CN212293728U - Mask assembly and evaporation device - Google Patents
Mask assembly and evaporation device Download PDFInfo
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- CN212293728U CN212293728U CN202021659215.1U CN202021659215U CN212293728U CN 212293728 U CN212293728 U CN 212293728U CN 202021659215 U CN202021659215 U CN 202021659215U CN 212293728 U CN212293728 U CN 212293728U
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Abstract
The utility model relates to an evaporation process field discloses a mask subassembly and evaporation device. The mask assembly comprises a bearing disc, a blocking piece and a driving assembly, the bearing disc is used for placing a substrate, an opening is formed in the bearing disc and used for exposing a region, to be deposited, of the substrate, the blocking piece is used for blocking the opening, and the driving assembly is connected with the blocking piece and used for driving the blocking piece to expose the substrate according to preset actions or operation instructions so that a film is deposited on the exposed region of the substrate by a material to be deposited. The evaporation device comprises the mask assembly. The utility model discloses can obtain the OLED device of a plurality of thickness in succession, easy operation is convenient, need not to switch over the mask plate repeatedly, can once only realize the experimental condition verification of a plurality of different OLED rete thickness, can optimize the thickness dimension of OLED rete fast by the high efficiency, convenient quick definite best test condition reduces experimental required time.
Description
Technical Field
The utility model relates to an evaporation process field especially relates to a mask subassembly and evaporation device.
Background
In the process of manufacturing a display device, an evaporation material (e.g., an organic light emitting material) is generally evaporated onto a substrate by an evaporation process. In the evaporation process, it is necessary to heat the evaporation material by a heating source and then evaporate the heated evaporation material to a predetermined position on the substrate. In the process of forming an Organic Light-Emitting Diode (OLED) display device by using an evaporation method, there are three states of an Organic material evaporation state, a metal material evaporation state and a non-evaporation state, and the three states need to be alternately changed, so that different mask plates need to be replaced.
In present coating by vaporization technology, disc type coating by vaporization equipment for experiments is subject to the spatial dimension restriction of coating by vaporization frame, and the mask plate pattern that can change is limited, and it is limited to lead to experimental condition, when changing the thickness of a plurality of OLED retes, need switch over the mask plate repeatedly and realize, need close the baffle when switching over the mask plate at every turn, promotes the substrate frame, and a plurality of actions such as the required mask plate of transfer can not high-efficient optimize the thickness dimension of OLED rete fast.
SUMMERY OF THE UTILITY MODEL
Based on the above problem, an object of the utility model is to provide a mask subassembly and coating by vaporization device, convenient operation can carry out the verification of a plurality of experimental conditions simultaneously.
In order to achieve the purpose, the utility model adopts the following technical proposal:
a mask assembly, comprising:
the device comprises a bearing disc, a substrate and a substrate positioning device, wherein the bearing disc is used for placing the substrate and is provided with an opening, and the opening is used for exposing a region to be deposited of the substrate;
the blocking piece is used for blocking the opening;
and the driving assembly is connected with the baffle plate and is used for driving the baffle plate to expose the substrate according to a preset action or an operation instruction so as to enable the material to be deposited to deposit a film in the exposed area of the substrate.
As the utility model discloses a mask assembly's preferred scheme, drive assembly can drive the separation blade translation is in order to expose gradually the opening.
As the utility model discloses a mask assembly's preferred scheme, drive assembly can drive the separation blade rotates to expose gradually the opening.
As the utility model discloses a mask assembly's preferred scheme, the separation blade with the opening is fan-shaped.
As the utility model discloses a mask assembly's preferred scheme, the opening includes parallel arrangement and mutually independent first opening and second opening, it includes adjacent device functional area and thickness calibration district to treat the deposition area, the device functional area with first opening cooperation, the thickness calibration district with the cooperation of second opening.
As the utility model discloses a mask assembly's preferred scheme, the separation blade with bear on the dish open-ended border sets up in the same layer.
