CN212643323U - Air supporting guide rail with adjustable rigidity - Google Patents

Air supporting guide rail with adjustable rigidity Download PDF

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Publication number
CN212643323U
CN212643323U CN202020211332.5U CN202020211332U CN212643323U CN 212643323 U CN212643323 U CN 212643323U CN 202020211332 U CN202020211332 U CN 202020211332U CN 212643323 U CN212643323 U CN 212643323U
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China
Prior art keywords
guide rail
air
slider
electromagnet
air film
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杨光伟
阳红
张敏
王虎
刘有海
戴晓静
孙守利
尹承真
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Institute of Mechanical Manufacturing Technology of CAEP
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Institute of Mechanical Manufacturing Technology of CAEP
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Abstract

The utility model discloses a rigidity adjustable air supporting guide rail, including guide rail strip and slider, the air film clearance has between slider and the guide rail strip, the air film clearance still includes the electro-magnet including being used for supporting the slider at the first air film of guide rail strip upside, the electro-magnet is fixed on guide rail strip and/or slider, and after the electro-magnet circular telegram, the electro-magnet produces and makes guide rail strip and slider draw close together magnetic force each other in vertical direction. The air-floating guide rail has the advantages that the structural design of the air-floating guide rail can enable the air-floating guide rail to be applied to a precision measuring instrument or an ultra-precision machine tool, and the air-floating guide rail has good supporting rigidity, motion precision and anti-interference capability when the light load is applied, and is beneficial to improving the motion precision and the dynamic performance of the air-floating guide rail.

Description

Air supporting guide rail with adjustable rigidity
Technical Field
The utility model relates to an air supporting guide rail technical field especially relates to an air supporting guide rail of rigidity adjustable.
Background
The air floatation guide rail realizes smooth movement without friction and vibration based on the dynamic and static pressure effect of gas. It has the characteristics of high motion precision, cleanness, no pollution and the like. Because of its error averaging, higher guiding accuracy can be achieved with relatively low manufacturing accuracy. Usually, the displacement sensor and the servo drive form a closed loop system to realize high-precision displacement positioning. The air-float guide rail is widely applied to measuring instruments and precision machinery.
The air rail generally includes the following structure: guide rail seat (guide rail strip), carriage apron (slider), throttle, gas supply system and adjusting device, the throttle form is various, generally includes like: small orifice restrictor, capillary restrictor, membrane feedback restrictor, etc.
The air-float guide rail can be divided into: planar closed type, cylinder closed type, gravity balanced type and vacuum preload type.
Taking the gravity balance type air-float guide rail as an example, the gravity balance type air-float guide rail has simple structure, convenient processing and low rigidity, and is used for occasions with small load change. However, in specific use, along with the change of the working conditions of the air-floating guide rail, such as the change of parameters of the guide rail, such as load, air supply pressure and the like, the thickness of the air film can be correspondingly changed, so that the dynamic performance of the air-floating guide rail is changed. The problem of low rigidity directly influences the motion precision and the anti-interference capability of the guide rail, and has great influence on the application and performance of the air-float guide rail.
SUMMERY OF THE UTILITY MODEL
To the motion precision, the interference killing feature if improve the air supporting guide rail that above-mentioned proposed to make the air supporting guide rail can satisfy the requirement to good dynamic behavior of air supporting guide rail and interference killing feature on precision measurement instrument or ultra-precision machine tool, the utility model provides a rigidity adjustable air supporting guide rail. The air-floating guide rail has the advantages that the structural design of the air-floating guide rail can enable the air-floating guide rail to be applied to a precision measuring instrument or an ultra-precision machine tool, and the air-floating guide rail has good supporting rigidity, motion precision and anti-interference capability when the light load is applied, and is beneficial to improving the motion precision and the dynamic performance of the air-floating guide rail.
