CN212310145U - Vacuum belt conveying detection device of laser scribing machine - Google Patents
Vacuum belt conveying detection device of laser scribing machine Download PDFInfo
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- CN212310145U CN212310145U CN202020581071.6U CN202020581071U CN212310145U CN 212310145 U CN212310145 U CN 212310145U CN 202020581071 U CN202020581071 U CN 202020581071U CN 212310145 U CN212310145 U CN 212310145U
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Abstract
The utility model relates to a laser scriber vacuum belt transport detection device belongs to laser scriber technical field. The battery piece sorting device comprises a vacuum adsorption block, a detection mechanism and a sorting mechanism, wherein the vacuum adsorption block is arranged in a belt conveyor, so that a belt is arranged on the vacuum adsorption block, a battery piece is adsorbed on the belt by the vacuum adsorption block, the detection mechanism is arranged above the belt conveyor, the battery piece is detected and a signal is fed back to a PLC system, the sorting mechanism stretches across the upper part of the belt conveyor, a material receiving box unit is arranged on the side surface of the belt conveyor, and the sorting mechanism is controlled by the PLC system to adsorb the qualified battery piece and put the qualified battery piece into the material receiving box; and the tail part of the belt conveyor is provided with an NG material box for collecting unqualified battery pieces. This application adsorbs the piece on the belt, has avoided the battery piece to take place to get rid of the piece phenomenon. The sliced sheets are detected on line in the conveying process, qualified slices and unqualified slices are sorted, and the reject ratio of the battery sheets is reduced.
Description
Technical Field
The utility model relates to a laser scriber vacuum belt transport detection device belongs to laser scriber technical field.
Background
The laser scribing machine irradiates the surface of a workpiece by using high-energy laser beams to locally melt and gasify an irradiated area, thereby achieving the purpose of scribing. Because the laser is focused by a special optical system to form a very small light spot, the energy density is high, the processing is non-contact, the mechanical punching force is not applied to the workpiece, the workpiece is not easy to deform, the thermal influence is extremely small, the scribing precision is high, and the laser is widely applied to cutting and scribing of solar panels and thin metal sheets. The laser scribing machine is mainly used for scribing and cutting metal materials, silicon, germanium, gallium arsenide and other semiconductor substrate materials, can process solar panels, silicon wafers, ceramic wafers, aluminum foils and the like, and has fine and attractive workpieces and smooth cut edges.
Generally, a stage of a laser dicing saw is used for placing an object to be processed, a workpiece to be processed is placed above the stage, and a laser is used as a working light source to perform cutting of curved and linear patterns. After the laser dicing saw cuts the wafer and cracks the wafer, the wafer is likely to be damaged, and the reject ratio of the subsequent process is increased. The traditional post-detection that carries on ordinary belt line can appear getting rid of the phenomenon of piece, gets rid of the piece action and easily causes the damage of battery piece, further increases the battery piece defective rate.
SUMMERY OF THE UTILITY MODEL
The technical problem to be solved by the utility model is to provide a vacuum belt conveying detection device of a laser scribing machine aiming at the prior art, which adsorbs the wafer on the belt and avoids the wafer throwing phenomenon; and the sliced sheets are subjected to online detection in the conveying process, qualified slices and unqualified slices are sorted, and the reject ratio of the battery sheets is reduced.
The utility model provides a technical scheme that above-mentioned problem adopted does: a vacuum belt conveying detection device of a laser scribing machine comprises a vacuum adsorption block, a detection mechanism and a sorting mechanism, wherein the vacuum adsorption block is arranged in a belt conveyor, so that a belt of the belt conveyor is arranged on the vacuum adsorption block, a battery plate conveyed by the belt conveyor is adsorbed on the belt by the vacuum adsorption block, the detection mechanism is arranged above the belt conveyor, the detection mechanism detects the battery plate and feeds a signal back to a PLC system, the sorting mechanism stretches across the upper part of the belt conveyor, material receiving box units are respectively arranged on the left side and the right side of the belt conveyor, and the sorting mechanism is controlled by the PLC system to adsorb qualified battery plates and place the qualified battery plates into the material receiving box units; the tail part of the belt conveyor is provided with an NG material box for collecting unqualified battery pieces on the belt conveyor;
the detection mechanism comprises a camera, the camera is arranged above the belt conveyor and is fixed on the support frame, and the camera takes a picture of a battery piece positioned below the camera;
sorting mechanism includes a plurality of vacuum chuck and linear motion module, and is a plurality of vacuum chuck parallel arrangement is fixed in respectively and removes on the frame, remove and erect in linear motion module bottom, the reciprocal linear motion of frame is removed in the drive of linear motion module, drives the reciprocal linear motion of vacuum chuck, realizes that vacuum chuck switches between band conveyer and material receiving box unit.
