CN212620119U

CN212620119U - Forced air cooling furnace body of diffusion and CVD equipment

Info

Publication number: CN212620119U
Application number: CN202020682446.8U
Authority: CN
Inventors: 王俊朝; 寇宗和; 杜武明
Original assignee: Shenzhen Fullshare Equipment Co ltd
Current assignee: Shenzhen Han's photovoltaic equipment Co.,Ltd.
Priority date: 2020-04-28
Filing date: 2020-04-28
Publication date: 2021-02-26
Anticipated expiration: 2030-04-28

Abstract

The utility model discloses a diffusion and CVD equipment's forced air cooling furnace body, including stove silk skeleton, interior heat preservation, air-cooled cooling system, outer heat preservation and stainless steel shell, interior heat preservation cup joints in the stove silk skeleton outside, the outside of heat preservation including air-cooled cooling system cup joints, outer heat preservation cup joints in the air-cooled cooling system outside, stainless steel shell cup joints the outside at outer heat preservation, air-cooled cooling system is used for the heat dissipation of furnace body. The air-cooled heat dissipation system is arranged outside the inner heat insulation layer of the furnace, and the used electric furnace wire is cooled in an accelerated manner through circulating ventilation at the outer side of the electric furnace wire through the air-cooled circulating pipeline divided into three sections, so that the cooling time of the furnace body after use is reduced, the frequency of the cyclic use of the furnace body is increased, and the overall working efficiency of the equipment is further increased.

Description

Forced air cooling furnace body of diffusion and CVD equipment

Technical Field

The utility model relates to a furnace body for diffusion and CVD equipment, in particular to a forced air cooling furnace body for diffusion and CVD equipment.

Background

The low-pressure diffusion equipment and the tubular CVD equipment are the most common technical equipment used in the solar photovoltaic industry, and the heat preservation furnace body is an essential important part of the two equipment. With the development of photovoltaic equipment technology, the requirements for reducing cost and improving efficiency are higher and higher, and the production speed of the original furnace body cannot meet the production requirement. The most direct and effective cost reduction and efficiency improvement method for improving the single machine productivity is to improve the use frequency of the furnace body, the furnace body needs to be heated to a higher temperature when in use, and then the furnace body can be processed next time after being cooled at the same temperature. In the prior art, the furnace body which is only provided with the heat preservation device is difficult to achieve rapid cooling, so that the production efficiency cannot be further improved.

SUMMERY OF THE UTILITY MODEL

In order to overcome the defects of the prior art, the utility model provides a furnace body cooling is accelerated by setting up an air-cooled heat dissipation system on the furnace body of diffusion and CVD equipment, and then the diffusion of increasing equipment production efficiency and the forced air-cooled furnace body of CVD equipment.

The utility model provides a technical scheme that its technical problem adopted is:

the utility model provides a diffusion and CVD equipment's forced air cooling furnace body, includes stove silk skeleton, interior heat preservation, air-cooled cooling system, outer heat preservation and stainless steel shell, interior heat preservation cup joints in the stove silk skeleton outside, the outside of heat preservation including air-cooled cooling system cup joints, outer heat preservation cup joints in the air-cooled cooling system outside, stainless steel shell cup joints in the outside of outer heat preservation, air-cooled cooling system is used for the heat dissipation of furnace body.

As the improvement of the technical scheme, the air-cooled radiating system comprises an annular radiating pipe, a heat-conducting connecting pipe, an air inlet pipe and an air outlet pipe, wherein the annular radiating pipe is provided with a plurality of groups.

As a further improvement of the technical scheme, the annular radiating pipes are provided with three groups, and two heat conduction connecting pipes and two air inlet pipes extend from two ends of each group of annular radiating pipes respectively.

As a further improvement of the technical scheme, the heat-conducting connecting pipe and the air inlet pipe are respectively arranged at the head end and the tail end of the annular radiating pipe, the head end and the tail end are respectively provided with the heat-conducting connecting pipe and the air inlet pipe, and each heat-conducting connecting pipe is connected with the air outlet pipe.

As a further improvement of the technical scheme, the furnace wire framework is composed of the electric furnace wires and a supporting framework, the supporting framework is provided with a plurality of supporting frameworks, the supporting frameworks are uniformly fixed on the periphery of the annular electric furnace wires, and the supporting framework is composed of a plurality of mounting blocks and long pins which connect the mounting blocks together.

As a further improvement of the technical scheme, the inner heat-insulating layer and the outer heat-insulating layer are both made of heat-insulating cotton, and the inner heat-insulating layer is made of a plurality of pieces of heat-insulating cotton.

As a further improvement of the technical scheme, the inner heat-insulating layer is arranged corresponding to the supporting framework, and the plurality of heat-insulating cotton are respectively clamped on the electric stove wires between the supporting frameworks.

