CN212411010U

CN212411010U - Inspection device in mask production process

Info

Publication number: CN212411010U
Application number: CN202021371143.0U
Authority: CN
Inventors: 张月圆; 华卫群; 刘维维; 刘浩
Original assignee: Wuxi Zhongwei Mask Electronics Co ltd
Current assignee: Wuxi Zhongwei Mask Electronics Co ltd
Priority date: 2020-07-14
Filing date: 2020-07-14
Publication date: 2021-01-26
Anticipated expiration: 2030-07-14

Abstract

The utility model discloses a device of patrolling and examining in mask production process, which comprises a base, the intermediate position department at chassis top installs the bracing piece, the outside cover of bracing piece is equipped with solid fixed ring, gu fixed ring's periphery installs the landing leg through the articulated shaft, the dead lever is installed at the mounting panel top of casing both sides, be provided with the protection casing directly over the telescope, the connecting rod is installed to the bilateral symmetry of protection casing bottom, the internally mounted of recess has damping spring, the tail end setting of connecting rod is in the inside of recess, and the tip and the damping spring of connecting rod are connected. This inspection device in mask production process, through setting up reinforcement stabilization function and shock attenuation safeguard function, effectively avoid taking place to remove at the in-process equipment of patrolling and examining, lead to patrolling and examining the deviation and need repeatedly patrol and examine, and then aggravate work load, influence work efficiency.

Description

Inspection device in mask production process

Technical Field

The utility model relates to a patrol and examine technical field, specifically be a patrol and examine device in mask production process.

Background

A mask is an indispensable component for a photolithography process. The mask carries a design pattern through which light is transmitted to transmit the design pattern through the photoresist. The performance of the mask directly determines the quality of the lithographic process. In a projection lithography machine, the mask is located as an optical element between the converging lens and the projection lens, which is not in direct contact with the wafer. The pattern on the mask is reduced by 4-10 times (modern lithography machines are generally reduced by 4 times) and then transmitted on the surface of the wafer. In order to distinguish the mask used in the contact exposure, the mask used in the projection exposure is also referred to as a reduction mask.

In the mask production process, the inspection device is required to monitor the mask, and in the inspection process, if the equipment moves, deviation occurs in final inspection, repeated inspection is required, inspection efficiency and working efficiency are seriously affected, and therefore the mask production process needs to be improved.

SUMMERY OF THE UTILITY MODEL

The utility model is not enough to prior art, the utility model provides an inspection device in mask production process, possess the advantage of consolidating stable function and shock attenuation safeguard function, inside when patrolling and examining in the workshop that has now been solved, because of the inside stone that falls that takes place easily in the workshop, lead to not only injuring the staff easily at the in-process of patrolling and examining, and can take place the phenomenon emergence that equipment was pounded badly, a large amount of resources of waste, danger coefficient when having increaseed staff's operation, and simultaneously, at the in-process of patrolling and examining, if equipment takes place to remove or squint, all can lead to finally patrolling and examining the result and appearing the deviation, need repeatedly to patrol and examine, influence work efficiency.

The utility model provides a following technical scheme: the utility model provides a device of patrolling and examining in mask production process, includes the chassis, the intermediate position department at chassis top installs the bracing piece, the outside cover of bracing piece is equipped with solid fixed ring, gu fixed ring's periphery installs the landing leg through the articulated shaft, the mounting panel is installed at the top of bracing piece, the casing is installed at the top of mounting panel, the telescope is installed at the top of casing, the dead lever is installed at the mounting panel top of casing both sides, the inside of dead lever is provided with the recess, be provided with the protection casing directly over the telescope, the connecting rod is installed to the bilateral symmetry of protection casing bottom, the internally mounted of recess has damping spring, the tail end setting of connecting rod is in the inside of recess, and the tip.

Preferably, a built-in storage battery is installed inside the housing, and an illuminating lamp is installed on the front surface of the housing.

Preferably, the bottom of the chassis is provided with universal wheels, and the top of the chassis is uniformly provided with sleeves.

Preferably, the surface of bracing piece evenly is provided with the spout, gu fixed ring's inboard evenly installs the slider, the slider sets up the inside at the spout.

Preferably, the tail end of the supporting leg is provided with a drill bit, and a fixing block is welded on one side of the supporting leg.

Preferably, the output end of the built-in storage battery is connected with the input end of the illuminating lamp.

Compared with the prior art, the utility model discloses possess following beneficial effect:

1. this inspection device in mask production process, through setting up the landing leg, make the utility model discloses have and consolidate stabilization function, effectively avoid moving at the in-process equipment of patrolling and examining, lead to patrolling and examining the deviation and need repeatedly patrol and examine, and then aggravate the work load, influence work efficiency, when using, the staff is through removing solid fixed ring, the slider of being convenient for slides from top to bottom in the inside of spout, and take out the landing leg from telescopic inside, adjust the angle of landing leg through the articulated shaft, conveniently support the drill bit subaerial, and simultaneously, through the hammering fixed block, with the drill bit deep-in ground end, thereby firmly consolidate the stability of equipment, the improvement is patrolled and examined the effect.

2. This inspection device in mask production process through setting up protection casing and damping spring for this practicality has shock attenuation safeguard function, when using, when workshop top fall heavy object and pound the protection casing, makes the protection casing atress drive the connecting rod and press damping spring, and then damping spring produces thrust for recovering deformation according to the characteristic of self when the atress compression, thereby cushions the decompression.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is an enlarged view of a portion A of FIG. 1 according to the present invention;

fig. 3 is a schematic view of the fixing ring structure of the present invention;

fig. 4 is a schematic view of the top of the chassis of the present invention.

