CN212321822U

CN212321822U - Magnetic detection device for coated rotary cathode magnetic bar

Info

Publication number: CN212321822U
Application number: CN202020302285.5U
Authority: CN
Inventors: 丛峰
Original assignee: Suzhou Victory Precision Manufacture Co Ltd
Current assignee: Suzhou Victory Precision Manufacture Co Ltd
Priority date: 2020-03-12
Filing date: 2020-03-12
Publication date: 2021-01-08
Anticipated expiration: 2030-03-12

Abstract

The utility model discloses a magnetism detection device for coating film rotating cathode bar magnet, include mounting base (1), install be used for placing the supporting component of rotating cathode bar magnet (8) on mounting base (1), install Y on mounting base (1) is to translation subassembly (3), install Y is to Z on translation subassembly (3) to adjusting part (4) and install Z is to X on adjusting part (4) to adjusting part (5), X is equipped with centre gripping subassembly (6) with centre gripping magnetism test probe (7) to the lower extreme of adjusting part (5). The utility model provides a magnetism detection device for coating film rotating cathode bar magnet can improve and detect the precision, improves production efficiency.

Description

Magnetic detection device for coated rotary cathode magnetic bar

Technical Field

The utility model relates to a magnetic control coating film technical field, in particular to a magnetism detection device for coating film rotating cathode bar magnet.

Background

Whether the magnetism of a rotary cathode magnetic rod of a magnetic control coating is uniform or not is crucial to the coating quality, magnet assembly of the magnetic rod, periodic maintenance and monitoring of the magnetic rod and reason investigation of the problem of the coating quality are carried out in advance, the magnetism of the magnetic rod can be detected, the current detection method is that a magnetic detection probe is manually held, a defined distance from one end of the magnetic rod to the most other end of the magnetic rod is slowly moved to be measured, the position error is large, the obtained data is inaccurate, and the reason for analyzing the problem is often not a real reason due to inaccurate data. Therefore, it is necessary to design a mechanism capable of ensuring the measurement accuracy to cope with this problem.

SUMMERY OF THE UTILITY MODEL

The utility model aims at providing a magnetism detection device for coating film rotating cathode bar magnet solves artifical handheld probe and detects the unsafe problem that leads to the measured data.

Based on the above problem, the utility model provides a technical scheme is:

the magnetism detection device for the film-coating rotary cathode magnetic rod comprises a mounting base, a supporting assembly, a Y-direction translation assembly, a Z-direction adjusting assembly and an X-direction adjusting assembly, wherein the supporting assembly is arranged on the mounting base and used for placing the rotary cathode magnetic rod, the Y-direction translation assembly is arranged on the mounting base, the Z-direction adjusting assembly is arranged on the Y-direction translation assembly, the X-direction adjusting assembly is arranged on the Z-direction adjusting assembly, and a clamping assembly is arranged at the lower end of the X-direction adjusting assembly and used for clamping a magnetism detection probe.

In one embodiment, the supporting assembly comprises a plurality of supporting seats arranged at intervals along the length direction of the mounting base, and the supporting seats are provided with limiting grooves matched with the rotary cathode magnetic rods.

In one embodiment, the Y-direction translation assembly includes a first guide rail fixed at the bottom of the mounting base and arranged along the length direction of the mounting base, a first slider in sliding fit with the first guide rail, a first support plate fixedly connected with the first slider, and a second support plate fixedly connected with the first support plate, the second support plate is arranged along the vertical direction, and the Z-direction adjustment assembly is disposed on the second support plate.

In one embodiment, the Z-adjustment assembly includes a second rail fixed to the second support plate, a second slider slidably engaged with the second rail, and a first fastener for fixing the second slider to the second rail.

In one embodiment, the second guide rail is provided with a first scale mark along the sliding direction.

In one embodiment, the X-direction adjusting assembly includes a third guide rail fixed to the second sliding block, a third sliding block slidably engaged with the third guide rail, and a second fastening member for fixing the third sliding block to the third guide rail, and the third sliding block is arranged along the width direction of the mounting base.

In one embodiment, the third guide rail is provided with a second scale mark along the sliding direction.

In one embodiment, the clamping assembly comprises an upper clamping plate and a lower clamping plate, and the magnetic detection probe is clamped between the upper clamping plate and the lower clamping plate.

Compared with the prior art, the utility model has the advantages that:

adopt the technical scheme of the utility model, fix a definite position in the bar magnet top through Z to adjusting part and X to adjusting part with magnetism test probe, then follow Y with magnetism test probe to the translation, can detect the magnetism of bar magnet, can accurately acquire the magnetic data of bar magnet, improve detection efficiency.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required to be used in the description of the embodiments are briefly introduced below, the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.

