CN212552298U - Marking positioning device and exposure machine - Google Patents

Marking positioning device and exposure machine Download PDF

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Publication number
CN212552298U
CN212552298U CN202021914358.2U CN202021914358U CN212552298U CN 212552298 U CN212552298 U CN 212552298U CN 202021914358 U CN202021914358 U CN 202021914358U CN 212552298 U CN212552298 U CN 212552298U
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Prior art keywords
optical fiber
marking
seat
light source
positioning device
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李永忠
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Zhongshan Xinnuo Microelectronics Co ltd
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Zhongshan Aiscent Technologies Co ltd
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Abstract

The utility model relates to a beat mark positioner and exposure machine, wherein, beat mark positioner and include: a light source head comprising a light source and a coupling lens; the marking head comprises a collimating lens; the light inlet end of the optical fiber is connected with the light source head, and the light outlet end of the optical fiber is connected with the marking head; and the light beam emitted by the light source sequentially passes through the coupling lens, the optical fiber and the collimating lens and then is output. The marking positioning device can realize high-precision marking positioning, and is simple in overall structure, low in cost, stable in performance and high in cost performance.

Description

Marking positioning device and exposure machine
Technical Field
The utility model relates to a visual identification technical field especially relates to a beat mark positioner and exposure machine.
Background
With the improvement of the integration level of the integrated circuit and the improvement of the mounting technology, the manufacturing requirement of the PCB board is higher and higher. The PCB manufacturing process is various and complex, one of the processes is to transfer a designed circuit layout onto the PCB to form a PCB circuit diagram, the process is an exposure technology, and the main equipment used is an exposure machine. The common PCB adopts a multilayer structure, needs multiple exposures, needs accurate positioning before each exposure, and needs a marking positioning device in the process. Whether the marked mark points are clear, reliable and stable directly influences the manufacturing precision and efficiency of the PCB. At present, the main marking modes include code spraying marking, mechanical marking, laser marking and the like. The jet printing marking has low fineness, the mechanical marking has the problems of abrasion and the like, and the laser marking belongs to non-contact marking, has high precision and efficiency, is simple to control and is widely applied.
At present, visual identification and positioning technologies are mostly adopted in marking systems of PCB exposure equipment, and the core of the marking system is to clearly highlight the 'identification points' to be positioned. This requires clear marking point edges and regular patterns. However, the space reserved for the marking system by the common exposure machine is limited, the attachment between the PCB and the control platform cannot be guaranteed to be smooth, and a certain gap may exist, which may affect the marking positioning precision. The traditional marking system usually adopts an LED or an LD as a light source to directly output the marking. However, the light beam output by the LED or LD light source has irregular and uneven light spot and is divergent, and the positioning accuracy cannot be guaranteed. Although a complex lens combination can be used for some reshaping improvement, the cost is increased, the size is increased, and the effect is not ideal in actual operation.
SUMMERY OF THE UTILITY MODEL
Therefore, the marking positioning device and the exposure machine are needed to be provided aiming at the problems, the marking positioning device can realize high-precision positioning marking, and is simple in overall structure, low in cost and high in cost performance.
A marking positioning device, comprising:
a light source head comprising a light source and a coupling lens;
the marking head comprises a collimating lens; and
the light inlet end of the optical fiber is connected with the light source head, and the light outlet end of the optical fiber is connected with the marking head; and the light beam emitted by the light source sequentially passes through the coupling lens, the optical fiber and the collimating lens and then is output.
