CN212409406U

CN212409406U - Air-cooled heat dissipation frame body of diffusion furnace

Info

Publication number: CN212409406U
Application number: CN202021210413.XU
Authority: CN
Inventors: 刘明利; 林凡辉
Original assignee: Qingdao Saier Microelectronics Co ltd
Current assignee: Qingdao Saier Microelectronics Co ltd
Priority date: 2020-06-26
Filing date: 2020-06-26
Publication date: 2021-01-26
Anticipated expiration: 2030-06-26

Abstract

The utility model relates to the technical field of diffusion furnaces, and discloses a diffusion furnace air-cooling heat dissipation frame body, which solves the problem that the heat dissipation effect of the diffusion furnace is poor due to the large volume of the diffusion furnace which is generally subjected to heat dissipation only by a fixedly installed fan in the process of heat dissipation of the diffusion furnace, and comprises a mounting frame, wherein a support and a mounting seat are fixedly installed at the top end of the mounting frame; the utility model discloses, fan through setting up, the gas-supply pipe, driving motor, the bull stick, the cooperation of connecting rod and slider etc. is used, wind-force passes through the gas-supply pipe and carries the inside of giving vent to anger, then spout through the air outlet nozzle, make the bull stick rotate around the top of mount pad simultaneously, the bull stick passes through the connecting rod and drives the slider and slide in the spout, the slider drives the one end of mounting panel and carries out the up-and-down motion of certain angle around the support, the circulation action, thereby can make the air outlet nozzle carry out the swing of certain angle, thereby carry out diversified thermal treatment to the diffusion furnace, the radiating effect.

Description

Air-cooled heat dissipation frame body of diffusion furnace

Technical Field

The utility model belongs to the technical field of the diffusion furnace, specifically be a diffusion furnace forced air cooling heat dissipation support body.

Background

The diffusion furnace is one of important process equipment of a front process of a semiconductor production line, and is used for diffusion, oxidation, annealing, alloying, sintering and other processes in industries such as large-scale integrated circuits, discrete devices, power electronics, photoelectric devices, optical fibers and the like.

Generally, in the process of radiating the diffusion furnace, the fan needs to be fixedly installed on the radiating frame body, but the fan is only fixedly installed to radiate the heat, and the radiating effect of the diffusion furnace is poor due to the large volume of the diffusion furnace.

Disclosure of Invention

To the above situation, for overcoming prior art's defect, the utility model provides a diffusion furnace forced air cooling heat dissipation support body, the effectual solution generally carries out radiating in-process to the diffusion furnace, only dispels the heat to it through fixed mounting's fan, because the volume of diffusion furnace is great, so to the relatively poor problem of its radiating effect.

In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a diffusion furnace forced air cooling heat dissipation support body, includes the mounting bracket, the top fixed mounting of mounting bracket has support and mount pad, the top of support is rotated and is connected with the mounting panel, the top fixed mounting of mounting panel has the pipe strap, the inside joint of pipe strap has the gas-supply pipe, the one end fixedly connected with outlet duct of gas-supply pipe, equidistant fixed mounting has the air outlet nozzle on the outlet duct, the top of mount pad is rotated and is connected with the bull stick, the one end of bull stick is rotated and is connected with the connecting rod, the one end fixedly connected with slider of connecting rod, slider slidable mounting is in the inside of spout, the.

Preferably, a fan is fixedly mounted on one side of the bottom end of the mounting frame, and an air outlet end of the fan is communicated with the inside of the air delivery pipe.

Preferably, the top end of the mounting seat is also rotatably provided with a large gear, and the large gear is fixedly connected with one end of the rotating rod through a pin shaft.

Preferably, a driving motor is fixedly mounted on the other side of the bottom end of the mounting frame, a pinion is mounted on an output shaft of the driving motor, and the pinion is in transmission connection with the bull gear through a chain.

Preferably, the rotating rod, the connecting rod and the mounting plate are all located outside the mounting frame.

Preferably, the fixed blocks are fixedly mounted on the two sides of the mounting frame, and mounting holes are formed in the middle of the fixed blocks.

Compared with the prior art, the beneficial effects of the utility model are that:

in operation, fan through setting up, the gas-supply pipe, driving motor, the bull stick, the cooperation of connecting rod and slider etc. is used, when needs dispel the heat, produce wind-force through the fan, carry the inside of the gas-supply pipe through the gas-supply pipe, then spout through the air outlet nozzle, drive the pinion rotation on its output shaft through driving motor simultaneously, the pinion drives the gear wheel through the chain and rotates, thereby make the bull stick rotate around the top of mount pad, the bull stick passes through the connecting rod and drives the slider and slide in the spout, the slider drives the one end of mounting panel and carries out the up-and-down motion of certain angle around the support, the circulation action, thereby can make the air outlet nozzle carry out the swing of certain angle, thereby carry out diversified heat dissipation to the diffusion.

