CN212321462U - Surface defect detection device - Google Patents
Surface defect detection device Download PDFInfo
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- CN212321462U CN212321462U CN202020449684.4U CN202020449684U CN212321462U CN 212321462 U CN212321462 U CN 212321462U CN 202020449684 U CN202020449684 U CN 202020449684U CN 212321462 U CN212321462 U CN 212321462U
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- 230000007547 defect Effects 0.000 title claims abstract description 71
- 238000001514 detection method Methods 0.000 title claims abstract description 38
- 210000001503 joint Anatomy 0.000 claims abstract description 6
- 230000003760 hair shine Effects 0.000 claims abstract description 5
- 230000007246 mechanism Effects 0.000 claims description 43
- 230000000712 assembly Effects 0.000 claims description 35
- 238000000429 assembly Methods 0.000 claims description 35
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 9
- 230000008859 change Effects 0.000 claims description 7
- 229910000838 Al alloy Inorganic materials 0.000 claims description 5
- 239000000956 alloy Substances 0.000 claims description 5
- 239000011521 glass Substances 0.000 claims description 5
- 238000013461 design Methods 0.000 description 14
- 238000012545 processing Methods 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 4
- 238000005286 illumination Methods 0.000 description 4
- 238000007689 inspection Methods 0.000 description 4
- 238000001914 filtration Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000000877 morphologic effect Effects 0.000 description 3
- 230000000149 penetrating effect Effects 0.000 description 3
- 208000034656 Contusions Diseases 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 208000034526 bruise Diseases 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000002950 deficient Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 238000003709 image segmentation Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
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Abstract
The utility model relates to a computer vision technical field especially relates to a surface defect detection device, including the platform, set up year thing subassembly, first support on the platform, respectively with camera and light source subassembly, the second support of first leg joint and with the coaxial light source of second leg joint, first support sets up relatively with the second support on the platform, it is located to carry the thing subassembly just in the shooting region of camera carry the thing subassembly and be used for bearing the sample that awaits measuring, the light source subassembly includes a plurality of light-emitting component, light-emitting component with the sample that awaits measuring relatively and set up in the camera with in order to provide the LED light source between the sample that awaits measuring, coaxial light source slope shines on the sample that awaits measuring in order to provide coaxial light source. The utility model provides a pair of surface defect detection device has efficient, the false retrieval rate and leak the advantage such as examining the rate low.
Description
[ technical field ] A method for producing a semiconductor device
The utility model relates to a check out test set technical field especially relates to a surface defect detection device.
[ background of the invention ]
The existing detection technology for metal surface defects is immature, the detection rate of rough texture metal surface defects is extremely low, and the false detection rate and the omission rate are extremely high.
A visual-based surface fine defect detection technology exists in the current market, and the technology collects 4 images of a metal surface to be detected at different illumination angles through 4 red light type point light source image systems, calculates gradient data of an object by using calibrated light source direction parameters, performs Gaussian curvature filtering processing on the gradient data, synthesizes curvature images, and performs image segmentation and morphological operation to realize defect detection of the metal surface. The defects are as follows: in addition, the efficiency of large-scale assembly line operation is low by directly acquiring 4 images to detect surface defects.
[ Utility model ] content
For overcoming current surface defect detection device and miss defect that the rate is high, efficient, the utility model provides a surface defect detection device.
In order to solve the technical problem, the utility model provides a following technical scheme: the utility model provides a surface defect detection device, surface defect detection device includes the platform, sets up year thing subassembly, first support on the platform, camera and light source subassembly, the second support of being connected with first support respectively and the coaxial light source of second leg joint, first support sets up with the second support is relative on the platform, it is located to carry the thing subassembly just to carry the thing subassembly and be used for bearing the sample that awaits measuring in the shooting region of camera, the light source subassembly includes a plurality of luminous subassemblies that can independently or give out light simultaneously, luminous subassembly with the sample that awaits measuring is relative and set up in the camera with await measuring between the sample in order to provide the LED light source, coaxial light source slope shines on the sample that awaits measuring in order to provide coaxial light source.
Preferably, the light source assembly further comprises a light source disc connected with one side of the plurality of light emitting assemblies, the light source disc is circular, the circumferences of the light emitting assemblies are arranged on one side, facing the object carrying assembly, of the light source disc, and the plurality of light emitting assemblies form an annular light source.
Preferably, the number of the light emitting assemblies is nine, the light emitting assemblies include a connecting member connected to the light source panel, a rotating member rotatably connected to the connecting member, and a light emitting member connected to the rotating member, and the rotating member can be rotated to change a rotation angle of the light emitting member.
Preferably, the connecting piece is provided with limiting blocks near the rotating piece, the limiting blocks are formed by protruding parts on one side opposite to the connecting piece, the rotating piece rotates to abut against the limiting blocks to limit the irradiation angle of the light emitting piece, the range of the rotating angle of the light emitting piece limited by the limiting blocks is 0-70 degrees, and the range of the rotating angle of the coaxial light source is 30-60 degrees.