To the above problem, the utility model provides a pair of rigidity adjustable air supporting guide rail solves the problem through following technical essential: the utility model provides a rigidity adjustable air supporting guide rail, includes guide rail strip and slider, the air film clearance has between slider and the guide rail strip, the air film clearance is including being used for supporting the slider at the first air film of guide rail strip upside, still includes the electro-magnet, the electro-magnet is fixed on guide rail strip and/or slider, and after the electro-magnet circular telegram, the electro-magnet produces makes guide rail strip and slider draw close the magnetic force that each other in vertical direction.
The bearing capacity of the existing gravity balance type air-float guide rail is in a nonlinear relation with the thickness of an air film, and the adjustment of the thickness of the air film is particularly important for obtaining better dynamic performance and improving the motion precision and the anti-interference capability of the guide rail. However, in the case of light load, the gas film form and pressure distribution in the gas film gap are adjusted by a restrictor, and the gas film rigidity cannot be substantially increased.
The technical scheme that this scheme provided is a gravity balance type air supporting guide rail, and when its concrete structure design, the characteristics of considering air supporting guide rail's air film thickness mainly by the load decision utilize electromagnet to add, the convenient advantage of uninstallation, has designed an air supporting guide rail including guide rail strip, electro-magnet and slider, and is more specific, as technical personnel in this field, for obtaining the air film clearance, corresponding gas circuit on the slider, simultaneously in the gas circuit installation flow controller can.
When the scheme is used specifically, the electromagnet is started to generate a force for enabling the guide rail bar and the sliding block to be close to each other, and the force is used as a part of the sliding block load. Therefore, the magnitude of the force loaded by the electromagnet can be adjusted according to the object load on the specific sliding block and the air source parameter of the air film, namely, the scheme provides the air-floating guide rail design with adjustable air film rigidity, so that the air-floating guide rail has good supporting rigidity, movement track precision and anti-interference capability when being applied to a precision measuring instrument or an ultra-precision machine tool and under light load.
The further technical scheme is as follows:
as a technical scheme capable of adjusting the state of the sliding block in the length direction and the width direction of the guide rail strip, a plurality of electromagnets are arranged on the left side and the right side of the guide rail strip in the width direction of the guide rail strip;
electromagnets on the left side of the guide rail bar are sequentially arranged along the length direction of the guide rail bar;
electromagnets on the right side of the guide rail bar are sequentially arranged along the length direction of the guide rail bar;
each electromagnet can work independently. This scheme is when concrete application, if through displacement sensor real-time supervision air film thickness, when the data that have a plurality of monitoring points and different monitoring points obtain the deviation appear, because each electro-magnet is equal autonomous working, through the electric current of controlling every electro-magnet respectively, change in guide rail strip length direction, the magnetic force size of the electro-magnet of distribution in different positions in the width direction, thereby control the magnetic force distribution of loading on the slider, correct the skew around the slider, control the skew, reach the purpose that lets air film thickness be in better interval and reduce the deflection of slider.
As an electro-magnet can slide along with the slider for the slider when optional position, each electro-magnet homoenergetic is participated in above gas mould thickness and is adjusted, the regulation of deflecting, and the electro-magnet installation itself does not influence the technical scheme of guide rail strip, slider cooperation relation simultaneously, sets up to: the electromagnets are all arranged on the sliding block;
the first air film is arranged in the middle of the width direction of the guide rail strip;
the left side and the right side of the sliding block are both provided with a groove connected with the side face of the sliding block, and the electromagnet is installed in the groove.
As an electro-magnet can slide along with the slider for the slider when optional position, each electro-magnet homoenergetic is participated in above gas mould thickness and is adjusted, the regulation of deflecting, for utilizing bigger electromagnetic force or electromagnetic force adjustable range, makes the slider obtain bigger load simultaneously, in order to reach the technical scheme who strengthens the adaptability to on the slider between the specific load weight, sets up to: the electromagnets are all arranged on the sliding block;
the first air film is arranged in the middle of the width direction of the guide rail strip;
the electromagnets are fixedly connected and installed on the sliding block through the top surface and the bottom surface of the sliding block. By adopting the scheme, the electromagnet can cover all other ranges except the range where the first air film is located at the bottom side of the sliding block.
