CN212355630U

CN212355630U - Electrostatic chuck and substrate clamping device

Info

Publication number: CN212355630U
Application number: CN201921905361.5U
Authority: CN
Inventors: 何启龙
Original assignee: Linyi Jinghua Ceramics Co ltd
Current assignee: Linyi Jinghua Ceramics Co ltd
Priority date: 2019-11-07
Filing date: 2019-11-07
Publication date: 2021-01-15
Anticipated expiration: 2029-11-07

Abstract

The utility model belongs to the technical field of the clamping device technique and specifically relates to an electrostatic chuck and base plate clamping device, including placing the box, be equipped with the opening on placing a lateral wall of box, symmetrical connection has a plurality of backup pads on placing the inner wall of box, the equidistance sets up between a plurality of backup pads, the equal coaxial clamp plate that is equipped with in bottom of a plurality of backup pads, a plurality of clamp plates are close to and are connected with two locating levers perpendicularly on one side of placing the box inner wall, it is equipped with the bar groove to place box inner wall correspondence department, the length in bar groove equals the backup pad and is located and transfer and the distance between the adjacent clamp plate, the other end of locating lever runs through the bar groove setting that corresponds position. The utility model discloses the backup pad that sets up can carry out stable centre gripping to placing base plate, the static chuck at clamp plate top, and has increased the holistic clamping-force of device.

Description

Electrostatic chuck and substrate clamping device

Technical Field

The utility model relates to a clamping device technical field especially relates to an electrostatic chuck and base plate clamping device.

Background

The electrostatic chuck is a general name of an ultra-clean sheet bearing body, a grabbing and carrying device which is suitable for the atmosphere or vacuum environment, the electrostatic adsorption technology used by the device is an advantageous technology for replacing the traditional mechanical clamping and vacuum adsorption mode, the electrostatic chuck system is widely applied in the fields of semiconductors, panel displays, optics and the like, and comprises an electrostatic adsorption controller, an electrostatic adsorption unit and a control unit, wherein the electrostatic adsorption host machine has leakage protection, current overload protection and high-voltage pulse protection, the electrode of the electrostatic adsorption unit adopts a high-frequency conductor, one surface of the electrostatic adsorption unit adopts an aluminum nitride ceramic film, the other surface of the electrostatic adsorption unit adopts a polyimide film, in the process of mounting and transporting the electrostatic chuck adsorption disc, the electrostatic chuck adsorption disc and the substrate need to be clamped and transported, the existing device is complex in structure and not beneficial to operation, and great inconvenience is brought to a user. To this end, we propose an electrostatic chuck and a substrate holding apparatus.

SUMMERY OF THE UTILITY MODEL

The utility model aims at solving the defects existing in the prior art and providing an electrostatic chuck and a substrate clamping device.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

an electrostatic chuck and a substrate clamping device are designed, comprising a placing box body, wherein an opening is arranged on one side wall of the placing box body, a plurality of supporting plates are symmetrically connected on the inner wall of the placing box body, the supporting plates are arranged at equal intervals, pressing plates are coaxially arranged at the bottoms of the supporting plates, two positioning rods are symmetrically and vertically connected on one side of the pressing plates close to the inner wall of the placing box body, strip-shaped grooves are arranged at corresponding positions on the inner wall of the placing box body, the length of each strip-shaped groove is equal to the distance between each supporting plate and the adjacent pressing plate which is positioned downwards, the other ends of the positioning rods penetrate through the strip-shaped grooves at the corresponding positions, the positioning rods positioned outside the placing box body form two rows, the positioning rods at one side are fixedly connected on first vertical plates, the two first vertical plates are arranged in parallel, the diaphragm one side intercommunication that is located the top is equipped with the bar and leads to the groove, the bar leads to inslot sliding connection has the second sliding plate, the one end of second sliding plate extends to and places box lateral wall department, the one end top fixedly connected with second riser of placing the box is kept away from to the second sliding plate, top one side of second riser is connected with first sliding plate perpendicularly, the width of first sliding plate is greater than the width of diaphragm, the top intercommunication of first sliding plate is equipped with a plurality of guide ways, the top of diaphragm corresponds position department and is connected with a plurality of positioning bolt perpendicularly, positioning bolt runs through the guide way setting that corresponds position department, it is connected with a plurality of limiting plates perpendicularly to place box lateral wall corresponding position department equidistance, distance between the adjacent limiting plate equals the width of second sliding plate, and the second sliding plate is kept away.