The material receiving box unit comprises a plurality of material receiving boxes, and the space between every two adjacent material receiving boxes is matched with the space between the vacuum suckers.
The belt conveyor is characterized in that an upper light source is arranged on the support frame, a backlight source is arranged in the belt conveyor, and the upper light source and the backlight source are arranged oppositely.
The vacuum adsorption block comprises a vacuum adsorption bottom plate and a vacuum adsorption upper cover plate, a vacuum groove is formed in the vacuum adsorption upper cover plate, and the vacuum adsorption upper cover plate covers the vacuum adsorption bottom plate, so that the vacuum groove is sealed to form a vacuum channel; the vacuum adsorption upper cover plate is provided with a vacuum air inlet and a vacuum air outlet, the vacuum air inlet and the vacuum air outlet are respectively communicated with a vacuum channel, the upper surface of the vacuum adsorption upper cover plate is provided with a belt groove, and the belt is arranged in the belt groove, so that the belt is attached to the vacuum adsorption upper cover plate.
The vacuum air outlets are uniformly arranged at intervals along the conveying direction of the belt.
The belt is provided with a plurality of vacuum strip-shaped hole groups which are arranged in parallel along the width direction, each vacuum strip-shaped hole group comprises a plurality of vacuum strip-shaped holes which are arranged at equal intervals along the conveying direction, and the vacuum strip-shaped holes between the vacuum strip-shaped hole groups are arranged in a staggered mode.
Compared with the prior art, the utility model has the advantages of: the utility model provides a laser scribing machine vacuum belt transport detection device, is equipped with the camera in band conveyer top, and the camera shoots the battery piece on the band conveyer and feeds back to the PLC system. The sorting mechanism stretches across the belt conveyor, the PLC system controls the sorting mechanism to adsorb qualified battery pieces and collect the battery pieces in the material receiving box unit, and unqualified battery pieces are collected in the NG material box. The sliced sheets are detected on line in the conveying process, qualified slices and unqualified slices are sorted, and the reject ratio of the battery sheets is reduced. In addition, a vacuum adsorption block is arranged in the belt conveyor, so that the sheet is adsorbed on the belt, and the phenomenon that the battery sheet is thrown is avoided.
Drawings
Fig. 1 is a schematic view of a vacuum belt conveying detection device of a laser dicing saw according to an embodiment of the present invention;
fig. 2 is a partial schematic view of a vacuum belt conveying detection device of a laser dicing saw according to an embodiment of the present invention;
FIG. 3 is a schematic view of a vacuum adsorption block and a belt in a vacuum belt conveying detection device of a laser dicing saw according to an embodiment of the present invention;
FIG. 4 is a cross-sectional view taken along line B-B of FIG. 2;
in the figure, 1 bottom plate, 2 material receiving boxes, 3 vacuum adsorption blocks, 3.1 vacuum air outlets, 3.2 vacuum adsorption upper cover plates, 3.3 vacuum adsorption bottom plates, 3.4 vacuum grooves, 3.5 vacuum air inlets, 3.6 belt grooves, 4 belt conveyors, 4.1 belts, 4.2 vacuum strip-shaped holes, 5 sorting mechanisms, 5.1 linear motion modules, 5.2 moving frames, 5.3 vacuum suction cups, 6 detection mechanisms, 6.1 supporting frames, 6.2 cameras, 6.3 upper light sources, 6.4 backlight sources and 7NG material boxes are arranged.
Detailed Description
The present invention will be described in further detail with reference to the following embodiments.
As shown in fig. 1 and 2, the vacuum belt conveying detection device for the laser dicing saw in this embodiment includes a vacuum adsorption block 3, a detection mechanism, and a sorting mechanism, wherein a belt conveyor 4 is disposed on a bottom plate 1, the vacuum adsorption block 3 is disposed in the belt conveyor 4, so that a belt 4.1 of the belt conveyor 4 is disposed on the vacuum adsorption block 3, and the vacuum adsorption block 3 adsorbs the battery pieces conveyed by the belt conveyor 4 onto the belt 4.1. 4 tops of band conveyer are equipped with camera 6.2, and camera 6.2 is fixed in on the support frame 6.1 of vertical setting, is equipped with light source 6.3 on the support frame 6.1, is equipped with backlight 6.4 in the band conveyer 4, and light source 6.3 sets up with backlight 6.4 relatively on, and camera 6.2 detects the battery piece that is located camera 6.2 below to feed back the result in the PLC system. Sorting mechanism 5 stretches over band conveyer 4, and the band conveyer 4 left and right sides is equipped with material receiving box unit respectively, and sorting mechanism 5 is controlled its qualified battery piece of letter sorting by the PLC system, and sorting mechanism 5 adsorbs qualified battery piece on band conveyer 4 and puts into material receiving box unit qualified battery piece. And an NG material box 7 is arranged at the tail part of the belt conveyor 4 and used for collecting unqualified battery pieces. The battery pieces which are not adsorbed by the sorting mechanism 5 are conveyed into the NG material box 7 by the belt conveyor 4.
