CN212332693U

CN212332693U - Plate trailer for wafer transportation

Info

Publication number: CN212332693U
Application number: CN202020973722.6U
Authority: CN
Inventors: 魏剑宏
Original assignee: Suzhou Angke Microelectronics Technology Co ltd
Current assignee: Suzhou Angke Microelectronics Technology Co ltd
Priority date: 2020-06-01
Filing date: 2020-06-01
Publication date: 2021-01-12
Anticipated expiration: 2030-06-01

Abstract

The utility model relates to the technical field of wafer transportation equipment, in particular to a wafer transportation plate trailer, which comprises a handle, a wheel carrier spring and wheels, wherein the bottom of the handle is welded and fixed on the upper end surface of a placing flat plate, and reinforcing ribs are symmetrically welded on the left side and the right side of a welding part; the placing flat plate is slidably arranged in a track of the connecting frame, and a limiting plate is processed above the connecting frame; the wheel carrier is fixedly welded at the bottom of the connecting frame; the connecting frame is internally provided with a cavity, and the lower end face of the placing flat plate is connected with the inner wall at the bottom of the connecting frame through a shock absorber. The utility model discloses a handle with the junction of wheel carrier sets up the bumper shock absorber with the shock attenuation board has further improved the shock attenuation effect in the wooden handcart transportation, makes and transports in-process wafer semi-manufactured goods and can not take place vibrations and cause the collision, and it has positive meaning to improve economic benefits to the enterprise.

Description

Plate trailer for wafer transportation

Technical Field

The utility model relates to a wafer transportation equipment technical field specifically is a pallet truck is used in wafer transportation.

Background

A wafer refers to a substrate (also called a substrate) from which semiconductor transistors or integrated circuits are fabricated. Since it is a crystalline material, it is called a wafer because it is circular in shape. The substrate material of the wafer comprises silicon, germanium and the like, since silicon is the most commonly used, if crystal material is not particularly indicated, silicon wafer is commonly used, the surface of the earth crust is provided with inexhaustible silicon dioxide, silicon dioxide ore is refined by an electric arc furnace, hydrochloric acid is used for chlorination, and the silicon dioxide ore is distilled to prepare high-purity polysilicon with the purity of 99.999999999 percent. The wafer can be processed into various circuit device structures to become integrated circuit products with specific electrical functions.

In the prior art, during the production and processing process of a wafer in a workshop, a worker often needs to use a pallet truck to transport a semi-finished wafer to the workshop of the next process for reprocessing, during the transportation process, the wafer is placed on a plate, if the wafer is shocked, the wafer is collided, the quality of the wafer can be seriously affected, the semi-finished wafer can be seriously and directly scrapped, and therefore the pallet truck for transporting the semi-finished wafer needs to have good shock resistance.

SUMMERY OF THE UTILITY MODEL

In order to solve the problem provided in the above-mentioned background art, the utility model provides a wafer transport is with wooden handcart.

In order to achieve the above object, the utility model provides a following technical scheme:

a wafer transportation plate trailer comprises a handle, wheel carriers, wheel carrier springs and wheels, wherein the two wheel carriers are arranged below the handle in a bilateral symmetry manner, and the wheel carrier springs and the wheels are arranged at the bottoms of the wheel carriers; the bottom of the handle is welded and fixed on the upper end surface of the placing flat plate, and reinforcing ribs are symmetrically welded on the left side and the right side of the welding position, so that the strength of the welding position is improved; the placing flat plate is slidably arranged in a track of the connecting frame, and a limiting plate is processed above the connecting frame to play a limiting role and ensure that the placing flat plate cannot fall off from the track; the wheel carrier is fixedly welded at the bottom of the connecting frame; the inner part of the connecting frame is a cavity, the lower end face of the placing flat plate is connected with the inner wall of the bottom of the connecting frame through a shock absorber, the technical effect of secondary shock absorption is achieved, when vibration occurs, the placing flat plate slides up and down in the track, and the shock absorption effect is achieved through the shock absorber; the shock absorption plate is characterized in that a connecting plate is welded and fixed at the center of the lower end face of the placing plate, a shock absorption plate with the quantity larger than two is welded and fixed at the lower end face of the connecting plate, the shock absorption plate is fixed together through a fixing buckle, the shock absorption plate is fixed at the left end and the right end through fixing feet, and the inner wall of the bottom of the connecting frame can achieve the technical effect of three-level shock absorption due to the deformation of the shock absorption plate.

