CN212683566U - Novel polishing head for polishing machine and jig thereof - Google Patents
Novel polishing head for polishing machine and jig thereof Download PDFInfo
- Publication number
- CN212683566U CN212683566U CN202020807518.7U CN202020807518U CN212683566U CN 212683566 U CN212683566 U CN 212683566U CN 202020807518 U CN202020807518 U CN 202020807518U CN 212683566 U CN212683566 U CN 212683566U
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- China
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- pressure distribution
- distribution ring
- polishing head
- annular groove
- jig
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- 238000005498 polishing Methods 0.000 title claims abstract description 63
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims abstract description 11
- 239000004810 polytetrafluoroethylene Substances 0.000 claims abstract description 11
- -1 polytetrafluoroethylene Polymers 0.000 claims description 3
- 238000009434 installation Methods 0.000 abstract description 5
- 239000000463 material Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The utility model provides a used novel rubbing head of burnishing machine and tool thereof, rubbing head include the rubbing head body, pressure distribution ring is equipped with to rubbing head body bottom, install the piece of dismantling pressure distribution ring on the rubbing head lateral wall. The jig comprises a jig body, and the jig body is used for installing the jig of the pressure distribution ring. The PTFE thread ejector rod for disassembling the pressure distribution ring is arranged on the side surface of the polishing head body, the PTFE thread ejector rod is in threaded connection with the polishing head body, the pressure distribution ring is disassembled by rotating the PTFE thread ejector rod, and the rapid disassembly of the pressure distribution ring is realized; the fixture is used for realizing the quick installation of the pressure distribution ring.
Description
Technical Field
The utility model belongs to the technical field of the polishing equipment, especially, relate to an used novel rubbing head of burnishing machine and tool thereof.
Background
The prior art and the defects thereof are as follows: a polishing head used by the polishing machine is provided with a pressure distribution ring, and pressure distribution rings with different hardness and different types are required according to different types of polished silicon wafers and different processes. The existing polishing head is very inconvenient for installing and disassembling the pressure distribution ring: when the pressure distribution ring is installed, the pressure distribution ring is pressed into the installation groove in a pure manual mode, and the efficiency is very low; during the dismantlement, insert from the gap between pressure distribution ring and the mounting groove with the screwdriver, enucleate the pressure distribution ring in the mounting groove, this kind of dismantlement mode very easily damages the pressure distribution ring, makes it can't reuse, causes very big waste.
SUMMERY OF THE UTILITY MODEL
In view of this, the utility model aims at providing a novel rubbing head that burnishing machine was used and tool thereof to solve the problem of current rubbing head installation and dismantlement pressure distribution ring difficulty.
In order to achieve the above purpose, the technical scheme of the utility model is realized like this:
the novel polishing head for the polishing machine comprises a polishing head body, wherein a pressure distribution ring is mounted at the bottom of the polishing head body, and a dismounting part for dismounting the pressure distribution ring is mounted on the side wall of the polishing head.
Further, a first annular groove is formed in the bottom of the polishing head body, the pressure distribution ring is installed in the first annular groove, a through hole is formed in the side wall of the polishing head body and communicated with the first annular groove, and the dismounting piece is installed in the through hole and attached to the pressure distribution ring.
Further, the cross section of the first annular groove is rectangular, the cross section of the pressure distribution ring is circular, and the width of the first annular groove is smaller than the diameter of the pressure distribution ring.
Further, the through-hole slope sets up, be equipped with the screw thread in the through-hole, the piece of disassembling includes tetrafluoro screw ejector pin, tetrafluoro screw ejector pin is corresponding with the through-hole, tetrafluoro screw ejector pin and through-hole threaded connection, tetrafluoro screw ejector pin one end top is on the pressure distribution ring.
Furthermore, the end of the PTFE thread mandril which is propped against the pressure distribution ring is hemispherical.
Furthermore, a boss with knurls is arranged at one end, far away from the pressure distribution ring, of the tetrafluoro thread mandril.
The utility model provides a used novel burnishing head tool of burnishing machine, includes the tool body, the tool body is used for installing above arbitrary the burnishing head, be equipped with on the tool body with the corresponding second annular groove of pressure distribution ring.
Further, the jig body is a circular tray, the bottom of the jig body extends upwards to form a side wall, the second annular groove is formed in the bottom of the jig body, and the bottom of the pressure distribution ring is installed in the second annular groove.
Further, the diameter of the second annular groove corresponds to the diameter of the pressure distribution ring, and the depth of the section of the second annular groove is one fourth of the diameter of the section of the pressure distribution ring.
Compared with the prior art, the used novel rubbing head of burnishing machine and tool thereof have following advantage:
(1) burnishing head body side-mounting have the tetrafluoro screw ejector pin of dismantling the pressure distribution ring, tetrafluoro screw ejector pin and burnishing head body threaded connection dismantle the pressure distribution ring through rotatory tetrafluoro screw ejector pin, have realized the quick dismantlement of pressure distribution ring.
(2) Tool body bottom be equipped with the second recess that corresponds with the pressure distribution ring, the fourth of pressure distribution ring is located the second recess, installs the first recess of rubbing head body with the three fourths of pressure distribution ring in through the tool body.