As the preferred scheme of the mask assembly of the present invention, the open-ended edge of the carrying tray is provided with the guiding groove in a sandwich shape, and the blocking piece can be slid or rotated along the guiding groove.
As the utility model discloses a mask assembly's preferred scheme, bear and be provided with the holding tank on the dish, the holding tank is located around the open-ended, four angles of open-ended set up a backstop board respectively, in order to support four angles of substrate.
As the utility model discloses a mask assembly's preferred scheme, drive assembly includes driving motor and connecting piece, the one end of connecting piece with driving motor's output is connected, the other end with the separation blade is connected.
The evaporation device comprises the mask assembly, a vacuum cavity and an evaporation source, wherein the mask assembly and the evaporation source are both located in the vacuum cavity.
The utility model has the advantages that:
the mask component and the evaporation device provided by the utility model are used for placing the substrate on the bearing disc during evaporation, aligning the area of the substrate to be deposited with the opening of the bearing disc, and the baffle piece is used for shielding the opening, the substrate is exposed by the baffle plate driven by the driving component according to the preset action or operation instruction, so that the material to be deposited is deposited to form a film in the exposed area of the substrate, in the process that the driving assembly drives the baffle plate to open the opening, the opening is gradually opened, the thickness of the formed film is ensured to be changed regularly along the movement direction of the baffle plate in cooperation with the pattern of the substrate, OLED devices with a plurality of thicknesses can be continuously obtained, the operation is simple and convenient, the mask plate does not need to be repeatedly switched, the test condition verification of a plurality of different OLED film thicknesses can be realized at one time, the thickness size of the OLED film can be optimized efficiently and quickly, the optimal test condition can be determined conveniently and quickly, and the test time is shortened.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required to be used in the description of the embodiments of the present invention will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the contents of the embodiments of the present invention and the drawings without creative efforts.
Fig. 1 is a first axis view of a mask assembly (in a translational manner) according to an embodiment of the present invention;
fig. 2 is an exploded schematic view of a mask assembly (in a translational form) according to an embodiment of the present invention;
fig. 3 is a second axis view of the mask assembly (in a translational manner) according to an embodiment of the present invention;
fig. 4 is a schematic structural diagram of a mask assembly (in a rotating manner) according to an embodiment of the present invention;
FIG. 5 is a schematic view of an upper opening of a susceptor in a mask assembly according to an embodiment of the present invention;
FIG. 6 is a schematic structural diagram of a substrate according to an embodiment of the present invention;
fig. 7 is a schematic structural view of a guiding groove on a bearing plate in a mask assembly according to an embodiment of the present invention.
In the figure:
1-evaporation source; 2-carrying tray; 3-a baffle plate; 4-a drive assembly;
21-opening; 22-accommodating grooves; 23-a stop plate; 24-a guide slot; 25-a guide wheel;
211 — a first opening; 212-a second opening;
41-driving motor; 42-a connector;
100-a substrate; 101-device functional area; 102-thickness calibration zone.
Detailed Description
In order to make the technical problems, technical solutions and technical effects achieved by the present invention more clear, the embodiments of the present invention will be described in further detail with reference to the accompanying drawings, and obviously, the described embodiments are only some embodiments, not all embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by those skilled in the art without creative efforts belong to the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. Wherein the terms "first position" and "second position" are two different positions.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection or a removable connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
The present embodiment provides a mask assembly, as shown in fig. 1-3, which includes a susceptor 2, a baffle 3 and a driving assembly 4. The bearing disc 2 is used for placing the substrate 100, the bearing disc 2 is provided with an opening 21, the opening 21 is used for exposing the area to be deposited of the substrate 100, the blocking piece 3 is used for blocking the opening 21, and the driving assembly 4 is connected with the blocking piece 3 and used for driving the blocking piece 3 to expose the substrate 100 according to a preset action or an operation instruction, so that the material to be deposited is deposited and formed into a film in the exposed area of the substrate 100.
