CN212293657U

CN212293657U - Multi-station vacuum annealing machine

Info

Publication number: CN212293657U
Application number: CN202022037029.0U
Authority: CN
Inventors: 罗震; 曹勇; 张培银; 李亚洲
Original assignee: Compton Jiangsu Technology Co Ltd
Current assignee: Thermos Jiangsu Housewares Co Ltd
Priority date: 2020-09-16
Filing date: 2020-09-16
Publication date: 2021-01-05
Anticipated expiration: 2030-09-16

Abstract

A multi-station vacuum annealing machine comprises a rack, a workbench arranged on the rack, a plurality of vacuum-pumping chambers arranged on the workbench, vacuum-pumping mechanisms respectively communicated with the vacuum-pumping chambers, a heating mechanism for heating one or more of the vacuum-pumping chambers, and a driving mechanism for driving the vacuum-pumping chambers and the heating mechanism to move relatively. The vacuum pumping chamber comprises a base arranged on the workbench and an upper cover cap capable of being in sealing fit with the base, and the base is communicated with the vacuum pumping mechanism. The heating mechanism comprises a lifting module and an electromagnetic heating coil arranged at the lower end part of the lifting module, and the electromagnetic heating coil is positioned right above one or more vacuum-pumping chambers. The multi-station vacuum annealing machine can carry out independent heating annealing on the workpiece, so that the workpiece to be annealed is uniformly heated, and the annealing quality is improved; the method can realize the automatic operation of the heating annealing, the heat preservation, the cooling and the heating annealing without stop, realizes the production takt without manual intervention, and has high production efficiency, low energy consumption and environmental protection.

Description

Multi-station vacuum annealing machine

Technical Field

The utility model relates to a vacuum annealing equipment field especially relates to a multistation vacuum annealing machine.

Background

The annealing process mainly refers to a heat treatment process of exposing a metal material to a high temperature for a long time and then slowly cooling the metal material. Can improve or eliminate various tissue defects and residual stress caused by the processes of casting, forging, rolling and welding of steel, prevent the deformation and cracking of workpieces, and particularly prevent the stainless steel sheet from being stretched and formed; the workpiece can be softened for cutting and forming; the crystal grains can be refined, and the structure is improved to improve the mechanical property of the workpiece; it may also be prepared for final heat treatment (quenching, tempering). The metal product has the advantages of smooth surface, no oxidation, no decarburization and the like after annealing.

However, most annealing equipments in the prior art are large annealing furnaces with single function and complex structure. In the traditional annealing furnace, a plurality of workpieces to be annealed are simultaneously placed into the annealing furnace and then heated inside the annealing furnace, so that the temperature in the annealing furnace is uneven and the annealing quality is poor; and the traditional annealing furnace has the defects of incapability of continuous production, low capacity, high later maintenance cost, large volume, high construction cost and the like.

SUMMERY OF THE UTILITY MODEL

The utility model aims at providing a multistation vacuum annealing machine can treat annealing work piece and carry out solitary heating annealing, makes and treats annealing work piece and be heated evenly, improves annealing quality, and can continuous use, improves the productivity.

In order to achieve the above purpose, the utility model adopts the technical scheme that: the utility model provides a multistation vacuum annealing machine, annealing machine includes the frame, locates workstation, a plurality of locating in the frame evacuation room on the workstation, with a plurality of evacuation mechanism that evacuation room is linked together respectively, to one or more of them the heating mechanism that evacuation room carries out the heating, drive evacuation room and the actuating mechanism relative movement's of heating mechanism actuating mechanism, evacuation room including locating base on the workstation, can with the sealed complex upper shield of base, the base with evacuation mechanism is linked together, heating mechanism include with the frame is fixed first support mutually, can set up along self axis direction with rotating set up first screw nut on the first support, with first motor that first screw nut transmission is connected, with first screw nut matched with extends the first lead screw that sets up along the upper and lower direction, And the electromagnetic heating coil is arranged at the lower end part of the first lead screw and is positioned right above one or more vacuum-pumping chambers.