For conveniently realizing the real-time detection of the thickness of the first gas film, the method is set as follows: the displacement sensor is used for detecting the air film thickness of the first air film.
In order to adopt the sensor of minimum quantity, obtain the skew of the front and back of slider and control the skew condition and detect, set up as: the number of the displacement sensors is two, and the two displacement sensors are fixed on the sliding block in a mode of being diagonally arranged between the two displacement sensors. In the prior art, the slider is generally rectangular or square, and the above diagonal arrangement can be understood as that one displacement sensor is located at the left side of the central line, the other displacement sensor is located at the right side, and the two sensors are located at different ends of the slider, compared with the central line extending along the sliding motion direction of the slider.
In order to realize the adjustable self-adaptive adjustment of the rigidity, the method is set as follows: still include the control system of signal input part and displacement sensor signal output part signal connection, control system is used for: the working parameters of the electromagnet are controlled by collecting the air film thickness data from the displacement sensor. As a person skilled in the art, the control of the working parameters of the electromagnet can be used for the self-adaptive adjustment of the thickness of the air film and the self-adaptive adjustment of deviation correction, and the control system adopts a self-adaptive fuzzy control algorithm to control the power supply parameters of the electromagnet, so that the corresponding purpose can be achieved.
Because the electro-magnet can produce magnetic field unavoidably at the time of working, for the influence that reduces above magnetic field to the air supporting guide rail work area like electronic components, reduce the electro-magnet to the influence of slider position on the width direction of guide rail when working, set up as: still including the magnetic screen cover of parcel on the electro-magnet, the magnetic screen cover is one side open-ended box body column structure, and in the assembly that electro-magnet and magnetic screen cover formed, the opening side of magnetic screen cover corresponds the work side of electro-magnet when leading rail strip and slider inter attraction. As a person skilled in the art, the above magnetic shield sleeve is used to prevent the magnetic field generated by the electromagnet from diffusing outward.
In order to obtain more stable motion track precision of the sliding block relative to the guide rail bar, the device is set as follows: the slider is of a block structure with a groove arranged at the lower side, the cross section of the guide rail strip is in an inverted T shape, the convex part at the upper side of the guide rail strip is embedded into the groove, and the first air film is positioned between the top side of the convex part and the bottom side of the groove;
the air film gap further comprises two second air films, and one second air film is arranged between the side face of the protruding part and the side face of the groove in the width direction of the guide rail strip. This scheme is when concrete application, and above structural design can make and utilize first gas film to realize the support to the slider in vertical direction, utilizes two second gas films, realizes the position restraint of slider in the guide rail strip width direction.
As a technical scheme that the air film rigidity is adjustable, the deflection of the sliding block is adjustable, and the air-float guide rail is conveniently designed in a miniaturized manner, the air-float guide rail device is arranged as follows: the number of the electromagnets is even;
the guide rail strip comprises a guide rail base body, the lower end of the electromagnet is fixed on the guide rail base body, and the electromagnet is used as a protruding part on the guide rail strip;
the electromagnets are arranged in two rows along the central line of the length direction of the guide rail bar;
two rows of electromagnets are in line symmetry;
each electromagnet can work independently.
The utility model discloses following beneficial effect has:
the technical scheme that this scheme provided is a gravity balance type air supporting guide rail, and when its concrete structure design, the characteristics of considering air supporting guide rail's air film thickness mainly by the load decision utilize electromagnet to add, the convenient advantage of uninstallation, has designed an air supporting guide rail including guide rail strip, electro-magnet and slider, and is more specific, as technical personnel in this field, for obtaining the air film clearance, corresponding gas circuit on the slider, simultaneously in the gas circuit installation flow controller can.
