CN212599670U

CN212599670U - Mass transfer laser stripping device

Info

Publication number: CN212599670U
Application number: CN202021066903.7U
Authority: CN
Inventors: 蒋光平; 许时渊
Original assignee: Chongqing Kangjia Photoelectric Technology Research Institute Co Ltd
Current assignee: Chongqing Kangjia Photoelectric Technology Research Institute Co Ltd
Priority date: 2020-06-10
Filing date: 2020-06-10
Publication date: 2021-02-26
Anticipated expiration: 2030-06-10

Abstract

The utility model provides a huge transfer laser stripping off device, including control assembly, laser instrument, fixed shell, actuator and condensing lens. The control assembly comprises a processor, a laser modulation circuit and a scanning drive circuit, and an optical fiber is arranged at the emergent end of the laser; the fixed shell is fixedly arranged; the actuator is fixedly arranged on the fixed shell and is connected with the scanning driving circuit; the condensing lens is fixedly arranged at the front end of the fixed shell; an optical fiber is secured to the actuator and extends beyond an end of the actuator toward the collection optic to form a cantilevered free end, the cantilevered free end being positioned between the actuator and the collection optic. The actuator generates high-frequency vibration and then drives the free end of the cantilever to swing, light spots moving according to a certain rule are obtained through the light condensation effect of the condenser lens, the micro light-emitting diode can be peeled off from the temporary storage substrate when the light spots are focused at a specific position, and the whole mass transfer laser peeling device has the advantages of simple structure, high precision and the like.

Description

Mass transfer laser stripping device

Technical Field

The utility model relates to a LED technical field relates to a huge transfer laser stripping off device, simultaneously, still relates to a huge transfer laser stripping off device that simple structure and precision are high.

Background

The micro light emitting diode has more desirable photoelectric efficiency, brightness and contrast ratio and lower power consumption than a general light emitting diode. A plurality of micro light emitting diodes are loaded on the light emitting back plate to form a micro light emitting diode array. After the micro light emitting diode is formed on the growth substrate, the micro light emitting diode is generally transferred to the temporary storage substrate, and when the micro light emitting diode is required to be installed in the light emitting back plate, the micro light emitting diode is transferred to the light emitting back plate from the temporary storage substrate. The micro light emitting diode is fixed on the temporary storage substrate through the bonding layer, and the micro light emitting diode and the temporary storage substrate are separated from each other, which is called peeling in the industry. Generally, the key equipment used in the lift-off stage is a laser lift-off device.

The laser stripping device in the prior art adopts a galvanometer scanning mode to strip, the position of a light spot is controlled by controlling reflectors of an X axis and a Y axis, two scanning mirrors are combined to reflect light, and then the reflecting angles of the two scanning mirrors are controlled by the two galvanometers, so that the incident light beam is controlled to reach the angle of a field lens, and the focus position of the light spot is controlled. However, in the prior art, the laser lift-off device is a highly complex and precise device, which is particularly sensitive to external vibration, stress and motor precision, so that it is difficult to precisely control the track of the light spot. Meanwhile, the laser stripping device has the problems of large volume, complex system, inconvenient operation and difficult maintenance.

SUMMERY OF THE UTILITY MODEL

The to-be-solved technical problem of the utility model lies in, to prior art's above-mentioned defect, provide a huge transfer laser stripping off device, can peel off miniature emitting diode from keeping in the base plate, have advantages such as simple structure and precision height.

The utility model provides a technical scheme that technical problem adopted as follows:

a bulk transfer laser lift-off apparatus comprising:

the control assembly comprises a processor, a laser modulation circuit and a scanning driving circuit, wherein the processor is respectively connected with the laser modulation circuit and the scanning driving circuit;

the laser is connected with the laser modulation circuit, and an emergent end of the laser is provided with an optical fiber;

the fixed shell is fixedly arranged and plays a role in structural support;

the actuator is fixedly arranged on the fixed shell and is connected with the scanning driving circuit;

the condensing lens is fixedly arranged at the front end of the fixed shell; the optical fiber is fixed to the actuator and extends beyond an end of the actuator toward the condenser lens to form a cantilevered free end, the cantilevered free end being positioned between the actuator and the condenser lens.