During evaporation, the substrate 100 is placed on the carrier tray 2, the area to be deposited of the substrate 100 is aligned with the opening 21 of the carrier tray 2, the blocking piece 3 is used for shielding the opening 21, and the driving assembly 4 drives the blocking piece 3 to expose the substrate 100 according to a preset action or operation instruction, so that the material to be deposited is deposited on the exposed area of the substrate 100 to form a film. Drive separation blade 3 at drive assembly 4 and open opening 21's in-process, opening 21 is opened gradually, cooperation base plate pattern, it changes to guarantee that film forming thickness is certain law along 3 direction of motion of separation blade, can obtain the OLED device of a plurality of thickness in succession, easy operation is convenient, need not to switch over the mask plate repeatedly, can once only realize the experimental condition verification of a plurality of different OLED rete thickness, can optimize the thickness dimension of OLED rete fast high-efficiently, the convenient best experimental condition of confirming fast, reduce experimental required time.
Bear and be provided with holding tank 22 on the dish 2, holding tank 22 is located opening 21 around, and holding tank 22 tentatively fixes a position to placing of substrate 100, and opening 21 can be the rectangle, and four angles of opening 21 set up a backstop board 23 respectively for four angles of support substrate 100. The driving assembly 4 includes a connecting member 42 and a driving motor 41, and an output end of the driving motor 41 drives the barrier 3 to perform a predetermined action or an operation command through the connecting member 42 to expose the substrate 100.
Alternatively, the driving assembly 4 can drive the baffle 3 to open the opening 21 in a uniform motion according to a preset action or an operation instruction. The driving assembly 4 drives the blocking piece 3 at a constant speed to gradually open the opening 21, and when the power of the evaporation source 1 is a fixed value, the thickness of the OLED film layer formed on the substrate 100 is gradually decreased (along the movement direction of the blocking piece 3) and continuously changed.
Alternatively, the driving assembly 4 can drive the shutter 3 to open the opening 21 in a pulsed motion according to preset actions or operating instructions. The blocking sheet 3 is driven by the driving assembly 4 in a pulse mode, so that the opening 21 is intermittently and gradually opened, for example, the driving assembly 4 drives the blocking sheet 3 to move for 10s at a constant speed of 0.5mm/s, stays for 5s, and then drives the blocking sheet 3 to move for 10s at a constant speed of 0.5mm/s, when the power of the evaporation source 1 is a constant value, the thickness of the OLED film layer formed on the substrate 100 is gradually decreased (along the moving direction of the blocking sheet 3) and is changed in a step shape.
In other embodiments, the preset action or the operation command may also refer to other motion forms such as uniform acceleration, which are determined according to the actual test conditions, and are not limited herein.
Alternatively, as shown in fig. 1 to 3, the movement direction of the blocking sheet 3 may be a straight line, and the driving assembly 4 can drive the blocking sheet 3 to translate to gradually expose the opening 21. The barrier sheet 3 and the opening 21 may be in a long strip shape to form long strip-shaped OLED film layers with different thicknesses. At this time, the driving motor 41 may be a linear motor, which facilitates the control of the translation of the baffle 3.
Because the evaporation coating indoor space is limited, in order to reduce the occupation space of drive assembly 4 and separation blade 3, optionally, as shown in fig. 4, the movement direction of separation blade 3 also can be the pitch arc, and drive assembly 4 can drive separation blade 3 and rotate to expose opening 21 gradually. Optionally, both the flap 3 and the opening 21 are fan-shaped. At this time, the driving motor 41 can be a rotating motor, which is convenient for controlling the swing of the barrier sheet 3 to form a fan-shaped OLED film layer with different thickness.