According to the marking positioning device, the light source head and the marking head are arranged in a split manner and are connected through the optical fibers, so that on one hand, the structure of the marking head can be simplified, the marking head is small in size and can be well suitable for a narrow installation space, the mounting and debugging on the platform are easier, the requirement on the fitting degree of the platform and the PCB is reduced, and meanwhile, the heat dissipation of the light source head is facilitated; on the other hand, the light beam output characteristic of the marking head is also improved, the light beam emitted by the light source of the light source head is focused into the optical fiber after passing through the coupling lens piece, then transmitted to the collimating lens with marking head through optical fiber, and then outputted after passing through the collimating lens, thus, the asymmetric, irregular diverging light, originally emitted by the light source, is focused into the fiber by the coupling lens, through the shaping action of the fiber, the irregular light beam can be changed into regular Gaussian beam or quasi-Gaussian beam, and then the collimated beam is changed into collimated beam after the collimation treatment is carried out by the collimating lens, so that the light beam output by the final marking head is a regular collimated light beam, and because the finally output marking light beam is collimated, can not receive the influence of the laminating interval of platform and PCB board in certain extent, when beating the mark head and beating the mark location to the PCB board, can demonstrate clear facula on the PCB board. Therefore, the marking positioning device can realize high-precision marking positioning, and has the advantages of simple overall structure, lower cost, stable performance and higher cost performance.
In one embodiment, the marking head is provided with an adjusting hole corresponding to the light-emitting side of the collimating lens, and the aperture of the adjusting hole is smaller than the spot diameter of the collimated light beam output by the collimating lens.
In one embodiment, the adjusting hole is a central symmetrical hole or an axial symmetrical hole.
In one embodiment, the two coupling lenses are respectively a first coupling lens and a second coupling lens, and the central axes of the first coupling lens and the second coupling lens coincide.
In one embodiment, the light source head further includes a light source seat, a first optical fiber seat and a first locking member, the light source and the coupling lens are disposed in the light source seat, the light source seat is provided with a connection port corresponding to the light emitting side of the coupling lens, the first optical fiber seat is in a cylindrical shape with two through ends, one end of the first optical fiber seat is in butt joint with the connection port, the light incident end of the optical fiber penetrates into the first optical fiber seat, and the first locking member is sleeved on the periphery of the optical fiber and locks and fixes the optical fiber and the first optical fiber seat.
In one of them embodiment, mark head still includes beats mark seat, second optic fibre seat and second retaining member, the second optic fibre seat is the tube-shape that both ends link up, collimating lens set up in the second optic fibre seat, beat the mark seat connect in the one end of second optic fibre seat and correspond collimating lens are equipped with the light-emitting window, the light-emitting window of optic fibre penetrates extremely in the second optic fibre seat, second retaining member cover is located optic fibre periphery and with optic fibre with second optic fibre seat locking is fixed.
In one embodiment, the marking positioning device further comprises a mounting seat, and the mounting seat is provided with a mounting hole for mounting the light source head.
In one embodiment, the mounting seat is provided with at least two mounting holes.
In one embodiment, the marking positioning device further comprises a heat dissipation seat arranged on the mounting seat.
The application also provides an exposure machine, which comprises the marking positioning device.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this application, are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification.
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
Fig. 1 is a schematic cross-sectional structure view of a marking positioning device according to an embodiment of the present invention;
FIG. 2 is a schematic view of the structure of the light source head of FIG. 1;
FIG. 3 is a schematic diagram of the structure of the marking head in FIG. 1;
FIG. 4 is a schematic diagram illustrating an assembly structure of a light source head, a mounting base, and a heat sink according to an embodiment.
10. A light source head; 11. a light source; 12. a coupling lens; 121. a first coupling lens; 122. a second coupling lens; 13. a light source holder; 14. a first fiber mount; 15. a first locking member; 20. marking a head; 21. a collimating lens; 22. an adjustment hole; 23. marking seats; 24. a second fiber mount; 25. a second locking member; 30. an optical fiber; 40. a mounting seat; 41. mounting holes; 50. a heat sink.
Detailed Description
In order to make the above objects, features and advantages of the present invention more comprehensible, embodiments of the present invention are described in detail below with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. The present invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein, as those skilled in the art will be able to make similar modifications without departing from the spirit and scope of the present invention.