Compared with the prior art, the technical scheme has the beneficial effects that: control the laser instrument through control assembly and send laser and control actuator vibration, on the one hand, laser is followed cantilever free end outgoing, and on the other hand, the actuator produces the oscillation of drive cantilever free end behind the high frequency vibration, obtains the facula according to certain law motion through the spotlight effect of condensing lens, and the facula focus just can be peeled off miniature emitting diode from the base plate of keeping in when the particular position, and whole huge transfer laser stripping off device has advantages such as simple structure and precision height.

Furthermore, a fixed connecting piece is further arranged in the fixed shell, the fixed connecting piece is of an annular structure, the actuator is sleeved in an inner ring of the fixed connecting piece, and the actuator is fixedly arranged in the fixed shell through the fixed connecting piece.

The beneficial effect who adopts above-mentioned scheme is: be provided with fixed connector in fixed shell, can fix the actuator in fixed shell better through fixed connector for the stability of actuator is better.

Further, the laser is an ultraviolet laser.

Furthermore, the exit end of the laser is also provided with a coupling unit, and the optical fiber is arranged at the exit end of the laser through the coupling unit.

The beneficial effect who adopts above-mentioned scheme is: the optical fiber is arranged at the emergent end of the laser through the coupling unit, and the emergent efficiency of the laser is improved through the coupling unit.

Furthermore, the fixed shell is vertical to the temporary storage substrate carrying the micro light-emitting diode to be transferred.

The beneficial effect who adopts above-mentioned scheme is: the temporary storage substrate to be stripped and the micro light-emitting diode can be conveniently placed below the fixed shell, and the device has the advantage of convenience in operation.

Furthermore, a cantilever light-gathering component is arranged at the free end of the cantilever;

the cantilever light-gathering component is of a hemispherical structure, a first mounting pore passing through a sphere center is arranged on the cantilever light-gathering component, and the free end of the cantilever extends into the first mounting pore;

the cantilever free end with be provided with the adhesive between the first installation pore, cantilever spotlight component pass through the adhesive fixed set up in on the cantilever free end.

The beneficial effect who adopts above-mentioned scheme is: the cantilever free end is provided with the cantilever light-gathering component, and laser can be focused before being emitted from the optical fiber through the cantilever light-gathering component, so that the forming effect of light spots is improved.

Furthermore, a gravity bearing assembly is also arranged at the free end of the cantilever;

the gravity bearing assembly is of a tubular structure, a second mounting pore is arranged in the gravity bearing assembly, and the free end of the cantilever penetrates through the second mounting pore and extends out of the second mounting pore;

adhesive glue is arranged between the free end of the cantilever and the second mounting pore, and the gravity bearing assembly is fixedly arranged on the free end of the cantilever through the adhesive glue;

the gravity bearing assembly is arranged behind the cantilever light-gathering assembly.

The beneficial effect who adopts above-mentioned scheme is: because the fixed shell is arranged along the vertical direction, and the gravity bearing assembly is arranged on the free end of the cantilever, a certain pulling force can be provided for the free end of the cantilever through the gravity bearing assembly, so that the free end of the cantilever is prevented from drifting to a large extent.

Furthermore, the cantilever light-gathering component and the gravity bearing component are of an integrally formed structure.

The beneficial effect who adopts above-mentioned scheme is: cantilever spotlight subassembly and gravity bear the weight of the subassembly and be integrated into one piece structure, and the structure sets up more rationally.

Furthermore, the cantilever light-gathering component is made of a transparent material, and the actuator is made of piezoelectric ceramics.

The beneficial effect who adopts above-mentioned scheme is: piezoelectric ceramics are adopted as the material of the actuator, and the processor can control the actuator to vibrate according to a given rule by providing an electric signal to the actuator through the scanning driving circuit, so that a specific light spot is formed.

Furthermore, the optical fiber penetrates through the fixed shell, and a first sealing ring is arranged between the optical fiber and the fixed shell;

and a second sealing ring is arranged between the condensing lens and the fixed shell.