As a further improvement of the technical scheme, the outer heat-insulating layer is made of tubular heat-insulating cotton, the stainless steel shell comprises two semi-tubular shells, and the tubular heat-insulating cotton is clamped outside the air-cooled heat-radiating system by the two semi-tubular shells.

The utility model has the advantages that: the utility model discloses a diffusion and CVD equipment's forced air cooling furnace body has set up the forced air cooling system in the interior heat preservation outside of stove, through falling into the air-cooled circulating line of three-section and cooling off used electric stove silk with higher speed through circulation ventilation in the outside of electric stove silk, reduces the cooling time of furnace body after using, has increased the frequency that the furnace body recycles, and then has increased the holistic work efficiency of equipment.

Drawings

The present invention will be further explained with reference to the drawings and examples.

FIG. 1 is a schematic view of the assembly of the present invention;

FIG. 2 is a structural exploded view of the present invention;

fig. 3 is a schematic structural view of the air-cooling heat dissipation system of the present invention.

1. An air-cooled heat dissipation system; 11. an annular radiating pipe; 12. a heat-conducting connecting pipe; 13. an air inlet pipe; 14. an air outlet pipe; 2. a furnace wire framework; 21. an electric furnace wire; 22. a support framework; 3. an inner insulating layer; 4. an outer insulating layer; 5. a stainless steel housing.

Detailed Description

The conception, the specific structure, and the technical effects produced by the present invention will be clearly and completely described below in conjunction with the embodiments and the accompanying drawings to fully understand the objects, the features, and the effects of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all embodiments, and other embodiments obtained by those skilled in the art without inventive labor based on the embodiments of the present invention all belong to the protection scope of the present invention. In addition, all the connection/connection relations referred to in the patent do not mean that the components are directly connected, but mean that a better connection structure can be formed by adding or reducing connection auxiliary components according to specific implementation conditions. The utility model discloses each technical feature in the creation can the interactive combination under the prerequisite that does not contradict conflict each other.

Referring to fig. 1 and 2, the forced air cooling furnace body of the diffusion and CVD equipment comprises a furnace wire framework 2, an inner heat-insulating layer 3, an air cooling heat-dissipating system 1, an outer heat-insulating layer 4 and a stainless steel shell 5, wherein the inner heat-insulating layer 3 is sleeved on the outer side of the furnace wire framework 2, the air cooling heat-dissipating system 1 is sleeved on the outer side of the inner heat-insulating layer 3, the outer heat-insulating layer 4 is sleeved on the outer side of the air cooling heat-dissipating system 1, the stainless steel shell 5 is sleeved on the outer side of the outer heat-insulating layer 4, and the air cooling heat-dissipating system 1 is used. The air-cooled heat dissipation system 1 arranged outside the inner heat preservation layer 3 dissipates heat of the heated furnace wire framework 2, so that the heat dissipation speed of the furnace wire framework 2 is increased, the furnace body can enter next processing after finishing one processing, the waiting time for the furnace to enter next processing after finishing one processing is reduced, the frequency of cyclic use of the furnace body is increased, and the working efficiency of the whole device is increased.

Referring to fig. 3, the air-cooled heat dissipation system 1 includes an annular heat dissipation pipe 11, a heat conductive connection pipe 12, an air inlet pipe 13 and an air outlet pipe 14, wherein the annular heat dissipation pipe 11 is provided with a plurality of groups. The annular radiating pipes 11 are provided with three groups, and two or more heat conducting connecting pipes 12 extend from two ends of each group of annular radiating pipes 11. The multiple groups of annular radiating pipes 11 are respectively used for circularly radiating, and for the air pipe radiating of one pipeline, the circulation frequency of the air pipes is higher when the pipelines radiate heat, the radiating speed is higher, and the cooling effect is better.

The heat conduction connecting pipe 12 and the air inlet pipe 13 are respectively located at the head end and the tail end of the annular radiating pipe 11, the head end and the tail end are both provided with one heat conduction connecting pipe 12 and one air inlet pipe 13, and each heat conduction connecting pipe 12 is connected with the air outlet pipe 14. The air outlet and the air inlet of the multi-section circulating heat dissipation pipeline are respectively connected through the air outlet pipe 14 and the air inlet pipes 13, air inlet of a plurality of pipelines is achieved, the pipeline simultaneously conducts the heat dissipation process of air outlet on the multi-section heat dissipation pipeline, and the heat dissipation efficiency of the heat dissipation system is guaranteed while the production cost is controlled.

Stove silk skeleton 2 comprises electric stove silk 21 and support chassis 22, support chassis 22 is equipped with a plurality ofly, and a week at annular electric stove silk 21 is fixed uniformly to a plurality of support chassis 22, support chassis 22 comprises a plurality of installation pieces and the long pin nail that links together the installation piece. The mounting holes with the same diameter as the electric stove wires 21 are formed in the mounting blocks of the supporting framework 22, the electric stove wires 21 sequentially penetrate through the mounting holes in the plurality of mounting blocks which are circumferentially arranged, the mounting blocks through which the electric stove wires 21 penetrate correspond to each other in the front-back direction, and the electric stove wires are sequentially inserted and connected together through the long pins. The arrangement of the installation block and the long pin can ensure that the number of the electric stove wires 21 can be flexibly increased and decreased, and the electric stove wires 21 can be stably installed, so that the service life of the electric stove wires 21 is prolonged.