Preferably, the annealing machine further comprises a manipulator arranged on the upstream of the heating mechanism and used for grabbing the upper cover cap, the manipulator comprises a second support fixed on the rack, a second lead screw nut which can be rotationally arranged on the second support along the axis direction, a second motor in transmission connection with the second lead screw nut, a second lead screw which is matched with the second lead screw nut and extends in the up-down direction, and a clamp arranged at the lower end of the second lead screw, and the clamp is positioned right above one of the vacuum pumping chambers.

Preferably, the driving mechanism comprises a cam divider fixed on the frame and a driving motor in transmission connection with the force input shaft of the cam divider, and the force output shaft of the cam divider is connected with the workbench.

Preferably, a plurality of the vacuum-pumping chambers are distributed at intervals along the circumferential direction of the workbench.

Preferably, the vacuumizing mechanism comprises a vacuumizing pump, a vacuum buffer cavity communicated with the vacuumizing pump through a first pipeline, and a second pipeline communicated with the vacuum buffer cavity and the base.

Further, the vacuum pumping mechanism further comprises a first high-vacuum solenoid valve arranged on the first pipeline.

Further, the vacuum pumping mechanism further comprises a second high-vacuum solenoid valve arranged on the second pipeline.

Preferably, the annealing machine further comprises a plurality of third pipelines respectively arranged on the base and communicated with the outside, and air inlet valves respectively arranged on each third pipeline.

Preferably, the annealing machine further comprises a vacuum gauge communicated with the vacuum pumping chamber.

Preferably, the heating mechanism further includes a heat radiation fan provided on an outer periphery of the electromagnetic heating coil.

Preferably, the upper cover is a glass upper cover.

Because of above-mentioned technical scheme's application, compared with the prior art, the utility model have the following advantage: the multi-station vacuum annealing machine can carry out independent heating annealing on the workpiece to be annealed, so that the workpiece to be annealed is uniformly heated, and the annealing quality is improved; the method can realize the automatic operation of the heating annealing, the heat preservation, the cooling and the heating annealing without stop, realizes the production takt without manual intervention, and has high production efficiency, low energy consumption and environmental protection. The multi-station vacuum annealing machine solves the problems of online production process of products to be annealed, rotary table type vacuumizing and sealing, a series of process problems of indirect heating of products through the upper glass cover, bright annealing of stainless steel and the like, and the surface of the treated products is smooth and clean.

Drawings

FIG. 1 is a schematic perspective view of a multi-station vacuum annealing machine according to the present invention;

FIG. 2 is a left side view of the multi-station vacuum annealing machine of the present invention;

FIG. 3 is a schematic view of the multi-station vacuum annealing machine of the present invention with the frame removed;

fig. 4 is a schematic perspective view of the multi-station vacuum annealing machine of the present invention at another angle after the frame is removed;

FIG. 5 is a schematic front view of the multi-station vacuum annealing machine of the present invention after removing the frame;

FIG. 6 is a right-side view of the multi-station vacuum annealing machine of the present invention after the frame is removed;

wherein: 1. a frame; 2. a work table; 3. vacuumizing the chamber; 31. a base; 32. an upper cover; 4. a vacuum pumping mechanism; 41. a vacuum pump is pumped; 42. a first conduit; 43. a vacuum buffer chamber; 44. a second conduit; 45. a high vacuum solenoid valve; 46. a second high vacuum solenoid valve; 47. an oil mist filter; 5. a heating mechanism; 51. a first bracket; 52. a first lead screw nut; 53. a first motor; 54. a first lead screw; 55. a quartz glass shield; 56. a heat radiation fan; 6. a drive mechanism; 61. a cam divider; 62. a drive motor; 7. a manipulator; 71. a second bracket; 72. a second lead screw nut; 73. a second motor; 74. a second lead screw; 75. a clamp; 8. an intake valve; 9. a conductive slip ring; 10. a cooling fan.

Detailed Description

The technical solution of the present invention will be further explained with reference to the accompanying drawings and specific embodiments.

Referring to fig. 1 to 6, the multi-station vacuum annealing machine includes a frame 1, a worktable 2 disposed on the frame 1, a plurality of vacuum-pumping chambers 3 disposed on the worktable 2, vacuum-pumping mechanisms 4 respectively communicated with the plurality of vacuum-pumping chambers 3, a heating mechanism 5 for heating one or more of the vacuum-pumping chambers 3, and a driving mechanism 6 for driving the vacuum-pumping chambers 3 and the heating mechanism 5 to move relatively.