Drawings
The accompanying drawings, which form a part hereof, are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention without undue limitation. In the drawings:
FIG. 1 is a diagram of a novel polishing head and a jig used in a polishing machine according to an embodiment of the present invention;
fig. 2 is an enlarged schematic view of a portion a in fig. 1 according to an embodiment of the present invention;
fig. 3 is an enlarged schematic view of a portion B in fig. 1 according to an embodiment of the present invention.
Description of reference numerals:
1. a polishing head body; 2. a polytetrafluoroethylene threaded ejector rod; 3. a pressure distribution ring; 4. a jig body; 5. a second annular groove; 6. a first annular groove.
Detailed Description
It should be noted that, in the present invention, the embodiments and features of the embodiments may be combined with each other without conflict.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are used merely for convenience of description and for simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art through specific situations.
The present invention will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.
As shown in fig. 1 to 3, a novel polishing head for a polishing machine comprises a polishing head body 1, wherein a pressure distribution ring 3 is mounted at the bottom of the polishing head body 1, and a dismounting member for dismounting the pressure distribution ring 3 is mounted on the side wall of the polishing head.
The polishing head comprises a polishing head body 1 and is characterized in that a first annular groove 6 is formed in the bottom of the polishing head body 1, a pressure distribution ring 3 is installed in the first annular groove 6, a through hole is formed in the side wall of the polishing head body 1 and communicated with the first annular groove 6, and a dismounting part is installed in the through hole and attached to the pressure distribution ring 3.
The cross section of the first annular groove 6 is rectangular, the cross section of the pressure distribution ring 3 is circular, and the width of the first annular groove 6 is smaller than the diameter of the pressure distribution ring 3.
The through-hole slope sets up, be equipped with the screw thread in the through-hole, the piece of disassembling includes tetrafluoro screw ejector pin 2, tetrafluoro screw ejector pin 2 is corresponding with the through-hole, tetrafluoro screw ejector pin 2 and through-hole threaded connection, 2 one end tops of tetrafluoro screw ejector pin are on pressure distribution ring 3.
The tetrafluoro thread mandril 2 is propped against the pressure distribution ring 3, and one end of the tetrafluoro thread mandril 2 is hemispherical.
And a boss with knurls is arranged at one end of the tetrafluoro thread mandril 2 far away from the pressure distribution ring 3.
The utility model provides a used novel burnishing head tool of burnishing machine, includes tool body 4, tool body 4 is used for installing above arbitrary the burnishing head, be equipped with on the tool body with the pressure distribution ring 3 corresponding second annular groove 5.
The jig body 4 is a circular tray, the bottom of the jig body extends upwards to form a side wall, the second annular groove 5 is formed in the bottom of the jig body 4, and the bottom of the pressure distribution ring 3 is installed in the second annular groove 5.
The diameter of the second annular groove 5 corresponds to the diameter of the pressure distribution ring 3, and the depth of the section of the second annular groove 5 is one fourth of the diameter of the section of the pressure distribution ring 3.
The pressure distribution ring is made of rubber.
The specific implementation mode is as follows:
the side of the polishing head body 1 is provided with a through hole communicated with the first annular groove 6, a tetrafluoro thread mandril 2 made of tetrafluoro material is arranged in the through hole, and the tetrafluoro thread mandril 2 is in threaded connection with the through hole. When the pressure distribution ring 3 is disassembled, the tetrafluoro thread mandril 2 is screwed in, namely, one part of the pressure distribution ring 3 can be pushed out of the first annular groove 6, the partial pressure distribution ring 3 pushed out of the first annular groove is slightly pulled by hands, the whole pressure distribution ring 3 can be pulled out of the first annular groove 6 and disassembled, and after the pressure distribution ring 3 is disassembled, the tetrafluoro thread mandril 2 is screwed back; the head of the PTFE thread mandril 22 is hemispherical, so that the pressure distribution ring 3 is prevented from being damaged; in order to facilitate the rotation of the PTFE thread ejector rod 2, the tail part of the PTFE thread ejector rod 2 is provided with a boss with knurls, so that a larger friction force can be provided when the PTFE thread ejector rod 2 is manually rotated, and the slipping is prevented; the tetrafluoro thread ejector rod 2 is provided with scale mark marks, the screwing-in depth of the thread ejector rod is visually shown, and the two scale marks are distributed up and down along the axial direction of the tetrafluoro thread ejector rod 2; when a scale mark at the lower part is exposed out of the polishing head body 1, the tetrafluoro thread mandril 2 is far away from the pressure distribution ring 3, and when a scale mark at the upper part enters the polishing head body 1, the tetrafluoro thread mandril 2 partially ejects out of the pressure distribution ring 3.
When the pressure distribution ring 3 is installed, the polishing head is lifted up, the pressure distribution ring 3 is installed with the jig and placed under the polishing head, the pressure distribution ring 3 to be installed is placed in the second annular groove 5 at the bottom of the jig, the polishing head is lowered into the installation jig at the moment until the polishing head is lifted up after being attached to the bottom of the jig, and the pressure distribution ring 3 is pressed into the first annular groove 6 of the polishing head at the moment. Because the side wall extending upwards at the bottom of the jig body has an outward inclined angle, the jig has an automatic centering function.