The beneficial effect who adopts above-mentioned scheme is: be provided with first sealing washer and second sealing washer, can form a relative confined space in fixed shell, prevent that external dust particle from getting into, guarantee the cleanness of camera lens subassembly and cantilever free end.

Further, the fixed shell is made of stainless steel, aluminum or plastic.

The beneficial effect who adopts above-mentioned scheme is: stainless steel or aluminum or plastic is used as the material of the fixed shell, and the device has the advantages of simple structure, easiness in molding, low manufacturing cost and the like.

Drawings

Fig. 1 is an overall schematic view of a bulk transfer laser lift-off device according to the present invention.

Fig. 2 is a schematic diagram of the relative positions of the first temporary substrate and the second temporary substrate in the bulk transfer laser lift-off device of the present invention.

Fig. 3 is a schematic diagram of the relative positions of the first temporary substrate, the second temporary substrate and the mask plate in the bulk transfer laser lift-off device of the present invention.

Fig. 4 is a schematic diagram of the relative positions of the first temporary substrate and the second temporary substrate after being peeled off in the bulk transfer laser peeling apparatus of the present invention.

Fig. 5 is a schematic view of a combination of the free end of the cantilever, the light-gathering assembly of the cantilever and the gravity-carrying assembly in the bulk transfer laser lift-off device of the present invention.

Fig. 6 is an exploded view of the free end of the cantilever, the light-gathering assembly of the cantilever and the gravity-carrying assembly of the bulk transfer laser lift-off device of the present invention.

Fig. 7 is a schematic diagram of a spiral scanning track in a bulk transfer laser lift-off device according to the present invention.

Fig. 8 is a schematic view of a zigzag scanning track in a bulk transfer laser lift-off device according to the present invention.

In the figures, the list of components represented by the various reference numbers is as follows:

the device comprises a control component 1, a laser 2, an optical fiber 3, a fixed shell 4, an actuator 5, a condensing lens 6, a coupling unit 7, a temporary storage substrate 8 to be stripped and a micro light-emitting diode 9;

a processor 101, a laser modulation circuit 102, a scan drive circuit 103;

a cantilever free end 301, a cantilever light focusing assembly 302, a gravity bearing assembly 303, a first mounting aperture 304, a second mounting aperture 305;

a fixed connector 401;

the temporary storage substrate comprises a first temporary storage substrate 901, a first bonding layer 902, a second bonding layer 903, a second temporary storage substrate 904 and a mask plate 905.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention clearer and clearer, the present invention will be described in further detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

In the description of the present invention, it should be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or assembly referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may for example be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; the two components can be directly connected or indirectly connected through an intermediate medium, and the two components can be communicated with each other. When an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When a component is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The specific meaning of the above terms in the present invention can be understood in specific cases for those skilled in the art.

The micro light emitting diode has more ideal photoelectric efficiency, brightness and contrast ratio and lower power consumption than the common light emitting diode, is popular in the industry and consumers, and has higher market share. In order to realize the display function, a plurality of micro light emitting diodes are loaded on the light emitting backplane to form a micro light emitting diode array.

After the micro-leds are formed on the growth substrate, the micro-leds are generally transferred to a temporary storage substrate, which is generally divided into a first temporary storage substrate 901 and a second temporary storage substrate 904.

As shown in fig. 2, the micro light emitting diode 9 is connected to the first temporary storage substrate 901 through the first adhesive layer 902, and the second temporary storage substrate 904 is provided with the second adhesive layer 903, when the micro light emitting diode 9 needs to be transferred from the first temporary storage substrate 901 to the second temporary storage substrate 904, the second adhesive layer 903 on the second temporary storage substrate 904 needs to be adhered to the micro light emitting diode 9, and then the first adhesive layer 902 is removed, which is shown in fig. 3 and fig. 4.

