline subassembly all with MO source bottle tube coupling.
2. A MO source bottle serial supply apparatus for MOCVD according to claim 1, characterized in that: the pipeline assembly comprises a first pipeline assembly and a second pipeline assembly, wherein the first pipeline assembly and the second pipeline assembly are symmetrically arranged and communicated through a connecting pipeline.
3. A MO source bottle serial supply apparatus for MOCVD according to claim 2, characterized in that: the first pipeline assembly comprises a first diaphragm valve (3), a first connecting female head (4), a second connecting female head (5) and a first connecting male head (6), a port on one side of the first diaphragm valve (3) is communicated with the second connecting female head (5) through a connecting pipeline, a port on the other side of the first diaphragm valve (3) is respectively communicated with the first connecting male head (6) and the first connecting female head (4) through a connecting pipeline, and the first diaphragm valve (3), the first connecting male head (6) and the first connecting female head (4) are connected through a three-way joint.
4. A MO source bottle serial supply apparatus for MOCVD according to claim 3, characterized in that: first pipeline subassembly passes through MO source jar socle and first MO source bottle (11) tube coupling, be provided with on the MO source jar socle and be used for control the air inlet valve and the air outlet valve of first MO source bottle (11) switching, in the first pipeline subassembly first female head of connecting (4) with MO source on the MO source jar socle is given vent to anger and is held public head (14) and be connected, in the first pipeline subassembly female head of second connecting (5) with MO source air inlet on the MO source jar socle is held public head (13) and is connected.
5. A MO source bottle serial supply apparatus for MOCVD according to claim 4, wherein: the second pipeline assembly comprises a second diaphragm valve (7), a third connecting female head (8), a fourth connecting female head (9) and a second connecting male head (10), a port on one side of the second diaphragm valve (7) is communicated with the third connecting female head (8) through a connecting pipeline, a port on the other side of the first diaphragm valve (3) is respectively communicated with the second connecting male head (10) and the fourth connecting female head (9) through a connecting pipeline, and the second diaphragm valve (7), the second connecting male head (10) and the fourth connecting female head (9) are connected through a three-way joint.
6. A MO source bottle serial supply apparatus for MOCVD according to claim 5, wherein: the second pipeline subassembly passes through MO source jar socle and second MO source bottle (12) tube coupling, be provided with on the MO source jar socle and be used for control the air inlet valve and the air outlet valve of second MO source bottle (12) switching, in the second pipeline subassembly fourth connect female (9) with MO source on the MO source jar socle is given vent to anger and is held public head (14) and be connected, in the first pipeline subassembly female (8) are connected with MO source air inlet end public head (13) on the MO source jar socle are connected.
7. A MO source bottle serial supply apparatus for MOCVD according to claim 5, wherein: and a port on one side of the first diaphragm valve (3) is connected with a port on one side of the second diaphragm valve (7) through a connecting pipeline.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202020224657.7U CN212741580U (en) | 2020-02-28 | 2020-02-28 | MO source bottle serial source supply device for MOCVD |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202020224657.7U CN212741580U (en) | 2020-02-28 | 2020-02-28 | MO source bottle serial source supply device for MOCVD |
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| CN212741580U true CN212741580U (en) | 2021-03-19 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111304742A (en) * | 2020-02-28 | 2020-06-19 | 木昇半导体科技(苏州)有限公司 | MO source bottle serial source supply device for MOCVD |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111304742A (en) * | 2020-02-28 | 2020-06-19 | 木昇半导体科技(苏州)有限公司 | MO source bottle serial source supply device for MOCVD |
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