The application provides an exposure machine, this exposure machine is including beating mark positioner. Specifically, in the process of exposure, place the PCB board on the control platform of exposure machine, beat the light beam that mark positioner sent and use on the PCB board to can obtain sharp, clear mark point in edge, be favorable to the quick discernment of visual identification system, promote and beat mark efficiency. The following description mainly deals with a specific embodiment of the marking positioning device. The marking positioning device provided in the present application can be applied to an exposure machine, but the application field is not limited thereto, and the marking positioning device can also be applied to other systems requiring marking point image recognition, and can realize high-precision marking positioning.
Referring to fig. 1, a marking positioning device according to an embodiment of the present invention includes a light source head 10, a marking head 20, and an optical fiber 30. The light source head 10 includes a light source 11 and a coupling lens 12; the marking head 20 includes a collimating lens 21; the light inlet end of the optical fiber 30 is connected with the light source head 10, and the light outlet end of the optical fiber 30 is connected with the marking head 20; the light beam emitted from the light source 11 passes through the coupling lens 12, the optical fiber 30, and the collimator lens 21 in this order and is then output.
Specifically, the light source head 10 and the marking head 20 are arranged separately, one end of the optical fiber 30 is connected with the light source head 10, the other end of the optical fiber is connected with the marking head 20, and the length of the optical fiber 30 can be set according to actual requirements. The light source head 10 includes a light source 11 and a coupling lens 12, and the coupling lens 12 is disposed on a light emitting side of the light source 11 to couple and focus a light beam of the light source 11. The light source 11 may be an LED light source or an LD light source, and the coupling lens 12 may be a single coupling lens or a combination of two or more coupling lenses. The marking head 20 includes a collimating lens 21, and the collimating lens 21 is mainly used for collimating the light beam emitted from the light-emitting end of the optical fiber 30, so as to adjust the divergent light beam into a collimated light beam.
According to the marking positioning device, the light source head 10 and the marking head 20 are arranged in a split manner and are connected through the optical fiber 30, so that on one hand, the structure of the marking head 20 can be simplified, the marking head 20 is small in size and can be well suitable for a narrow installation space, the platform is easier to install and debug, the requirement on the attaching degree of the platform and a PCB (printed circuit board) is reduced, and meanwhile, the heat dissipation of the light source head 10 is facilitated; on the other hand, the light beam output characteristic of the marking head 20 is also improved, the light beam emitted by the light source 11 of the light source head 10 passes through the coupling lens 12 and then is focused into the optical fiber 30, then is transmitted onto the collimating lens 21 of the marking head 20 through the optical fiber 30 and then is output through the collimating lens 21, thus, the asymmetric and irregular divergent light emitted by the light source 11 is focused into the optical fiber 30 through the coupling lens 12, the irregular light beam can be changed into a regular Gaussian beam or a quasi-Gaussian beam through the shaping effect of the optical fiber 30, the divergent light beam is changed into a collimated light beam after the collimation treatment is carried out through the collimating lens 21, the light beam output by the marking head 20 is finally the regular collimated light beam, because the finally output marking light beam is collimated, the influence of the joint distance between the platform and the PCB can be avoided within a certain range, when the marking head 20 marks and positions the PCB, a clear spot of light can be presented on the PCB board. Therefore, the marking positioning device can realize high-precision marking positioning, and has the advantages of simple overall structure, lower cost, stable performance and higher cost performance.
Further, in this embodiment, the heading head 20 is provided with an adjusting hole 22 corresponding to the light exit side of the collimating lens 21, and the aperture of the adjusting hole 22 is smaller than the spot diameter of the collimated light beam output by the collimating lens 21. So, the collimated light beam accessible adjusting hole 22 back output of collimating lens 21 output because the aperture of adjusting hole 22 is less than the facula diameter of collimated light beam, consequently can excise the deckle edge at the facula edge of collimated light beam for the facula of final output is littleer, and the edge is more sharp, has better visual identification effect, can further promote to beat mark positioning accuracy.
Further, in the present embodiment, the adjustment hole 22 is a centrosymmetric hole or an axisymmetric hole. For example, the adjusting hole 22 can be designed as a round hole, a triangular hole, a square hole, a quincunx hole or other symmetrical small holes. Therefore, on one hand, a graph with sharp edges can be obtained, and on the other hand, a symmetrical regular graph can be obtained, so that the rapid and accurate identification of a visual identification system is facilitated.