Preferably, the first support comprises a connecting rod connected with the platform, a camera fixing part connected with the connecting rod in a sliding manner, and a fixing frame, and the fixing frame is arranged on one side of the camera fixing part facing the platform;
the camera fixing part comprises a camera adjusting block connected with the connecting rod in a sliding mode, and a first clamping block and a second clamping block which are connected with the camera adjusting block respectively, a waist-shaped hole connected with the first clamping block and the second clamping block respectively is formed in the camera adjusting block, and the first clamping block and the second clamping block are clamped to fix the camera.
Preferably, the fixing frame comprises a light source fixing block connected with the connecting rod, and a first connecting block and a second connecting block which are respectively connected with the light source fixing block, and the first connecting block and the second connecting block are connected with the light source disc.
Preferably, the second bracket includes a support rod connected to the platform and a light source fixing member slidably connected to the support rod, and the light source fixing member has the same structure as the camera fixing member to fix the coaxial light source.
Preferably, a U-shaped groove is formed in the platform, the second support comprises a sliding part connected with the supporting rod, the supporting rod penetrates through the sliding part, the sliding part is connected with the U-shaped groove, the platform, the first support, the second support and the light source disc are made of aluminum alloy materials, the camera is an area array color camera, the light sources emitted by the light emitting part and the coaxial light source are blue light, and the wavelength range of the light sources emitted by the light emitting part and the coaxial light source is 435 and 480 nm.
Preferably, the object carrying assembly comprises a first moving mechanism arranged on the platform, a second moving mechanism connected with the first moving mechanism in a sliding mode, and an object carrying table connected with the second moving mechanism, wherein the first moving mechanism and the second moving mechanism are perpendicular to each other.
Preferably, the camera, the coaxial light source and the light emitting assembly are connected with an external computer, the external computer controls the camera to collect images, the coaxial light source and the light emitting assembly to irradiate a sample to be detected, and the sample to be detected comprises any one of a metal product, a glass product and an electronic product.
Compared with the prior art, the utility model provides a surface defect detection device has following beneficial effect:
1. surface defect detection device platform, set up year thing subassembly, first support on the platform, respectively with camera and light source subassembly, the second support of first support connection and the coaxial light source of second leg joint, first support sets up with the second support is relative on the platform, it is located to carry the thing subassembly just to carry in the shooting region of camera it is used for bearing the sample that awaits measuring, the light source subassembly includes a plurality of luminous subassemblies that can independently or give out light simultaneously, luminous subassembly with the sample that awaits measuring is relative and set up in the camera with await measuring between the sample in order to provide the LED light source, coaxial light source slope shines on the sample that awaits measuring in order to provide coaxial light source. The coaxial light source can be used for detecting surface objects with large reflection degree, can highlight the surface unevenness on a sample to be detected, overcomes the interference caused by surface reflection, and is mainly used for detecting the bruise, scratch, crack and foreign matter of the flat and smooth surface of the sample to be detected;
the coaxial light source irradiates on the sample to be detected to obtain a larger irradiation area, so that the picture of the characteristic of the sample to be detected can be rapidly acquired, whether the sample to be detected has defects can be rapidly and preliminarily judged through one image, and the efficiency can be well improved; however, the detection angle is relatively limited, the to-be-detected sample cannot be well irradiated in all directions, all-direction image data of the to-be-detected sample is collected, and the to-be-detected sample has defects in accuracy relative to the plurality of light-emitting assemblies.
2. The light source assembly comprises a plurality of light source discs connected to one side of the light-emitting assemblies, the light source discs are circular, the circumferences of the light-emitting assemblies are arranged on one side, facing the object carrying assembly, of the light source discs, and the light-emitting assemblies form an annular light source. The annular light source can provide all-round, multi-angle light source and shine on carrying the thing subassembly to reduce false retrieval rate and miss detection rate.
3. The number of the light-emitting assemblies is nine, the light-emitting assemblies comprise connecting pieces connected with the light source disc, rotating pieces connected with the connecting pieces in a rotating mode and light-emitting pieces connected with the rotating pieces, and the light-emitting pieces can rotate to change the irradiation angles. The design of adopting the number of the light-emitting assemblies to be nine has the advantages of reducing cost and errors and improving surface image quality.
4. The connecting piece is provided with limiting blocks close to the rotating piece, the limiting blocks are formed by extending two opposite sides of the connecting piece, the rotating piece rotates to abut against the limiting blocks to limit the rotating angle of the light-emitting piece, the rotating angle range of the light-emitting piece limited by the limiting blocks is 0-70 degrees, and the rotating angle range of the coaxial light source is 30-60 degrees. The angle of the camera's shot can also be changed by rotating the camera between the first and second clamping blocks. The rotation angle range of the light-emitting piece is limited to be 0-70 degrees between the limiting blocks, and the rotation angle range of the coaxial light source is 30-60 degrees. The limiting block is adopted to limit the angle range, so that the surface image of the sample to be detected can be obtained in the largest area.
5. The fixing frame comprises a light source fixing block connected with the connecting rod, a first connecting block and a second connecting block, wherein the first connecting block and the second connecting block are respectively connected with the light source fixing block, and the first connecting block and the second connecting block are connected with the light source disc. The connecting hole is a waist-shaped hole, and the light source disc can be adjusted to turn according to the corresponding positions of the penetrating hole and the connecting hole, so that the adjustment and the turning are more flexible.