Alternatively, as shown in fig. 5, the opening 21 includes a first opening 211 and a second opening 212 which are arranged in parallel and are independent of each other, and as shown in fig. 6, the region to be deposited of the substrate 100 includes a device functional region 101 and a thickness calibration region 102 which are adjacent, the device functional region 101 is matched with the first opening 211, and the thickness calibration region 102 is matched with the second opening 212. The thickness calibration region 102 may be a region disposed at one side of the device functional region 101; the thickness calibration region 102 may also be two regions disposed on both sides of the device functional region 101. During vapor deposition, the device functional region 101 and the thickness calibration region 102 are simultaneously vapor-deposited to form a film layer with the same thickness, and the ellipsometer is used for testing the film thickness of the thickness calibration region 102 at the corresponding position of the device functional region 101, so that the specific test conditions of the device functional region 101 of the OLED device can be accurately known, the device functional region 101 is prevented from being damaged, the test flow is simplified, and the test accuracy is improved.
Optionally, the edges of the blocking sheet 3 and the opening 21 on the carrier tray 2 are disposed in the same layer, so as to ensure that the blocking sheet 3 can completely block the opening 21, and prevent the opening 21 from being exposed to a gap when the blocking sheet 3 is not driven to open the opening 21, which results in deposition of a part of the substrate 100 to form a film, and further affects the experimental result. Alternatively, the edge of the opening 21 of the carrier tray 2 is provided with a guide groove 24 (shown in fig. 7) in a sandwich shape, and the shutter 3 can slide or rotate along the guide groove 24. The guide slot 24 in a sandwich shape is arranged at the edge of the opening 21 on the bearing disc 2, so that the baffle 3 can smoothly and stably slide or rotate according to the preset direction, and the accuracy and consistency of experimental conditions are ensured.
Further optionally, a guide wheel 25 is arranged in the interlayer-shaped guide groove 24, and the guide wheel 25 can play a role of guiding and supporting the blocking piece 3, so as to reduce the frictional resistance of the blocking piece 3 sliding in the guide groove 24, realize the stable sliding of the blocking piece 3 in the guide groove 24, and conveniently control the sliding distance of the blocking piece 3 in the guide groove 24 according to experimental conditions.
This embodiment still provides an evaporation plating device, and this evaporation plating device includes foretell mask assembly, still includes vacuum cavity and evaporation plating source 1, will treat that deposition material deposits the membrane gradually in the exposure region of substrate 100 through evaporation plating source 1, and mask assembly and evaporation plating source 1 all are located the vacuum cavity. The coating by vaporization device that this embodiment provided, drive separation blade 3 at drive assembly 4 and open opening 21's in-process, opening 21 is opened gradually, cooperation base plate pattern, it changes to guarantee that film thickness is certain law along separation blade 3 direction of motion, can obtain the OLED device of a plurality of thickness in succession, easy operation is convenient, need not to switch over the mask plate repeatedly, can once only realize the experimental condition verification of a plurality of different OLED rete thickness, can optimize the thickness dimension on OLED rete high-efficiently fast, the convenient best experimental condition of confirming fast, reduce experimental required time.
The embodiment also provides an OLED optimization method, which adopts the mask assembly, and the OLED optimization method includes the following steps:
placing the substrate 100 on the carrier plate 2 with the area of the substrate 100 to be deposited aligned with the opening 21 of the carrier plate 2;
the driving component 4 drives the baffle 3 to move according to a preset action or an operation instruction, the baffle 3 gradually opens the opening 21 on the bearing disc 2, and the area to be deposited of the substrate 100 gradually exposes from the opening 21;
evaporating for a first preset time, and gradually depositing a material to be deposited into a film in the exposed area of the substrate 100;
after the opening 21 on the bearing disc 2 is completely opened, continuing to evaporate for a second preset time;
and detecting the thickness of the corresponding position of the film layer to be optimized.