Further, referring to fig. 2, in the present embodiment, two coupling lenses 12 are disposed, which are a first coupling lens 121 and a second coupling lens 122, respectively, and central axes of the first coupling lens 121 and the second coupling lens 122 are coincident. Specifically, the light source 11, the first coupling lens 121 and the second coupling lens 122 are sequentially disposed along the same axis, and the light beam of the light source 11 can be focused into the optical fiber 30 through the coupling action of the first coupling lens 121 and the second coupling lens 122. Simple combination is carried out through first coupling lens 121 and second coupling lens 122 in this embodiment, and the cooperation of rethread optic fibre 30 can carry out the plastic to the beam characteristic and improve, compares in traditional complicated lens combination, and the structure is simpler, and the volume is more small and exquisite, and the cost is lower, can also reach better plastic effect simultaneously.
Further, referring to fig. 2, in the embodiment, the light source head 10 further includes a light source seat 13, a first optical fiber seat 14 and a first locking member 15, the light source 11 and the coupling lens 12 are both disposed in the light source seat 13, the light source seat 13 is provided with a connection port corresponding to the light emitting side of the coupling lens 12, the first optical fiber seat 14 is in a cylindrical shape with two through ends, one end of the first optical fiber seat 14 is butted with the connection port, the light incident end of the optical fiber 30 penetrates into the first optical fiber seat 14 from the other end of the first optical fiber seat 14, and the first locking member 15 is sleeved on the periphery of the optical fiber 30 and locks and fixes the optical fiber 30 and the first optical fiber seat 14.
Specifically, in this embodiment, light source base 13 is substantially in the shape of a cylinder with two ends penetrating through, light sources 11 and coupling lenses 12 are arranged in light source base 13 at intervals along the axial direction of light source base 13, an opening is provided at one end of light source base 13 close to light sources 11, and the connection wires of light sources 11 can be connected to an external control circuit through the opening. One end of first optical fiber holder 14 is inserted into light source holder 13 from the connection port of light source holder 13. In this embodiment, the coupling lens 12 includes a first coupling lens 121 and a second coupling lens 122, and to ensure coaxiality and installation reliability of the first coupling lens 121 and the second coupling lens 122, the light source head 10 further includes a fixed cylinder, and the first coupling lens 121 and the second coupling lens 122 can be assembled into the fixed cylinder, and then the fixed cylinder is assembled into the light source base 13. Optionally, the inner peripheral surface of the light source base 13 is provided with a first limiting step, the inner peripheral surface of the first optical fiber base 14 is provided with a second limiting step, one end of the fixing cylinder abuts against the first limiting step, and the other end of the fixing cylinder is inserted into the first optical fiber base 14 and abuts against the second limiting step, so that the installation stability of the coupling lens 12 can be ensured. The first locking member 15 may be a fiber cap sleeved on the periphery of the optical fiber 14, and the optical fiber 30 may be fixed by the cooperation of the first locking member 15 and the first fiber seat 14. The light source head 10 has a simple overall structure and is stable and reliable to assemble.
Further, please refer to fig. 3, in this embodiment, the marking head 20 further includes a marking seat 23, a second optical fiber seat 24 and a second locking member 25, the second optical fiber seat 24 is a cylinder with two through ends, the collimating lens 21 is disposed in the second optical fiber seat 24, the marking seat 23 is connected to one end of the second optical fiber seat 24 and has a light outlet corresponding to the collimating lens 21, the light outlet end of the optical fiber 30 penetrates into the second optical fiber seat 24 from the other end of the second optical fiber seat 24, and the second locking member 25 is sleeved on the periphery of the optical fiber 30 and locks and fixes the optical fiber 30 and the second optical fiber seat 24.
Specifically, in this embodiment, the marking seat 23 forms the major structure of the marking head 20, and can be used to fix the marking head 20 to an external platform, and one end of the second optical fiber seat 24 is sleeved with the marking seat 23, optionally, the outer peripheral surface of the second optical fiber seat 24 is provided with a limit convex part in abutting fit with the marking seat 23, so that the assembling reliability between the marking seat 23 and the second optical fiber seat 24 can be ensured. The other end of the second optical fiber holder 24 is connected to the second locking member 25, and the optical fiber 30 can be fixed by the cooperation of the second locking member 25 and the second optical fiber holder 24. The collimating lens 21 and the optical fiber 30 are fixed in the second optical fiber holder 24, so that the coaxiality between the collimating lens and the optical fiber can be well ensured. Optionally, in this embodiment, the marking head 20 further includes an end cover connected to the marking seat 23, the end cover is disposed on the light emitting side of the collimating lens 21, an adjusting hole 22 corresponding to the collimating lens 21 is disposed on the end cover, and the edge of the finally output light spot is sharp and clear through the adjusting hole 22. The marking head 20 is simple in overall structure and stable and reliable in assembly.