6. The second support comprises a supporting rod connected with the platform and a light source fixing piece connected with the supporting rod in a sliding mode, and the light source fixing piece is the same as the camera fixing portion in structure so as to fix the coaxial light source. The light source fixing part can also adjust the irradiation angle of the coaxial light source to reduce the false detection rate and the omission factor, and the principle is the same as that of the camera fixing part.
7. The platform is provided with a U-shaped groove, the second support comprises a sliding piece connected with the supporting rod, and the supporting rod penetrates through the sliding piece and is connected with the U-shaped groove. By adopting the design, the second support can conveniently slide on the platform, and the coaxial light source on the second support can change the irradiation direction according to the movement of the support rod.
8. The platform, the first support, the second support and the light source disc are made of oxidized black aluminum alloy materials, the camera is an area array color camera, the light source emitted by the light emitting piece and the coaxial light source is blue light, and the wavelength range of the light source emitted by the light emitting piece and the coaxial light source is 435 and 480 nm. The design aims to eliminate secondary reflection of ambient light on materials, and further influence the integrity of image acquisition caused by the secondary reflection. The anti-interference performance of the blue light type illuminating part to the environment is better than that of white light, especially under the condition that the surface of the object carrying component is reflected, the point cloud model illuminated by the blue light type illuminating part is smoother than the surface of the point cloud model illuminated by white light, and the smoother point cloud model can reflect the surface quality of the object carrying component more truly.
9. The surface defect detection device further comprises a carrying assembly, wherein the carrying assembly comprises a first moving mechanism arranged on the platform and a second moving mechanism in sliding connection with the first moving mechanism, the carrying assembly is connected with the second moving mechanism, and the first moving mechanism and the second moving mechanism are perpendicular to each other. By adopting the design of the first moving mechanism and the second moving mechanism, the position of the carrying component can be adjusted so as to facilitate the camera to collect image information and facilitate the adjustment of the irradiation angle of the coaxial light source and the light-emitting component.
10. The sample to be tested comprises any one of a metal product, a glass product and an electronic product. Can detect various products, has rich functions and wide application prospect.
[ description of the drawings ]
FIG. 1 is a schematic perspective view of the surface defect inspection apparatus of the present invention;
FIG. 2 is a schematic perspective view of a light source module of the surface defect detecting device of the present invention;
FIG. 3 is a schematic perspective view of a light source module of the surface defect detecting device of the present invention;
fig. 4 is an image relationship diagram between the number of images and the average error of the surface defect detecting apparatus of the present invention.
FIG. 5 is another schematic perspective view of the surface defect inspection device of the present invention;
FIG. 6 is a schematic view of the first bracket of the surface defect detecting apparatus of the present invention;
FIG. 7 is a schematic view of the explosion structure of the camera fixing part of the surface defect detecting device of the present invention;
FIG. 8 is a schematic view of another three-dimensional structure of the surface defect detecting device of the present invention;
FIG. 9 is a schematic perspective view of the light source fixing member of the surface defect detecting apparatus of the present invention;
FIG. 10 is a schematic view of another three-dimensional structure of the surface defect detecting device of the present invention;
FIG. 11 is a schematic perspective view of a slider of the surface defect detecting device of the present invention;
FIG. 12 is a schematic perspective view of the platform of the surface defect inspection apparatus of the present invention;
FIG. 13 is a schematic view of another three-dimensional structure of the surface defect detecting device of the present invention;
FIG. 14 is a schematic perspective view of the carrier assembly of the surface defect detecting device of the present invention;
FIG. 15 is a schematic view of another three-dimensional structure of the surface defect detecting device of the present invention;
fig. 16 is a flowchart of the surface defect detecting apparatus of the present invention.
Description of reference numerals:
10. a surface defect detecting device; 11. a sample to be tested; 20. a platform; 21. A second bracket; 211. a support bar; 217. a slider; 218. a slide hole; 219. a fixing hole; 212. a light source fixture; 22. a coaxial light source; 23. a U-shaped groove; 231. a sliding groove; 232. fixing grooves; 30. a first bracket; 31. a connecting rod; 32. a camera fixing section; 33. a fixed mount; 34. a light source fixing block; 35. A first connection block; 36. a second connecting block; 37. connecting holes; 38. a camera adjustment block; 381. a first clamping block; 382. a second clamp block; 383. a waist-shaped hole; 40. a camera; 50. a light source assembly; 51. a light source disk; 52. a light emitting member; 511. Perforating holes; 52. a light emitting assembly; 521. a connecting member; 522. a rotating member; 523. a light emitting member; 524. a limiting block; 60. a carrier assembly; 61. a first moving mechanism; 62. a second moving mechanism; 63. an object stage.
[ detailed description ] embodiments
In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and the embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like as used herein are for illustrative purposes only.