In general, the first adhesive layer 902 and the second adhesive layer 903 may specifically include one or more of a fluorine coating, silicone, a water-soluble adhesive, PVA, polyimide, and the like. As shown in fig. 3, after the second adhesive layer 903 on the second temporary storage substrate 904 is adhered to the micro light emitting diode 9, the laser emitted by the laser peeling device is irradiated onto the first temporary storage substrate 901 through the mask 905, and the laser selectively irradiates the first adhesive layer 902 at the position corresponding to the micro light emitting diode 9 to be transferred, so that the first adhesive layer is tack-free or directly vaporized, and the micro light emitting diode 9 to be transferred is peeled off from the first temporary storage substrate 901 and adhered to the second temporary storage substrate 904. As shown in fig. 4, after removing the first adhesive layer 902 at a specific position, the specific micro-leds 9 can be peeled off from the first temporary substrate 901 and transferred to the second temporary substrate 904.

It can be seen that during the lift-off process, the laser landing point needs to be precisely controlled. The laser stripping device in the prior art adopts a galvanometer scanning mode to strip, the position of a light spot is controlled by controlling reflectors of an X axis and a Y axis, two scanning mirrors are combined to reflect light, and then the reflecting angles of the two scanning mirrors are controlled by the two galvanometers, so that the incident light beam is controlled to reach the angle of a field lens, and the focus position of the light spot is controlled. However, in the prior art, the laser lift-off device is a highly complex and precise device, which is particularly sensitive to external vibration, stress and motor precision, so that it is difficult to precisely control the track of the light spot. Meanwhile, the laser stripping device has the problems of large volume, complex system, inconvenient operation and difficult maintenance.

As shown in fig. 1, in order to solve the above problem, the present invention provides a bulk transfer laser lift-off device, which comprises a control assembly 1, a laser 2, a fixed housing 4, an actuator 5 and a condenser lens 6. Specifically, the control assembly 1 comprises a processor 101, a laser modulation circuit 102 and a scanning driving circuit 103, wherein the processor 101 is respectively connected with the laser modulation circuit 102 and the scanning driving circuit 103; the laser 2 is connected with the laser modulation circuit 102, and an optical fiber 3 is arranged at the emergent end of the laser 2; the fixed shell 4 is fixedly arranged, and the fixed shell 4 plays a role in structural support; the actuator 5 is fixedly arranged on the fixed shell 4, and the actuator 5 is connected with the scanning driving circuit 103; the condenser lens 6 is fixedly arranged at the front end of the fixed housing 4, and specifically, the actuator 5 is fixedly arranged at the rear end of the fixed housing 4; the end of the optical fiber 3 fixed to the actuator 5 and extending out of the actuator 5 towards the condenser lens 6 forms a cantilever free end 301, the cantilever free end 301 being located between the actuator 5 and the condenser lens 6.

The control assembly 1 is used for controlling the laser 2 and the actuator 5, the control assembly 1 controls the laser 2 to emit laser light through the laser modulation circuit 102, and the control assembly 1 controls the actuator 5 to vibrate through the scanning driving circuit 103. The stationary housing 4 is the structural support portion of the device. The actuator 5, upon receiving the control signal, emits a high frequency jitter according to the control signal. The condensing lens 6 is used for condensing light.

The utility model provides a huge transfer laser stripping off device's working process does: the control component 1 controls the laser 2 to emit laser through the laser modulation circuit 102, and the laser is transmitted through the optical fiber 3 and is emitted from the cantilever free end 301 of the optical fiber 3; the control component 1 controls the actuator 5 to emit high-frequency vibration through the scanning drive circuit 103, and the free end 301 of the cantilever moves along with the actuator 5 in the high-frequency vibration process, so that the emitting point of the laser moves in a given track and emits a laser beam, and a point light source is converted into a moving line light source; after the laser further passes through the condenser lens 6, the condenser lens 6 collects the light and irradiates the temporary storage substrate 8 to be peeled, so that a predetermined scanning track is formed on the temporary storage substrate 8 to be peeled, and then the specific micro light emitting diode 9 is peeled. As shown in fig. 7 and 8, in fig. 7, the laser forms a spiral scanning track on the temporary substrate 8 to be stripped, and in fig. 8, the laser forms a zigzag scanning track on the temporary substrate 8 to be stripped