In the figure: 1. a chassis; 2. a support bar; 3. a universal wheel; 4. a drill bit; 5. a chute; 6. a storage battery is arranged inside; 7. a protective cover; 8. a telescope; 9. a housing; 10. an illuminating lamp; 11. mounting a plate; 12. a fixing ring; 13. a support leg; 14. a fixed block; 15. a sleeve; 16. a connecting rod; 17. fixing the rod; 18. a groove; 19. a damping spring; 20. hinging a shaft; 21. a slide block.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-4, an inspection device in mask production process comprises a chassis 1, universal wheels 3 are installed at the bottom of the chassis 1, the utility model is convenient to move and move through the universal wheels 3, a sleeve 15 is installed at the top of the chassis 1 uniformly, a support rod 2 is installed at the middle position of the top of the chassis 1, a fixing ring 12 is sleeved outside the support rod 2, a chute 5 is uniformly arranged on the surface of the support rod 2, a slide block 21 is uniformly installed at the inner side of the fixing ring 12, the slide block 21 is arranged inside the chute 5, the slide block 21 can slide up and down inside the chute 5 conveniently, the support legs 13 can be taken out from the inside of the sleeve 15 by moving, and then the support legs are inserted into the ground to realize stability, the support legs 13 are installed on the circumferential surface of the fixing ring 12 through hinge shafts 20, the tail ends of the support, and the tail end of the supporting leg 13 is arranged inside the sleeve 15, so that the supporting leg 13 can be conveniently inserted into the sleeve 15 in the moving process, the worker can be effectively prevented from sliding down to hurt the worker, the protective performance is improved, a fixed block 14 is welded on one side of the supporting leg 13, a mounting plate 11 is arranged on the top of the supporting rod 2, a shell 9 is arranged on the top of the mounting plate 11, a built-in storage battery 6 is arranged inside the shell 9, a lighting lamp 10 is arranged on the front side of the shell 9, the output end of the built-in storage battery 6 is connected with the input end of the lighting lamp 10, so that the utility model can be conveniently powered by the built-in storage battery, the utility model can operate in a dark environment through the lighting lamp 10, the practicability is improved, a telescope 8 is arranged on the top of the shell 9, a fixed rod 17 is arranged on, the protective cover 7 is arranged right above the telescope 8, the connecting rods 16 are symmetrically arranged on two sides of the bottom of the protective cover 7, the damping springs 19 are arranged inside the grooves 18, the tail ends of the connecting rods 16 are arranged inside the grooves 18, and the end portions of the connecting rods 16 are connected with the damping springs 19.

When in work, the utility model can be moved to a proper position in the production workshop by the staff through the universal wheel 3, and the fixed ring 12 is moved, so that the slide block 21 can slide up and down in the chute 5, thereby taking the supporting leg 13 out of the sleeve 15, adjusting the angle of the supporting leg 13 through the hinge shaft 20 to facilitate the drill bit 4 to be propped against the ground, meanwhile, hammering the fixed block 14 to drive the drill bit 4 to go deep into the ground bottom for further reinforcement, further, the inspection treatment can be carried out through the telescope 8, and the illumination can be provided for dim production workshops through the illuminating lamp 10, when a heavy object falls from the top of the production workshop and the protective cover 7 is hit, the protective cover 7 is forced to drive the connecting rod 16 to press the damping spring 19, further, the damper spring 19 generates a thrust force for restoring the deformation according to its own characteristics when compressed by a force, thereby performing cushioning and pressure reduction.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides an inspection device in mask production process, includes chassis (1), its characterized in that: the utility model discloses a telescopic support, including chassis (1), bracing piece (2), the outside cover of bracing piece (2) is equipped with solid fixed ring (12), landing leg (13) are installed through articulated shaft (20) to the periphery of solid fixed ring (12), mounting panel (11) are installed at the top of bracing piece (2), casing (9) are installed at the top of mounting panel (11), telescope (8) are installed at the top of casing (9), dead lever (17) are installed at the mounting panel (11) top of casing (9) both sides, the inside of dead lever (17) is provided with recess (18), be provided with protection casing (7) directly over telescope (8), connecting rod (16) are installed to the both sides symmetry of protection casing (7) bottom, the internally mounted of recess (18) has damping spring (19), the tail end setting of connecting rod (16) is in the inside of recess (18), and the end of the connecting rod (16) is connected with a damping spring (19).

2. The inspection device according to claim 1, wherein: the built-in storage battery (6) is installed inside the shell (9), and the illuminating lamp (10) is installed on the front face of the shell (9).

3. The inspection device according to claim 1, wherein: the universal wheels (3) are installed at the bottom of the chassis (1), and sleeves (15) are evenly installed on the top of the chassis (1) in an equal mode.

4. The inspection device according to claim 1, wherein: the surface of bracing piece (2) evenly is provided with spout (5), slider (21) are evenly installed to the inboard of solid fixed ring (12), slider (21) set up the inside at spout (5).

5. The inspection device according to claim 1, wherein: the tail end of the supporting leg (13) is provided with a drill bit (4), and one side of the supporting leg (13) is welded with a fixing block (14).

6. The inspection device according to claim 2, wherein: the output end of the built-in storage battery (6) is connected with the input end of the illuminating lamp (10).