Referring to fig. 1, the present invention provides a surface defect detecting device 10, the surface defect detecting device 10 includes a platform 20, a carrying assembly 60 disposed on the platform 20, a first bracket 30 connected to the platform 20, a camera 40 and a light source assembly 50 connected to the first bracket 30, a second bracket 21 connected to one side of the platform 20 opposite to the first bracket 30, and a coaxial light source 22 connected to the second bracket 21, wherein the first bracket 30 and the second bracket 21 are disposed on the platform 20 relatively. The object carrying component 60 is used for carrying the sample 11 to be measured and is located in the shooting area of the camera 40, the light source component 50 is arranged between the camera 40 and the object carrying component 60 to provide a light source for the sample 11 to be measured, and the coaxial light source 22 obliquely irradiates on the sample 11 to be measured to provide coaxial light.
Referring to fig. 1 and 2, the light source assembly 50 includes a light source disc 51 and a plurality of light emitting assemblies 52 connected to one side of the light source disc 51 and capable of emitting light independently or simultaneously, the light source disc 51 is circular, the light emitting assemblies 52 are annularly disposed on a surface of the light source disc 51 facing the object carrying assembly 60 with a center of the light source disc 51 as a center, and the plurality of light emitting assemblies 52 form an annular light source. Through the design of annular light source, can provide all-round, multi-angle light source and shine on carrying thing subassembly 60 to reduce false retrieval rate and miss detection rate. A plurality of through holes 511 are annularly arranged on the light source disc 51, and the through holes 511 are used for connecting with the first bracket 30. The distance from the through hole 511 to the center of the light source plate 51 is greater than the distance from the light emitting element 52 to the center of the light source plate 51.
Referring to fig. 2 and 3, the light emitting assembly 52 includes a connecting member 521 connected to the light source disc 51, a rotating member 522 rotatably connected to the connecting member 521, and a light emitting member 523 fixedly connected to the rotating member 522, and the light illumination angle of the light emitting member 523 can be changed by rotating the rotating angles of the rotating member 522 and the connecting member 521, and the connecting member 521 and the rotating member 522 may be any one of rotating mechanisms such as an angle code, a hinge, and a rotating shaft.
Optionally, in some specific embodiments, a limit block 524 is disposed on the connecting member 521 near the rotating member 522, the limit block 524 is formed by protruding one connecting member 521 toward the opposite side of the other connecting member 521, and a gap is left between the limit block 524 and the rotating member 522. When the rotating member 522 rotates to abut against the limiting block 524, the limiting block 524 further limits the irradiation angle of the light emitting member 523. The rotation angle range of the light emitting member 523 limited between the limiting blocks 524 is 0 to 70 degrees, and preferably, the rotation angle range may be any one of 30 to 45 degrees, 45 to 60 degrees and 60 to 70 degrees. Different rotation angles of the light emitting member 523 correspond to different illumination angles of the light emitting member 523.
In this embodiment, the light emitting member 523 is an LED light source and emits blue light, the wavelength of the blue light emitted by the LED light source is 435nm to 480nm, the blue light has better interference resistance to the environment than the white light, especially, when there is reflection on the surface of the object carrying assembly (not shown), and the point cloud model emitted by the blue light is smoother than the point cloud model emitted by the white light, and the smoother point cloud model can more truly reflect the surface quality of the sample 11 to be measured. After the spatial coordinates of each sampling Point on the surface of the object are obtained, a Point set called Point Cloud is obtained, and the Point Cloud model is an entity model formed by Point clouds in a computer.
Of course, in some other embodiments, or depending on the difference between different types of test samples, other types of light emitters 523 or other wavelengths of light emitters 523 may be selected.
Preferably, in the present embodiment, the number of the light emitting assemblies 52 is set to be eight, nine, or ten. Of course, other data is possible in other implementations, or when there is a difference in the user's needs for the detection results.
Referring to fig. 4, in order to illustrate that the nine light emitting elements 52 have low cost and small average error, the data of the surface defect detecting apparatus 10 are simulated, the number of the light emitting elements 52 is set to three, four, five, six, eight, nine, and twelve, and a camera (not shown) separately collects the number of three, four, five, six, eight, nine, and twelve images. That is, three, four, five, six, eight, nine, and twelve images are respectively collected under each number of light emitting elements 52. Respectively substituting the length (w) and the width (h) of three, four, five, six, eight, nine and twelve acquired images into an error function:
wherein Z isxAnd ZyIn order to obtain the gradients in the x and y directions of the depth value Z after P, Q is integrated by using a Southwell algorithm, P and Q are the gradients in the x and y directions calculated according to a photometric stereo method, respectively, and the average error between three acquired images, the average error between four acquired images, the average error between five acquired images, the average error between six acquired images, the average error between eight acquired images, the average error between nine acquired images and the average error epsilon between twelve acquired images are calculated, so that an image relation graph between the number of images and the average error is obtained, wherein the abscissa is the number of images, and the ordinate is the average error.
