CN212568549U

CN212568549U - Sapphire crystal orientation high-precision automatic angle measuring device

Info

Publication number: CN212568549U
Application number: CN202021104154.2U
Authority: CN
Inventors: 李浩瀚
Original assignee: Shenzhen Lanbaoyuan Photoelectric Technology Co ltd
Current assignee: Shenzhen Lanbaoyuan Photoelectric Technology Co ltd
Priority date: 2020-06-16
Filing date: 2020-06-16
Publication date: 2021-02-19
Anticipated expiration: 2030-06-16

Abstract

The utility model discloses a sapphire crystal orientation high accuracy automatic measurement angle device, including workstation and scintillation detector, the fixed X ray generator that is equipped with in workstation top one side, the fixed angle appearance that is equipped with of workstation top opposite side, be provided with the X optical gate on the X ray generator, the scintillation detector passes through the fixed setting of connecting block and is in on the angle appearance, just the scintillation detector is located X ray generator offside, the scintillation detector with X ray generator corresponds signal connection, the angle appearance top is equipped with elevating system, the elevating system top is equipped with the rotation motor, the output of rotating the motor is connected with the bull stick. Has the advantages that: the round rod is pulled in advance, the telescopic spring of the round rod is shortened, the wafer to be tested is placed between the ceramic plates and is supported by hands, and the wafer to be tested is reset and extended through the telescopic spring, so that the two ceramic plates clamp the wafer to be tested, and the wafer to be tested is convenient to detach.

Description

Sapphire crystal orientation high-precision automatic angle measuring device

Technical Field

The utility model relates to a precious stone crystal orientation field particularly, relates to a sapphire crystal orientation high accuracy automatic angle measuring device.

Background

The crystal orientation of the grown sapphire single crystal lump is firstly found out, the sapphire single crystal lump is processed into crystal ingots with various specified diameters and then is processed into wafers, the processed sapphire single crystal wafers need to be rechecked for crystal defects and crystal orientation angles, and the rechecking inspection for the crystal orientation angles of the wafers is carried out while finding out the defective wafers. The traditional sapphire crystal orientation angle rechecking is carried out by adopting a sapphire single crystal orientation instrument consisting of a workbench, an upper cover plate, a large-scale high-voltage transformer, an electric appliance cabinet, a goniometer and the like, and the adopted method comprises the following steps: the signal of the X-ray reflected by the sapphire single crystal wafer through the orientation instrument is received and amplified by the metal tube, the peak value of the X-ray is directly found out on the microammeter, and the correctness of the crystal orientation angle of the sapphire single crystal wafer is judged.

An effective solution to the problems in the related art has not been proposed yet.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a sapphire crystal orientation high accuracy automatic measure angle device to solve the problem that provides in the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme:

a sapphire crystal orientation high-precision automatic angle measuring device comprises a workbench and a scintillation detector, wherein an X-ray generator is fixedly arranged on one side of the top end of the workbench, an angle instrument is fixedly arranged on the other side of the top end of the workbench, an X-ray shutter is arranged on the X-ray generator, the scintillation detector is fixedly arranged on the angle instrument through a connecting block, the scintillation detector is positioned on the opposite side of the X-ray generator, the scintillation detector is in corresponding electrical signal connection with the X-ray generator, a lifting mechanism is arranged on the top end of the angle instrument, a rotating motor is arranged on the top end of the lifting mechanism, the output end of the rotating motor is connected with a rotating rod, an L-shaped sample platform is fixedly arranged on the top end of the rotating rod, a vertical plate is arranged on the top end of the L-shaped sample platform, a round rod is movably sleeved on the vertical plate, and a clamping plate is positioned at one end, the grip block with fixed expanding spring that is equipped with between the vertical board, the expanding spring cover is in on the round bar, the round bar other end is fixed to be equipped with and draws the piece, the grip block with the equal fixed paste of the corresponding one end of L type sample platform has the ceramic plate, it is connected with speed control mechanism to rotate the motor.

