CN212293843U

CN212293843U - Oven for producing monocrystalline silicon wafers

Info

Publication number: CN212293843U
Application number: CN202021027600.4U
Authority: CN
Inventors: 王德喜
Original assignee: Tianjin Laichang Electronic Technology Co ltd
Current assignee: Tianjin Laichang Electronic Technology Co ltd
Priority date: 2020-06-08
Filing date: 2020-06-08
Publication date: 2021-01-05
Anticipated expiration: 2030-06-08

Abstract

The utility model discloses an oven for monocrystalline silicon piece production, the power distribution box comprises a box body, the equal fixed dead lever that is provided with of lower extreme front side, rear side in the box body, the activity is provided with the movable plate between the dead lever top, the fixed board of placing that is provided with in movable plate top, it all fixes a plurality of racks that are provided with to place board top both sides, the fixed heating mechanism that is provided with in the middle part of the outside right side of box, heating mechanism is at the fixed connecting pipe that is provided with in one side upper end of keeping away from the box. The utility model discloses place the silicon chip in proper order and install between the rack of placing board top both sides when heating the barbecue to the silicon chip, start heating mechanism and fan again simultaneously and send the inside heat transport of heating mechanism into the box inside and heat, and the rethread filter frame, body are inside the air current transport air inlet machine of box inside, the rethread fan to connecting pipe, heating mechanism flow back inside the box can, thereby be convenient for reduce the inside heat loss of box and reduce the heating cost like this.

Description

Oven for producing monocrystalline silicon wafers

Technical Field

The utility model relates to a monocrystalline silicon piece technical field specifically is an oven for monocrystalline silicon piece production.

Background

A single crystal silicon wafer, a single crystal of silicon, is a crystal having a substantially complete lattice structure, has different properties in different directions, is a good semiconductor material, is used for manufacturing semiconductor devices, solar cells and the like, and is formed by pulling high-purity polycrystalline silicon in a single crystal furnace;

the traditional oven for producing the monocrystalline silicon piece has the following defects;

at present, an oven is needed in the process of producing the monocrystalline silicon piece, and the existing oven is easy to cause the heat to pass when in use, so that the production cost is easily increased.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide an oven for monocrystalline silicon piece production to solve the problem that proposes among the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides an oven for monocrystalline silicon piece production, includes the box, the equal fixed dead lever that is provided with of lower extreme front side, rear side in the box interior, the activity is provided with the movable plate between the dead lever top, the fixed board of placing that is provided with in movable plate top, it all fixes and is provided with a plurality of racks to place board top both sides, the fixed heating mechanism that is provided with in the outside right side middle part of box, heating mechanism is at the fixed connecting pipe that is provided with in one side upper end of keeping away from the box, the fixed fan that is provided with in connecting pipe top, the fixed filter frame that is provided with in box top, the fixed body that is provided with between filter frame top and.

Preferably, the top end of the fixed rod is fixedly provided with a sliding strip, the front side and the rear side of the bottom end of the movable plate are provided with sliding grooves, and the sliding strips are connected with the sliding grooves in a sliding mode.

Preferably, the left side of the outer part of the box body is provided with a through groove, and a baffle is fixedly arranged in the through groove.

Preferably, a sewage draining head is fixedly arranged at the bottom end of the box body, and a fixing frame is fixedly arranged between the left side of the fan and the box body.

Preferably, the middle part of the top end of the moving plate is provided with a rotating groove, and a rotating block is fixedly arranged in the rotating groove, the top end of the rotating block is fixedly connected with the bottom end of the placing plate.

Preferably, the filter plates are fixedly arranged at the top end and the bottom end inside the filter frame.

Compared with the prior art, the beneficial effects of the utility model are that:

1. the utility model discloses when heating the barbecue to the silicon chip place the silicon chip in proper order between the rack of installing in placing board top both sides, start heating mechanism and fan simultaneously again and carry the heat of heating mechanism inside into the box and heat, and rethread filter frame, body carry the air current of box inside into the air inlet machine, rethread fan return connecting pipe, heating mechanism to the box inside can, so be convenient for reduce the heat loss of box inside and reduce the heating cost;

2. the utility model discloses filter through the filter plate of upper strata and lower floor simultaneously before making the inside hot-air of box carry into the inside of tube, prevent that the inside impurity of the inside hot-air of box from carrying into the tube inside, and when placing the silicon chip of board top both sides and carry out the change limit heating, thereby it adjusts to place the board through the turn trough and the drive of commentaries on classics piece and change the limit and prevent to heat even condition appearance.

Drawings

FIG. 1 is a schematic view of the overall structure of an oven for producing monocrystalline silicon wafers according to the present invention;

FIG. 2 is an enlarged structural view of the oven of FIG. 1 for producing monocrystalline silicon wafers according to the present invention;

fig. 3 is an enlarged structural diagram of a portion B in fig. 1 in an oven for producing a single crystal silicon wafer according to the present invention.