The simulation results show that when the number of light emitting assemblies 52 is more than eight, the average error between three, four, five, six, eight, nine, and twelve images separately collected is minimized. However, the cost is increased by the number of the light emitting elements 52. Therefore, the design of nine light emitting assemblies 52 has the advantages of reduced cost, reduced error, and improved surface image quality. The design that nine light emitting assemblies 52 are annularly arranged on the light source disc 51 is adopted, and the surface of the sample 11 to be measured can be irradiated in multiple directions and different angles, so that the camera 40 can acquire images of different angles on the surface of the object carrying assembly. The integrity of the detection information is improved, and false detection and missing detection caused by the shadow and the miscellaneous point are avoided. The nine light emitting assemblies 52 irradiate from nine different directions, the collected information is more, the number of the image miscellaneous points is less, the collecting speed is high, the nine images can be collected in 1s, and the cost is low.
Referring to fig. 5 and 6, the first bracket 30 includes a connecting rod 31 connected to the platform 20, a camera fixing portion 32 slidably connected to the connecting rod 31, and a fixing frame 33, and the fixing frame 33 is disposed on a side of the camera fixing portion 32 facing the platform 20.
The fixing frame 33 comprises a light source fixing block 34 penetrating through the connecting rod 31, a first connecting block 35 and a second connecting block 36 which are respectively connected with the light source fixing block 34, and the first connecting block 35 and the second connecting block 36 are connected with the light source disc 51.
The first connecting block 35 and the second connecting block 36 are provided with a connecting hole 37 in the direction toward one side of the light source disc 51, and when the first connecting block 35 and the second connecting block 36 are connected with the light source disc 51, the connecting hole 37 corresponds to the through hole 511. Preferably, the connecting hole 37 is a waist-shaped hole, and the light source disc 51 can be adjusted and turned according to the corresponding position of the through hole 511 and the connecting hole 37, so that the adjustment and turning are more flexible.
Referring to fig. 7, the camera fixing portion 32 includes a camera adjusting block 38 slidably connected to the connecting rod 31, a first clamping block 381 and a second clamping block 382 respectively connected to the camera adjusting block 38, a waist-shaped hole 383 connected to the first clamping block 381 and the second clamping block 382 is disposed on the camera adjusting block 38, a shooting position of the camera 40 is changed by sliding the first clamping block 381 and the second clamping block 382 with the waist-shaped hole 383, the camera 40 is fixed by clamping the first clamping block 381 and the second clamping block 382, and a shooting angle of the camera 40 can be changed by rotating the camera 40 between the first clamping block 381 and the second clamping block 382.
Referring to fig. 8 and 9, the second bracket 21 includes a supporting rod 211 connected to the platform 20, and a light source fixing member 212 slidably connected to the supporting rod 211, the light source fixing member 212 has the same structure as the camera fixing portion 32 to fix the coaxial light source 22, and the coaxial light source 22 is adjusted and fixed on the light source fixing member 212 after selecting an irradiation angle to reduce a false detection rate and a false detection rate, which has the same principle as the camera fixing portion 32. The coaxial light source 22 is internally provided with a plurality of LED light sources arranged in high density, so that the brightness of the coaxial light source 22 is greatly improved, and the coaxial light source 22 has the advantages of clear imaging, uniform brightness and the like and is mainly used for detecting plane objects with large light reflection degree.
The light source emitted by the coaxial light source 22 is blue light, the wavelength range of the light source emitted by the coaxial light source 22 is 435-480nm, the coaxial light source 22 is obliquely arranged at an angle of 30-60 degrees and irradiates the sample 11 to be detected, preferably, the coaxial light source 22 is obliquely arranged at an angle of 45 degrees and irradiates the sample 11 to be detected. Compared with a single light-emitting component 52, the coaxial light source 22 can obtain a larger irradiation area when irradiating on the sample 11 to be measured, and a plurality of light-emitting components 52 can obtain irradiation areas with multiple azimuth angles when irradiating on the sample 11 to be measured in sequence. The coaxial light source 22 irradiates on the sample 11 to be detected to obtain a larger irradiation area, so that the picture of the characteristic of the sample 11 to be detected can be rapidly acquired, whether the sample 11 to be detected has defects can be rapidly and preliminarily judged through one image, and the efficiency can be well improved; however, the detection angle is relatively limited, and the sample 11 to be detected cannot be well irradiated in all directions, the image data of the sample 11 to be detected in all directions is acquired, and the plurality of light-emitting assemblies 52 have defects in accuracy, so that when the coaxial light source 52 judges that the sample has defects, the plurality of light-emitting assemblies 52 are further combined for further judgment, and the accuracy can be well ensured, therefore, the coaxial light source 22 and the plurality of light-emitting assemblies 52 are combined, so that the efficiency can be well ensured, and the accuracy can be well improved.
Referring to fig. 10, a U-shaped groove 23 is disposed on the platform 20, the second bracket 21 includes a sliding member 217 connected to the supporting rod 211, the supporting rod 211 penetrates the sliding member 217, and the sliding member 217 is connected to the U-shaped groove 23.