When the scheme is used specifically, the electromagnet is started to generate a force for enabling the guide rail bar and the sliding block to be close to each other, and the force is used as a part of the sliding block load. Therefore, the magnitude of the force loaded by the electromagnet can be adjusted according to the object load on the specific sliding block and the air source parameter of the air film, namely, the scheme provides the air-floating guide rail design with adjustable air film rigidity, so that the air-floating guide rail has good supporting rigidity, movement track precision and anti-interference capability when being applied to a precision measuring instrument or an ultra-precision machine tool and under light load.
Drawings
Fig. 1 is a schematic structural diagram of an embodiment of an air-floating guide rail with adjustable rigidity according to the present invention, which is a cross-sectional view for reflecting a specific scheme that grooves are formed on the left side and the right side of a slider to mount an electromagnet, and the application of the electromagnet on the air-floating guide rail does not affect the matching relationship between a guide rail bar and the slider;
fig. 2 is a schematic structural view of an embodiment of the stiffness-adjustable air-floating guide rail according to the present invention, which is a cross-sectional view for reflecting a specific technical solution that the electromagnet is installed at the bottom side of the slider, so that the effective magnetic force influence range of the electromagnet includes all other regions except the first air film range at the lower side of the slider;
FIG. 3 is a side view of the structure shown in FIG. 1 or FIG. 2, different from FIGS. 1 and 2, including a displacement sensor and control system;
FIG. 4 is a top view of the structure shown in FIG. 1 or FIG. 2;
fig. 5 is a schematic structural view of an embodiment of the stiffness-adjustable air-float guide rail according to the present invention, which is a cross-sectional view for reflecting a specific scheme when the electromagnet is used as a part of the guide rail strip in the shape of an inverted T;
FIG. 6 is a side view of the structure shown in FIG. 5, different from FIG. 5, including a displacement sensor and control system;
fig. 7 is a top view of the structure shown in fig. 5.
The labels in the figures are: 1. the device comprises a guide rail bar, 2, an electromagnet, 3, a sliding block, 4, a restrictor, 5, a magnetic shielding sleeve, 6, a displacement sensor, 7, a control system, 8, a first air film, 9 and a second air film.
Detailed Description
The present invention will be described in further detail with reference to the following examples, but the present invention is not limited to the following examples:
example 1:
as shown in fig. 1 to 7, the air-floating guide rail with adjustable rigidity comprises a guide rail bar 1 and a slider 3, wherein an air film gap is formed between the slider 3 and the guide rail bar 1, the air film gap comprises a first air film 8 for supporting the slider 3 on the upper side of the guide rail bar 1, and the air-floating guide rail further comprises an electromagnet 2, the electromagnet 2 is fixed on the guide rail bar 1 and/or the slider 3, and after the electromagnet 2 is electrified, the electromagnet 2 generates magnetic force which enables the guide rail bar 1 and the slider 3 to be close to each other in the vertical direction.
The bearing capacity of the existing gravity balance type air-float guide rail is in a nonlinear relation with the thickness of an air film, and the adjustment of the thickness of the air film is particularly important for obtaining better dynamic performance and improving the motion precision and the anti-interference capability of the guide rail. However, in the case of a light load, the gas film form and the pressure distribution in the gas film gap are adjusted by the restrictor 4, and the gas film rigidity cannot be substantially increased.
The technical scheme that this scheme provided is a gravity balance type air supporting guide rail, and during its concrete structure design, the characteristics that the air film thickness of considering air supporting guide rail mainly is decided by the load, utilize electromagnet 2 to add, the convenient advantage of uninstallation, designed an air supporting guide rail including guide rail strip 1, electro-magnet 2 and slider 3, more concrete, as technical staff in this field, for obtaining the air film clearance, corresponding gas circuit on slider 3, simultaneously in the gas circuit installation flow controller 4 can.
When the scheme is used specifically, by starting the electromagnet 2, the electromagnet 2 generates a force which enables the guide rail bar 1 and the sliding block 3 to be close to each other, and the force is used as a part of the load of the sliding block 3. Therefore, the magnitude of the force loaded by the electromagnet 2 can be adjusted according to the object load and the air film air source parameters on the specific slide block 3, namely, the scheme provides the air-float guide rail design with adjustable air film rigidity, so that the air-float guide rail has good supporting rigidity, movement track precision and anti-interference capability when being applied to a precision measuring instrument or an ultra-precision machine tool and under light load.