According to the further scheme of the utility model, the shock absorber comprises an upper plate, a sliding rod, a shock absorber spring and a lower plate, the upper end face of the upper plate is welded and fixed on the lower end face of the placing plate, the lower end face of the upper plate is welded and fixed with the sliding rod, the bottom of the sliding rod is slidably mounted in the lower plate, the shock absorber spring is sleeved on the sliding rod, and the bottom of the lower plate is welded and fixed on the inner wall of the bottom of the connecting frame.

As a further scheme of the utility model, fixed foot is including rotating connecting piece, slider, fixed foot spring, it is in to rotate connecting piece top welded fastening on the shock attenuation board, slider upper portion rotates to be installed rotate on the connecting piece, slider lower part slidable mounting is in the spout, the spout is seted up in carriage bottom inner wall, the slider lower part with the space department of spout has placed fixed foot spring, plays fixedly the effect of shock attenuation board, simultaneously guarantee when the shock attenuation board takes place to deform the stability of shock attenuation board.

Compared with the prior art, the beneficial effects of the utility model are that:

in the plate trailer transportation, except that the wheel carrier spring can carry out the shock attenuation, the bumper shock absorber can carry out the second grade shock attenuation, the shock attenuation board can carry out tertiary shock attenuation, guarantees simultaneously that the stability of wheel carrier is not influenced, just the bumper shock absorber with the shock attenuation board is installed place the flat board with between the connecting frame, be in sealed environment, long service life, stability is good, and is not fragile. The utility model discloses a set up the bumper shock absorber with the shock attenuation board has further improved the shock attenuation effect in the wooden handcart transportation, makes and transports in-process wafer semi-manufactured goods and can not take place vibrations and cause the collision, and it has positive meaning to improve economic benefits to the enterprise.

Drawings

Fig. 1 is a schematic structural diagram of the present invention.

Fig. 2 is an enlarged view of a portion a in fig. 1.

Fig. 3 is an enlarged view of a portion B in fig. 1.

In the figure: 1-grip, 2-wheel carrier, 3-wheel carrier spring, 4-reinforcing rib, 5-placing flat plate, 6-connecting frame, 7-track, 8-damper, 9-upper plate, 10-sliding rod, 11-damper spring, 12-lower plate, 13-connecting plate, 14-damping plate, 15-fixing buckle, 16-fixing foot, 17-rotating connecting piece, 18-sliding block, 19-sliding chute, 20-fixing foot spring, 21-limiting plate and 22-wheel.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-3, a wafer transportation pallet truck includes a handle 1, wheel frames 2, wheel frame springs 3 and wheels 22, two wheel frames 2 are arranged below the handle 1, the wheel frame springs 3 and the wheels 22 are arranged at the bottom of the wheel frames 2; the bottom of the handle 1 is welded and fixed on the upper end surface of the placing flat plate 5, and reinforcing ribs 4 are symmetrically welded on the left side and the right side of the welding position, so that the strength of the welding position is improved; the placing flat plate 5 is slidably arranged in the track 7 of the connecting frame 6, and a limiting plate 21 is processed above the connecting frame 6 to play a limiting role and ensure that the placing flat plate 5 cannot fall off from the track 7; the wheel carrier 2 is fixedly welded at the bottom of the connecting frame 6; the connecting frame 6 is internally provided with a cavity, the lower end face of the placing flat plate 5 is connected with the inner wall of the bottom of the connecting frame 6 through the shock absorber 8, the technical effect of secondary shock absorption is achieved, when vibration occurs, the placing flat plate 5 slides up and down in the track 7, and the shock absorption effect is achieved through the shock absorber 8; the shock absorber 8 comprises an upper plate 9, a sliding rod 10, a shock absorber spring 11 and a lower plate 12, the upper end face of the upper plate 9 is fixedly welded to the lower end face of the placing flat plate 5, the lower end face of the upper plate 9 is fixedly welded with the sliding rod 10, the bottom of the sliding rod 10 is slidably mounted in the lower plate 12, the shock absorber spring 11 is sleeved on the sliding rod 10, and the bottom face of the lower plate 12 is fixedly welded to the inner wall of the bottom of the connecting frame 6; a connecting plate 13 is fixedly welded at the center of the lower end face of the placing flat plate 5, damping plates 14 with the number larger than two are fixedly welded at the lower end face of the connecting plate 13, the damping plates 14 are fixed together through fixing buckles 15, the left end and the right end of the damping plate 14 at the bottom are fixed on the inner wall of the bottom of the connecting frame 6 through fixing pins 16, and the damping plates 14 can achieve the technical effect of three-level damping due to deformation;