The inner heat-insulating layer 3 and the outer heat-insulating layer 4 are both made of heat-insulating cotton, and the inner heat-insulating layer 3 is made of a plurality of pieces of heat-insulating cotton. The inner heat-insulating layer 3 is arranged corresponding to the supporting frameworks 22, and the plurality of heat-insulating cotton are respectively clamped on the electric stove wires 21 between the supporting frameworks 22. The cotton setting of interior heat preservation is preliminary heat preservation to electric stove silk 21, and the joint is cotton and the electric stove silk 21 direct contact of inlayer heat preservation in the inslot that supporting framework 22 and electric stove silk 21 constitute, does not set up other media in the centre, has avoided the heat loss of electric stove silk 21.

The outer heat-insulating layer 4 is tube-shaped heat-insulating cotton, the stainless steel shell 5 comprises two half-tube-shaped shells, and the tube-shaped heat-insulating cotton is clamped outside the air-cooled heat-radiating system 1 by the two half-tube-shaped shells. If directly set up the outside of electric stove silk 21 with cold wind cooling system, can produce great space between electric stove silk 21 and interior heat preservation 3, the in-process temperature that heats at electric stove silk 21 runs off easily, and the direct and electric stove silk 21 contact of heat dissipation tuber pipe still causes the damage of the two easily. Therefore, the cold air cooling system is arranged on the outer side of the inner heat-insulating layer 3, so that the heat of the electric stove wire 21 can be kept in the heating process, and a good cooling effect can be achieved in the process that the stove body is stopped to be used.

While the preferred embodiments of the present invention have been described, the present invention is not limited to the above embodiments, and those skilled in the art can make various equivalent modifications or substitutions without departing from the spirit of the present invention, and such equivalent modifications or substitutions are intended to be included within the scope of the present invention as defined by the appended claims.

Claims

1. A forced air cooling furnace body of diffusion and CVD equipment is characterized in that: including stove silk skeleton, interior heat preservation, forced air cooling system, outer heat preservation and stainless steel shell, interior heat preservation cup joints in the stove silk skeleton outside, the outside of heat preservation including forced air cooling system cup joints, outer heat preservation cup joints in the forced air cooling system outside, stainless steel shell cup joints in the outside of outer heat preservation, forced air cooling system is used for the heat dissipation of furnace body.

2. A forced air cooling furnace body of a diffusion and CVD apparatus according to claim 1, characterized in that: the air-cooled radiating system comprises an annular radiating tube, a heat-conducting connecting pipe, an air inlet pipe and an air outlet pipe, wherein the annular radiating tube is provided with a plurality of groups.

3. A forced air cooling furnace body of a diffusion and CVD apparatus according to claim 2, characterized in that: the annular radiating tubes are provided with three groups, and two heat conduction connecting pipes and two air inlet pipes extend out of two ends of each group of annular radiating tubes respectively.

4. A forced air cooling furnace body of a diffusion and CVD apparatus according to claim 3, characterized in that: the heat conduction connecting pipe and the air inlet pipe are respectively located at the head end and the tail end of the annular radiating pipe, the head end and the tail end are both provided with the heat conduction connecting pipe and the air inlet pipe, and each heat conduction connecting pipe is connected with the air outlet pipe.

5. A forced air cooling furnace body of a diffusion and CVD apparatus according to claim 1, characterized in that: the stove silk skeleton comprises electric stove silk and supporting framework, supporting framework is equipped with a plurality ofly, and a week at annular electric stove silk is fixed uniformly to a plurality of supporting framework, supporting framework comprises a plurality of installation pieces and the long pin nail that links together the installation piece.

6. A forced air cooling furnace body of a diffusion and CVD apparatus according to claim 5, wherein: the inner heat-insulating layer and the outer heat-insulating layer are both made of heat-insulating cotton, and the inner heat-insulating layer is composed of a plurality of pieces of heat-insulating cotton.

7. A forced air cooling furnace body of a diffusion and CVD apparatus according to claim 6, wherein: the inner heat-insulating layer is arranged corresponding to the supporting framework, and the plurality of heat-insulating cotton are respectively clamped on the electric stove wires between the supporting frameworks.

8. A forced air cooling furnace body of a diffusion and CVD apparatus according to claim 6, wherein: the outer heat preservation layer is tube-shape heat preservation cotton, the stainless steel shell includes two half-cylinder shells, and two half-cylinder shells are with the cotton card in tube-shape heat preservation in the forced air cooling system outside.