Example 2:
in this embodiment, as shown in fig. 1 to 7, as a technical solution for adjusting the state of the slider 3 in the longitudinal direction and the width direction of the guide rail strip 1, a plurality of electromagnets 2 are disposed on both the left side and the right side of the guide rail strip 1 in the width direction of the guide rail strip 1;
electromagnets 2 on the left side of the guide rail bar 1 are sequentially arranged along the length direction of the guide rail bar 1;
electromagnets 2 on the right side of the guide rail bar 1 are sequentially arranged along the length direction of the guide rail bar 1;
each electromagnet 2 can work independently. This scheme is when concrete application, if through displacement sensor 6 real-time supervision air film thickness, when the data that have a plurality of monitoring points and different monitoring points obtain the deviation appear, because each electro-magnet 2 all can the autonomous working, through the electric current of controlling each electro-magnet 2 respectively, change at 1 length direction of guide rail strip, the magnetic force size of the electro-magnet 2 of width direction distribution in different positions, thereby control the magnetic force distribution of loading on slider 3, correct the skew around slider 3, control the skew, reach the purpose that lets air film thickness be in better interval and reduce the deflection of slider 3.
Example 3:
the present embodiment is further limited on the basis of embodiment 2, as shown in fig. 1, fig. 3 and fig. 4, as a technical solution that the electromagnets 2 can slide along with the slider 3, so that when the slider 3 is at any position, each electromagnet 2 can participate in the above air mold thickness adjustment and deflection adjustment, and the installation of the electromagnet 2 does not affect the fit relationship between the guide rail strip 1 and the slider 3, the arrangement is as follows: the electromagnets 2 are all arranged on the sliding block 3;
the first air film 8 is arranged in the middle of the guide rail bar 1 in the width direction;
the left side and the right side of the sliding block 3 are both provided with a groove connected with the side surface of the sliding block 3, and the electromagnet 2 is arranged in the groove.
Example 4:
the embodiment is further limited on the basis of the embodiment 2, as shown in fig. 2, fig. 3 and fig. 4, as an electromagnet 2, which can slide along with the slider 3, when the slider 3 is at any position, each electromagnet 2 can participate in the above air-mode thickness adjustment and deflection adjustment, and meanwhile, in order to utilize a larger electromagnetic force or an adjustable range of the electromagnetic force, the slider 3 obtains a larger load, so as to achieve the technical scheme of strengthening the adaptability to a specific load weight interval on the slider 3, the technical scheme is set as follows: the electromagnets 2 are all arranged on the sliding block 3;
the first air film 8 is arranged in the middle of the guide rail bar 1 in the width direction;
the electromagnets 2 are fixedly connected and installed on the sliding block 3 through the top surface and the bottom surface of the sliding block 3. By adopting the scheme, the electromagnet 2 can cover all other ranges except the range where the first air film 8 is located at the bottom side of the sliding block 3.
Example 5:
the present embodiment is further limited on the basis of embodiment 1, and as shown in fig. 1 to 7, in order to conveniently realize the real-time detection of the gas film thickness of the first gas film 8, the following settings are set: the device also comprises a displacement sensor 6, wherein the displacement sensor 6 is used for detecting the air film thickness of the first air film 8.
In order to adopt the sensor with the least quantity, obtain the forward and backward deviation and the left and right deviation condition detection of the slide block 3, set up as: the number of the displacement sensors 6 is two, and the two displacement sensors 6 are fixed on the sliding block 3 in a manner of being diagonally arranged between the two displacement sensors. In the prior art, the slider 3 is generally rectangular or square, and the above diagonal arrangement is understood to mean that one of the displacement sensors 6 is located on the left side of the central line, the other is located on the right side, and the two sensors are located at different ends of the slider 3 compared with the central line extending along the sliding motion direction of the slider 3.