Furthermore, the corner edge of the bottom end of the workbench is fixedly provided with a moving rod, and the bottom end of the moving rod is provided with universal wheels with brake pads.

Further, elevating system is lower sleeve and upper sleeve pole, the cover is established to upper sleeve pole bottom in the lower sleeve, the spiral is inserted and is equipped with the threaded rod on the lower sleeve, the lower sleeve is fixed the workstation top, upper sleeve pole top with rotate the connection of motor outer wall bottom, threaded rod one end is fixed and is equipped with the rotation hand lever.

Further, a mounting plate is fixedly arranged on one side of the bottom of the vertical plate, and the mounting plate is fixedly mounted at the top end of the L-shaped sample table through screws.

Furthermore, the rotating speed control mechanism is a variable frequency controller, the variable frequency controller is fixed at the top end of the workbench, and the variable frequency controller is connected with the rotating motor through a wire.

Compared with the prior art, the utility model discloses following beneficial effect has:

x-ray signals generated by an X-ray generator are generated through a light outlet hole of an X-ray shutter on the X-ray generator, after being reflected by a wafer to be detected placed on a ceramic plate on an L-shaped sample table which can rotate by three hundred and sixty degrees through a rotating motor, the signals received by a scintillation detector are amplified, the crystal orientation of the wafer to be detected and the defects of a detected crystal are found out through parameter signals such as the peak value, the half peak value and the like of the X-ray signals displayed on a milliammeter on the X-ray generator, an X-ray signal amplification system is also transmitted to a centralized control room for centralized data processing through a communication interface of the X-ray generator after being amplified, in the process, a lifting mechanism can be manually adjusted to adjust the height of the wafer to be detected so as to enable the wafer to correspond to the scintillation detector and the X-ray generator, the measurement accuracy is improved, and when the rotating motor rotates the wafer to be detected, the rotating speed of the rotating motor is controlled through a rotating speed control mechanism, avoid rotating too fast and influence the precision of measuring the wafer, stimulate the round bar in advance, make its expanding spring shorten to put the wafer to be surveyed between the ceramic plate, hold with the hand, rethread expanding spring resets the extension, thereby two ceramic plates press from both sides tightly to be surveyed the brilliant, also are convenient for dismantle simultaneously.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.

Fig. 1 is a front view of a sapphire crystal orientation high-precision automatic angle measuring device according to the embodiment of the present invention.

Reference numerals:

1. a work table; 2. an X-ray generator; 3. an angle gauge; 4. an X optical shutter; 5. a scintillation detector; 6. connecting blocks; 7. rotating the motor; 8. a rotating rod; 9. an L-shaped sample stage; 10. a vertical plate; 11. a round bar; 12. a clamping plate; 13. a tension spring; 14. a ceramic plate; 15. a travel bar; 16. a universal wheel; 17. a lower sleeve; 18. an upper loop bar; 19. a threaded rod; 20. mounting a plate; 21. and a variable frequency controller.

Detailed Description

The following, with reference to the drawings and the detailed description, further description of the present invention is made:

in order to make the above objects, features and advantages of the present invention more clearly understood, the present invention will be further described with reference to the accompanying drawings and examples. It should be noted that the embodiments and features of the embodiments of the present application may be combined with each other without conflict.

In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, however, the present invention may be practiced in other ways than those specifically described herein, and therefore the present invention is not limited to the limitations of the specific embodiments of the present disclosure.