FIG. 1 is a schematic structural view of an embodiment of a magnetic detection device for a coated rotary cathode bar magnet according to the present invention;

fig. 2 is a schematic structural view of another direction of the embodiment of the present invention;

FIG. 3 is a schematic structural diagram of a rotating cathode magnetic rod according to an embodiment of the present invention;

fig. 4 is a schematic diagram of a detection state according to an embodiment of the present invention;

FIG. 5 is a schematic structural diagram of another direction of the detection state according to the embodiment of the present invention;

fig. 6 is a schematic diagram illustrating the definition of the moving direction of the detecting probe according to the embodiment of the present invention.

Wherein:

1. installing a base;

2. a support seat 2-1 and a limit groove;

3. a Y-direction translation assembly; 3-1, a first guide rail; 3-2, a first slide block; 3-3, a first supporting plate; 3-4, a second support plate;

4. a Z-direction adjusting component; 4-1, a second guide rail; 4-2, a second slide block; 4-3, a first fastener; 4-4, a first scale mark;

5. an X-direction adjusting component 5-1 and a third guide rail; 5-2, a third slide block; 5-3, a second fastener; 5-4, second scale mark;

6. a clamping assembly; 6-1, an upper splint; 6-2, a lower splint;

7. a magnetic detection probe;

8. the cathode magnetic bar is rotated.

Detailed Description

The above-described scheme is further illustrated below with reference to specific examples. It should be understood that these examples are for illustrative purposes and are not intended to limit the scope of the present invention. The conditions used in the examples may be further adjusted according to the conditions of the particular manufacturer, and the conditions not specified are generally the conditions in routine experiments.

Referring to fig. 1-2, for the structural schematic diagram of the embodiment of the utility model provides a magnetism detection device for coating film rotating cathode bar magnet, including mounting base 1, install the supporting component who is used for placing rotating cathode bar magnet 8 on mounting base 1, install Y on mounting base 1 to translation subassembly 3, install Z on Y to translation subassembly 3 to adjusting part 4, and install X on Z to adjusting part 4 to adjusting part 5, be equipped with centre gripping subassembly 6 at X to adjusting part 5's lower extreme and with centre gripping magnetism detection probe 7. In this example, the mounting base 1 has a rectangular plate-like structure, and the length of the mounting base 1 is equal to or longer than the length of the rotary cathode bar magnet 8. Magnetic detection probe 7 is prior art, the utility model discloses no longer describe.

The supporting assembly comprises a plurality of supporting seats 2 which are arranged at intervals along the length direction of the mounting base 1, limiting grooves 2-1 matched with the rotary cathode magnetic rods 8 are arranged on the supporting seats 2, and the rotary cathode magnetic rods 8 are placed on the supporting seats 2 and are limited and fixed through the limiting grooves 2-1 during detection.

Referring to fig. 2, the Y-direction translation assembly 3 includes a first guide rail 3-1 fixed at the bottom of the mounting base 1 and arranged along the length direction of the mounting base 1, a first slider 3-2 in sliding fit with the first guide rail 3-1, a first support plate 3-3 fixedly connected with the first slider 3-2, and a second support plate 3-4 fixedly connected with the first support plate 3-3, the first support plate 3-3 is fixed at the lower end of the first slider 3-2 and arranged along the horizontal direction, the second support plate 3-4 is arranged along the vertical direction, and the Z-direction adjustment assembly 4 is arranged on the second support plate 3-4.

The Z-direction adjusting component 4 comprises a second guide rail 4-1 fixed on the second support plate 3-4, a second sliding block 4-2 in sliding fit with the second guide rail 4-1, and a first fastening piece 4-3 for fixing the second sliding block 4-2 on the second guide rail 4-1, wherein the first fastening piece 4-3 can adopt a screw, and when the second sliding block 4-2 is adjusted to a proper position, the second sliding block 4-2 is fixed through the first fastening piece 4-3.

In order to facilitate the Z-direction adjustment, a first scale mark 4-4 is arranged on the second guide rail 4-1 along the sliding direction.

The X-direction adjusting assembly 5 comprises a third guide rail 5-1 fixed on the second sliding block 4-2, a third sliding block 5-2 in sliding fit with the third guide rail 5-1, and a second fastening piece 5-3 for fixing the third sliding block 5-2 on the third guide rail 5-1, wherein the third sliding block 5-2 is arranged along the width direction of the mounting base 1, and the second fastening piece 5-3 can be screws.