Example 6:
the embodiment is further limited on the basis of embodiment 5, and as shown in fig. 1 to 7, in order to implement the above adaptive adjustment of stiffness, the following are provided: still include control system 7 of signal input part and displacement sensor 6 signal output part signal connection, control system 7 is used for: the working parameters of the electromagnet 2 are controlled by collecting the air film thickness data from the displacement sensor 6. As a person skilled in the art, the control of the working parameters of the electromagnet 2 can be used for the self-adaptive adjustment of the thickness of the air film and the self-adaptive adjustment of deviation correction, and the control system 7 adopts a self-adaptive fuzzy control algorithm to control the power supply parameters of the electromagnet 2 so as to achieve the corresponding purpose.
Example 7:
in this embodiment, as shown in fig. 1 to 7, since the electromagnet 2 inevitably generates a magnetic field during operation, in order to reduce the influence of the above magnetic field on electronic components, for example, in the air rail operating region and the influence of the electromagnet 2 on the position of the slider 3 in the width direction of the rail bar 1 during operation, the following configurations are provided: still including the magnetic screen cover 5 of parcel on electro-magnet 2, magnetic screen cover 5 is one side open-ended box body column structure, and in the assembly that electro-magnet 2 and magnetic screen cover 5 formed, the opening side of magnetic screen cover 5 corresponds the working side of electro-magnet 2 when carrying out guide rail strip 1 and slider 3 inter attraction. As a person skilled in the art, the upper magnetic shield sleeve 5 serves to prevent the magnetic field generated by the electromagnet 2 from diffusing outward.
Example 8:
the present embodiment is further limited on the basis of embodiment 1, and as shown in fig. 1 to 7, in order to obtain more stable motion trajectory precision of the slider 3 relative to the guide rail bar 1, the following are set: the sliding block 3 is of a block structure with a groove arranged at the lower side, the cross section of the guide rail strip 1 is in an inverted T shape, the convex part at the upper side of the guide rail strip 1 is embedded into the groove, and the first air film 8 is positioned between the top side of the convex part and the bottom side of the groove;
the air film gap further comprises two second air films 9, and one second air film 9 is arranged between the side surface of the convex part and the side surface of the groove in the width direction of the guide rail strip 1. When this scheme is specifically used, above structural design can make and utilize first air film 8 to realize the support to slider 3 in vertical direction, utilizes two second air films 9, realizes the position restraint of slider 3 in guide rail 1 width direction.
Example 9:
the embodiment is further limited on the basis of embodiment 8, and as shown in fig. 5 to 7, as a technical solution for adjusting the air film stiffness, adjusting the deflection of the slider 3, and conveniently realizing the miniaturization design of the air-bearing guide rail, the following are provided: the number of the electromagnets 2 is even;
the guide rail bar 1 comprises a guide rail base body, the lower end of the electromagnet 2 is fixed on the guide rail base body, and the electromagnet 2 is used as a convex part on the guide rail bar 1;
the electromagnets 2 are arranged in two rows along the central line of the length direction of the guide rail bar 1;
two rows of electromagnets 2 are in line symmetry;
each electromagnet 2 can work independently.
The foregoing is a more detailed description of the present invention, taken in conjunction with the specific preferred embodiments thereof, and it is not intended that the invention be limited to the specific embodiments thereof. To the utility model belongs to the technical field of the ordinary skilled person say, do not deviate from the utility model discloses a other embodiments that reach under the technical scheme all should be contained the utility model discloses a within the scope of protection.

Claims (10)

1. The utility model provides a rigidity adjustable air supporting guide rail, includes guide rail strip (1) and slider (3), the air film clearance has between slider (3) and guide rail strip (1), the air film clearance is including being used for supporting first air film (8) at guide rail strip (1) upside with slider (3), its characterized in that still includes electro-magnet (2), electro-magnet (2) are fixed on guide rail strip (1) and/or slider (3), and after electro-magnet (2) circular telegram, electro-magnet (2) produce and make guide rail strip (1) and slider (3) draw close to each other in vertical direction magnetic force.