fixed foot 16 includes rotation connecting piece 17, slider 18, fixed foot spring 20, rotation connecting piece 17 top welded fastening is in on the

damper plate

14, 18 upper portions of slider rotate to be installed on

rotation connecting piece

17, 18 lower parts of slider slidable mounting are in spout 19, spout 19 sets up in 6 bottom inner walls of link frame, 18 lower parts of slider with 19 space department has placed fixed foot spring 20, plays fixedly damper plate 14's effect, simultaneously damper plate 14 guarantees when taking place deformation damper plate 14's stability.

The working principle of the utility model is that in the plate trailer transportation process, except that wheel carrier spring 3 can carry out the shock attenuation, bumper shock absorber 8 can carry out the second grade shock attenuation, shock attenuation board 14 can carry out tertiary shock attenuation, guarantees simultaneously that the stability of wheel carrier is not influenced, just bumper shock absorber 8 with shock attenuation board 14 is installed place dull and stereotyped 5 with between the connecting frame 6, be in sealed environment, long service life, stability is good, and is not fragile. The utility model discloses a set up bumper shock absorber 8 with shock attenuation board 14 has further improved the shock attenuation effect in the wooden handcart transportation, makes and transports in-process wafer semi-manufactured goods and can not take place vibrations and cause the collision, and it has positive meaning to improve economic benefits to the enterprise.

It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.

Claims

1. A wafer transportation plate trailer comprises a handle (1), wheel carriers (2), wheel carrier springs (3) and wheels (22), wherein the two wheel carriers (2) are arranged below the handle (1) in a bilateral symmetry manner, the wheel carrier springs (3) and the wheels (22) are arranged at the bottoms of the wheel carriers (2), and the wafer transportation plate trailer is characterized in that the bottom of the handle (1) is welded and fixed on the upper end surface of a placing flat plate (5), and reinforcing ribs (4) are symmetrically welded at the left side and the right side of the welding position; the placing flat plate (5) is slidably arranged in a track (7) of the connecting frame (6), and a limiting plate (21) is processed above the connecting frame (6); the wheel carrier (2) is fixedly welded at the bottom of the connecting frame (6); the interior of the connecting frame (6) is a cavity, and the lower end face of the placing flat plate (5) is connected with the inner wall of the bottom of the connecting frame (6) through a shock absorber (8).

2. The wafer transportation plate trailer of claim 1, wherein the shock absorber (8) comprises an upper plate (9), a sliding rod (10), a shock absorber spring (11) and a lower plate (12), the upper end surface of the upper plate (9) is welded and fixed on the lower end surface of the placing flat plate (5), the sliding rod (10) is welded and fixed on the lower end surface of the upper plate (9), the bottom of the sliding rod (10) is slidably installed in the lower plate (12), the shock absorber spring (11) is sleeved on the sliding rod (10), and the bottom surface of the lower plate (12) is welded and fixed on the inner wall of the bottom of the connecting frame (6).

3. The wafer transportation plate trailer of claim 1, wherein a connecting plate (13) is welded and fixed at the center of the lower end face of the placing flat plate (5), and the left end and the right end of the damping plate (14) are fixed on the inner wall of the bottom of the connecting frame (6) through fixing pins (16).

4. The wafer transport cart according to claim 3, wherein the number of the shock absorbing plates (14) is greater than two and the shock absorbing plates are fixed together by a fixing buckle (15).

5. The wafer transportation plate trailer according to claim 3, characterized in that the fixed foot (16) comprises a rotary connecting piece (17), a sliding block (18) and a fixed foot spring (20), the top of the rotary connecting piece (17) is welded and fixed on the damping plate (14), the upper part of the sliding block (18) is rotatably installed on the rotary connecting piece (17), the lower part of the sliding block (18) is slidably installed in a sliding groove (19), the sliding groove (19) is arranged on the inner wall of the bottom of the connecting frame (6), and the fixed foot spring (20) is placed in a gap between the lower part of the sliding block (18) and the sliding groove (19).