Above-mentioned letter sorting mechanism 5 is including removing frame 5.2, 4 vacuum chuck 5.3 and linear motion module 5.1, 4 vacuum chuck 5.3 parallel arrangement, and be fixed in it and remove frame 5.2 bottom, linear motion module 5.1 bottom is located to removal frame 5.2, linear motion module 5.1 drive removes frame 5.2 reciprocating linear motion, drive 4 vacuum chuck 5.3 at belt conveyer 4 and connect the reciprocal linear motion between the magazine unit, vacuum chuck 5.3 advances to 4 tops of belt conveyer promptly, and adsorb qualified battery piece on the belt conveyer 4, and put into left material receiving box unit or the material receiving box unit on right side with the adsorbed battery piece. The two sides of the belt conveyor 4 are respectively provided with a material receiving box unit, so that the continuous operation can be still realized after one material receiving box unit is filled, and the continuity of the sorting operation is realized.
As shown in fig. 3 and 4, the vacuum adsorption block 3 includes a vacuum adsorption bottom plate 3.3 and a vacuum adsorption upper cover plate 3.2, vacuum grooves 3.4 are symmetrically formed in the bottom of the vacuum adsorption upper cover plate 3.2, and the distance between the two vacuum grooves 3.4 is matched with the distance between the two belts 4.1. The vacuum adsorption upper cover plate 3.2 covers the vacuum adsorption bottom plate 3.3, so that the two vacuum grooves 3.4 are sealed to form two vacuum channels. A belt groove 3.6 is formed in the vacuum adsorption upper cover plate 3.2, and a belt 4.1 is arranged in the belt groove 3.6, so that the belt 4.1 is attached to the vacuum adsorption upper cover plate 3.2. Vacuum air inlets 3.5 are respectively arranged on two side surfaces of the vacuum adsorption upper cover plate 3.2, a plurality of vacuum air outlets 3.1 are arranged on the top of the vacuum adsorption upper cover plate 3.2, and the plurality of vacuum air outlets 3.1 are uniformly arranged at intervals along the advancing direction of the belt 4.1. The vacuum air inlet 3.5 and the vacuum air outlet 3.1 are respectively communicated with the vacuum channel, and the vacuum air outlet 3.1 faces to the belt 4.1 of the belt conveyor 4. Two parallel arrangement's vacuum bar punch combination is seted up along width direction to belt 4.1, and vacuum bar punch combination includes a plurality of vacuum bar holes 4.2, and a plurality of vacuum bar holes set up along the even interval of direction of delivery. When the belt moves, the belt vacuum strip-shaped holes are opposite to the vacuum air outlet, so that vacuum flows out through the vacuum air outlet and the belt vacuum strip-shaped holes, and the battery piece is adsorbed on the belt. The vacuum strip-shaped holes between the adjacent vacuum strip-shaped hole groups are arranged in a staggered mode, so that the adsorption force on the battery piece is further improved, the phenomenon that the piece is thrown is avoided, and the damage to the piece is avoided.
The material receiving box unit comprises 4 material receiving boxes 2 which are arranged in parallel, and the space between the material receiving boxes 2 is matched with the space between the vacuum sucker components. Every 4 battery pieces are in a group, and after a group of battery pieces are detected by a camera to be completely qualified, the 4 battery pieces are adsorbed by a vacuum chuck and are placed in corresponding material receiving boxes. If one of the battery pieces in the group of battery pieces is not qualified, all the battery pieces are put into an NG material box. The quality of the battery piece is detected on line, qualified slices and unqualified slices are sorted, and the reject ratio of the battery piece is reduced.
In addition to the above embodiments, the present invention also includes other embodiments, and all technical solutions formed by equivalent transformation or equivalent replacement should fall within the protection scope of the claims of the present invention.