2. An adjustable air-floating guide rail according to claim 1, characterized in that, in the width direction of the guide rail bar (1), a plurality of electromagnets (2) are arranged on the left side and the right side of the guide rail bar (1);
electromagnets (2) on the left side of the guide rail bar (1) are sequentially arranged along the length direction of the guide rail bar (1);
electromagnets (2) on the right side of the guide rail bar (1) are sequentially arranged along the length direction of the guide rail bar (1);
each electromagnet (2) can work independently.
3. An adjustable air-bearing guide rail according to claim 2, characterized in that the electromagnets (2) are all mounted on the slider (3);
the first air film (8) is arranged in the middle of the guide rail bar (1) in the width direction;
the left side and the right side of the sliding block (3) are provided with grooves connected with the side surfaces of the sliding block (3), and the electromagnets (2) are installed in the grooves.
4. An adjustable air-bearing guide rail according to claim 2, characterized in that the electromagnets (2) are all mounted on the slider (3);
the first air film (8) is arranged in the middle of the guide rail bar (1) in the width direction;
the electromagnets (2) are fixedly connected and installed on the sliding block (3) through the top surface and the bottom surface of the sliding block (3).
5. The adjustable-stiffness air rail according to claim 1, further comprising a displacement sensor (6), wherein the displacement sensor (6) is used for detecting the air film thickness of the first air film (8).
6. An adjustable stiffness air rail according to claim 5 characterised in that the number of displacement sensors (6) is two and that two displacement sensors (6) are fixed to the slider (3) in a diagonal arrangement with respect to each other.
7. The adjustable-stiffness air-bearing guide rail according to claim 5 or 6, further comprising a control system (7) with a signal input end in signal connection with a signal output end of the displacement sensor (6), wherein the control system (7): the working parameters of the electromagnet (2) are controlled by collecting the air film thickness data from the displacement sensor (6).
8. The air-floating guide rail with adjustable rigidity according to claim 1, characterized by further comprising a magnetic shielding sleeve (5) wrapped on the electromagnet (2), wherein the magnetic shielding sleeve (5) is of a box-shaped structure with one side open, and in the combination formed by the electromagnet (2) and the magnetic shielding sleeve (5), the open side of the magnetic shielding sleeve (5) corresponds to the working side of the electromagnet (2) when the guide rail bar (1) and the slider (3) are mutually attracted.
9. The adjustable air-bearing guide rail of claim 1, characterized in that the slider (3) is a block structure with a groove at the lower side, the cross section of the guide rail bar (1) is inverted T-shaped, the convex part at the upper side of the guide rail bar (1) is embedded in the groove, and the first air film (8) is positioned between the top side of the convex part and the bottom side of the groove;
the air film gap further comprises two second air films (9), and one second air film (9) is arranged between the side surface of the convex part and the side surface of the groove in the width direction of the guide rail bar (1).
10. An adjustable stiffness air rail according to claim 9 wherein there are a plurality and an even number of electromagnets (2);
the guide rail bar (1) comprises a guide rail base body, the lower end of the electromagnet (2) is fixed on the guide rail base body, and the electromagnet (2) is used as a protruding part on the guide rail bar (1);
the electromagnets (2) are arranged in two rows along the central line of the length direction of the guide rail bar (1);
two rows of electromagnets (2) are in line symmetry;
each electromagnet (2) can work independently.
CN202020211332.5U 2020-02-26 2020-02-26 Air supporting guide rail with adjustable rigidity Active CN212643323U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111156249A (en) * 2020-02-26 2020-05-15 中国工程物理研究院机械制造工艺研究所 Air supporting guide rail with adjustable rigidity

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111156249A (en) * 2020-02-26 2020-05-15 中国工程物理研究院机械制造工艺研究所 Air supporting guide rail with adjustable rigidity

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