It should be noted that, the processor 101 is an MCU chip, and it is a prior art to control the laser 2 and the actuator 5 through the processor 101, the laser modulation circuit 102 and the scan driving circuit 103, and the present invention only applies this prior art, and the innovation point is not here. The actuator 5 is provided at the rear end of the fixed housing 4, and the condenser lens 6 is provided at the front end of the fixed housing 4, and these "rear end" and "front end" are relative concepts in terms of structural position. With the emitting direction of the laser as a reference, the direction along the emitting direction of the laser is forward, and the direction opposite to the emitting direction of the laser is backward. The utility model discloses in, actuator 5 and condenser lens 6's positional relationship, only need guarantee that laser through condenser lens 6 reejection can. As shown in fig. 1, the front end of the actuator 5, i.e., the end of the actuator 5 in the laser emission direction, and conversely, the rear end of the actuator 5, i.e., the end of the actuator 5 opposite to the laser emission direction. According to the above reference, the actuator 5 is fixedly disposed at the rear end of the fixed housing 4, and the condenser lens 7 is fixedly disposed at the front end of the fixed housing 4, which means that in the emitting process of the laser light, the laser light firstly passes through the actuator 5 and then passes through the condenser lens 6, which is shown in fig. 1 as the actuator 5 is disposed at the upper portion of the fixed housing 4, and the condenser lens 6 is disposed at the lower portion of the fixed housing 4.

Therefore, the laser 2 is controlled to emit laser and the actuator 5 is controlled to vibrate through the control assembly 1, on one hand, the laser is emitted from the free end 301 of the cantilever, on the other hand, the actuator 5 drives the free end 301 of the cantilever to swing after generating high-frequency vibration, light spots moving according to a certain rule are obtained through the condensation effect of the condenser lens 6, when the light spots are focused at specific positions, the light spots are convenient to control the falling points, the micro light-emitting diodes 9 can be stripped from the temporary storage substrate, and the whole huge transfer laser stripping device has the advantages of simple structure, high precision and the like.

Preferably, a fixed connector 401 is further disposed in the fixed housing 4, the fixed connector 401 is an annular structure, the actuator 5 is sleeved in an inner ring of the fixed connector 401, and the actuator 5 is fixedly disposed in the fixed housing 4 through the fixed connector 401.

The stationary housing 4 is intended to serve as a structural support, however, in practical applications it is difficult to place the actuator 5 directly on the stationary housing 4. For this purpose, a fixed connection 401 is provided in the stationary housing 4, by means of which fixed connection 401 the actuator 5 can be better fixedly arranged in the stationary housing 4, so that the stability of the actuator 5 is better.

Preferably, the exit end of the laser 2 is further provided with a coupling unit 7, and the optical fiber 3 is disposed at the exit end of the laser 2 through the coupling unit 7. The optical fiber 3 is arranged at the emitting end of the laser 2 through the coupling unit 7, and the emitting efficiency of the laser is improved through the arrangement of the coupling unit 7.

Preferably, the fixed housing 4 is perpendicular to the temporary storage substrate carrying the micro-leds to be transferred. Specifically, the fixed housing 4 is disposed in a vertical direction, that is, a central axis of the fixed housing 4 is perpendicular to a horizontal plane. The stationary housing 4 is disposed in a vertical direction so that the laser light also propagates substantially from top to bottom. When the laser track moves to the position corresponding to the micro light-emitting diode 9 to be transferred, the laser 2 emits laser, so that the micro light-emitting diode 9 to be transferred is separated from the temporary storage substrate to be transferred; when the laser track moves to the position corresponding to other micro light-emitting diodes 9 which do not need to be transferred, the laser 2 is turned off and does not emit laser, so that the micro light-emitting diodes 9 which do not need to be transferred are continuously left on the substrate. Therefore, when the stripping operation is needed, the temporary storage substrate to be stripped and the micro light-emitting diode 9 are only needed to be placed below the fixed shell 4, so that the laser spot can be ensured to fall on a specific position, and the stripping device has the advantage of convenience in operation. Specifically, the laser 2 is an ultraviolet laser.

