CN212519485U

CN212519485U - Continuous microwave monocrystalline silicon material explosion equipment

Info

Publication number: CN212519485U
Application number: CN202021519124.8U
Authority: CN
Inventors: 谭夏智; 马水
Original assignee: Shenzhen Megmeet Electrical Co Ltd
Current assignee: Shenzhen Megmeet Electrical Co Ltd
Priority date: 2020-07-28
Filing date: 2020-07-28
Publication date: 2021-02-09
Anticipated expiration: 2030-07-28

Abstract

The utility model discloses a continuous type microwave monocrystalline silicon explodes material equipment, including microwave reaction unit, water tank and material feeding unit, microwave reaction unit's feed end and discharge end department all are equipped with material feeding unit, the material feeding unit's of discharge end department tip and water tank intercommunication. The utility model discloses a continuous type microwave monocrystalline silicon explodes material equipment has energy consumption low, efficient, degree of automation is high and effectively avoids advantages such as raw materials pollution.

Description

Continuous microwave monocrystalline silicon material explosion equipment

Technical Field

The utility model relates to a silicon material explodes material technical field, especially relates to a continuous type microwave monocrystalline silicon explodes material equipment.

Background

At present, the material explosion equipment for the monocrystalline silicon raw material mainly uses electric heating as a main part, but the material explosion process has high energy consumption, the monocrystalline silicon raw material is easy to be oxidized due to uneven heating in the electric heating process, and the heating medium material can be slowly released at high temperature to pollute the monocrystalline silicon raw material, increase the burden of the subsequent production process and reduce the quality of a monocrystalline silicon finished product. In addition, monocrystalline silicon material explosion equipment adopts a closed cavity form in order to avoid raw material pollution, the feeding and discharging operation of the closed cavity is complex, the production line is difficult to apply for production, the production cost is high, and the efficiency is low.

SUMMERY OF THE UTILITY MODEL

The to-be-solved technical problem of the utility model is to overcome the not enough of prior art, provide a continuous type microwave monocrystalline silicon explodes material equipment that the energy consumption is low, efficient, degree of automation is high and effectively avoid raw materials to pollute.

In order to solve the technical problem, the utility model provides a technical scheme does:

the utility model provides a continuous type microwave monocrystalline silicon explodes material equipment, includes microwave reaction unit, water tank and material feeding unit, microwave reaction unit's feed end and discharge end department all are equipped with material feeding unit, and the material feeding unit's of discharge end department tip and water tank intercommunication.

As a further improvement of the above technical solution:

the microwave reaction device comprises a microwave reaction bin, the two ends of the microwave reaction bin are a feeding end and a discharging end, microwave suppression doors are arranged at the feeding end and the discharging end, and the microwave suppression doors move under the driving of a driving piece to block or open the feeding end and the discharging end.

The microwave reaction bin is a polygonal cavity, and one or more feed holes are formed in the cavity.

The inner surface of the microwave reaction chamber is covered with an inorganic material plate, and the inorganic material plate comprises but is not limited to a polypropylene plate, a polytetrafluoroethylene plate and a silicon dioxide layer.

And the outer surface of the microwave reaction bin is covered with a heat-insulating layer.

The feeding device comprises a conveying table, a plurality of conveying rollers which are parallel to each other are arranged on the table surface of the conveying table, and the conveying rollers are horizontally arranged and roll towards the feeding end or back to the discharging end under the driving of a driving piece.

The feeding device further comprises a limiting mechanism, the limiting mechanism is arranged above the table board of the conveying table and comprises two limiting strips which are arranged horizontally at intervals, the limiting strips are perpendicular to the axis of the conveying roller, opposite side surfaces of the two limiting strips are in a groove shape, and the distance between the two limiting strips is gradually reduced along the conveying direction; and the opposite side surfaces of the two limiting strips are provided with rollers rolling around a vertical axis.

The feeding device further comprises a lifting platform capable of moving up and down along the vertical direction, the lifting platform is arranged between the conveying platform and the microwave reaction bin, the conveying device is arranged on the top surface of the lifting platform, the lifting platform rises after the microwave suppression door is opened and is communicated with the feeding device and the microwave reaction bin, and the lifting platform falls before the microwave suppression door is closed.