Preferably, the four corners of the bottom of the box body are fixedly connected with rollers.

Preferably, the first sliding plate, the second sliding plate and the second vertical plate are of an integral structure.

Preferably, the bottom of the pressure plate and the top of the supporting plate are coaxially connected with non-slip mats.

The utility model provides a pair of electrostatic chuck and base plate clamping device, beneficial effect lies in: the utility model discloses the backup pad that sets up can carry out stable centre gripping to placing base plate, the static chuck at clamp plate top, and under the positioning action between gliding second sliding plate and the limiting plate, has realized the stability of diaphragm and has placed, and then has increased the holistic clamping-force of device.

Drawings

Fig. 1 is a schematic structural view of an electrostatic chuck and a substrate clamping device according to the present invention.

Fig. 2 is a partial enlarged view of a portion a of the electrostatic chuck and the substrate holding apparatus according to the present invention.

In the figure: pressing plate 1, backup pad 2, gyro wheel 3, diaphragm 4, locating lever 5, place box 6, first riser 7, bar groove 8, first sliding plate 9, positioning bolt 10, limiting plate 11, guide way 12, second sliding plate 13, the logical groove of bar 14, second riser 15.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.

Referring to fig. 1-2, an electrostatic chuck and base plate clamping device, including placing box 6, be equipped with the opening on the lateral wall of placing box 6, symmetrical connection has a plurality of backup pads 2 on the inner wall of placing box 6, the equidistance sets up between a plurality of backup pads 2, the equal coaxial clamp plate 1 that is equipped with in bottom of a plurality of backup pads 2, a plurality of clamp plates 1 are close to and are placed two locating levers 5 of symmetrical vertical connection on one side of box 6 inner wall, it is equipped with bar groove 8 to place 6 inner wall correspondence department of box, the length in bar groove 8 equals backup pad 2 and is located and transfer and the distance between the adjacent clamp plate 1, backup pad 2, the space that forms between the clamp plate 1 is used for placing base plate or electrostatic chuck, backup pad 2 that set up simultaneously has played certain left and right sides of pressing, and then.

The other end of locating lever 5 runs through the setting of bar groove 8 that corresponds position department, it forms two rows to be located 6 outside locating levers 5 of placing box, the equal fixed connection of one side locating lever 5 is on

first riser

7, 7 parallel arrangement of two first risers, and 7 perpendicular clamp plates 1 of first riser, backup pad 2 sets up, equal fixedly connected with diaphragm 4 between the both ends of two first risers 7, cooperation between 7 of first riser and the diaphragm 4 of setting is connected, can play stable effect to locating lever 5, and then made things convenient for the normal clear of regulation.

One side of the transverse plate 4 positioned above is communicated with a strip-shaped through groove 14, a second sliding plate 13 is connected in the strip-shaped through groove 14 in a sliding manner, one end of the second sliding plate 13 extends to the side wall of the placing box body 6, the top of one end, far away from the placing box body 6, of the second sliding plate 13 is fixedly connected with a second vertical plate 15, one side of the top of the second vertical plate 15 is vertically connected with a first sliding plate 9, the width of the first sliding plate 9 is larger than that of the transverse plate 4, the top of the first sliding plate 9 is communicated with a plurality of guide grooves 12, a plurality of positioning bolts 10 are vertically connected at corresponding positions at the top of the transverse plate 4, the positioning bolts 10 penetrate through the guide grooves 12 at corresponding positions, a plurality of limiting plates 11 are vertically connected at equal intervals at corresponding positions on the side wall of the placing box body 6, the distance between the adjacent limiting plates 11 is equal, under the cooperation connection between gliding second sliding plate 13 and the limiting plate 11, can play certain positioning action to diaphragm 4 after placing, and then improved the tight effort of clamp of device.

The utility model discloses the backup pad 2 that sets up can carry out stable centre gripping to placing base plate, the static chuck at 1 top of clamp plate, and under the positioning action between gliding second sliding plate 13 and limiting plate 11, has realized stable the placing of diaphragm 4, and then has increased the holistic clamping-force of device.