The driving mechanism 6 drives the evacuation chambers 3 and the heating mechanism 5 to move relatively, so that the heating mechanism 5 can heat and anneal the respective evacuation chambers 3. The present embodiment provides three schemes for driving the evacuation chamber 3 and the heating mechanism 5 to move relatively, which are all within the protection scope of the present application. One of them is: the fixed heating mechanism 5 drives the vacuum pumping chamber 3 to move; the second way is: the vacuum pumping chamber 3 is fixed and drives the heating mechanism 5 to move; the third mode is as follows: the heating mechanism 5 and the evacuation cell 3 move simultaneously. This embodiment describes the first technical solution in detail as follows:

as shown in fig. 5 and fig. 6, the driving mechanism 6 includes a cam divider 61 fixed on the frame 1, and a driving motor 62 in transmission connection with an input shaft of the cam divider 61, and an output shaft of the cam divider 61 is connected with the table 2. The drive motor 62 can drive the table 2 to rotate by the cam divider 61, thereby relatively moving the evacuation room 3 provided on the table 2 and the heating mechanism 5. The plurality of evacuation chambers 3 are arranged along the circumferential direction of the worktable 2 at intervals, and preferably, the plurality of evacuation chambers 3 are distributed in an array.

Make between platform 2 and the frame 1 and link up through flat bearing, flat bearing mainly is used for bearing the weight of workstation 2, shifts the bearing to frame 1 department, and workstation 2 rotates with cam splitter 61 drive. The cam divider 61 is rotated by a drive motor 62.

The evacuation room 3 of the present application is provided in plural, and the number of the evacuation rooms is the same as the number of the stations of the cam divider 61, for example, 10, 12 or other numbers are provided, and the following is an example in which 10 evacuation rooms 3 are provided:

when 10 evacuation chambers 3 are provided, the cam divider 61 is provided with 10 stations, one evacuation chamber 3 being provided for each station. The starting angle of the cam divider 61 is 270 degrees, the stop angle is 90 degrees, a limit block is set at each station, the cam divider 61 stops when the limit block is detected by the travel switch, and the cam divider can also stop in a delayed mode, so that the cam divider 61 is still in the range of the stop angle of 90 degrees when the driving motor 62 stops, the vacuum pumping chamber 3 on the workbench 2 is accurately positioned, and the heating mechanism 5 can accurately heat and anneal products in the vacuum pumping chamber 3. The center of the plane bearing of the worktable 2 connected with the cam divider 61 is a hollow shaft for arranging the pipeline of the vacuum pumping mechanism 4.

The vacuum pumping chamber 3 comprises a base 31 arranged on the workbench 2, an upper cover 32 capable of being in sealing fit with the base 31, and a product positioning jig arranged in the base 31, wherein the product positioning jig can be used for conveniently placing a product to be annealed, the position of the product to be annealed can be accurately placed, annealing treatment is convenient to carry out, and the base 31 is communicated with the vacuum pumping mechanism 4. The upper cover 32 is in a shape of an upper end closed and a lower end opened, the lower end of the upper cover 32 is in contact seal with the base 31, and a circle of flat flange is arranged at the lower end opening of the upper cover 32. The contact position of the base 31 and the upper cover 32 is provided with a high-temperature-resistant sealing ring to increase the sealing effect.

Preferably, the base 31, the upper cover 32 and the product positioning jig are all made of high-purity quartz materials and can withstand the temperature of more than 1000 ℃. The overall property of the vacuum-pumping chamber 3 is stable and is not influenced by the heating mechanism 5 to heat the product to be annealed.