The table board of the conveying table is hinged to the bottom frame of the conveying table at the side edge close to the water tank, and the driving end of the overturning driving piece is connected with the table board and drives the table board to rotate around the hinged side edge.

Compared with the prior art, the utility model has the advantages of:

the utility model discloses a continuous type microwave monocrystalline silicon explodes material equipment, including microwave reaction unit, water tank and two material feeding unit, two material feeding unit set up feed end and discharge end department at microwave reaction unit respectively for the monocrystalline silicon raw materials that will wait to explode the material feeds into microwave reaction unit's feed end, and take out from microwave reaction unit's discharge end the monocrystalline silicon raw materials that will explode the material and accomplish, and discharge end department's material feeding unit's tip and water tank intercommunication, can be quick send into the monocrystalline silicon raw materials that will explode the material and accomplish in the water tank and cool off.

The utility model discloses an equipment adopts the microwave to heat monocrystalline silicon broken, compares in electrical heating, not only can establish even stable heating environment, avoids the raw materials oxidation and receives external pollution, effectively improves the quality of monocrystalline silicon product, can also guarantee that whole heating environment possesses energy-conserving and efficient advantage, compares and to save 20% energy in electrical heating equipment. In addition, microwave reaction unit combines together with material feeding unit and water tank, can realize automatic feeding, ejection of compact and cooling operation, consequently can be applicable to the automation line that the monocrystalline silicon explodes the material, has improved production efficiency greatly, has reduced manufacturing cost.

Drawings

FIG. 1 is a schematic structural diagram of a continuous microwave single crystal silicon blasting device;

FIG. 2 is a schematic structural diagram of a feeding table in the continuous microwave single crystal silicon explosive device;

FIG. 3 is a schematic structural diagram of a microwave reaction device in the continuous microwave single crystal silicon material blasting equipment;

FIG. 4 is a schematic diagram of the matching structure of a microwave reaction device and a feeding device in the continuous microwave single crystal silicon material blasting equipment.

Illustration of the drawings: 1. a microwave reaction device; 11. a feeding end; 12. a discharge end; 13. a microwave reaction bin; 14. a microwave suppression gate; 2. a water tank; 3. a feeding device; 31. a conveying table; 311. a conveying roller; 32. a limiting mechanism; 321. a limiting strip; 322. a roller; 33. a lifting platform; 34. the driving member is turned over.

Detailed Description

In order to facilitate understanding of the present invention, the present invention will be described more fully and specifically with reference to the accompanying drawings and preferred embodiments, but the scope of the present invention is not limited to the following specific embodiments.

Example (b):

as shown in fig. 1, the continuous microwave monocrystalline silicon material explosion equipment of the embodiment includes a microwave reaction device 1, a water tank 2 and a feeding device 3, the feeding end 11 and the discharging end 12 of the microwave reaction device 1 are respectively provided with the feeding device 3 for feeding the monocrystalline silicon raw material to be exploded into the feeding end 11 of the microwave reaction device 1, and taking out the monocrystalline silicon raw material to be exploded from the discharging end 12 of the microwave reaction device 1, the end of the feeding device 3 at the discharging end 12 is communicated with the water tank 2, and the monocrystalline silicon raw material to be exploded can be rapidly fed into the water tank 2 for cooling.

The equipment of this embodiment adopts the microwave to heat the breakage to monocrystalline silicon, compares in electrical heating, not only can establish even stable heating environment, avoids the raw materials oxidation and receives external pollution, effectively improves the quality of monocrystalline silicon product, can also guarantee that whole heating environment possesses energy-conserving and efficient advantage, compares and to save 20% energy in electrical heating equipment. In addition, microwave reaction unit 1 combines together with material feeding unit 3 and water tank 2, can realize automatic feeding, ejection of compact and cooling operation, consequently can be applicable to the automation line that monocrystalline silicon explodes the material, has improved production efficiency greatly, has reduced manufacturing cost.