Referring to fig. 10, 11 and 12, the sliding member 217 may be a fixing member such as a snap, a bearing seat, etc., and the sliding member 217 includes a sliding hole 218 and fixing holes 219 disposed at both sides of the sliding hole 218. The U-shaped groove 23 includes a sliding groove 231 and fixing grooves 232 disposed on both sides of the sliding groove 231, the support rod 211 penetrates the sliding hole 218 and slides on the sliding groove 231, the fixing hole 219 corresponds to the fixing groove 232, and the fixing hole 219 penetrates the fixing groove 232 to be fixedly connected to a standard component disposed outside. With this design, the sliding of the second support 21 on the platform 20 is facilitated, and the coaxial light source (not shown) on the second support 21 can change the irradiation direction according to the movement of the support rod 211.
Referring to fig. 13 and 14, the carrier assembly 60 includes a first moving mechanism 61 fixedly connected to the platform 20, and a second moving mechanism 62 slidably connected to the first moving mechanism 61, the first moving mechanism 61 and the second moving mechanism 62 are perpendicular to each other, the first moving mechanism 61 and the second moving mechanism 62 may be sliding structures such as a slide rail, a guide rail, and an air cylinder, and the first moving mechanism 61 and the second moving mechanism 62 are controlled by a peripheral single chip microcomputer (not shown). The second moving mechanism 62 is far away from the first moving mechanism 61, and an object stage 63 is arranged on the first moving mechanism 61, wherein the object stage 63 is used for placing the sample 11 to be measured. With this design, the position of the object carrying assembly 60 is adjustable to facilitate the camera 40 to collect image information and to facilitate the coaxial light source 22 and the illuminating member 523 to adjust the illumination angle.
In this embodiment, the platform 20, the first support 30, the second support 21, and the light source disc 51 are made of oxidized black aluminum alloy material, and the design is adopted to eliminate secondary reflection of ambient light on the material, so that the secondary reflection affects the integrity of image acquisition. The camera 40 is an area array color camera, which is suitable for image acquisition of a static object and has low cost.
Referring to fig. 15, the camera 40, the coaxial light source 22, and the light emitting component 52 are connected to an external single chip microcomputer (not shown), the single chip microcomputer is connected to an external computer (not shown), the external computer controls the single chip microcomputer to control the camera 40 to collect an image, the coaxial light source 22, and the light emitting component 52 to irradiate the sample 11 to be tested, and the sample 11 to be tested includes any one of a metal product, a glass product, and an electronic product.
A surface defect detection method is provided, a sample 11 to be detected is placed on a carrying component 60, and a computer controls a single chip microcomputer to further control the working states of a coaxial light source, a camera and a light-emitting component, and comprises the following steps:
s1: the coaxial light source irradiates a sample to be detected;
s2: the camera collects 1 image and transmits the image to the computer for processing;
s3: judging whether a defect exists or not;
if there is a defect, go to step S4: outputting defect information and positions and finishing detection;
if no defect exists, the following steps are carried out:
s5: the computer controls each light-emitting component to sequentially irradiate a light source on a sample to be detected, and the camera sequentially collects nine images;
s6: calculating the nine collected images by using a photometric stereo vision principle and obtaining a gradient map;
s7: the computer further carries out Gaussian curvature filtering processing and morphological processing on the gradient map;
s8: whether a defect exists;
if there is a defect, go to step S4;
if no defect exists, the following steps are carried out:
s9: and integrating and surface fitting the obtained gradient to obtain a depth map, and performing Gaussian curvature filtering processing and morphological processing on the depth map.
S10: whether a defect exists;
if there is a defect, go to step S4;
if there is no defect, go to step S11: outputting the non-defective information and ending the detection.
Steps S3, S8, and S10 are determined by the computer, and the processing of the acquired image by the computer is performed by the existing computer vision inspection technology, which is not described herein again.
Compared with the prior art, the utility model provides a surface defect detection device has following beneficial effect:
1. surface defect detection device platform, set up year thing subassembly, first support on the platform, respectively with camera and light source subassembly, the second support of first support connection and the coaxial light source of second leg joint, first support sets up with the second support is relative on the platform, it is located to carry the thing subassembly just to carry in the shooting region of camera it is used for bearing the sample that awaits measuring, the light source subassembly includes a plurality of luminous subassemblies that can independently or give out light simultaneously, luminous subassembly with the sample that awaits measuring is relative and set up in the camera with await measuring between the sample in order to provide the LED light source, coaxial light source slope shines on the sample that awaits measuring in order to provide coaxial light source. The coaxial light source can be used for detecting surface objects with large reflection degree, can highlight the surface unevenness on a sample to be detected, overcomes the interference caused by surface reflection, and is mainly used for detecting the bruise, scratch, crack and foreign matter of the flat and smooth surface of the sample to be detected;
the coaxial light source irradiates on the sample to be detected to obtain a larger irradiation area, so that the picture of the characteristic of the sample to be detected can be rapidly acquired, whether the sample to be detected has defects can be rapidly and preliminarily judged through one image, and the efficiency can be well improved; however, the detection angle is relatively limited, the to-be-detected sample cannot be well irradiated in all directions, all-direction image data of the to-be-detected sample is collected, and the to-be-detected sample has defects in accuracy relative to the plurality of light-emitting assemblies.