Adjusting the evaporation rate of the evaporation source 1 to be a preset evaporation rate according to the thickness of the OLED film layer required to be tested and verified, and setting the output speed of the driving assembly 4 according to a preset action or an operation instruction and the length of the region to be deposited of the substrate 100. The substrate 100 is placed on the carrier tray 2, the area to be deposited of the substrate 100 is aligned with the opening 21 of the carrier tray 2, the driving assembly 4 drives the blocking sheet 3 to move according to the preset action or operation instruction, the blocking sheet 3 gradually opens the opening 21 on the carrier tray 2, and the area to be deposited of the substrate 100 is gradually exposed from the opening 21. The evaporation source 1 continuously evaporates at a preset evaporation rate for a first preset time, materials to be deposited are gradually deposited to form a film in an exposed area of the substrate 100, and after the opening 21 on the bearing disc 2 is completely opened, the evaporation source 1 continuously evaporates at the preset evaporation rate for a second preset time. The area to be deposited of the OLED film layer comprises an adjacent device function area 101 and a thickness calibration area 102, during evaporation, the device function area 101 and the thickness calibration area 102 are simultaneously evaporated to form a film layer with the same thickness, an ellipsometer is used for testing the film thickness of the thickness calibration area 102 at the corresponding position of the device function area 101, the specific test condition of the device function area 101 of the OLED film layer can be accurately known, and the optimal thickness of the device function area 101 can be known by subsequently detecting and comparing the performances of the device function areas 101 with different thicknesses.
Optionally, the preset action or operation instruction is: the driving assembly 4 can drive the blocking sheet 3 to move according to a first preset direction at a first speed. When the driving assembly 4 drives the blocking sheet 3 to move in a first preset direction at a first speed, the blocking sheet 3 moves at a constant speed, the opening 21 in the bearing tray 2 blocked by the blocking sheet 3 is gradually opened, the region to be deposited of the substrate 100 is gradually exposed, the material to be deposited is deposited to form a film in the exposed region of the substrate 100, a strip-shaped OLED film layer with different thicknesses can be formed, and the thickness of the OLED film layer formed on the substrate 100 is gradually reduced (along the first preset direction) and continuously changed.
Optionally, the preset action or operation instruction is: the driving component 4 can drive the baffle 3 to move a first distance in a first preset direction at a second speed and stay for a third preset time. The driving assembly 4 drives the blocking sheet 3 to move for a first distance in the first preset direction at a second speed and stay for a third preset time, the blocking sheet 3 moves in a pulse mode, the opening 21, shielded by the blocking sheet 3, on the bearing disc 2 is gradually opened, the area to be deposited of the substrate 100 is gradually exposed, the material to be deposited is deposited and formed into a film in the exposed area of the substrate 100, the long strip-shaped OLED film layers with different thicknesses can be formed, and the thickness of the OLED film layer formed on the substrate 100 is gradually reduced (in the first preset direction) and is changed in a step shape.
Optionally, the preset action or operation instruction is: the driving component 4 can drive the baffle 3 to rotate according to a second preset direction at a first angular speed. When the driving assembly 4 drives the blocking sheet 3 to rotate according to the second preset direction at the first angular speed, the movement form of the blocking sheet 3 is uniform rotation, the opening 21 on the bearing disc 2 blocked by the blocking sheet 3 is gradually opened, the area to be deposited of the substrate 100 is gradually exposed, the material to be deposited is deposited to form a film in the exposed area of the substrate 100, fan-shaped OLED film layers with different thicknesses can be formed, and the thickness of the OLED film layer formed on the substrate 100 is gradually reduced (along the second preset direction, such as the clockwise direction) and continuously changed.
Optionally, the preset action or operation instruction is: the driving component 4 can drive the baffle 3 to rotate for a first angle according to a second preset direction at a second angular speed, and the baffle stays for a fourth preset time. The driving assembly 4 drives the blocking sheet 3 to rotate by a first angle according to a second preset direction at a second angular speed, and when the blocking sheet 3 stays for a fourth preset time, the movement form of the blocking sheet 3 is pulse-type rotation, the opening 21 on the bearing disc 2 blocked by the blocking sheet 3 is gradually opened, the area to be deposited of the substrate 100 is gradually exposed, the material to be deposited is deposited to form a film in the exposed area of the substrate 100, a fan-shaped OLED film layer with different thicknesses can be formed, and the thickness of the OLED film layer formed on the substrate 100 is gradually reduced (along the second preset direction, such as the clockwise direction) and is changed in a step shape.