On the basis of the above embodiment, in order to facilitate the installation and fixation of the light source head 10, further, as shown in fig. 4, the marking positioning device further includes an installation seat 40, and the installation seat 40 is provided with an installation hole 41 for installing the light source head 10. Specifically, mount pad 40 is used for with outside platform fixed connection, and mounting hole 41 sets up in the lateral part of mount pad 40, and when installation light source head 10, the one end that is equipped with light source 11 with light source head 10 inserts to mounting hole 41 in, the rethread heat-conducting glue encapsulate can, easy operation is convenient. In order to ensure the installation reliability between the light source head 10 and the installation hole 41, the outer peripheral surface of the light source head 10 may be provided with a positioning convex portion, and after the light source head 10 is assembled in place, the positioning convex portion may be in limit abutment with the outer surface of the installation seat 40, so as to realize quick positioning and installation, and the assembly is stable and reliable.
Further, in the present embodiment, the mount 40 is provided with at least two mounting holes 41. Therefore, one, two or more light source heads 10 can be better integrated, the output power of the light source 11 can be increased, and the marking efficiency is improved. The number of the mounting holes 41 may be set according to actual requirements, for example, in the present embodiment, the mounting seat 40 is substantially rectangular, and ten mounting holes 41 are arranged side by side along the length direction of the side portion of the mounting seat 40.
In addition, since the light source 11 generates a certain amount of heat during operation, in order to ensure the service life of the light source 11, further, in this embodiment, the marking positioning device further includes a heat sink 50 disposed on the mounting base 40. The heat sink 50 can provide a good heat dissipation effect for the light source 11, and can effectively prolong the service life of the light source 11.
Specifically, in the present embodiment, as shown in fig. 4, the mounting seat 40 is a rectangular body extending substantially along the transverse direction, the bottom of the mounting seat 40 is respectively provided with a fixing plate at two sides in the width direction, and the fixing plate is provided with a fixing hole so as to be fixedly connected with the external platform. The side of the mounting seat 40 is provided with a plurality of mounting holes 41 at intervals along the longitudinal direction. The heat sink 50 includes a substrate fixed to the top surface of the mounting base 40, and a plurality of heat dissipation fins disposed on the substrate, the plurality of heat dissipation fins being arranged at intervals along the length direction of the mounting base 40. So, can carry out better integration processing to one or more light source head 10 through setting up mount pad 40, the installation of the light source head 10 control scheme of being convenient for and the concentrated heat dissipation of light source head 10, so, can increase light source 11's output, when improving the mark efficiency, also guaranteed light source 11's life.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only represent some embodiments of the present invention, and the description thereof is specific and detailed, but not to be construed as limiting the scope of the present invention. It should be noted that, for those skilled in the art, without departing from the spirit of the present invention, several variations and modifications can be made, which are within the scope of the present invention. Therefore, the protection scope of the present invention should be subject to the appended claims.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", and the like, indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," and "fixed" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.
In the present application, unless expressly stated or limited otherwise, the first feature may be directly on or directly under the second feature or indirectly via intermediate members. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.
The "certain body" and the "certain portion" may be a part corresponding to the "member", that is, the "certain body" and the "certain portion" may be integrally formed with the other part of the "member"; the "part" can be made separately from the "other part" and then combined with the "other part" into a whole. The expressions "a certain body" and "a certain part" in the present application are only one example, and are not intended to limit the scope of the present application for reading convenience, and the technical solutions equivalent to the present application should be understood as being included in the above features and having the same functions.
It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like as used herein are for illustrative purposes only and do not denote a unique embodiment.