As shown in fig. 4, the heating mechanism 5 includes a lifting module, and an electromagnetic heating coil provided at a lower end portion of the lifting module. In detail, the heating mechanism 5 includes a first bracket 51 fixed to the frame 1, a first lead screw nut 52 rotatably disposed on the first bracket 51 along an axial direction thereof, a first motor 53 in transmission connection with the first lead screw nut 52, a first lead screw 54 extending in an up-down direction and engaged with the first lead screw nut 52, and an electromagnetic heating coil (not shown in the drawings) disposed at a lower end portion of the first lead screw 54, and the electromagnetic heating coil is located directly above one or more of the evacuation chambers 3. Preferably, a quartz glass shield 55 is fixed to the lower end of the first lead screw 54, and the electromagnetic heating coil is wound in the quartz glass shield 55, so that the quartz glass shield 55 can withstand a temperature of 1000 ° or more. In the figure, the electromagnetic heating coil is positioned right above one of the vacuum-pumping chambers 3, and is used for heating and annealing the product to be annealed in one vacuum-pumping chamber 3.

When the heating mechanism 5 heats one of the vacuum-pumping chambers 3, the heating mechanism 5 is provided with an electromagnetic heating coil; when the heating mechanism 5 heats a plurality of the evacuation chambers 3, the heating mechanism 5 is provided with a corresponding number of electromagnetic heating coils, so that each evacuation chamber 3 can independently correspond to one electromagnetic heating coil, and the electromagnetic heating coils can uniformly heat the evacuation chambers 3. And the plurality of electromagnetic heating coils can be lifted simultaneously or not.

The heating mechanism 5 further includes a heat radiation fan 56 provided on the outer periphery of the electromagnetic heating coil. The cooling device is used for cooling the electromagnetic heating coil, and the electromagnetic heating coil is prevented from being influenced by radiant heat to cause damage to the coil. The frame 1 is also provided with a cooling fan 10, and the cooling fan 10 is positioned on the periphery of the upper part of the workbench 2 and used for performing air cooling heat dissipation on the vacuum pumping chamber 3 subjected to annealing treatment.

As shown in fig. 3, the annealing machine further includes a manipulator 7 disposed upstream of the heating mechanism 5 for grasping the upper cover 32, the manipulator 7 includes a second bracket 71 fixed on the frame 1, a second lead screw nut 72 rotatably disposed on the second bracket 71 along its axial direction, a second motor 73 in transmission connection with the second lead screw nut 72, a second lead screw 74 extending in the up-down direction and engaged with the second lead screw nut 72, a clamp 75 disposed at a lower end of the second lead screw 74, and a clamp driving module for driving the clamp 75 to grasp and release, and the clamp 75 is located right above one of the evacuation chambers 3.

If the manipulator 7 is located at the first station, the heating mechanism 5 is located at the third station, and after the manipulator 7 places the upper cover 32 on the base 31, the vacuumizing mechanism 4 can vacuumize the vacuumizing chamber 3 at the first station or the second station, and the heating mechanism 5 heats and anneals the product in the vacuumizing chamber 3 at the third station. Preferably, a workpiece taking mechanical arm and a workpiece loading mechanical arm can be added to the annealing machine, for example, the mechanical arm 7 lifts the upper cover 32 on the base 31, the workpiece taking mechanical arm takes down the product on the base 31, then the workpiece loading mechanical arm places the product to be heated and annealed on the product positioning jig on the base 31, then the mechanical arm 7 puts down the upper cover 32 on the base 31, and the vacuumizing mechanism 4 vacuumizes the vacuumizing chamber 3.

As shown in fig. 3 and 4, the vacuum pumping mechanism 4 includes a vacuum pumping pump 41, a vacuum buffer chamber 43 communicated with the vacuum pumping pump 41 through a first pipeline 42, a second pipeline 44 communicating the vacuum buffer chamber 43 with the base 31, a first high vacuum solenoid valve 45 disposed on the first pipeline 42, and a second high vacuum solenoid valve 46 disposed on the second pipeline 44. The first pipeline 42 is also provided with a high vacuum rotary sealing element, the rotary sealing element has the function of solving the problem of the inclined street action of the static end and the rotating end of the first pipeline 42 when the workbench 1 rotates, the vacuum degree can reach 10-5Pa, and the leakage rate can reach 10-10Pa.m 3/sec.