Drawings

The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention, and together with the description serve to explain the invention and not to limit the invention. In the drawings:

fig. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic view of the mounting plate mounting structure of the present invention;

FIG. 3 is a schematic view of the mounting structure of the air outlet pipe of the present invention;

in the figure: 1. a mounting frame; 2. a support; 3. a mounting seat; 4. mounting a plate; 5. a pipe clamp; 6. a gas delivery pipe; 7. an air outlet pipe; 8. an air outlet nozzle; 9. a rotating rod; 10. a connecting rod; 11. a slider; 12. a chute; 13. a fan; 14. a drive motor; 15. a bull gear; 16. and a chain.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments; based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Embodiment one, by figure 1, figure 2 and figure 3 give, the utility model discloses a mounting bracket 1, mounting bracket 1's top fixed mounting has support 2 and mount pad 3, support 2's top is rotated and is connected with mounting panel 4, mounting panel 4's top fixed mounting has pipe strap 5, be convenient for install gas-supply pipe 6, pipe strap 5's inside joint has gas-supply pipe 6, gas-supply pipe 6's one end fixedly connected with outlet duct 7, be convenient for carry the air, equidistant fixed mounting has air outlet 8 on the outlet duct 7, mount pad 3's top is rotated and is connected with bull stick 9, the one end of bull stick 9 is rotated and is connected with connecting rod 10, connecting rod 10's one end fixedly connected with

slider

11, 11 slidable mounting of slider is in the inside of spout 12, spout 12 sets up the bottom of mounting panel 4, can drive mounting panel 4 up-and-down motion.

In the second embodiment, on the basis of the first embodiment, a fan 13 is fixedly installed on one side of the bottom end of the installation frame 1, and the air outlet end of the fan 13 is communicated with the inside of the air delivery pipe 6, so that power can be provided through the fan 13.

In the third embodiment, on the basis of the first embodiment, the top end of the mounting base 3 is further rotatably provided with a large gear 15, and the large gear 15 is fixedly connected with one end of the rotating rod 9 through a pin shaft, so that the rotating rod 9 can be driven to rotate through the large gear 15.

In the fourth embodiment, on the basis of the first embodiment, a driving motor 14 is fixedly installed on the other side of the bottom end of the mounting frame 1, a pinion is installed on an output shaft of the driving motor 14, and the pinion is in transmission connection with a large gear 15 through a chain 16 and can provide power through the driving motor 14.

Fifth embodiment, on the basis of the first embodiment, the rotating rod 9, the connecting rod 10 and the mounting plate 4 are all located outside the mounting frame 1, so that a worker can conveniently mount the mounting frame.

Sixth embodiment, on the basis of first embodiment, the equal fixed mounting in both sides of mounting bracket 1 has the fixed block, and the mounting hole has all been seted up at the middle part of fixed block, and the staff of being convenient for fixes mounting bracket 1.

The working principle is as follows: the during operation, at first install mounting bracket 1 in the suitable position department on the diffusion furnace, when needs dispel the heat, produce wind-force through fan 13, carry 7 insides of outlet duct through gas-supply pipe 6, then spout through air outlet nozzle 8, drive the pinion rotation on its output shaft through driving motor 14 simultaneously, the pinion drives gear wheel 15 through chain 16 and rotates, thereby make bull stick 9 rotate around the top of mount pad 3, bull stick 9 drives slider 11 through connecting rod 10 and slides in spout 12, slider 11 drives the one end of mounting panel 4 and carries out the up-and-down motion of certain angle around support 2, the circulation action, thereby can make air outlet nozzle 8 carry out the swing of certain angle, thereby carry out diversified heat dissipation to the diffusion furnace, the radiating effect is good.

It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a diffusion furnace forced air cooling heat dissipation support body, includes mounting bracket (1), its characterized in that: the utility model discloses a mounting bracket for the automobile exhaust gas purification device, including mounting bracket (1), the top fixed mounting of mounting bracket (1) has support (2) and mount pad (3), the top of support (2) is rotated and is connected with mounting panel (4), the top fixed mounting of mounting panel (4) has pipe strap (5), the inside joint of pipe strap (5) has gas-supply pipe (6), the one end fixedly connected with outlet duct (7) of gas-supply pipe (6), equidistant fixed mounting has air outlet nozzle (8) on outlet duct (7), the top of mount pad (3) is rotated and is connected with bull stick (9), the one end rotation of bull stick (9) is connected with connecting rod (10), the one end fixedly connected with slider (11) of connecting rod (10), slider (11) slidable mounting is in the inside of spout (12), the bottom of mounting.

2. The air-cooled heat dissipation frame body of the diffusion furnace according to claim 1, characterized in that: a fan (13) is fixedly mounted on one side of the bottom end of the mounting rack (1), and the air outlet end of the fan (13) is communicated with the interior of the gas conveying pipe (6).

3. The air-cooled heat dissipation frame body of the diffusion furnace according to claim 1, characterized in that: the top end of the mounting seat (3) is further rotatably provided with a large gear (15), and the large gear (15) is fixedly connected with one end of the rotating rod (9) through a pin shaft.

4. The air-cooled heat dissipation frame body of the diffusion furnace according to claim 1, characterized in that: the bottom end of the mounting rack (1) is fixedly provided with a driving motor (14), an output shaft of the driving motor (14) is provided with a pinion, and the pinion is in transmission connection with the large gear (15) through a chain (16).

5. The air-cooled heat dissipation frame body of the diffusion furnace according to claim 1, characterized in that: the rotating rod (9), the connecting rod (10) and the mounting plate (4) are all located outside the mounting frame (1).

6. The air-cooled heat dissipation frame body of the diffusion furnace according to claim 1, characterized in that: the mounting bracket is characterized in that fixed blocks are fixedly mounted on two sides of the mounting bracket (1), and mounting holes are formed in the middle of the fixed blocks.