The first embodiment is as follows:

referring to fig. 1, a sapphire crystal orientation high-precision automatic angle measuring device according to an embodiment of the present invention includes a worktable 1 and a scintillation detector 5, an X-ray generator 2 is fixedly disposed on one side of the top end of the worktable 1, an angle meter 3 is fixedly disposed on the other side of the top end of the worktable 1, an X-ray gate 4 is disposed on the X-ray generator 2, the scintillation detector 5 is fixedly disposed on the angle meter 3 through a connecting block 6, the scintillation detector 5 is located on the opposite side of the X-ray generator 2, the scintillation detector 5 is electrically connected to the X-ray generator 2 in correspondence, a lifting mechanism is disposed on the top end of the angle meter 3, a rotating motor 7 is disposed on the top end of the lifting mechanism, a rotating rod 8 is connected to an output end of the rotating motor 7, an L-shaped sample table 9 is fixedly disposed on the top end of the rotating rod 8, a vertical plate 10 is disposed on the top end of the L-shaped sample, the movable sleeve is equipped with round bar 11 on vertical board 10, round bar 11 is located the fixed grip block 12 that is equipped with of 9 one ends of L type sample platform, grip block 12 with fixed expanding spring 13 that is equipped with between vertical board 10, expanding spring 13 cover is in on the round bar 11, the fixed pull block that is equipped with in 11 other ends of round bar, grip block 12 with the equal fixed ceramic plate 14 that pastes of the corresponding one end of L type sample platform 9, it is connected with speed control mechanism to rotate motor 7.

Example two:

referring to fig. 1, for a workbench 1, moving rods 15 are fixedly arranged at corner edges of the bottom end of the workbench 1, and universal wheels 16 with brake pads are mounted at the bottom ends of the moving rods 15.

Through the above technical scheme of the utility model, beneficial effect: the moving rod 15 and the universal wheel 16 are arranged, so that the whole device can move conveniently, and when the device does not move, the universal wheel 16 is braked through the brake pad.

Example three:

referring to fig. 1, for the lifting mechanism, the lifting mechanism is a lower sleeve 17 and an upper sleeve 18, the bottom of the upper sleeve 18 is sleeved in the lower sleeve 17, a threaded rod 19 is spirally inserted into the lower sleeve 17, the lower sleeve 17 is fixed at the top end of the workbench 1, the top end of the upper sleeve 18 is connected with the bottom end of the outer wall of the rotating motor 7, and a rotating hand lever is fixedly arranged at one end of the threaded rod 19.

Through the above technical scheme of the utility model, beneficial effect: the upper sleeve rod 18 is manually lifted and slid in the lower sleeve 17, so that the height of the wafer to be measured is adjusted, and after the adjustment is completed, the wafer is positioned and fixed through the threaded rod 19.

Example four:

referring to fig. 1, for the vertical plate 10, a mounting plate 20 is fixedly arranged on one side of the bottom of the vertical plate 10, and the mounting plate 20 is fixedly mounted at the top end of the L-shaped sample stage 9 through screws.

Through the above technical scheme of the utility model, beneficial effect: the mounting plate 20 is fixedly mounted at the top end of the L-shaped sample table 9 through screws, so that the vertical plate 10 is convenient to detach, the whole body is replaced, the extension spring 13 is replaced, and the phenomenon that the extension spring 13 loses elasticity after being used for a long time to cause the effect that a wafer cannot be clamped is avoided.

Example five:

referring to fig. 1, for the rotating speed control mechanism, the rotating speed control mechanism is a variable frequency controller 21, the variable frequency controller 21 is fixed at the top end of the workbench 1, and the variable frequency controller 21 is connected to the rotating motor 7 through a wire.

Through the above technical scheme of the utility model, beneficial effect: the rotation speed of the rotating motor 7 and thus the speed of the rotating rod can be adjusted by the frequency conversion controller 21.

