CN218404394U - Precursor source bottle - Google Patents

Abstract

The utility model discloses a precursor source bottle belongs to semiconductor film preparation manufacturing field. The method comprises the following steps: the air inlet pipe extends to the inside of the source bottle, and is provided with a plurality of through air distribution holes; the bottle body is provided with an air outlet.

Description

Precursor source bottle

Technical Field

The utility model relates to a semiconductor film preparation field, concretely relates to precursor source bottle.

Background

Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD) are the two main methods of depositing high quality thin films in semiconductor manufacturing. To achieve CVD or ALD, it is necessary to deliver chemicals, reaction gases, etc. into the deposition chamber, such chemical sources, reaction gases being referred to as precursors for CVD or ALD. The precursor source bottle is a device for storing precursor materials. During deposition, vapor of the precursor is delivered from the source bottle to the reaction chamber, and reacts on the chamber or the substrate to produce a thin film.

The precursor material may be in a gas, liquid or solid phase, most commonly a liquid phase, or may be brought into a liquid phase by heating. According to different saturated vapor pressures of precursor materials, the following three transportation modes are commonly used:

1. in the steam suction mode, steam is released by directly opening a bottle opening valve and is injected into the reaction cavity;

2. a gas bubbling mode, wherein the bubbling mode is adopted to increase the generation amount of steam, then the steam is released and injected into the reaction cavity;

3. in the direct liquid injection mode, the liquid precursor is instantly gasified through a nozzle and then released and injected into the reaction cavity.

For bubbling source bottles, it is desirable to minimize the precursor delivery time during the production process in order to increase the deposition rate, and for this reason, the precursor vapor volume in the source bottle must be increased, typically in two or both ways:

(1) Raising the temperature of the source bottle;

(2) Increasing the amount of carrier gas produces more and larger bubbles and thus more vapor.

Because the thermal stability of the precursor molecules has a certain limit, the temperature of the source bottle cannot be increased without limit, and the gas carrying amount is increased while the temperature is increased in a limited manner to more effectively increase the steam amount. When the carrier gas amount reaches a certain amount, a large amount of precursor droplets are generated and carried into the gas delivery pipeline or even the reaction chamber along with the carrier gas. Meanwhile, due to poor stability of part of precursor materials, in the process that a large number of bubbles escape from the liquid level and break, precursor molecules are decomposed due to the action of surface tension, and fragments or particles with poor volatility are generated. One part of the fragments or particles can be brought into a gas delivery pipeline or a reaction cavity by the carrier gas, and the other part of the fragments or particles can fall back into the bottle, so that the purity of the precursor components in the source bottle is reduced, the viscosity of the precursor components is increased, the decomposition of precursor molecules is further accelerated, and the steam quantity is unstable. This further causes problems such as increased precursor usage, blocked piping, contamination of the film with solid particles, etc., which in turn leads to increased cost, equipment downtime, decreased film performance, and decreased yield. Therefore, it is still difficult to reduce the decomposition rate of the precursor material by increasing the gas carrying capacity to avoid or reduce the entrainment of the precursor droplets into the lines and chambers.

SUMMERY OF THE UTILITY MODEL

To the deficiency of the prior art, the utility model provides a precursor source bottle.

The purpose of the utility model can be realized by the following technical scheme:

a precursor source bottle, comprising: a bottle body, an air outlet pipe and an air inlet pipe,

the air inlet pipe extends into the source bottle, and a plurality of through air distribution holes are formed in the air inlet pipe; the bottle body is provided with a gas outlet, and the gas outlet is connected with the gas outlet pipe.

Optionally, the air inlet pipe comprises a pipe body and an air distribution member, the air distribution member is provided with a cavity, the air distribution member is arranged at the bottom of the interior of the bottle body, and the pipe body is communicated with the cavity; the air distribution hole is formed in the air distribution member and penetrates through the cavity.

Optionally, a filter is disposed over the air outlet.

Optionally, a purging branch is connected between the air inlet pipe and the air outlet pipe.

Optionally, the filter element has a pore size of less than 1mm.

Optionally, the bottle body is made of stainless steel or hastelloy.

Optionally, the gas distribution member is a shower head or a pipe.

The utility model has the advantages that:

the method can effectively avoid the generation of a large amount of decomposition of precursor molecules which are easy to decompose, can also effectively prevent or reduce the phenomenon that liquid drops or particles of the precursor enter a subsequent pipeline or cavity, can not cause the phenomena of precursor dosage increase, loss increase, pipeline blockage, solid particle pollution of the film and the like due to the increase of the gas carrying capacity, and effectively avoid the adverse consequences of cost increase, equipment shutdown, film performance reduction, yield reduction and the like caused by product decomposition or particle pollution in the production of semiconductors.

Drawings

The present invention will be further described with reference to the accompanying drawings.

FIG. 1 is a schematic diagram of a source vial in one embodiment of the present application;

fig. 2 is a schematic structural diagram of a gas distributor according to another embodiment of the present application.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by a person skilled in the art without making creative efforts belong to the protection scope of the present invention.