After the equipment is used for blasting materials, when the monocrystalline silicon raw material is taken out from the water tank 2 for crushing, the fragments are good in uniformity and not easy to produce powder, and the waste of the raw material can be effectively reduced.

In this embodiment, as shown in fig. 3, the microwave reaction apparatus 1 includes a microwave reaction chamber 13, two ends of the microwave reaction chamber 13 are a feeding end 11 and a discharging end 12, the feeding end 11 and the discharging end 12 are both provided with microwave suppression doors 14, and the microwave suppression doors 14 move under the driving of the driving member to block or open the feeding end 11 and the discharging end 12. In the feeding and discharging process, the microwave suppression door 14 opens the feeding end 11 and the discharging end 12 so as to facilitate the taking and placing of the raw materials, and in the material explosion process, the microwave suppression door 14 is in a closed state so as to ensure the closure of the microwave reaction bin 13, further ensure that the internal raw materials are not polluted by impurities and other external pollutants, and improve the product quality. In this embodiment, the driving element for driving the microwave suppression door 14 to open and close may be a cylinder, an oil cylinder, an electric push rod, or other driving devices, and may be opened and closed by manually pressing a switch, or by using a control system to realize opening and closing in an automatic production process. The microwave suppression door 14 is provided with at least one suppression sheet made of a microwave suppression material for suppressing microwave leakage.

In this embodiment, the wall surface of the microwave reaction chamber 13 is uniformly provided with a plurality of feed holes, and the microwave reaction apparatus 1 further includes a plurality of microwave emitting source members whose end portions face the inside of the microwave reaction chamber 13 through the feed holes. The microwave emitting source member emits microwaves for processing the raw material into the microwave reaction chamber 13 through the feed hole. In this embodiment, a rack is further disposed outside the microwave reaction chamber 13, and the microwave emitting source component may be mounted on the rack, or may be directly disposed on the microwave reaction chamber 13, which is not described herein.

In this embodiment, the microwave reaction chamber 13 is a cylinder with a hexagonal cross section, and is made of a 316L stainless steel plate with a thickness of 3 mm. A feed hole is provided on each side. Two rows of feed holes are arranged on the upper left inclined plane and the upper right inclined plane, and the first row comprises 5 feed holes and the second row comprises 3 feed holes; the lower left inclined plane and the lower right inclined plane are provided with two rows of feed holes, wherein the first row comprises 5 feed holes, and the second row comprises 2 feed holes; the left side surface and the right side surface are respectively provided with a row of 5 feed holes to provide uniform and stable explosive energy. Wherein, the feed hole is a rectangular hole with the length of 95.3 +/-1 mm and the width of 54.6 +/-1 mm. On each face, the feed holes are respectively arranged transversely, vertically, transversely and vertically. Therefore, the microwave field intensity of the explosive material in the microwave reaction bin 13 can be further ensured to be uniform, and the microwave field intensity density meets the requirement.

In the embodiment, a plurality of magnetrons are uniformly arranged on the inner surface of the microwave reaction bin 13, a microwave emission source emits microwaves to the microwave reaction bin 13, and part of the microwaves are absorbed by the raw materials and converted into heat energy, so that the temperature of the silicon material is raised; meanwhile, the unused microwaves are reflected and absorbed by a magnetron arranged on the inner surface, and the silicon material is heated by secondary radiation. Through the measures, the heating efficiency can be further improved, and the energy consumption is reduced. Compared with resistance furnace heating, the energy consumption can be reduced by about 40%.

In this embodiment, the inner surface of the microwave reaction chamber 13 is covered with an inorganic material plate, which includes but is not limited to a polypropylene plate, a polytetrafluoroethylene plate, and a silica layer. The inner surface in this embodiment is covered with a polypropylene plate, i.e., a PP plate, so as to ensure that the wall material of the microwave reaction chamber 13 is not volatilized by microwave heating, thereby contaminating the monocrystalline silicon raw material.

In this embodiment, the outer surface of the microwave reaction bin 13 is covered with a heat insulation layer, the thickness of the heat insulation layer is 10mm, and the heat insulation layer is made of an aluminum silicate heat insulation plate. In other embodiments, the insulating layer may also be one or more of asbestos, aluminum silicate, alumina, mullite. The heat preservation can keep the inside temperature of microwave reaction storehouse 13, reduces the heat radiation of the high temperature silicon material after the heating to the microwave reaction storehouse 13 inner wall of lower temperature, reduces the energy consumption.