In the figure: 1. a box body; 2. a heating mechanism; 3. a connecting pipe; 4. a fan; 5. a pipe body; 6. filtering the plate; 7. a filter frame; 8. placing a rack; 9. a baffle plate; 10. placing the plate; 11. moving the plate; 12. fixing the rod; 13. a blowdown head; 14. rotating the groove; 15. rotating the block; 16. and (4) a slide bar.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-3, the present invention provides a technical solution: the utility model provides an oven for monocrystalline silicon piece production, the power distribution box comprises a box body 1, lower extreme front side in 1 inside of box, the equal fixed mounting in rear side has dead lever 12, movable mounting has movable plate 11 between the 12 tops of dead lever, 11 top fixed mounting on movable plate has place board 10, place the equal fixed mounting in board 10 top both sides and have a plurality of racks 8, 1 outside right side middle part fixed mounting of box has heating mechanism 2, heating mechanism 2 has connecting pipe 3 in one side upper end fixed mounting who keeps away from box 1, 3 top fixed mounting of connecting pipe has fan 4, 1 top fixed mounting of box has filter frame 7, fixed mounting has body 5 between 7 tops of filter frame and the fan 4, fan 4 and heating mechanism 2 all set the switch.

The top ends of the fixed rods 12 are fixedly provided with sliding strips 16, the front side and the rear side of the bottom end of the movable plate 11 are provided with sliding grooves, and the sliding strips 16 are connected with the inner parts of the sliding grooves in a sliding manner, so that the movable plate 11 is driven to move through the sliding grooves and the sliding strips 16, silicon wafers are placed and taken conveniently, and the silicon wafers are flexible and stable in moving; a through groove is formed in the left side of the outer portion of the box body 1, and a baffle plate 9 is fixedly mounted inside the through groove, so that when the silicon wafer is placed and taken, the baffle plate 9 is pulled to move to one side far away from the through groove, and the through groove is in a hollow structure for taking and placing; a sewage discharge head 13 is fixedly arranged at the bottom end of the box body 1, and a fixing frame is fixedly arranged between the left side of the fan 4 and the box body 1, so that the stability of the fan 4 during installation is improved through the fixing frame; the middle part of the top end of the moving plate 11 is provided with a rotating groove 14, a rotating block 15 is fixedly arranged in the rotating groove 14, and the top end of the rotating block 15 is fixedly connected with the bottom end of the placing plate 10, so that when the silicon wafers on two sides of the top end of the placing plate 10 are subjected to edge changing heating, the placing plate 10 is driven by the rotating groove 14 and the rotating block 15 to rotate and adjust, and the placing plate 10 is subjected to edge changing heating, so that the condition of uniform heating is prevented; the filter plate 6 is fixedly mounted at the top end and the bottom end inside the filter frame 7, so that the hot air inside the box body 1 is conveyed into the tube body 5 through the filter plates 6 on the upper layer and the lower layer to be filtered before being conveyed into the tube body 5, and impurities inside the hot air inside the box body 1 are prevented from being conveyed into the tube body 5.

The working principle is as follows: the utility model discloses place the silicon chip in proper order and install when heating the barbecue to the silicon chip and place between the rack 8 of placing board 10 top both sides, start simultaneously again and heat mechanism 2 and fan 4 and heat the heat transport of heating mechanism 2 inside and heat 1 inside, and rethread filter frame 7, body 5 is inside air current transport air inlet machine 4 of box 1 inside, rethread fan 4 is connecting pipe 3, heating mechanism 2 flows back 1 inside can, thereby be convenient for reduce the heat loss of box 1 inside and reduce the heating cost, filter 6 make the hot-air transport of box 1 inside advance body 5 inside through the filter plate of upper strata and lower floor simultaneously and filter before, prevent that the inside impurity of the inside hot-air of box 1 from conveying into body 5 inside, and when the silicon chip of placing board 10 top both sides carries out the heating of changing the limit, and drive through rotary chute 14 and turning block 15 and place board 10 and rotate the regulation thereby place board 10 and change limit heating and prevent to heat even A situation arises.

It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. An oven for the production of monocrystalline silicon wafers, comprising a box body (1), characterized in that: the improved box is characterized in that a fixing rod (12) is fixedly arranged on the front side and the rear side of the lower end in the box body (1) and is movably arranged between the top ends of the fixing rod (12), a movable plate (11) is fixedly arranged on the top end of the movable plate (11), a placing plate (10) is fixedly arranged on the top end of the placing plate (10), a plurality of placing frames (8) are fixedly arranged on the two sides of the top end of the placing plate (10), a heating mechanism (2) is fixedly arranged in the middle of the outer right side of the box body (1), a connecting pipe (3) is fixedly arranged on the upper end of one side, far away from the box body (1), of the heating mechanism (2), a fan (4) is fixedly arranged on the top end of the connecting pipe (3), a filter frame (7) is fixedly arranged on the top end of the box.

2. The oven for the production of single crystal silicon wafers according to claim 1, wherein: the top end of the fixed rod (12) is fixedly provided with a sliding strip (16), the front side and the rear side of the bottom end of the movable plate (11) are provided with sliding grooves, and the sliding strip (16) is connected with the inside of the sliding grooves in a sliding mode.

3. The oven for the production of single crystal silicon wafers according to claim 1, wherein: the box body (1) is provided with a through groove on the left side outside and a baffle (9) is fixedly arranged inside the through groove.

4. The oven for the production of single crystal silicon wafers according to claim 1, wherein: the bottom end of the box body (1) is fixedly provided with a sewage discharge head (13), and a fixing frame is fixedly arranged between the left side of the fan (4) and the box body (1).

5. The oven for the production of single crystal silicon wafers according to claim 1, wherein: the movable plate is characterized in that a rotary groove (14) is formed in the middle of the top end of the movable plate (11), a rotary block (15) is fixedly arranged in the rotary groove (14), the top end of the rotary block (15) is fixedly connected with the bottom end of the placing plate (10).

6. The oven for the production of single crystal silicon wafers according to claim 1, wherein: and filter plates (6) are fixedly arranged at the top end and the bottom end inside the filter frame (7).