2. The light source assembly comprises a plurality of light source discs connected to one side of the light-emitting assemblies, the light source discs are circular, the circumferences of the light-emitting assemblies are arranged on one side, facing the object carrying assembly, of the light source discs, and the light-emitting assemblies form an annular light source. The annular light source can provide all-round, multi-angle light source and shine on carrying the thing subassembly to reduce false retrieval rate and miss detection rate.
3. The number of the light-emitting assemblies is nine, the light-emitting assemblies comprise connecting pieces connected with the light source disc, rotating pieces connected with the connecting pieces in a rotating mode and light-emitting pieces connected with the rotating pieces, and the light-emitting pieces can rotate to change the irradiation angles. The design of adopting the number of the light-emitting assemblies to be nine has the advantages of reducing cost and errors and improving surface image quality.
4. The connecting piece is provided with limiting blocks close to the rotating piece, the limiting blocks are formed by extending two opposite sides of the connecting piece, the rotating piece rotates to abut against the limiting blocks to limit the rotating angle of the light-emitting piece, the rotating angle range of the light-emitting piece limited by the limiting blocks is 0-70 degrees, and the rotating angle range of the coaxial light source is 30-60 degrees. The angle of the camera's shot can also be changed by rotating the camera between the first and second clamping blocks. The rotation angle range of the light-emitting piece is limited to be 0-70 degrees between the limiting blocks, and the rotation angle range of the coaxial light source is 30-60 degrees. The limiting block is adopted to limit the angle range, so that the surface image of the sample to be detected can be obtained in the largest area.
5. The fixing frame comprises a light source fixing block connected with the connecting rod, a first connecting block and a second connecting block, wherein the first connecting block and the second connecting block are respectively connected with the light source fixing block, and the first connecting block and the second connecting block are connected with the light source disc. The connecting hole is a waist-shaped hole, and the light source disc can be adjusted to turn according to the corresponding positions of the penetrating hole and the connecting hole, so that the adjustment and the turning are more flexible.
6. The second support comprises a supporting rod connected with the platform and a light source fixing piece connected with the supporting rod in a sliding mode, and the light source fixing piece is the same as the camera fixing portion in structure so as to fix the coaxial light source. The light source fixing part can also adjust the irradiation angle of the coaxial light source to reduce the false detection rate and the omission factor, and the principle is the same as that of the camera fixing part.
7. The platform is provided with a U-shaped groove, the second support comprises a sliding piece connected with the supporting rod, and the supporting rod penetrates through the sliding piece and is connected with the U-shaped groove. By adopting the design, the second support can conveniently slide on the platform, and the coaxial light source on the second support can change the irradiation direction according to the movement of the support rod.
8. The platform, the first support, the second support and the light source disc are made of oxidized black aluminum alloy materials, the camera is an area array color camera, the light source emitted by the light emitting piece and the coaxial light source is blue light, and the wavelength range of the light source emitted by the light emitting piece and the coaxial light source is 435 and 480 nm. The design aims to eliminate secondary reflection of ambient light on materials, and further influence the integrity of image acquisition caused by the secondary reflection. The anti-interference performance of the blue light type illuminating part to the environment is better than that of white light, especially under the condition that the surface of the object carrying component is reflected, the point cloud model illuminated by the blue light type illuminating part is smoother than the surface of the point cloud model illuminated by white light, and the smoother point cloud model can reflect the surface quality of the object carrying component more truly.
9. The surface defect detection device further comprises a carrying assembly, wherein the carrying assembly comprises a first moving mechanism arranged on the platform and a second moving mechanism in sliding connection with the first moving mechanism, the carrying assembly is connected with the second moving mechanism, and the first moving mechanism and the second moving mechanism are perpendicular to each other. By adopting the design of the first moving mechanism and the second moving mechanism, the position of the carrying component can be adjusted so as to facilitate the camera to collect image information and facilitate the adjustment of the irradiation angle of the coaxial light source and the light-emitting component.
10. The sample to be tested comprises any one of a metal product, a glass product and an electronic product. Can detect various products, has rich functions and wide application prospect.
The above description is only a preferred embodiment of the present invention, and should not be taken as limiting the invention, and all modifications, equivalents and improvements made within the principles of the present invention are intended to be included within the scope of the present invention.
Claims (10)
1. A surface defect detecting apparatus characterized by: surface defect detection device includes the platform, sets up year thing subassembly, first support on the platform, camera and light source subassembly, the second support of being connected with first support respectively and the coaxial light source of second leg joint, first support sets up with the second support is relative on the platform, it is located to carry the thing subassembly just to carry the shooting region of camera the thing subassembly is used for bearing the sample that awaits measuring, the light source subassembly includes a plurality of luminous subassemblies that can independently or give out light simultaneously, luminous subassembly with the sample that awaits measuring is relative and set up in the camera with await measuring between the sample in order to provide the LED light source, coaxial light source slope shines on the sample that awaits measuring in order to provide coaxial light source.
2. The surface defect detecting apparatus according to claim 1, wherein: the light source assembly further comprises a plurality of light source discs connected to one side of the light emitting assemblies, the light source discs are circular, the circumferences of the light emitting assemblies are arranged on one side, facing the object carrying assembly, of the light source discs, and the light emitting assemblies form an annular light source.