The rotary sealing member is arranged on the first pipeline 42 and connected with the vacuum pumping pump 41, the type of the pump can be selected according to the requirements of vacuum degree, pumping speed and the like, and the vacuum degree can be high and the multi-stage pump can be connected in series. The vacuum degree of the vacuum pump can meet the requirements of no oxidation and no color change of products by 10-1PA, and a rotary vane pump can be selected (the protection scope of the vacuum pump is not limited by the vacuum pumping mode). Preferably, an electromagnetic vacuum differential pressure valve is arranged at an air inlet of the rotary vane pump, a power supply of the electromagnetic vacuum differential pressure valve is connected with a start-stop power supply of the rotary vane pump, and the electromagnetic vacuum differential pressure valve is a mechanical vacuum pump safety valve and is arranged at the air inlet of the rotary vane pump and synchronously opened and closed with the rotary vane pump. When the pump stops working or the power supply is suddenly interrupted, the valve automatically closes the valve plate by utilizing the atmospheric pressure, so that the vacuum system keeps vacuum and the atmosphere is filled into the pump cavity, and the phenomenon that the pump oil reversely flows to pollute the vacuum system is avoided. An oil mist filter 47 is installed at an air outlet of the vacuum pumping pump 41, and the oil mist filter 47 prevents a large amount of oil of the vacuum pump from being reduced, so that the cleanliness of rooms and plants is improved, and the environmental pollution is reduced.

The vacuum buffer chamber 43 in this embodiment can play both a role of connecting each evacuation room 3 and a role of vacuum buffer. When the vacuum is not pumped, the vacuum buffer chamber 43 is always in a vacuum state because the vacuum buffer chamber 43 is connected with the vacuum pump 41 and the high vacuum solenoid valves are arranged between the vacuum buffer chamber 43 and the vacuum pumping chamber 3. Preferably, the volume of the vacuum buffer chamber 43 is greater than or equal to the volume of the single evacuation chamber 3, and when the evacuation chamber 3 needs annealing, the first high-vacuum solenoid valve 45 and the second high-vacuum solenoid valve 46 are opened, so as to achieve the purpose of evacuating the air in the evacuation chamber 3. The annealing machine also comprises a vacuum gauge communicated with the vacuum pumping chamber 3. The vacuum gauge is used for pumping the vacuum degree in the vacuum chamber 3, and when the vacuum degree reaches the set vacuum degree requirement, a signal is given, and the heating mechanism 5 can start heating.

An independent second high vacuum solenoid valve 46 is arranged between each vacuum pumping chamber 3 and the vacuum buffer cavity 43, when the vacuum pumping chamber 3 does not work or the upper cover 32 of the vacuum pumping chamber 3 is taken off to take and place products, the second high vacuum solenoid valve 46 connecting the vacuum pumping chamber 3 and the vacuum buffer cavity 43 is in a closed state, so that the annealing-material taking-material placing processes are not influenced, and the purpose of on-line annealing is achieved. The defects that the conventional large-scale annealing furnace needs to be fed in the whole furnace, the whole furnace has low efficiency, high energy consumption and incapability of continuous production, the later maintenance cost is high, the size is large, the construction cost is high and the like are thoroughly solved.

The annealing machine further comprises a plurality of third pipelines which are respectively arranged on the base 31 and communicated with the outside, and an air inlet valve 8 which is respectively arranged on each third pipeline. When the annealing is finished and the product needs to be taken out from the vacuum chamber 3, the air can be discharged to the vacuum chamber 3 through the air inlet valve 8, and the upper cover 32 is taken down after the internal and external pressure of the vacuum chamber 3 is balanced, so that the annealing furnace is labor-saving and convenient.

The application's annealing machine still includes the slide ring 9 that leads electricity fixed with 1 item of frame, and the slide ring 9 that leads electricity is connected with a plurality of admission valves 8, second high vacuum solenoid valve 46 to when preventing workstation 1 to rotate, twine the confusion with the circuit that admission valve 8, second high vacuum solenoid valve 46 are connected.

The annealing machine of this application still include with evacuation mechanism 4, heating mechanism 5, actuating mechanism 6, manipulator 7, admission valve 8, cooling fan 9 wait the controller of being connected for the annealing machine of this application can automatic work.

The working process of the multi-station annealing machine is as follows: the vacuum pump 41 performs vacuum processing on the entire vacuum mechanism 4, and at this time, the second high vacuum solenoid valve 46 is in a closed state, and the vacuum buffer chamber 43 is in a vacuum state.