Claims (6)
1. The utility model provides a laser scribing machine vacuum belt transport detection device which characterized in that: the battery sorting device comprises a vacuum adsorption block, a detection mechanism and a sorting mechanism, wherein the vacuum adsorption block is arranged in a belt conveyor, so that a belt of the belt conveyor is arranged on the vacuum adsorption block, a battery piece conveyed by the belt conveyor is adsorbed on the belt by the vacuum adsorption block, the detection mechanism is arranged above the belt conveyor, the detection mechanism detects the battery piece and feeds a signal back to a PLC system, the sorting mechanism stretches across the upper part of the belt conveyor, material receiving box units are respectively arranged on the left side and the right side of the belt conveyor, and the sorting mechanism is controlled by the PLC system to adsorb qualified battery pieces and place the qualified battery pieces into the material receiving box units; the tail part of the belt conveyor is provided with an NG material box for collecting unqualified battery pieces on the belt conveyor;
the detection mechanism comprises a camera, the camera is arranged above the belt conveyor and is fixed on the support frame, and the camera takes a picture of a battery piece positioned below the camera;
sorting mechanism includes a plurality of vacuum chuck and linear motion module, and is a plurality of vacuum chuck parallel arrangement is fixed in respectively and removes on the frame, remove and erect in linear motion module bottom, the reciprocal linear motion of frame is removed in the drive of linear motion module, drives the reciprocal linear motion of vacuum chuck, realizes that vacuum chuck switches between band conveyer and material receiving box unit.
2. The vacuum belt conveying detection device of the laser scribing machine according to claim 1, wherein: the material receiving box unit comprises a plurality of material receiving boxes, and the space between every two adjacent material receiving boxes is matched with the space between the vacuum suckers.
3. The vacuum belt conveying detection device of the laser scribing machine according to claim 1, wherein: the belt conveyor is characterized in that an upper light source is arranged on the support frame, a backlight source is arranged in the belt conveyor, and the upper light source and the backlight source are arranged oppositely.
4. The vacuum belt conveying detection device of the laser scribing machine according to claim 1, wherein: the vacuum adsorption block comprises a vacuum adsorption bottom plate and a vacuum adsorption upper cover plate, a vacuum groove is formed in the vacuum adsorption upper cover plate, and the vacuum adsorption upper cover plate covers the vacuum adsorption bottom plate, so that the vacuum groove is sealed to form a vacuum channel; the vacuum adsorption upper cover plate is provided with a vacuum air inlet and a vacuum air outlet, the vacuum air inlet and the vacuum air outlet are respectively communicated with a vacuum channel, the upper surface of the vacuum adsorption upper cover plate is provided with a belt groove, and the belt is arranged in the belt groove, so that the belt is attached to the vacuum adsorption upper cover plate.
5. The vacuum belt conveying detection device of the laser scribing machine according to claim 4, wherein: the vacuum air outlets are uniformly arranged at intervals along the conveying direction of the belt.
6. The vacuum belt conveying detection device of the laser scribing machine according to claim 4, wherein: the belt is provided with a plurality of vacuum strip-shaped hole groups which are arranged in parallel along the width direction, each vacuum strip-shaped hole group comprises a plurality of vacuum strip-shaped holes which are arranged at equal intervals along the conveying direction, and the vacuum strip-shaped holes between the vacuum strip-shaped hole groups are arranged in a staggered mode.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020581071.6U CN212310145U (en) | 2020-04-18 | 2020-04-18 | Vacuum belt conveying detection device of laser scribing machine |
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| CN202020581071.6U CN212310145U (en) | 2020-04-18 | 2020-04-18 | Vacuum belt conveying detection device of laser scribing machine |
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| CN212310145U true CN212310145U (en) | 2021-01-08 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114733796A (en) * | 2022-05-09 | 2022-07-12 | 苏州天准科技股份有限公司 | Intelligent silicon wafer sorting system and analysis method |
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- 2020-04-18 CN CN202020581071.6U patent/CN212310145U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114733796A (en) * | 2022-05-09 | 2022-07-12 | 苏州天准科技股份有限公司 | Intelligent silicon wafer sorting system and analysis method |
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Address after: 214400 601, block a, wisdom square, Chuangzhi Industrial Park, 201 Jinshan Road, Jiangyin hi tech Zone, Wuxi City, Jiangsu Province Patentee after: Jiangyin Delong Energy Equipment Co.,Ltd. Address before: 214400 601, block a, wisdom square, Chuangzhi Industrial Park, 201 Jinshan Road, Jiangyin hi tech Zone, Wuxi City, Jiangsu Province Patentee before: JIANGYIN DELONG LASER ENERGY EQUIPMENT Co.,Ltd. |