For the convenience of understanding the above technical solution of the present invention, the following detailed description is made on the working principle or the operation mode of the present invention in the practical process:

in practical application, an X-ray signal generated by an X-ray generator 2 is generated through a light outlet hole of an X-ray shutter 4 on the X-ray generator 2, a measured wafer placed on a ceramic plate 14 on an L-shaped sample table 9 which can rotate by three hundred sixty degrees through a rotating motor 7 is reflected and then received by a scintillation detector 5, the signal received by the scintillation detector 5 is amplified, the crystal orientation of the measured wafer and the defect of a detected crystal are found out through parameter signals such as the peak value, the half peak value and the like of the X-ray signal displayed on a milliammeter on the X-ray generator 2, the X-ray signal amplification system is also transmitted to a centralized control room through a communication interface of the X-ray generator 2 for centralized data processing after being amplified, in the process, a lifting mechanism can be manually adjusted to adjust the height of the measured wafer so that the measured wafer corresponds to the scintillation detector 5 and the X-ray generator 2, and therefore, the measurement accuracy is improved, when the rotating motor 7 rotates the measured wafer, the rotating speed of the rotating motor 7 is controlled through the rotating speed control mechanism, the phenomenon that the accuracy of the measured wafer is affected due to too fast rotation is avoided, the round rod 11 is pulled in advance, the telescopic spring 13 of the round rod is shortened, the measured wafer is placed between the ceramic plates 14 and is supported by hands, and the telescopic spring 13 is reset and extended, so that the two ceramic plates 14 clamp the measured wafer tightly, and meanwhile, the measured wafer is convenient to detach.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The sapphire crystal orientation high-precision automatic angle measuring device is characterized by comprising a workbench (1) and a scintillation detector (5), wherein an X-ray generator (2) is fixedly arranged on one side of the top end of the workbench (1), an angle instrument (3) is fixedly arranged on the other side of the top end of the workbench (1), an X-ray gate (4) is arranged on the X-ray generator (2), the scintillation detector (5) is fixedly arranged on the angle instrument (3) through a connecting block (6), the scintillation detector (5) is positioned on the opposite side of the X-ray generator (2), the scintillation detector (5) is connected with the X-ray generator (2) through corresponding electric signals, a lifting mechanism is arranged on the top end of the angle instrument (3), a rotating motor (7) is arranged on the top end of the lifting mechanism, and the output end of the rotating motor (7) is connected with a rotating rod (8), the fixed L type sample platform (9) that is equipped with in bull stick (8) top, L type sample platform (9) top is equipped with vertical board (10), the movable sleeve is equipped with round bar (11) on vertical board (10), round bar (11) are located the fixed grip block (12) that is equipped with of L type sample platform (9) one end, grip block (12) with fixed expanding spring (13) that is equipped with between vertical board (10), expanding spring (13) cover is in on round bar (11), round bar (11) other end is fixed and is equipped with the arm-tie piece, grip block (12) with the equal fixed ceramic plate (14) that paste of the corresponding one end of L type sample platform (9), rotating electrical machines (7) are connected with speed control mechanism.

2. The sapphire crystal orientation high-precision automatic angle measuring device according to claim 1, wherein moving rods (15) are fixedly arranged at the bottom corner edges of the workbench (1), and universal wheels (16) with brake pads are mounted at the bottom ends of the moving rods (15).

3. The sapphire crystal orientation high-precision automatic angle measuring device according to claim 1, wherein the lifting mechanism comprises a lower sleeve (17) and an upper sleeve (18), the bottom of the upper sleeve (18) is sleeved in the lower sleeve (17), a threaded rod (19) is spirally inserted into the lower sleeve (17), the lower sleeve (17) is fixed to the top end of the workbench (1), the top end of the upper sleeve (18) is connected with the bottom end of the outer wall of the rotating motor (7), and a rotating hand lever is fixedly arranged at one end of the threaded rod (19).

4. The sapphire crystal orientation high-precision automatic angle measuring device according to claim 1, wherein a mounting plate (20) is fixedly arranged on one side of the bottom of the vertical plate (10), and the mounting plate (20) is fixedly mounted at the top end of the L-shaped sample table (9) through screws.

5. The sapphire crystal orientation high-precision automatic angle measuring device according to claim 1, wherein the rotating speed control mechanism is a variable frequency controller (21), the variable frequency controller (21) is fixed on the top end of the worktable (1), and the variable frequency controller (21) is connected with the rotating motor (7) through a lead.