In an initial state, the clamp 75 is located right above one of the evacuation chambers 3, the second motor 73 of the manipulator 7 drives the second lead screw nut 72 to rotate, and further drives the second lead screw 74 matched with the second lead screw nut to move downwards along the vertical direction until the clamp 75 moves to the clamping position of the evacuation chamber 3, then the clamp driving module drives the clamp 75 to clamp the upper cover 72, and the second motor 73 drives the clamp 75 to move upwards.

Then, the piece to be annealed can be manually placed on the product positioning jig in the base 71, then the second motor 73 drives the clamp 75 to move downward (the driving process is the same as that described above, and details are not described here), and the clamp driving module drives the clamp 75 to release the upper cover 72, so that the upper cover 72 falls on the base 71 to be attached to the base 71 and is matched with the base. When the annealing machine can also be provided with a workpiece taking manipulator and a workpiece loading manipulator, the workpiece to be annealed can be placed on the product positioning jig in the base 71 through the workpiece loading manipulator.

After the upper cover 72 is placed on the base 71 and bonded, the second high vacuum solenoid valve 46 communicated with the evacuation cell 3 is opened to evacuate the evacuation cell 3, so that the interior of the evacuation cell 3 is in a vacuum state.

Then, the driving motor 62 drives the cam divider 61 to rotate, and further drives the workbench 2 to rotate, and further drives the vacuum-pumping chamber 3 arranged on the workbench 2 to rotate, and the vacuum-pumped chamber 3 is rotated to the lower part of the heating mechanism 5 to perform annealing treatment.

When the vacuumized vacuum-pumping chamber 3 rotates to the lower part of the heating mechanism 5, the first motor 53 drives the first lead screw nut 52 to rotate, and then drives the first lead screw 54 matched with the first lead screw to move downwards along the vertical direction until the electromagnetic heating coil moves to the periphery of the vacuum-pumping chamber 3, the electromagnetic heating coil is sleeved on the periphery of the vacuum-pumping chamber 3, and then the electromagnetic heating coil heats and anneals the vacuum-pumping chamber 3. After the heating annealing is completed, the first motor 53 drives the electromagnetic heating coil to move upwards, so that the electromagnetic heating coil is separated from the circumferential motion track range of the vacuum-pumping chamber 3, and the next vacuum-pumped vacuum-pumping chamber 3 is convenient to heat and anneal.

The driving mechanism 6 continues to drive the workbench 2 to rotate, so that the product which is positioned in the vacuum-pumping chamber 3 and is subjected to heating annealing is naturally cooled. At this time, the cooling fan 10 continuously rotates to increase the air flow and increase the cooling speed.

When the evacuation chamber 3 which has been subjected to heating annealing is moved to the position below the clamp 75 again, or before the evacuation chamber 3 is moved to the position below the clamp 75, on the premise that the cooling temperature/time reaches a preset requirement, the air inlet valve 8 is opened to introduce air into the evacuation chamber 3, the internal and external pressure of the evacuation chamber 3 is balanced, then the clamp 75 is driven by the second motor 73 to move downwards, the clamp driving module drives the clamp 75 to clamp the upper cover 72, the evacuation chamber 3 is opened, the annealed product is taken out by a manual or piece taking manipulator, the product to be annealed is introduced into a product positioning jig in the base 71 by a manual or piece taking manipulator, then the clamp 75 is driven by the second motor 73 to move downwards (the driving process is the same as that described above, and is not described herein again), the clamp driving module drives the clamp 75 to release the upper cover 72, so that the upper cover 72 falls on the base 71 to be attached, in cooperation therewith. And annealing the product which is just put in. The whole production cycle can be automatically operated without stop, the production takt is realized, manual intervention is not needed, the production efficiency is high, the energy consumption is low, and the environment is protected.

When the multi-station vacuum annealing machine is provided with 10 vacuum pumping chambers 3, the whole process of feeding, annealing and discharging can be completed by about 18S according to the comprehensive takt of a stainless steel tube with the diameter of 50mm-100mm, the height of 50mm-300mm and the wall thickness of 0.5mm-0.2mm, and the efficiency is high.