In order to facilitate the adjustment in the X direction, a second graduation mark 5-4 is provided on the third guide rail 5-1 along the sliding direction.

In this example, the clamp assembly 6 includes an upper clamp plate 6-1 and a lower clamp plate 6-2, and the magnetic detection probe 7 is clamped between the upper clamp plate 6-1 and the lower clamp plate 6-2.

Referring to fig. 4-6, during detection, the rotary cathode magnetic rod 8 is placed on the plurality of supporting seats 2, the Y-direction translation assembly 3 is moved to the rightmost position of the rotary cathode magnetic rod 8, the magnetic detection probe 7 is adjusted to the initial measurement position through the Z-direction adjustment assembly 4 and the X-direction adjustment assembly 5, the positions of the magnetic detection probe in the X direction and the Z direction are locked, then the Y-direction translation assembly 3 is moved to detect the magnetism of the whole rotary cathode magnetic rod 8 from right to left, and in the detection process, the magnetic detection probe 7 is rigidly connected and fixed in the X direction and the Z direction and only linearly translates in the Y direction, so that the measurement precision is ensured, and more magnetic data can be obtained by adjusting the positions of the magnetic detection probe in the X direction and the Z direction to be used for research on the coating process.

The above examples are only for illustrating the technical conception and the features of the present invention, and the purpose thereof is to enable one skilled in the art to understand the contents of the present invention and to implement the present invention, which should not be construed as limiting the scope of the present invention. All equivalent changes and modifications made according to the spirit of the present invention should be covered by the protection scope of the present invention.

Claims

1. A magnetism detection device for coating film rotary cathode bar magnet which characterized in that: including mounting base (1), install be used for placing the supporting component of rotatory cathode bar magnet (8), install on mounting base (1) Y on mounting base (1) to translation subassembly (3), install Y is to Z on translation subassembly (3) to adjusting part (4) and install X on Z to adjusting part (4) is to adjusting part (5), X is equipped with centre gripping subassembly (6) with centre gripping magnetism test probe (7) to the lower extreme of adjusting part (5).

2. The magnetic detection device for the coated rotary cathode magnetic bar according to claim 1, characterized in that: the supporting assembly comprises a plurality of supporting seats (2) which are arranged at intervals along the length direction of the mounting base (1), and limiting grooves (2-1) matched with the rotary cathode magnetic bars (8) are formed in the supporting seats (2).

3. The magnetic detection device for the coated rotary cathode magnetic bar according to claim 1, characterized in that: y is including fixing mounting base (1) bottom and along first guide rail (3-1) that mounting base (1) length direction arranged, with first guide rail (3-1) sliding fit's first slider (3-2), with first slider (3-2) fixed connection's first backup pad (3-3) and with first backup pad (3-3) fixed connection's second backup pad (3-4), second backup pad (3-4) are arranged along vertical direction, Z is in to adjusting part (4) setting on second backup pad (3-4).

4. The magnetic detection device for the coated rotary cathode magnetic bar according to claim 3, wherein: the Z-direction adjusting assembly (4) comprises a second guide rail (4-1) fixed on the second support plate (3-4), a second sliding block (4-2) in sliding fit with the second guide rail (4-1), and a first fastener (4-3) for fixing the second sliding block (4-2) on the second guide rail (4-1).

5. The magnetic detection device for the coated rotary cathode magnetic bar according to claim 4, wherein: and a first scale mark (4-4) is arranged on the second guide rail (4-1) along the sliding direction.

6. The magnetic detection device for the coated rotary cathode magnetic bar according to claim 4, wherein: the X-direction adjusting assembly (5) comprises a third guide rail (5-1) fixed on the second sliding block (4-2), a third sliding block (5-2) in sliding fit with the third guide rail (5-1), and a second fastening piece (5-3) for fixing the third sliding block (5-2) on the third guide rail (5-1), wherein the third sliding block (5-2) is arranged along the width direction of the mounting base (1).

7. The magnetic detection device for the coated rotary cathode magnetic bar according to claim 6, wherein: and a second scale mark (5-4) is arranged on the third guide rail (5-1) along the sliding direction.

8. The magnetic detection device for the coated rotary cathode magnetic bar according to claim 1, characterized in that: the clamping assembly (6) comprises an upper clamping plate (6-1) and a lower clamping plate (6-2), and the magnetic detection probe (7) is clamped between the upper clamping plate (6-1) and the lower clamping plate (6-2).