In this embodiment, as shown in fig. 2, the feeding device 3 includes a conveying table 31, a plurality of conveying rollers 311 parallel to each other are disposed on a table surface of the conveying table 31, and the conveying rollers 311 are horizontally arranged and driven by a driving member to roll toward the feeding end 11 or back to the discharging end 12. The conveying roller 311 is a ceramic roller to prevent metal contamination, and the driving member for driving the conveying roller 311 to roll may be a motor, which is not described herein. In other embodiments, the feeding device 3 may also feed materials through various conveying structures such as a stainless steel chain type conveying structure and a stainless steel chain plate type conveying structure, which are not described herein again.

In this embodiment, the feeding device 3 further includes a limiting mechanism 32, the limiting mechanism 32 is disposed above the table top of the conveying table 31, and includes two limiting strips 321 arranged at intervals on the horizontal plane, the limiting strips 321 are perpendicular to the axis of the conveying roller 311, the opposite side surfaces of the two limiting strips 321 are in a notch shape, and the distance is gradually reduced along the conveying direction. When the monocrystalline silicon raw material was placed on material feeding unit 3, along with the transport of conveying roller 311, the raw materials was constantly to the direction of delivery operation, can be along the groove automatic centering between spacing 321 this moment, avoided the skew to lead to the vibration to leak the material or can't get into situations such as feed end 11 and appear.

In this embodiment, all be equipped with on the relative side of two spacing 321 around vertical axis rolling gyro wheel 322, gyro wheel 322 can effectively reduce the resistance between spacing 321 and the raw materials, makes the transportation of raw materials more smooth and easy.

In this embodiment, as shown in fig. 4, the feeding device 3 further includes a lifting table 33 capable of moving up and down along a vertical direction, the lifting table 33 is disposed between the conveying table 31 and the microwave reaction chamber 13, and a conveying device is disposed on a top surface of the lifting table 33. Before the material explosion is carried out, the microwave suppression door 14 at the feeding end 11 is opened, then the lifting table 33 is lifted, the conveying process can avoid the interference between the microwave suppression door 14 and the lifting table 33, the conveying table 31 conveys the raw materials to be exploded to the lifting table 33, the raw materials are conveyed to the feeding end 11 by the conveying device on the lifting table 33, then the lifting table 33 is lowered, the microwave suppression door 14 is closed, and the sealing performance of the internal environment is ensured. After the material explosion is completed, similarly, the microwave suppression door 14 at the discharge end 12 is opened, the lifting table 33 is lifted, the material subjected to the material explosion is transported to the conveying table 31 from the discharge end 12, and then the lifting table 33 is lowered, and the microwave suppression door 14 is closed. In this embodiment, the conveying device on the lifting table 33 may be a conveying roller or a conveying device such as a conveyor belt. In this embodiment, also be provided with conveyor in the microwave reaction storehouse 13 to carry inside material from feed end 11 to discharge end 12, convenient production.

In this embodiment, the feeding device 3 at the discharging end 12 is further provided with a turning driving member 34, the table top of the conveying table 31 is hinged to the bottom frame of the conveying table 31 at a position close to the side edge of the water tank 2, and the driving end of the turning driving member 34 is connected with the table top and drives the table top to rotate around the hinged side edge. After the raw materials explode the material and accomplish and transport to material feeding unit 3 on, carry platform 31 to transport the raw materials to the one side that is close to water tank 2, later overturn driving piece 34 drive mesa upset, make the raw materials fall into water tank 2 and cool off. In this embodiment, the turnover driving member 34 may be a driving device such as an air cylinder, an oil cylinder, or an electric push rod.