In a specific example of the present application, as shown in fig. 1, a precursor source bottle is disclosed, which comprises a bottle body 1, an inlet pipe 2 and an outlet pipe 3, wherein the end of the inlet pipe 2 extends below the liquid level, and in order to prevent the carrier gas flow from being too large and bubbles from being too large, a gas distribution member is adopted to blow out the carrier gas flow through a plurality of channels. The gas distribution member may be, for example, a gas flow distributor 5, and more specifically, a shower head (shower head) or a pipe with a plurality of gas distribution holes.

In some examples of the present application, the channels or pore sizes of the gas flow distributor 5 described above may be further reduced to tens to hundreds of micrometers. The air distribution aperture of the air flow distributor 5 may be set to 1mm or less. The air flow distributor 5 may be, for example, a sand core or a micron-sized filter screen.

In some examples of the present application, the air outlet pipe opening effectively prevents the bubbling air flow from entering the air outlet pipeline through the addition of a detachable filtering baffle 4, wherein the filtering baffle can be used for preventing liquid drops brought out by the bubbling air flow or particles caused by decomposition.

The material of the filtering baffle 4 can be polished or passivated 316L stainless steel or polished or passivated Hastelloy.

The aperture of the filtering baffle is less than 1mm, or less than 0.1mm; still further, it is preferable that the pore diameter of the above-mentioned filtering baffle is less than 10 μm; further, it is preferable that the pore diameter of the filtering baffle is less than 1 μm.

The material of the bottle body 1 can be 316L stainless steel, and in order to improve the cleanliness of the interior of the bottle body 1 and avoid corrosion or pollution, the bottle body 1 can be subjected to electrochemical polishing or passivation; the material of the bottle body 1 can also be Hastelloy after polishing or passivation. The whole body of the bottle body 1 can be welded or detachable.

In another embodiment, the external design of the flask 1 may be two valves, three valves, or five valves.

In another embodiment of the present application, a precursor source bottle is disclosed, which comprises a bottle body 1 forming a containing cavity, an air inlet pipe 2, an air outlet pipe 3, an air outlet filtering baffle 4, and an air flow distributor 5 at the end of the air inlet pipe, wherein the air flow distributor is composed of an upper baffle 501, a right baffle 502 and a bottom filtering net 503, and one end of the left side is welded at the end of the air inlet pipe, as shown in fig. 2. The direction of the arrows in the figure represents the direction of carrier gas flow. In this embodiment, the gap between the bottom filter screen 503 and the bottom of the bottle 1 is 2mm.

Specifically, an air inlet valve and an air outlet valve can be arranged on the air inlet pipe 2 and the air outlet pipe 3 for controlling air inlet and air outlet. A purging branch is connected between the air inlet pipe and the air outlet pipe. When the bottle body 1 is detached from the equipment, the air inlet valve and the air outlet valve are adjusted to seal the air inlet. And opening a valve of the purging branch, blowing air from the air inlet end, purging the air outlet end, and purging the residual precursor material.

In the description of the present invention, it is to be understood that the terms "open hole", "upper", "lower", "thickness", "top", "middle", "length", "inner", "around", and the like, indicate positional or positional relationships, are merely for convenience in describing the present invention and to simplify the description, and do not indicate or imply that the components or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention.

In the description herein, references to the description of "one embodiment," "an example," "a specific example," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

The foregoing shows and describes the basic principles, essential features, and advantages of the invention. It will be understood by those skilled in the art that the present invention is not limited to the above embodiments, and that the foregoing embodiments and descriptions are provided only to illustrate the principles of the present invention without departing from the spirit and scope of the present invention.

Claims (7)

1. A precursor source bottle, comprising: a bottle body, an air outlet pipe and an air inlet pipe,

the air inlet pipe extends into the source bottle, and is provided with a plurality of through air distribution holes; the bottle body is provided with an air outlet which is connected with the air outlet pipe;

an air inlet valve and an air outlet valve are arranged on the air inlet pipe and the air outlet pipe and are used for controlling air inlet and air outlet; and a purging branch is connected between the air inlet pipe and the air outlet pipe.

2. The precursor source bottle of claim 1, wherein the gas inlet tube comprises a tube and a gas distribution member, the gas distribution member having a cavity, the gas distribution member being disposed at a bottom of an interior of the bottle, the tube communicating with the cavity; the air distribution hole is formed in the air distribution member and penetrates through the cavity.

3. A precursor source bottle according to claim 1, wherein a filter is disposed on the gas outlet.

4. A precursor source bottle according to claim 3, wherein the filter has an aperture of less than 1mm.

5. The precursor source bottle of claim 1, wherein the body is made of stainless steel or hastelloy.

6. A precursor source bottle as claimed in claim 2, wherein the gas distribution member is a showerhead or a tube.

7. A precursor source bottle according to claim 4, wherein the filter has a pore size of less than 10 μm.

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