As shown in fig. 5, preferably, a cantilever light-gathering component 302 is further disposed on the cantilever free end 301; the cantilever light-gathering component 302 is a hemispherical structure, a first installation pore 304 passing through a sphere center is arranged on the cantilever light-gathering component 302, and the free end 301 of the cantilever extends into the first installation pore 304; an adhesive is disposed between the free end 301 of the cantilever and the first mounting fine hole 304, and the cantilever light-gathering component 302 is fixedly disposed on the free end 301 of the cantilever through the adhesive.

The cantilever free end 301 is a part of the optical fiber 3 and is located at the end of the optical fiber 3, and the optical fiber 3 only plays a role of light conduction and cannot condense light, so that there is a problem that the laser light emitted from the cantilever free end 301 may have poor directional uniformity. And be provided with cantilever spotlight component 302 on cantilever free end 301, can focus on laser through cantilever spotlight component 302 before the emergence from optic fibre 3, can correct the direction of laser, solve the poor problem of direction uniformity to a certain extent to improve the formation effect of facula.

As shown in fig. 5 and 6, preferably, a gravity bearing assembly 303 is further disposed on the free end 301 of the cantilever; the gravity bearing assembly 303 is a tubular structure, a second installation pore 305 is formed in the gravity bearing assembly 303, and the cantilever free end 301 is inserted into the second installation pore 305 and extends out of the second installation pore 305; adhesive glue is arranged between the cantilever free end 301 and the second mounting pore 305, and the gravity bearing component 303 is fixedly arranged on the cantilever free end 301 through the adhesive glue; the gravity bearing assembly 303 is disposed behind the cantilever light focusing assembly 302.

Referring to fig. 5 and 6, after the laser light exits from the cantilever free end 301, the laser light passes through the light-gathering action of the cantilever light-gathering component 302, and therefore, the cantilever light-gathering component 302 is located at a position before the end of the cantilever free end 301. The gravity bearing assembly 303 is used for providing a downward pulling force for the cantilever light focusing assembly 302, and the laser emission process does not need to pass through the cantilever light focusing assembly 302, and accordingly, the gravity bearing assembly 303 is located behind the end portion of the cantilever free end 301, which is shown in fig. 5 and 6, that is, the gravity bearing assembly 303 is located above the cantilever light focusing assembly 302.

When the actuator 5 vibrates at high frequency, the free end 301 of the cantilever swings. Since the free end 301 of the cantilever has a small mass, it is easy to drift during the swinging process, so that the laser emitting direction is not toward the condensing lens 6, but toward the fixed housing 4. After the gravity bearing component 303 is arranged, because the fixed shell 4 is vertically arranged, the gravity bearing component 303 can provide a downward pulling force for the gravity bearing component 303 under the action of gravity, so that the free end 301 of the cantilever is prevented from drifting to a large extent, and the emitting direction of laser light is ensured to face the condensing lens 6.

Specifically, the cantilever light-gathering component 302 and the gravity-bearing component 303 are an integrally formed structure. The cantilever light-gathering component 302 and the gravity bearing component 303 are of an integrally formed structure, and the structural arrangement is more reasonable. More specifically, the cantilever light-gathering component 302 is made of a transparent material, and the actuator 5 is made of a piezoelectric ceramic. The piezoelectric ceramic is used as the material of the actuator 5, the piezoelectric ceramic is an information functional ceramic material capable of converting mechanical energy and electric energy into each other, and the processor 101 can control the actuator 5 to vibrate according to a given rule by providing an electric signal to the actuator 5 through the scanning driving circuit 103, so as to form a specific light spot. More specifically, the material of the fixed housing 4 is stainless steel, aluminum or plastic. Stainless steel or aluminum or plastic is used as the material of the fixed shell 4, and the device has the advantages of simple structure, easiness in molding, low manufacturing cost and the like.

Preferably, the optical fiber 3 is inserted into the fixed housing 4, and a first sealing ring is arranged between the optical fiber 3 and the fixed housing 4; a second sealing ring is arranged between the condensing lens 6 and the fixed shell 4.