To sum up, the multi-station vacuum annealing machine of the utility model can carry out independent heating annealing on the workpiece to be annealed, so that the workpiece to be annealed is uniformly heated, and the annealing quality is improved; the method can automatically run the heating annealing-cooling-heating annealing circulation without stopping, realizes production takt without manual intervention, and has the advantages of high production efficiency, low energy consumption and environmental protection. The multi-station vacuum annealing machine solves the problems of online production process of products to be annealed, rotary table type vacuumizing and sealing, indirect heating of products through a glass cover, bright annealing of stainless steel and other series of process processes, and the surface of the treated products is smooth and clean.

The above embodiments are only for illustrating the technical concept and features of the present invention, and the purpose of the embodiments is to enable people skilled in the art to understand the contents of the present invention and to implement the present invention, which cannot limit the protection scope of the present invention. All equivalent changes and modifications made according to the spirit of the present invention should be covered by the protection scope of the present invention.

Claims

1. The utility model provides a multistation vacuum annealing machine which characterized in that: the annealing machine comprises a rack, a workbench arranged on the rack, a plurality of vacuum-pumping chambers arranged on the workbench, a vacuum-pumping mechanism respectively communicated with the vacuum-pumping chambers, a heating mechanism for heating one or more of the vacuum-pumping chambers, and a driving mechanism for driving the vacuum-pumping chambers and the heating mechanism to move relatively, wherein the vacuum-pumping chambers comprise bases arranged on the workbench and upper covers capable of being in sealing fit with the bases, the bases are communicated with the vacuum-pumping mechanisms, the heating mechanism comprises a first bracket fixed with the rack, a first lead screw nut arranged on the first bracket in a rotating manner along the self axis direction, a first motor in transmission connection with the first lead screw nut, a first lead screw matched with the first lead screw nut and arranged in an up-down extending manner, and an electromagnetic heating coil arranged at the lower end part of the first lead screw, the electromagnetic heating coil is positioned right above one or more of the vacuum-pumping chambers.

2. The multi-station vacuum annealing machine according to claim 1, wherein: the annealing machine further comprises a manipulator which is arranged on the upper stream of the heating mechanism and used for grabbing the upper cover cap, wherein the manipulator comprises a second support fixed on the rack, a second lead screw nut which can be rotationally arranged on the second support along the axis direction, a second motor which is in transmission connection with the second lead screw nut, a second lead screw which is matched with the second lead screw nut and extends along the vertical direction, and a clamp which is arranged at the lower end part of the second lead screw, wherein the clamp is positioned above one of the vacuum pumping chambers.

3. The multi-station vacuum annealing machine according to claim 1, wherein: the driving mechanism comprises a cam divider fixed on the rack and a driving motor in transmission connection with the force input shaft of the cam divider, and the force output shaft of the cam divider is connected with the workbench.

4. The multi-station vacuum annealing machine according to claim 1, wherein: the vacuum pumping chambers are distributed at intervals along the circumferential direction of the workbench.

5. The multi-station vacuum annealing machine according to claim 1, wherein: the vacuumizing mechanism comprises a vacuumizing pump, a vacuum buffer cavity communicated with the vacuumizing pump through a first pipeline, and a second pipeline communicated with the vacuum buffer cavity and the base.

6. The multi-station vacuum annealing machine according to claim 5, wherein: the vacuumizing mechanism further comprises a first high-vacuum electromagnetic valve arranged on the first pipeline.

7. The multi-station vacuum annealing machine according to claim 5, wherein: the vacuumizing mechanism further comprises a second high-vacuum electromagnetic valve arranged on the second pipeline.

8. The multi-station vacuum annealing machine according to claim 1, wherein: the annealing machine further comprises a plurality of third pipelines and air inlet valves, the third pipelines are arranged on the base and communicated with the outside, and the air inlet valves are arranged on the third pipelines respectively.

9. The multi-station vacuum annealing machine according to claim 1, wherein: the annealing machine also comprises a vacuum gauge communicated with the vacuum pumping chamber.

10. The multi-station vacuum annealing machine according to claim 1, wherein: the heating mechanism further comprises a heat radiation fan arranged on the periphery of the electromagnetic heating coil.