Specifically, when the device is used, a substrate to be placed or an electrostatic chuck plate is placed on the top of the supporting plate 2, and after the placement is finished, the first sliding plate 9 arranged on the transverse plate 4 slides, the sliding first sliding plate 9 can drive the second vertical plate 15 and the second sliding plate 13 to move, one end of the second sliding plate 13 moves out of the adjacent limiting plate 11, the transverse plate 4 can be moved up and down, the sliding transverse plate 4 can drive the supporting plate 2 to move to the top of the placed base plate or electrostatic chuck through the sliding positioning rod 5, and under the combined action of the pressing plate 1, the clamping effect on the base plate is realized, the second sliding plate 13 can be slid again after the placement is finished, namely, the second sliding plate 13 can be positioned under the action of the limiting plate 11, so that the structure is simple and the operation of a user is convenient.

Referring to fig. 1, further, the four corners of the bottom of the placing box 6 are fixedly connected with the rollers 3.

The idler wheel 3 is convenient for a user to move the placing box body 6, and a large amount of manpower is saved.

Referring to fig. 1 and 2, the first sliding plate 9, the second sliding plate 13, and the second riser plate 15 are integrally formed.

The first sliding plate 9, the second sliding plate 13 and the second vertical plate 15 are integrally arranged, so that the overall stability of the device is improved.

Referring to fig. 1, further, the bottom of the pressing plate 1 and the top of the supporting plate 2 are coaxially connected with non-slip mats.

The clamping force between the supporting plate 2 and the pressing plate 1 is improved due to the arrangement of the anti-slip mat.

Above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the design of the present invention, equivalent replacement or change should be covered within the protection scope of the present invention.

Claims

1. An electrostatic chuck and substrate clamping device comprises a placing box body (6), and is characterized in that an opening is formed in one side wall of the placing box body (6), a plurality of supporting plates (2) are symmetrically connected to the inner wall of the placing box body (6), the supporting plates (2) are arranged at equal intervals, pressing plates (1) are coaxially arranged at the bottoms of the supporting plates (2), two positioning rods (5) are symmetrically and vertically connected to one side, close to the inner wall of the placing box body (6), of the pressing plates (1), strip-shaped grooves (8) are formed in corresponding positions of the inner wall of the placing box body (6), the length of each strip-shaped groove (8) is equal to the distance between each supporting plate (2) and the adjacent pressing plate (1) which is placed downwards, the other ends of the positioning rods (5) penetrate through the strip-shaped grooves (8) in corresponding positions, the positioning rods (5) positioned, one side positioning rod (5) is fixedly connected to first vertical plates (7), the two first vertical plates (7) are arranged in parallel, the first vertical plates (7) are perpendicular to the pressing plate (1) and the supporting plate (2), a transverse plate (4) is fixedly connected between two ends of the two first vertical plates (7), one side of the transverse plate (4) positioned above is communicated with a strip-shaped through groove (14), a second sliding plate (13) is connected in the strip-shaped through groove (14) in a sliding mode, one end of the second sliding plate (13) extends to the side wall of the placing box body (6), the top of one end, far away from the placing box body (6), of the second sliding plate (13) is fixedly connected with a second vertical plate (15), one side of the top of the second vertical plate (15) is vertically connected with a first sliding plate (9), the width of the first sliding plate (9) is larger than that of the transverse plate (4), a plurality of guide grooves (, the top of diaphragm (4) corresponds position department and is connected with a plurality of positioning bolt (10) perpendicularly, and positioning bolt (10) run through guide way (12) setting that correspond position department, place box (6) lateral wall and correspond position department equidistance and be connected with a plurality of limiting plate (11) perpendicularly, and the distance between adjacent limiting plate (11) equals the width of second sliding plate (13), and second sliding plate (13) keep away from the one end extensible of second riser (15) to between adjacent limiting plate (11).

2. The electrostatic chuck and substrate holding apparatus according to claim 1, wherein the rollers (3) are fixedly connected to four corners of the bottom of the placing box (6).

3. The electrostatic chuck and substrate clamping device of claim 1, wherein the first sliding plate (9), the second sliding plate (13), and the second vertical plate (15) are integrally formed.

4. An electrostatic chuck and substrate holding apparatus as claimed in claim 1, wherein the bottom of the pressure plate (1) and the top of the support plate (2) are coaxially attached with non-slip pads.