In this embodiment, the raw material is loaded in a quartz tank, and the external dimensions of the quartz tank are as follows: length × width × height: 1000mm multiplied by 330mm multiplied by 150mm, wall thickness 40 mm; the size of the raw material is diameter x length: 220mm by 1000 mm. The size of the water tank 2 is as follows: length × width × height: 1200mm by 500 mm. When the quartz groove enters the microwave cavity, all the microwave emission source components are simultaneously started, and the silicon material can be heated to 400 ℃ from room temperature within 35 minutes. After being cooled rapidly by cold water and dried, the silicon material can be crushed into even fragments under the action of small external force.

In this embodiment, the apparatus may further comprise a control cabinet, and the driving of each driving member and the turning driving member 34 may be controlled by a control system disposed inside the control cabinet.

The above description is only the preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above embodiments. For those skilled in the art, the modifications and changes obtained without departing from the technical idea of the present invention should be regarded as the protection scope of the present invention.

Claims

1. The utility model provides a material equipment is exploded to continuous type microwave monocrystalline silicon which characterized in that: the microwave reactor comprises a microwave reaction device (1), a water tank (2) and a feeding device (3), wherein the feeding end (11) and the discharging end (12) of the microwave reaction device (1) are respectively provided with the feeding device (3), and the end part of the feeding device (3) at the discharging end (12) is communicated with the water tank (2).

2. The continuous microwave single crystal silicon blasting equipment according to claim 1, characterized in that: microwave reaction unit (1) includes microwave reaction storehouse (13), and the both ends in microwave reaction storehouse (13) do feed end (11) and discharge end (12), feed end (11) and discharge end (12) department all are equipped with microwave suppression door (14), microwave suppression door (14) move under the drive of driving piece in order to keep off and establish or open feed end (11) and discharge end (12).

3. The continuous microwave single crystal silicon blasting equipment of claim 2, characterized in that: the microwave reaction bin (13) is a polygonal cavity, and one or more feed holes are formed in the cavity.

4. The continuous microwave single crystal silicon blasting equipment of claim 2, characterized in that: the inner surface of the microwave reaction bin (13) is covered with an inorganic material plate, and the inorganic material plate comprises but is not limited to a polypropylene plate, a polytetrafluoroethylene plate and a silicon dioxide layer.

5. The continuous microwave single crystal silicon blasting equipment of claim 2, characterized in that: the outer surface of the microwave reaction bin (13) is covered with a heat-insulating layer.

6. The continuous microwave single crystal silicon blasting equipment of claim 2, characterized in that: the feeding device (3) comprises a conveying table (31), a plurality of mutually parallel conveying rollers (311) are arranged on the table surface of the conveying table (31), and the conveying rollers (311) are horizontally arranged and roll towards the feeding end (11) or back to the discharging end (12) under the driving of a driving piece.

7. The continuous microwave single crystal silicon blasting equipment according to claim 6, characterized in that: the feeding device (3) further comprises a limiting mechanism (32), the limiting mechanism (32) is arranged above the table top of the conveying table (31) and comprises two limiting strips (321) which are arranged horizontally at intervals, the limiting strips (321) are perpendicular to the axis of the conveying roller (311), the opposite side surfaces of the two limiting strips (321) are in a groove shape, and the distance between the two limiting strips is gradually reduced along the conveying direction; and the opposite side surfaces of the two limiting strips (321) are respectively provided with a roller (322) rolling around a vertical axis.

8. The continuous microwave single crystal silicon blasting equipment according to claim 6, characterized in that: the feeding device (3) further comprises a lifting platform (33) capable of moving up and down along the vertical direction, the lifting platform (33) is arranged between the conveying platform (31) and the microwave reaction bin (13), the conveying device is arranged on the top surface of the lifting platform (33), the lifting platform (33) rises after the microwave suppression door (14) is opened and is communicated with the feeding device (3) and the microwave reaction bin (13), and the lifting platform (33) descends before the microwave suppression door (14) is closed.

9. The continuous microwave single crystal silicon blasting equipment according to claim 6, characterized in that: the feed arrangement (3) of discharge end (12) department is last still to be equipped with upset driving piece (34), the mesa of carrying platform (31) is articulated with the chassis of carrying platform (31) in the side department that is close to water tank (2), the mesa is connected to the drive end of upset driving piece (34) to the drive mesa rotates around articulated side.