3. The surface defect detecting apparatus according to claim 2, wherein: the number of the light-emitting assemblies is nine, the light-emitting assemblies comprise connecting pieces connected with the light source disc, rotating pieces connected with the connecting pieces in a rotating mode and light-emitting pieces connected with the rotating pieces, and the rotating pieces can rotate to change the rotating angles of the light-emitting pieces.
4. A surface defect detecting apparatus according to claim 3, wherein: the connecting piece is provided with limiting blocks close to the rotating piece, the limiting blocks are formed by protruding parts on one side opposite to the connecting piece, the rotating piece rotates to abut against the limiting blocks to limit the irradiation angle of the light-emitting piece, the range of the rotation angle of the light-emitting piece limited by the limiting blocks is 0-70 degrees, and the range of the rotation angle of the coaxial light source is 30-60 degrees.
5. The surface defect detecting apparatus according to claim 4, wherein: the first support comprises a connecting rod connected with the platform, a camera fixing part connected with the connecting rod in a sliding manner and a fixing frame, and the fixing frame is arranged on one side, facing the platform, of the camera fixing part;
the camera fixing part comprises a camera adjusting block connected with the connecting rod in a sliding mode, and a first clamping block and a second clamping block which are connected with the camera adjusting block respectively, a waist-shaped hole connected with the first clamping block and the second clamping block respectively is formed in the camera adjusting block, and the first clamping block and the second clamping block are clamped to fix the camera.
6. The surface defect detecting apparatus according to claim 5, wherein: the fixing frame comprises a light source fixing block connected with the connecting rod, a first connecting block and a second connecting block, wherein the first connecting block and the second connecting block are respectively connected with the light source fixing block, and the first connecting block and the second connecting block are connected with the light source disc.
7. The surface defect detecting apparatus according to claim 5, wherein: the second support comprises a supporting rod connected with the platform and a light source fixing piece connected with the supporting rod in a sliding mode, and the light source fixing piece is the same as the camera fixing portion in structure so as to fix the coaxial light source.
8. The surface defect detecting apparatus according to claim 7, wherein: the platform is provided with a U-shaped groove, the second support comprises a sliding part connected with the supporting rod, the supporting rod penetrates through the sliding part, the sliding part is connected with the U-shaped groove, the platform, the first support, the second support and the light source disc are made of aluminum alloy materials, the camera is an area array color camera, light sources emitted by the light emitting part and the coaxial light source are blue light, and the wavelength range of the light sources emitted by the light emitting part and the coaxial light source is 435-480 nm.
9. The surface defect detecting apparatus according to claim 1, wherein: the object carrying assembly comprises a first moving mechanism arranged on the platform, a second moving mechanism connected with the first moving mechanism in a sliding mode and an object carrying table connected with the second moving mechanism, and the first moving mechanism and the second moving mechanism are perpendicular to each other.
10. The surface defect detecting apparatus according to any one of claims 2 to 9, wherein: the camera, the coaxial light source and the light-emitting component are connected with an external computer, the external computer controls the camera to collect images, the coaxial light source and the light-emitting component to irradiate a sample to be detected, and the sample to be detected comprises any one of metal products, glass products and electronic products.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111896550A (en) * | 2020-03-31 | 2020-11-06 | 广西师范大学 | Surface defect detection device and method |
| CN113111828A (en) * | 2021-04-23 | 2021-07-13 | 中国科学院宁波材料技术与工程研究所 | Three-dimensional defect detection method and system for bearing |
| CN114441553A (en) * | 2022-04-11 | 2022-05-06 | 深圳市鹰眼在线电子科技有限公司 | Mini LED detection structure with self-adjusting light source |
| WO2022222120A1 (en) * | 2021-04-23 | 2022-10-27 | 中国科学院宁波材料技术与工程研究所 | Bearing three-dimensional defect detection method and system |
| CN115616834A (en) * | 2022-09-29 | 2023-01-17 | 苏州天准科技股份有限公司 | Light source device for 3C product detection |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111896550A (en) * | 2020-03-31 | 2020-11-06 | 广西师范大学 | Surface defect detection device and method |
| CN113111828A (en) * | 2021-04-23 | 2021-07-13 | 中国科学院宁波材料技术与工程研究所 | Three-dimensional defect detection method and system for bearing |
| WO2022222120A1 (en) * | 2021-04-23 | 2022-10-27 | 中国科学院宁波材料技术与工程研究所 | Bearing three-dimensional defect detection method and system |
| CN114441553A (en) * | 2022-04-11 | 2022-05-06 | 深圳市鹰眼在线电子科技有限公司 | Mini LED detection structure with self-adjusting light source |
| CN114441553B (en) * | 2022-04-11 | 2022-07-12 | 深圳市鹰眼在线电子科技有限公司 | Mini LED detection structure with self-adjusting light source |
| CN115616834A (en) * | 2022-09-29 | 2023-01-17 | 苏州天准科技股份有限公司 | Light source device for 3C product detection |
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