The OLED optimization method that this embodiment provided, drive separation blade 3 at drive assembly 4 and open the in-process of opening 21, opening 21 is opened gradually, cooperation base plate pattern, it changes to guarantee that film thickness is certain law along separation blade 3 direction of motion, can obtain the OLED device of a plurality of thicknesses in succession, easy operation is convenient, need not to switch over the mask board repeatedly, can once only realize the experimental condition verification of a plurality of different OLED rete thicknesses, can optimize the thickness dimension of OLED rete high-efficiently fast, the convenient best experimental condition of confirming fast, reduce experimental required time.
It should be noted that the foregoing is only a preferred embodiment of the present invention and the technical principles applied. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments illustrated herein, but is capable of various obvious modifications, rearrangements and substitutions without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail with reference to the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the scope of the present invention.
Claims (10)
1. A mask assembly, comprising:
the device comprises a bearing disc, a substrate and a substrate positioning device, wherein the bearing disc is used for placing the substrate and is provided with an opening, and the opening is used for exposing a region to be deposited of the substrate;
the blocking piece is used for blocking the opening;
and the driving assembly is connected with the baffle plate and is used for driving the baffle plate to expose the substrate according to a preset action or an operation instruction so as to enable the material to be deposited to deposit a film in the exposed area of the substrate.
2. A mask assembly according to claim 1, wherein the driving assembly is capable of driving the baffle plate to translate to gradually expose the opening.
3. A mask assembly according to claim 1, wherein the driving assembly can drive the baffle plate to rotate so as to gradually expose the opening.
4. A mask assembly according to claim 3, wherein the baffle and the opening are fan-shaped.
5. A mask assembly according to claim 1, wherein the openings include a first opening and a second opening which are arranged in parallel and independent from each other, the region to be deposited includes a device functional region and a thickness calibration region which are adjacent, the device functional region is matched with the first opening, and the thickness calibration region is matched with the second opening.
6. A mask assembly according to claim 1, wherein the baffle is disposed in the same layer as the edge of the opening in the susceptor.
7. A mask assembly according to claim 6, wherein the edge of the opening on the bearing disc is provided with a sandwich-type guide groove, and the baffle plate can slide or rotate along the guide groove.
8. A mask assembly according to claim 1, wherein the tray is provided with a receiving groove, the receiving groove is located around the opening, and four corners of the opening are respectively provided with a stop plate for supporting four corners of the substrate.
9. A mask assembly according to claim 1, wherein the driving assembly comprises a driving motor and a connecting member, one end of the connecting member is connected with the output end of the driving motor, and the other end is connected with the baffle.
10. An evaporation device, comprising the mask assembly of any one of claims 1 to 9, and further comprising a vacuum chamber and an evaporation source, wherein the mask assembly and the evaporation source are both located in the vacuum chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021659215.1U CN212293728U (en) | 2020-08-11 | 2020-08-11 | Mask assembly and evaporation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021659215.1U CN212293728U (en) | 2020-08-11 | 2020-08-11 | Mask assembly and evaporation device |
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| CN212293728U true CN212293728U (en) | 2021-01-05 |
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| CN202021659215.1U Active CN212293728U (en) | 2020-08-11 | 2020-08-11 | Mask assembly and evaporation device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115896689A (en) * | 2022-11-18 | 2023-04-04 | 乐金显示光电科技(中国)有限公司 | Mask device and evaporation equipment |
| CN115896689B (en) * | 2022-11-18 | 2024-05-28 | 乐金显示光电科技(中国)有限公司 | Mask device and evaporation equipment |
-
2020
- 2020-08-11 CN CN202021659215.1U patent/CN212293728U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115896689A (en) * | 2022-11-18 | 2023-04-04 | 乐金显示光电科技(中国)有限公司 | Mask device and evaporation equipment |
| CN115896689B (en) * | 2022-11-18 | 2024-05-28 | 乐金显示光电科技(中国)有限公司 | Mask device and evaporation equipment |
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