Claims (10)

1. A marking positioning device, comprising:
a light source head comprising a light source and a coupling lens;
the marking head comprises a collimating lens; and
the light inlet end of the optical fiber is connected with the light source head, and the light outlet end of the optical fiber is connected with the marking head; and the light beam emitted by the light source sequentially passes through the coupling lens, the optical fiber and the collimating lens and then is output.
2. The marking and positioning device as claimed in claim 1, wherein the marking head is provided with an adjusting hole corresponding to the light emitting side of the collimating lens, and the aperture of the adjusting hole is smaller than the spot diameter of the collimated light beam output by the collimating lens.
3. The marking and positioning device of claim 2, wherein the adjustment hole is a centrally symmetric hole or an axially symmetric hole.
4. The marking and positioning device as claimed in claim 1, wherein the number of the coupling lenses is two, namely a first coupling lens and a second coupling lens, and the central axes of the first coupling lens and the second coupling lens coincide.
5. The marking and positioning device according to claim 1, wherein the light source head further comprises a light source seat, a first optical fiber seat and a first locking member, the light source and the coupling lens are disposed in the light source seat, the light source seat is provided with a connection port corresponding to the light emitting side of the coupling lens, the first optical fiber seat is in a cylindrical shape with two through ends, one end of the first optical fiber seat is in butt joint with the connection port, the light incident end of the optical fiber penetrates into the first optical fiber seat, and the first locking member is sleeved on the periphery of the optical fiber and locks and fixes the optical fiber and the first optical fiber seat.
6. The marking and positioning device according to claim 1, wherein the marking head further comprises a marking seat, a second optical fiber seat and a second locking member, the second optical fiber seat is cylindrical with two ends penetrating through, the collimating lens is arranged in the second optical fiber seat, the marking seat is connected to one end of the second optical fiber seat and provided with a light outlet corresponding to the collimating lens, the light outlet end of the optical fiber penetrates into the second optical fiber seat, and the second locking member is sleeved on the periphery of the optical fiber and locks and fixes the optical fiber and the second optical fiber seat.
7. The marking and positioning device of any one of claims 1 to 6, further comprising a mounting base provided with a mounting hole for mounting the source head.
8. The marking and positioning device of claim 7, wherein the mounting base is provided with at least two of the mounting holes.
9. The marking and positioning device of claim 7, further comprising a heat sink disposed on the mounting block.
10. An exposure machine, characterized by comprising the marking positioning device as claimed in any one of claims 1 to 9.
CN202021914358.2U 2020-09-04 2020-09-04 Marking positioning device and exposure machine Active CN212552298U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202021914358.2U CN212552298U (en) 2020-09-04 2020-09-04 Marking positioning device and exposure machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202021914358.2U CN212552298U (en) 2020-09-04 2020-09-04 Marking positioning device and exposure machine

Publications (1)

Publication Number Publication Date
CN212552298U true CN212552298U (en) 2021-02-19

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN202021914358.2U Active CN212552298U (en) 2020-09-04 2020-09-04 Marking positioning device and exposure machine

Country Status (1)

Country Link
CN (1) CN212552298U (en)

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Address after: 528400 No. 3 Mingzhu Road, Torch Development Zone, Zhongshan City, Guangdong Province

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