The jig body 4 is circular tray, and circular tray upwards extends and keeps off the wall, and the jig bottom is equipped with second annular groove 5, and the degree of depth of second annular groove 5 is the fourth of 3 diameters of pressure distribution ring, and the fourth of pressure distribution ring 3 is located second annular groove 5, and polishing head body 1 is when installation pressure distribution ring 3, and polishing head body 1 extrudees to the jig end of a plate, and pressure distribution ring 3 is the rubber material, and the three-fourth of pressure distribution ring 3 is installed in first annular groove 6 this moment, pressure distribution ring 3 protrusion in first annular groove 6.
The above description is only a preferred embodiment of the present invention, and should not be taken as limiting the invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (9)
1. The utility model provides a used novel rubbing head of burnishing machine which characterized in that: the polishing head comprises a polishing head body (1), wherein a pressure distribution ring (3) is arranged at the bottom of the polishing head body (1), and a dismounting piece for dismounting the pressure distribution ring (3) is arranged on the side wall of the polishing head.
2. A novel polishing head for a polishing machine as set forth in claim 1 wherein: the polishing head comprises a polishing head body (1), wherein a first annular groove (6) is formed in the bottom of the polishing head body (1), a pressure distribution ring (3) is installed in the first annular groove (6), a through hole is formed in the side wall of the polishing head body (1), the through hole is communicated with the first annular groove (6), and a dismounting part is installed in the through hole and attached to the pressure distribution ring (3).
3. A novel polishing head for a polishing machine as set forth in claim 2 wherein: the cross section of the first annular groove (6) is rectangular, the cross section of the pressure distribution ring (3) is circular, and the width of the first annular groove (6) is smaller than the diameter of the pressure distribution ring (3).
4. A novel polishing head for a polishing machine as set forth in claim 2 wherein: the through-hole slope sets up, be equipped with the screw thread in the through-hole, the piece of disassembling includes tetrafluoro screw ejector pin (2), tetrafluoro screw ejector pin (2) are corresponding with the through-hole, tetrafluoro screw ejector pin (2) and through-hole threaded connection, tetrafluoro screw ejector pin (2) one end top is on pressure distribution ring (3).
5. A novel polishing head for a polishing machine as set forth in claim 4 wherein: one end of the polytetrafluoroethylene threaded ejector rod (2) which is abutted against the pressure distribution ring (3) is hemispherical.
6. A novel polishing head for a polishing machine as set forth in claim 5 wherein: and a boss with knurls is arranged at one end of the polytetrafluoroethylene threaded mandril (2) far away from the pressure distribution ring (3).
7. The utility model provides a used novel rubbing head tool of burnishing machine which characterized in that: the polishing head jig comprises a jig body (4), wherein the jig body (4) is used for mounting the polishing head as claimed in any one of claims 1 to 5, and a second annular groove (5) corresponding to the pressure distribution ring (3) is formed in the jig body.
8. A novel polishing head jig for a polishing machine according to claim 7, wherein: the jig is characterized in that the jig body (4) is a circular tray, the bottom of the jig body extends upwards to form a side wall, the second annular groove (5) is formed in the bottom of the jig body (4), and the bottom of the pressure distribution ring (3) is installed in the second annular groove (5).
9. A novel polishing head jig for a polishing machine according to claim 8, wherein: the diameter of the second annular groove (5) corresponds to the diameter of the pressure distribution ring (3), and the depth of the section of the second annular groove (5) is one fourth of the diameter of the section of the pressure distribution ring (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020807518.7U CN212683566U (en) | 2020-05-14 | 2020-05-14 | Novel polishing head for polishing machine and jig thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020807518.7U CN212683566U (en) | 2020-05-14 | 2020-05-14 | Novel polishing head for polishing machine and jig thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212683566U true CN212683566U (en) | 2021-03-12 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202020807518.7U Active CN212683566U (en) | 2020-05-14 | 2020-05-14 | Novel polishing head for polishing machine and jig thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN212683566U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113635169A (en) * | 2021-08-10 | 2021-11-12 | 江苏吉星新材料有限公司 | Burr trimming mechanism and polishing device |
-
2020
- 2020-05-14 CN CN202020807518.7U patent/CN212683566U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113635169A (en) * | 2021-08-10 | 2021-11-12 | 江苏吉星新材料有限公司 | Burr trimming mechanism and polishing device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: 214200 Dongjia Avenue, Yixing Economic and Technological Development Zone, Wuxi City, Jiangsu Province Patentee after: Zhonghuan Leading Semiconductor Technology Co.,Ltd. Country or region after: China Patentee after: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. Address before: 214200 Dongjia Avenue, Yixing Economic and Technological Development Zone, Wuxi City, Jiangsu Province Patentee before: Zhonghuan leading semiconductor materials Co.,Ltd. Country or region before: China Patentee before: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. |
|
| CP03 | Change of name, title or address |