If external dust particles enter the fixed shell 4 and then attach to the light-emitting part of the free end 301 of the cantilever or the condensing lens 6, the dust particles have a large influence on the laser in the laser emitting process, so that the power is reduced if the dust particles are light, and the device is burnt if the dust particles are heavy. For this purpose, a first sealing ring and a second sealing ring are provided, which can form a relatively closed space in the stationary housing 4, preventing the entry of external dust particles, and ensuring the cleanliness of the lens assembly and the free end 301 of the cantilever.

To sum up, the utility model provides a huge transfer laser stripping off device, including control assembly 1, laser instrument 2, fixed shell 4, actuator 5 and condensing lens 6. The control component 1 comprises a processor 101, a laser modulation circuit 102 and a scanning driving circuit 103, wherein the processor 101 is respectively connected with the laser modulation circuit 102 and the scanning driving circuit 103; the laser 2 is connected with the laser modulation circuit 102, and an optical fiber 3 is arranged at the emergent end of the laser 2; the fixed shell 4 is fixedly arranged, and the fixed shell 4 plays a role in structural support; the actuator 5 is fixedly arranged at the rear end of the fixed shell 4, and the actuator 5 is connected with the scanning driving circuit 103; the condenser lens 6 is fixedly arranged at the front end of the fixed shell 4; the optical fiber 3 passes through the actuator 5 and is formed with a cantilever free end 301 at a front end of the actuator 5, the cantilever free end 301 being located between the actuator 5 and the condenser lens 6. Control laser 2 through control assembly 1 and send laser and control actuator 5 vibration, on the one hand, laser is followed cantilever free end 301 outgoing, and on the other hand, actuator 5 produces the high-frequency vibration after and drives cantilever free end 301 swing, obtains the facula according to certain law motion through the spotlight effect of condensing lens 6, and the facula focus just can be peeled off miniature emitting diode 9 from the base plate of keeping in storage when the particular position, and whole huge transfer laser stripping off device has advantages such as simple structure and precision height.

It is to be understood that the invention is not limited to the above-described embodiments, and that modifications and variations may be made by those skilled in the art in light of the above teachings, and all such modifications and variations are intended to be included within the scope of the invention as defined in the appended claims.

Claims

1. A bulk transfer laser lift-off apparatus, comprising:

the fixed shell is fixedly arranged and plays a role in structural support;

the condensing lens is fixedly arranged at the front end of the fixed shell;

the optical fiber is fixed to the actuator and extends beyond an end of the actuator toward the condenser lens to form a cantilevered free end, the cantilevered free end being positioned between the actuator and the condenser lens.

2. The bulk transfer laser lift-off apparatus according to claim 1, wherein: the actuator is characterized in that a fixed connecting piece is further arranged in the fixed shell, the fixed connecting piece is of an annular structure, the actuator is sleeved in an inner ring of the fixed connecting piece, and the actuator is fixedly arranged in the fixed shell through the fixed connecting piece.

3. The bulk transfer laser lift-off apparatus according to claim 1, wherein: the laser is an ultraviolet laser.

4. The bulk transfer laser lift-off apparatus according to claim 1, wherein: the fixed shell is vertical to the temporary storage substrate carrying the micro light-emitting diode to be transferred.

5. The bulk transfer laser lift-off apparatus according to claim 4, wherein: the free end of the cantilever is also provided with a cantilever light-gathering component;

6. The bulk transfer laser lift-off apparatus according to claim 5, wherein: the free end of the cantilever is also provided with a gravity bearing assembly;

7. The bulk transfer laser lift-off apparatus according to claim 6, wherein: the cantilever light-gathering component and the gravity bearing component are of an integrally formed structure.

8. The bulk transfer laser lift-off apparatus according to claim 7, wherein: the cantilever light-gathering component is made of transparent materials, and the actuator is made of piezoelectric ceramics.

9. A bulk transfer laser lift-off apparatus according to any one of claims 1 to 8, wherein: the optical fiber penetrates through the fixed shell, and a first sealing ring is arranged between the optical fiber and the fixed shell;

10. A bulk transfer laser lift-off apparatus according to any one of claims 1 to 8, wherein: the fixed shell is made of stainless steel, aluminum or plastic.